Opening type feeding and discharging mechanism and semiconductor conveying device

Abstract

The utility model relates to the technical field of semiconductor wafer transportation, disclose a kind of open warehouse type feeding and discharging mechanism and semiconductor transportation equipment, comprising: base frame and reversible track structure, reversible track structure has open warehouse type structure, reversible track structure is set in the side of material taking manipulator;Reversible track structure has the first working state of material taking manipulator moves wafer to preset position and turns over to form the first working state of conveying track receiving wafer after closing warehouse;Reversible track structure has the second working state of moving wafer to the end far from material taking manipulator and turning over open warehouse after discharging and receiving next wafer.By directly receiving material to reversible track structure, the action and stroke of material taking manipulator in front and back process are reduced, and Y-axis direction action of material taking manipulator and discharging manipulator does not need to be increased, to improve work efficiency.And wafer is directly received by conveying track, and the risk of dropping material is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer transportation technology, specifically to an open-type loading and unloading mechanism and semiconductor equipment. Background Technology

[0002] In the semiconductor automation industry, it is often necessary to transfer the molded wafers (lead frames) to designated locations for corresponding processes, such as laser marking, camera inspection or code reading and performance testing. In these processes, an automatic mechanism is generally required to transfer the wafers from the magazine to the work area, which requires an automatic loading and unloading mechanism to complete these actions.

[0003] In existing loading and unloading mechanisms, after the loading robot lifts the material sheet, it needs to work with the picking robot located above the loading robot to pick up the material sheet from front to back and from top to bottom and place it on the work track. This requires the picking robot to add Y-axis movement, which is slow, inefficient, and there is a risk of material falling during the conveying process. Utility Model Content

[0004] In view of this, the present invention provides an open-type loading and unloading mechanism and semiconductor equipment to solve the problem that in the existing loading and unloading mechanism, after the loading robot lifts the material sheet, it is necessary to cooperate with the picking robot located above the loading robot to pick up the material sheet from front to back and from top to bottom and place it on the working track. This requires the picking robot to add Y-axis direction movement, which is slow, inefficient, and has the risk of material falling during the conveying process.

[0005] In a first aspect, this utility model provides an open-type loading and unloading mechanism, comprising:

[0006] Base frame;

[0007] A flip-up track structure with an open-type structure is provided, and the flip-up track structure is arranged on the periphery of the material handling robot.

[0008] The flip-up track structure has a first working state in which the material handling robot moves the material piece to a preset position and then flips to close the compartment, thereby forming a conveying track to receive the material piece.

[0009] The flip-up track structure has a second working state in which the material sheet is moved to one end away from the material handling robot, flipped to open the compartment, and then unloaded and received the next material sheet.

[0010] Beneficial effects: When the picking robot moves the material sheet to a preset height, the flip track flips and closes the compartment to form a conveyor track to receive the sheet. The sheet can then be transported along the conveyor track until it reaches the discharge end, where the flip track flips again to open the compartment and unload the sheet. By directly receiving the material through the flip track structure, the movements and travel of the picking robots in the preceding and following processes are reduced. The picking robot only needs to lift the sheet to the height of the conveyor track formed by the flip track, while the unloading robot only needs to pick it up at the discharge end. Neither the picking nor the unloading robot needs to increase Y-axis movement, thus improving work efficiency. Furthermore, directly receiving the sheet via the conveyor track reduces the risk of material falling.

[0011] In one alternative implementation, the reversible track structure includes:

[0012] The track seat is connected to the base frame, and two track seats are provided symmetrically.

[0013] The system includes two flipping tracks, which are symmetrically mounted on two track seats. The inner side of each flipping track has a track groove for transporting the material sheet. A cam follower is provided at the same end of each flipping track.

[0014] A drive unit is mounted on the base frame, and a cam follower is attached to the output end of the drive unit. The drive unit can push the cam follower to move upward to drive the flipping track to flip.

[0015] In one alternative implementation, the reversible track structure further includes:

[0016] A return spring, one end of which is connected to the flipping track and the other end is mounted on the track seat. The return spring is the force that causes the flipping track to flip downward to open the compartment.

[0017] Beneficial effects: The downward tilting of the flip track is pulled open by a spring, while the upward tilting is held in place by a cylinder in the drive unit, resulting in smooth and safe operation.

[0018] In one alternative embodiment, the reversible track structure further includes a reversible foot arm seat, one end of which is rotatably connected to the reversible track, and the other end is fixed to the upper seat of the track.

[0019] In one optional embodiment, the flip-up track structure further includes: a cross slide rail installed between the track upper seat and the base frame; the flip-up track transports the material sheet in a first direction; the track upper seat can move along a second direction perpendicular to the first direction to adjust the distance between the two flip-up tracks.

[0020] Beneficial effects: One side of the cross slide rail is connected to the upper track seat, and the other side is fixed to the base frame, allowing the upper track seat to move along a second direction perpendicular to the first direction. This drives the tilting track, return spring, track cover, and guide pin mounted on it to move simultaneously, adjusting the distance between the two tilting tracks. This allows for the creation of conveyor tracks of different widths, accommodating materials of different sizes and offering strong compatibility.

[0021] In one alternative implementation, the reversible track structure further includes:

[0022] A track cover, which is fixed to the track seat, extends from the inside of the track cover to the upper end of the flip track.

[0023] Beneficial effects: By setting a cover on the track, the tilting track can be restricted and ensured to tilt upwards to the horizontal, preventing over-tilting, which would affect the normal transportation of the material, or even cause the corner of the tilting track to come into contact with the material, thus causing the material to be damaged during transportation.

[0024] In one alternative embodiment, a guide pin is provided on the side of the track cover near the flip track;

[0025] The flipping track is provided with a guide groove corresponding to the guide pin;

[0026] The guide pin is adapted to be inserted into the guide groove.

[0027] Beneficial effects: During the flipping process, the flipping track will flip up and down along the guide pin to ensure the flipping direction of the flipping track, thereby ensuring the receiving position when it is in a horizontal state and preventing displacement during the flipping process driven by the drive component. This ensures smooth loading and unloading of the material and prevents material from falling or deviating.

[0028] In one alternative embodiment, the open-type loading and unloading mechanism further includes a protective cover that covers the drive component.

[0029] A semiconductor transport device includes a loading robot, a picking robot, a conveyor track, a unloading robot, and the aforementioned open-type loading and unloading mechanism.

[0030] The loading robot and the picking robot are installed at the loading end of the semiconductor transport equipment. The picking robot is installed above the loading robot. The loading robot is used to lift the sheet towards the picking robot, and the picking robot is used to pick up the sheet from the loading robot to a preset position.

[0031] The unloading robot is installed at the unloading end of the semiconductor transport equipment;

[0032] There are two open-type loading and unloading mechanisms, which are respectively configured to correspond to the material handling robot and the material unloading robot;

[0033] The conveyor track is positioned between the two open-type loading and unloading mechanisms.

[0034] Beneficial effects: The semiconductor transport equipment described above, by assembling a loading robot, a picking robot, a conveyor track, a unloading robot, and the aforementioned open-type loading and unloading mechanism, has advantages such as simple structure, good versatility, easy assembly and use, and low manufacturing cost. The wafer transfer process, achieved through the above steps, is smooth, compatible, and highly efficient.

[0035] In an alternative implementation, a corner code is also included, which is installed between the transport track and the semiconductor transport device. Attached Figure Description

[0036] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the overall structure of the open-type loading and unloading mechanism according to an embodiment of the present utility model;

[0038] Figure 2 This is an exploded view of the structure of the open-type loading and unloading mechanism according to an embodiment of the present utility model;

[0039] Figure 3 This is an axonometric schematic diagram of the flipping track according to an embodiment of the present invention;

[0040] Figure 4 This is an axonometric view of the flipping track from another angle according to an embodiment of the present invention;

[0041] Figure 5 This is a schematic diagram of the structure of the flipping track according to an embodiment of the present utility model;

[0042] Figure 6 This is a schematic diagram of the structure of the semiconductor transport device according to an embodiment of the present invention;

[0043] Explanation of reference numerals in the attached figures:

[0044] 1. Base frame;

[0045] 2. Reversible track structure; 21. Track upper seat; 22. Reversible track; 221. Guide groove; 23. Cam follower; 24. Drive component; 25. Return spring; 26. Reversible foot arm seat; 27. Cross slide rail; 28. Track upper cover; 29. ​​Guide pin;

[0046] 3. Protective cover;

[0047] 4. Loading robot;

[0048] 5. Material handling robot;

[0049] 6. Conveyor track;

[0050] 7. Unloading robot;

[0051] 8. Corner code;

[0052] 9. Material sheet. Detailed Implementation

[0053] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0054] In the semiconductor automation industry, it is often necessary to transfer the encapsulated wafers to designated locations for corresponding processes, such as laser marking, camera inspection, code reading, and performance testing. In these processes, an automated mechanism is generally required to transfer the wafers from the magazine to the work area, which requires an automated loading and unloading mechanism to complete these actions.

[0055] In existing loading and unloading mechanisms, after the loading robot lifts the material sheet, it needs to work with the picking robot located above the loading robot to pick up the material sheet from front to back and from top to bottom and place it on the work track. This requires the picking robot to add Y-axis movement, which is slow, inefficient, and there is a risk of material falling during the conveying process.

[0056] To solve the above technical problems, the following will be combined with... Figures 1 to 6 The following describes embodiments of the present invention.

[0057] According to embodiments of the present invention, such as Figure 1As shown, an open-type loading and unloading mechanism is provided, including: a base frame 1 and a reversible track structure 2. The reversible track structure 2 is an open-type structure and is disposed around the periphery of the picking robot 5. The reversible track structure 2 has a first working state in which the picking robot 5 moves the material piece 9 to a preset position and then flips to close the compartment to form a conveyor track to receive the material piece 9; the reversible track structure 2 has a second working state in which the material piece 9 is moved to one end away from the picking robot 5 and then flips to open the compartment to unload and receive the next material piece 9.

[0058] Specifically, when the picking robot 5 moves the material piece 9 to a preset height, the flipping track 22 flips and closes to form a conveyor track to receive the material piece 9. The material piece 9 can then be transported along the conveyor track until it reaches the discharge end. At this point, the flipping track 22 flips and opens to unload the material piece 9. By directly receiving the material through the flipping track structure 2, the actions and travel of the picking robot 5 and the unloading robot 7 in the preceding and following processes are reduced. The picking robot 5 only needs to lift the material piece 9 to the height of the conveyor track formed by the flipping track 22, while the unloading robot 7 only needs to pick it up at the discharge end. The picking robot 5 and the unloading robot 7 do not need to increase their Y-axis direction movements, thus improving work efficiency. Furthermore, by directly receiving the material piece 9 using the conveyor tracks supporting both sides of the material piece 9, the risk of material falling is reduced.

[0059] In one embodiment, such as Figure 1 As shown, a through hole is provided in the middle of the base frame 1, through which the material-picking robot 5 can pass. The material-picking robot 5 is vertically positioned in the middle of the through hole, and can drive the material piece 9 to move up and down. The direction of movement of the material piece 9 on the flipping mechanism is the first direction A, which is the Y-axis direction. The flipping mechanism includes: a track upper seat 21, a flipping track 22, a cam follower 23, a drive component 24, a return spring 25, a track upper cover 28, and a guide pin 29. Among them, there are two of each of the track upper seat 21, flipping track 22, return spring 25, and track upper cover 28, which are symmetrically arranged on the base frame 1 on both sides of the robot. The drive component 24 is a cylinder.

[0060] Let's take one side as an example to illustrate its specific structure, such as... Figures 2 to 5As shown, the upper track seat 21 is horizontally fixed on the base frame 1, and the flip track 22 is installed on the inner side of the upper track seat 21, with its axis horizontally arranged along a first direction. Specifically, two flip foot arm seats 26 are installed on the inner side of the upper track seat 21 near the flip track 22. The flip foot arm seats 26 are fixed to the upper track seat 21 by screws or bolts, and the flip track 22 is hinged to the flip foot arm seats 26, allowing them to be rotatably connected. The two flip foot arm seats 26 are spaced apart along the first direction and are respectively located at both ends of the flip track 22 to improve the stability of the flip track 22 on the flip foot arm seats 26. The radial cross-section of the flip track 22 is L-shaped, with a track groove on the side away from the upper track seat 21. A cam follower 23, which is crank-shaped, is provided at one end of the flip track 22 and connected to the flip track 22. A drive unit 24 is installed on the side of the open-type loading and unloading mechanism near the cam follower 23. The lower end of the drive unit 24 is a fixed end, which is fixed to the base frame 1. The upper end of the drive unit 24 is an output end that can move up and down. The cam follower 23 is attached to the output end of the drive unit 24. The drive unit 24 can push the cam follower 23 to move upward, thereby causing the flipping track 22 to flip. A return spring 25 is installed on the upper rail seat 21. A mounting through hole is opened in the middle of the inner side of the upper rail seat 21. One end of the return spring 25 is fixed in the mounting through hole, and the other end of the return spring 25 is fixed to the lower end of the corresponding flipping track 22. The return spring 25 provides the return force for the flipping track 22 to flip downward to open the compartment.

[0061] When it is necessary to receive the material piece 9 from the picking robot 5, firstly, the flip-top track structure 2 is in its second working state with the compartment open. At this time, both flip-top tracks 22 are tilted downwards to increase the distance between them, which is greater than the width of the material piece 9. This allows the picking robot 5 to smoothly move the material piece 9 upwards from between the two flip-top tracks 22 to a preset position. Secondly, the drive unit 24 is activated, and its output end moves upwards, driving the two cam follower 23 to move upwards. This causes the two flip-top tracks 22 to flip upwards around the connecting shaft between the flip-top track 22 and the flip-top foot arm seat 26, changing the two flip-top tracks 22 from a tilted downward state to a horizontal state. At this time, the track grooves on the inner sides of the two flip-top tracks 22 are arranged opposite each other to form a conveying track for receiving the material piece 9. During the formation of the conveying track, the two conveying tracks move closer to the sides of the material piece 9, and the return spring 25 is stretched. When the two conveying tracks are in a horizontal state, the two sides of the material piece 9 overlap the two track grooves respectively. At this time, the flip-top track structure 2 is in its first working state.

[0062] When the sheet material 9 is moved by the external conveyor track 6 to the unloading end away from the picking robot 5, it needs to be unloaded. The output end of the drive unit 24 moves downward, and the return spring 25 gradually returns to its original state, providing a downward flipping force to the inner side of the flipping track 22. This causes the two flipping tracks 22 to flip downward around the connecting shaft between the flipping track 22 and the flipping foot arm seat 26 as the rotation center, until the two flipping tracks 22 change from a horizontal state to an inclined downward state. At the same time as unloading, the next sheet material 9 picked up by the picking robot 5 can be received.

[0063] It should be noted that if one side of the L-shaped flip track 22 is horizontal and the other side is vertical, and the track groove is located at the upper diagonal corner of the flip track 22 body, then the flip track 22 is determined to be horizontal.

[0064] Repeat the above steps to achieve continuous feeding and unloading. The downward tilting of the flipping track 22 is pulled open by a spring, and the upward tilting is held in place by a cylinder of the drive component 24. The operation is smooth and safe.

[0065] In one embodiment, such as Figure 2 As shown, the reversible track structure 2 also includes: cross slide rails 27, which are installed between the track upper seat 21 and the base frame 1. Four cross slide rails 27 are provided in total, with two cross slide rails 27 between each track upper seat 21 and the base frame 1. The two cross slide rails 27 are respectively located at the end of the corresponding reversible track 22. One side of the cross slide rail 27 is connected to the track upper seat 21, and the other side is fixed to the base frame 1, allowing the track upper seat 21 to reciprocate along a second direction perpendicular to the first direction, thereby driving the reversible track 22, the return spring 25, the track cover 28, and the guide pin 29 installed on it to move simultaneously. This adjusts the distance between the two reversible tracks 22, resulting in conveyor tracks of different widths, compatible with different sizes of material sheets 9, and offering strong compatibility.

[0066] In one embodiment, such as Figures 1 to 3 As shown, the flip-up track structure 2 also includes: a track cover 28, which is fixed to the track seat 21. The inner side of the track cover 28 extends to the upper end of the flip-up track 22 to cover the upper end of the track groove. A first limiting surface is provided on the inner side of the track cover 28 near the flip-up track 22. A second limiting surface is provided on the flip-up track 22 corresponding to the first limiting surface. Both the first and second limiting surfaces are planar. When the driving member 24 drives the flip-up track 22 to flip upward until the second limiting surface abuts against the first limiting surface, the flip-up track 22 can no longer flip upward. At this time, the flip-up track 22 is in a horizontal state, and the driving member 24 stops. By setting the track cover 28, the flip-up track 22 can be restricted and ensured to flip upward to a horizontal state, preventing over-flipping, which would affect the normal transportation of the material sheet 9, or even cause the corner of the flip-up track 22 to abut against the material sheet 9, resulting in damage to the material sheet 9 during transportation.

[0067] In one embodiment, such as Figures 1 to 5 As shown, guide pins 29 are provided on the side of the track cover 28 near the flip track 22. At least two guide pins 29 are fixed at corresponding intervals along the first direction on each track cover 28. The guide pins 29 are vertically arranged. The flip track 22 is provided with guide grooves 221 corresponding to the guide pins 29. The guide pins 29 are suitable for insertion into the guide grooves 221. When the flip track 22 flips, it will flip up and down along the guide pins 29 to ensure the flipping direction of the flip track 22, thereby ensuring its receiving position when it is in a horizontal state and preventing its displacement during the flipping process driven by the drive component 24. This ensures smooth loading and unloading of the material sheet 9 and prevents material from falling or deviating.

[0068] In one embodiment, such as Figure 1 and Figure 2 As shown, the open-type loading and unloading mechanism also includes a protective cover 3, which covers the drive component 24 and is used to protect the drive component 24.

[0069] According to an embodiment of the present invention, another aspect also provides a semiconductor transport device, such as... Figure 6 As shown, it includes a loading robot 4, a picking robot 5, a conveyor track 6, a unloading robot 7, and the aforementioned open-type loading and unloading mechanism.

[0070] The loading robot 4 and the picking robot 5 are installed at the loading end of the semiconductor transport equipment. The picking robot 5 is installed above the loading robot 4. The loading robot 4 is used to lift the sheet 9 toward the picking robot 5. The picking robot 5 is used to pick up the sheet 9 from the loading robot 4 to a preset position.

[0071] The unloading robot 7 is installed at the unloading end of the semiconductor transport equipment.

[0072] Angle brackets 8 can be installed at position 28 on the track cover of the open-type loading and unloading mechanism to connect multiple open-type loading and unloading mechanisms and other transmission mechanisms. For example, in this embodiment, two open-type loading and unloading mechanisms are provided, corresponding to the picking robot 5 and the unloading robot 7 respectively. A conveyor track 6 is set between the two open-type loading and unloading mechanisms, which are symmetrically arranged. The conveyor track 6 is used to transfer the material sheet 9 on the upstream open-type loading and unloading mechanism to the downstream open-type loading and unloading mechanism. Through the above arrangement, the overall compatibility length of the track can be controlled.

[0073] The aforementioned semiconductor transport equipment has multiple operating modes. In the first mode, two open-type loading / unloading mechanisms operate synchronously, meaning they are simultaneously in the second working state (open) and the first working state (closed). Before loading, both open-type loading / unloading mechanisms are in the second working state, with the tilting track 22 tilted downwards until the picking robot 5 moves the sheet 9 from the loading robot 4 to a preset position. Simultaneously, the drive components 24 in both mechanisms operate, causing them to close simultaneously, and the tilting track 22 becomes horizontal to receive the sheet 9. The conveyor track 6 moves the sheet 9 from the upstream open-type loading / unloading mechanism to the downstream mechanism, until it reaches the unloading position of the unloading robot 7. The unloading robot 7 picks up the sheet, and the drive components 24 in both mechanisms operate simultaneously, moving downwards. The return spring 25 drives both mechanisms to open simultaneously to cooperate with the unloading robot 7 in unloading. The above steps are repeated to transport the sheet 9.

[0074] The second method involves two asynchronous loading / unloading mechanisms. Before loading, the upstream loading / unloading mechanism on conveyor track 6 opens its bin, while the downstream mechanism closes. When the picking robot 5 moves the material piece 9 from the loading robot 4 to a preset position, the drive unit 24 in the upstream loading / unloading mechanism on conveyor track 6 operates, moving its moving end upwards and simultaneously closing both loading / unloading mechanisms. The rotating track 22 then becomes horizontal to receive the material piece 9. Conveyor track 6 transports the material piece 9 from the upstream loading / unloading mechanism until it is stably positioned on conveyor track 6. At this point, the upstream loading / unloading mechanism on conveyor track 6 can open its bin to receive the next material piece 9. Next, the conveyor track 6 moves the sheet 9 to the downstream open-type loading and unloading mechanism. Simultaneously, the drive component 24 in the upstream open-type loading and unloading mechanism of the conveyor track 6 operates, and the moving end moves downward. The return spring 25 drives the open-type loading and unloading mechanism to open simultaneously to cooperate with the unloading robot 7 to unload the sheet. Then, it returns to the closed state to receive the next sheet 9. The above steps are repeated to transfer the sheet 9.

[0075] The semiconductor transport equipment described above, by assembling the loading robot 4, the unloading robot 5, the conveying track 6, the unloading robot 7, and the aforementioned open-type loading and unloading mechanism, has the advantages of simple structure, good versatility, easy assembly and use, and low manufacturing cost, and it has all the beneficial effects of the aforementioned open-type loading and unloading mechanism.

[0076] The above steps are used to transfer sheet 9 smoothly, with good compatibility and high transfer efficiency.

[0077] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A hopper-type loading and unloading mechanism, characterized in that, include: Base frame (1); The flip-up track structure (2) has an open-type structure, and the flip-up track structure (2) is arranged on the periphery of the material handling robot (5); The reversible track structure (2) has a first working state in which the material handling robot (5) moves the material piece (9) to a preset position and then flips to close the bin to form a conveying track to receive the material piece (9); The reversible track structure (2) has a second working state in which the material piece (9) is moved to one end away from the material handling robot (5) and flipped open to unload and receive the next material piece (9).

2. The open-type loading and unloading mechanism according to claim 1, characterized in that, The reversible track structure (2) includes: The upper track seat (21) is connected to the base frame (1). There are two upper track seats (21), which are symmetrically arranged. Two flip tracks (22) are provided, and the two flip tracks (22) are symmetrically installed on the two track seats (21). The inner side of the flip track (22) is provided with a track groove for transporting the material piece (9). A cam follower (23) is provided at the same end of the two flip tracks (22). A drive unit (24) is mounted on the base frame (1). The cam follower (23) is attached to the output end of the drive unit (24). The drive unit (24) can push the cam follower (23) to move upward to drive the flip track (22) to flip.

3. The open-type loading and unloading mechanism according to claim 2, characterized in that, The reversible track structure (2) also includes: A return spring (25) is provided, one end of which is connected to the flipping track (22) and the other end is mounted on the track seat (21). The return spring (25) is the force that causes the flipping track (22) to flip downward to open the compartment.

4. The open-type loading and unloading mechanism according to claim 2, characterized in that, The reversible track structure (2) further includes a reversible foot arm seat (26), one end of which is rotatably connected to the reversible track (22), and the other end is fixed on the track seat (21).

5. The open-type loading and unloading mechanism according to claim 2, characterized in that, The reversible track structure (2) further includes: a cross slide rail (27), which is installed between the track seat (21) and the base frame (1); The direction in which the flipping track (22) transports the material piece (9) is the first direction; The track seat (21) can move along a second direction perpendicular to the first direction to adjust the distance between the two flip tracks (22).

6. The open-type loading and unloading mechanism according to claim 2, characterized in that, The reversible track structure (2) also includes: Track cover (28) is fixed on track seat (21) and the inner side of track cover (28) extends to the upper end of the flip track (22).

7. The open-type loading and unloading mechanism according to claim 6, characterized in that, A guide pin (29) is provided on the side of the track cover (28) near the flip track (22); The flip track (22) is provided with a guide groove (221) corresponding to the guide pin (29); The guide pin (29) is adapted to be inserted into the guide groove (221).

8. The open-type loading and unloading mechanism according to claim 6, characterized in that, The open-type loading and unloading mechanism also includes a protective cover (3), which is mounted on the drive component (24).

9. A semiconductor transport device, characterized in that, Includes a loading robot (4), a unloading robot (5), a conveyor track (6), an unloading robot (7), and an open-type loading and unloading mechanism as described in any one of claims 1-8. The loading robot (4) and the picking robot (5) are installed at the loading end of the semiconductor transport equipment. The picking robot (5) is installed above the loading robot (4). The loading robot (4) is used to lift the sheet (9) toward the picking robot (5). The picking robot (5) is used to pick up the sheet (9) from the loading robot (4) to a preset position. The unloading robot (7) is installed at the unloading end of the semiconductor transport equipment; There are two open-type loading and unloading mechanisms, which are respectively set to the material handling robot (5) and the unloading robot (7); The conveyor track (6) is located between the two open-type loading and unloading mechanisms.

10. The semiconductor transport device according to claim 9, characterized in that, It also includes a corner code (8) installed between the transport track (6) and the semiconductor transport device.

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