Graphite fixture plate cleaning apparatus

Abstract

This utility model discloses a graphite fixture plate cleaning device, which includes a material handling mechanism and a conveying mechanism. A cleaning mechanism for cleaning the graphite fixture plate is arranged between the two material handling mechanisms. The conveying mechanism is located between the material handling mechanism and the cleaning mechanism. The material handling mechanism includes a transport trolley and a material handling robot. The material handling robot is fixed to the worktable by a support rod. The material handling robot includes a first-direction moving component, a second-direction moving component, and a third-direction moving component. The first-direction moving component includes a first-direction moving guide rail, a first-direction moving slider, and a first-direction moving drive source. The bottom end of the first-direction moving guide rail is fixedly connected to the top surface of a fixed plate. The first-direction moving slider is slidably connected to the first-direction moving guide rail. A first connecting plate is fixedly connected to the upper surface of the first-direction moving slider. This utility model solves the technical problems of low efficiency and high hazards associated with manual cleaning in the field of graphite fixture cleaning technology.

Description

Technical Field

[0001] This utility model relates to the field of graphite fixture cleaning technology, specifically to a graphite fixture plate cleaning device. Background Technology

[0002] In modern industrial production, graphite jigs have become an indispensable key tooling equipment in many fields such as semiconductor manufacturing, solar cell production, and mold processing due to their excellent high temperature resistance, corrosion resistance, electrical and thermal conductivity, and good chemical stability.

[0003] Currently, the cleaning of graphite jig plates mainly relies on manual operation. During manual cleaning, workers need to use simple tools, such as brushes and scrapers, to meticulously clean each part of the jig plate. However, this method has many serious limitations. On the one hand, manual cleaning is extremely inefficient; workers need to spend a lot of time and energy cleaning every corner, making it difficult to meet the needs of rapid turnover of jig plates in large-scale, high-efficiency production environments. On the other hand, manual cleaning poses a significant health hazard to workers. During the cleaning process, workers inevitably come into contact with graphite dust and potentially residual chemicals. Graphite dust particles are extremely small, easily suspended in the air and inhaled, and long-term accumulation can cause serious damage to the respiratory system, leading to various occupational diseases such as pneumoconiosis. Utility Model Content

[0004] The purpose of this utility model is to overcome the above-mentioned technical deficiencies and provide a graphite fixture plate cleaning device to solve the technical problems of low efficiency and high hazards in the field of graphite fixture cleaning technology.

[0005] To achieve the above technical objectives, the present invention provides a graphite fixture plate cleaning device, including...

[0006] The system includes a material handling mechanism and a conveying mechanism; a cleaning mechanism for cleaning the graphite fixture plate is provided between the two material handling mechanisms; the conveying mechanism is located between the material handling mechanism and the cleaning mechanism; the material handling mechanism includes a transport trolley and a material handling robot; the material handling robot is fixed to the worktable by a support rod; the material handling robot includes a first direction moving component, a second direction moving component, and a third direction moving component; the first direction moving component includes a first direction moving guide rail, a first direction moving slider, and a first direction moving drive source; the bottom end of the first direction moving guide rail is fixedly connected to the top surface of a fixed plate; the first direction moving slider is slidably connected to the first direction moving guide rail; a first connecting plate is fixedly connected to the upper surface of the first direction moving slider; the output shaft of the first direction moving drive source is fixedly connected to one side of the first connecting plate.

[0007] Compared with the prior art, the beneficial effects of this utility model include:

[0008] 1. High versatility and compatibility: The graphite jig plate cleaning equipment provided by this utility model can transport graphite jig plates of different specifications by using a feeding tool and a conveying mechanism, so that the equipment can clean graphite jig plates of various specifications, which greatly improves the versatility and compatibility of the equipment.

[0009] 2. High efficiency: The graphite jig plate cleaning equipment provided by this utility model uses a material handling robot to automatically grab the graphite jig plate and move it in the XYZ direction. It does not rely on manual labor and can operate continuously for 24 hours, which greatly improves the cleaning efficiency of graphite jig plates.

[0010] 3. High safety: The graphite jig plate cleaning equipment provided by this utility model realizes the automated cleaning of graphite jig plates without manual operation, which greatly reduces the harm to the human body. At the same time, an industrial-grade vacuum cleaner is set up to promptly treat the cleaned graphite and prevent graphite powder from spreading and harming human health. Attached Figure Description

[0011] Figure 1 This is a three-dimensional structural diagram of the graphite jig plate cleaning equipment provided by this utility model;

[0012] Figure 2 This is a three-dimensional structural diagram of the material handling robot provided by this utility model;

[0013] Figure 3 This is a three-dimensional structural diagram of the transport trolley provided by this utility model;

[0014] Figure 4 This is a schematic diagram of the three-dimensional structure of the feeding fixture provided by this utility model;

[0015] Figure 5 This is a three-dimensional structural diagram of the conveying mechanism provided by this utility model. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0019] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 This embodiment provides a graphite fixture plate cleaning device, including a material handling mechanism 1, a conveying mechanism 2, and a cleaning mechanism 3.

[0020] Furthermore, a cleaning mechanism 3 for cleaning the graphite fixture plate 4 is provided between the two material handling mechanisms 1.

[0021] Furthermore, the conveying mechanism 2 is disposed between the material handling mechanism 1 and the cleaning mechanism 3. The material handling mechanism 1 disposed at one end of the conveying mechanism 2 belongs to the loading station A, and the material handling mechanism 1 disposed at the other end of the conveying mechanism 2 belongs to the unloading station B.

[0022] The material handling mechanism 1 includes a transport trolley 11 and a material handling robot 12. The material handling robot 12 is fixed to the worktable 5 by a support rod 13, and the material handling robot 12 includes a first direction movement component 121, a second direction movement component 122 and a third direction movement component 123.

[0023] Furthermore, the main function of the first directional moving component 121 is to enable the suction cup unit 14 to move along the length direction of the worktable 5.

[0024] Furthermore, the main function of the second directional moving component 122 is to enable the suction cup unit 14 to move along the width direction of the worktable 5.

[0025] Furthermore, the third-party directional moving component 123 mainly adjusts the position of the suction cup unit 14 in the vertical direction.

[0026] Furthermore, the first directional movement component 121 includes a first directional movement guide rail 1211, a first directional movement slider 1212, and a first directional movement drive source 1213.

[0027] Furthermore, both the first direction moving guide rail 1211 and the second direction moving guide rail 1221 are linear moving guide rails, which serve as guides and supports.

[0028] Furthermore, the bottom end of the first directional moving guide rail 1211 is fixedly connected to the top surface of the fixed plate 15, the first directional moving slider 1212 is slidably connected to the first directional moving guide rail 1211, the upper surface of the first directional moving slider 1212 is fixedly connected to the first connecting plate 16, and the output shaft of the first directional moving drive source 1213 is fixedly connected to one side of the first connecting plate 16.

[0029] Furthermore, when the output shaft of the first direction movement drive source 1213 extends or shortens, it drives the first connecting plate 16 to move along the length direction of the worktable 5.

[0030] Furthermore, there are two of each of the first direction moving guide rail 1211 and the first direction moving slider 1212, with the two first direction moving guide rails 1211 arranged in parallel on both sides of the upper end of the fixed plate 15.

[0031] Furthermore, the second directional movement component 122 includes a second directional movement guide rail 1221, a second directional movement slider 1222, and a second directional movement drive source 1223.

[0032] Furthermore, the second directional moving guide rail 1221 is fixedly connected to the upper end face of the first connecting plate 16 along the width direction of the worktable 5, and the second directional moving slider 1222 is slidably connected to the second directional moving guide rail 1221.

[0033] Furthermore, the upper end of the second direction moving slider 1222 is fixedly connected to the second connecting plate 17, the fixed end of the second direction moving drive source 1223 is disposed at the top of the first connecting plate 16, and the output end of the second direction moving drive source is fixedly connected to one side of the second connecting plate.

[0034] Furthermore, there are two of each of the second direction moving guide rail 1221 and the second direction moving slider 1222. The two second direction moving guide rails 1221 are arranged in parallel on the upper surface of the first connecting plate 16, serving as support and guide.

[0035] Furthermore, when the output shaft of the second directional movement drive source 1223 extends or shortens, it drives the second connecting plate 17 to move along the width direction of the worktable 5.

[0036] Furthermore, the third-party directional moving component 123 includes a third-party directional moving drive source 1231. The fixed end of the third-party directional moving drive source 1231 is fixedly connected to the second connecting plate 17, and the output shaft of the third-party directional moving drive source 1231 is fixedly connected to a material picking plate 1232. A guide rod 1233 is also provided between the material picking plate 1232 and the second connecting plate 17, and a suction cup unit 14 is arrayed at the lower end of the material picking plate 1232.

[0037] Furthermore, when the output shaft of the third-party motion drive source 1231 extends or shortens, it drives the suction cup unit 14 to move in the vertical direction.

[0038] Preferably, the first direction movement drive source 1213, the second direction movement drive source 1223, and the third direction movement drive source 1231 are all pneumatic push rods. The combined movement of the first direction movement component 121, the second direction movement component 122, and the third direction movement component 123 can realize the movement of the suction cup unit 14 in the XYZ axis direction, thereby realizing the gripping of the graphite jig plate 4.

[0039] Furthermore, the transport trolley 11 is equipped with a feeding fixture 111, which includes a first feeding rotating shaft 1111 and a first feeding slider 1112, a second feeding rotating shaft 1113 and a second feeding slider 1114. The first feeding rotating shaft 1111 and the second feeding rotating shaft 1113 are respectively threadedly slidably connected to the first feeding slider 1112 and the second feeding slider 1114. When the first feeding rotating shaft 1111 rotates, since the first feeding slider 1112 is threadedly rotatably connected to the first feeding rotating shaft 1111, the first feeding slider 1112 can move along the first feeding rotating shaft 1111. Similarly, the second feeding slider 1112 can move along the second feeding rotating shaft 1113.

[0040] Furthermore, the top ends of the first feeding slider 1112 and the second feeding slider 1114 are respectively fixedly connected to the first feeding connecting plate 1115 and the second feeding connecting plate 1116, and two of the first feeding connecting plate 1115 and the second feeding connecting plate 1116 are provided.

[0041] Furthermore, the feeding fixture 111 also includes a feeding fixture base plate 1117, a first feeding moving guide rail 1118 and a first feeding moving slider 1119, a second feeding moving guide rail 1120 and a second feeding moving slider 1121.

[0042] Furthermore, the first feeding connecting plate 1115 is arranged along the length and width directions of the tooling base plate 1117.

[0043] Furthermore, the first feeding moving guide rail 1118 and the second feeding moving guide rail 1120 are respectively arranged on the upper end of the feeding fixture base plate 1117 along the length and width directions of the feeding fixture base plate 1117, and two of each are provided.

[0044] Furthermore, the first feeding slider 1119 and the second feeding slider 1121 are slidably connected to the first feeding guide rail 1118 and the second feeding guide rail 1120, respectively. The top ends of the first feeding slider 1119 and the second feeding slider 1121 are fixedly connected to the bottom ends of the first feeding connecting plate 1115 and the second feeding connecting plate 1116, respectively. The first feeding guide rail 1118, the second feeding guide rail 1119, the first feeding slider 1120, and the second feeding slider 1121 serve as guides, supports, and slides.

[0045] Furthermore, specifically, when the first feeding rotating shaft 1111 is rotated, the distance between the two first feeding connecting plates 1115 can be adjusted; when the second feeding rotating shaft 1113 is rotated, the distance between the two second feeding connecting plates 1116 can be adjusted. One end of both the first feeding rotating shaft 1111 and the second feeding rotating shaft 1113 is equipped with a rotating adjusting wheel 1122 for easy operation by staff.

[0046] Furthermore, the upper surfaces of the first feeding connecting plate 1115 and the second feeding connecting plate 1116 are fixedly connected with limit rods 1123. The limit rods 1123 mainly limit the graphite jig plate 4. Adjusting the distance between the two first feeding connecting plates 1115 and the second feeding connecting plate 116 can accommodate graphite jig plates 4 of different lengths or widths, thus improving the versatility and compatibility of the equipment.

[0047] Furthermore, the conveying mechanism 2 includes a conveyor belt assembly 21, a width adjusting rotating shaft 22, and a width adjusting slider 23. The width adjusting rotating shaft 22 is threadedly slidably connected to the width adjusting slider 23, and the width adjusting slider 23 is U-shaped. The conveyor belt assembly 21 is disposed at the upper end of the width adjusting slider 23.

[0048] Furthermore, there are two conveyor belt assemblies 21 arranged in parallel. The drive source of each conveyor belt assembly 21 drives its conveyor belt 211 to rotate, and the rotation speed of the two conveyor belt assemblies 21 must be consistent.

[0049] After the distance between the two first feeding connecting plates 1115 is adjusted, the width adjustment rotating shaft 22 needs to be rotated to adjust the distance between the two conveyor belt assemblies 21 so that the distance between the two first feeding connecting plates is equal to the distance between the two conveyor belt assemblies 21.

[0050] A limiting plate 24 is provided on the outer side of the conveyor belt assembly 21; the overall cross-section of the limiting plate 24 is inverted L-shaped, and the distance between the upper end of the limiting plate 24 and the conveyor belt is slightly greater than the thickness of the graphite jig plate 4, so as to prevent the graphite jig plate 4 from overlapping during transportation.

[0051] This utility model also provides a method for using a graphite fixture plate cleaning device, including the following steps:

[0052] S1. The uncleaned graphite jig plate 4 is manually pushed into the loading station A by the transport trolley 11.

[0053] S2. The material handling mechanism 1 picks up the graphite fixture plate 4 and places it onto the conveying mechanism 2.

[0054] S3. The graphite fixture plate 4 is conveyed to the cleaning mechanism 3 along with the conveying mechanism 2. After being cleaned by the cleaning mechanism 3, it is conveyed to the unloading position B.

[0055] S5. The material handling mechanism 1 picks up the graphite fixture plate 4 and places it into the transport trolley 11.

[0056] S6. The cleaned graphite fixture plate 4 is manually pushed away from the unloading position B along with the transport trolley 11.

[0057] In this embodiment, two transport trolleys 11 are provided at the loading position A to improve the transfer efficiency of the graphite fixture plate 4; the lower end of the cleaning mechanism 3 is also provided with a receiving hopper, and the outlet of the receiving hopper is connected to an industrial-grade vacuum cleaner 5 to process the cleaned graphite and prevent graphite from scattering and harming human health.

[0058] In this embodiment, an industrial pump 6 is also provided below the workbench 5 to provide air pressure for the suction cup unit 14 and various pneumatic drive sources.

[0059] Working principle: The graphite fixture plate cleaning equipment provided by this utility model includes a material handling mechanism 1, a conveying mechanism 2, and a cleaning mechanism 3. The cleaning mechanism 3 for cleaning the graphite fixture plate 4 is arranged between the two material handling mechanisms 1. The conveying mechanism 2 is arranged between the material handling mechanism 1 and the cleaning mechanism 3. The material handling mechanism 1 includes a transport trolley 11 and a material handling robot 12. The material handling robot 12 is fixed to the worktable 5 by a support rod 13. The material handling robot 12 includes a first direction movement component 121, a second direction movement component 122, and a third direction movement component 123. The first direction movement component 121 includes a first direction movement guide rail 1211, a first direction movement slider 1212, and a first direction movement drive source 1213. The bottom end of the first direction movement guide rail 1211 is fixedly connected to the top surface of the fixed plate 15. The first direction movement slider 1212 is slidably connected to the first direction movement guide rail 1211. A first connecting plate 16 is fixedly connected to the upper surface of the first direction movement slider 1212. The output shaft of the first direction movement drive source 1213 is fixedly connected to one side of the first connecting plate 16.

[0060] Specifically, the uncleaned graphite jig plate 4 is pushed into the loading station A by the transport trolley 11. The material handling mechanism 1 picks up the graphite jig plate 4 and places it on the conveying mechanism 2. The graphite jig plate 4 is transported to the cleaning mechanism 3 by the conveying mechanism 2. After being cleaned by the cleaning mechanism 3, it is transported to the unloading station B. The material handling mechanism 1 picks up the graphite jig plate 4 and places it on the transport trolley 11. The cleaned graphite jig plate 4 is then pushed away from the unloading station B by the transport trolley 11.

[0061] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. A graphite fixture plate cleaning device, characterized in that, The system includes a material handling mechanism and a conveying mechanism; a cleaning mechanism for cleaning the graphite fixture plate is provided between the two material handling mechanisms; the conveying mechanism is located between the material handling mechanism and the cleaning mechanism; the material handling mechanism includes a transport trolley and a material handling robot; the material handling robot is fixed to the worktable by a support rod; the material handling robot includes a first direction moving component, a second direction moving component, and a third direction moving component; the first direction moving component includes a first direction moving guide rail, a first direction moving slider, and a first direction moving drive source; the bottom end of the first direction moving guide rail is fixedly connected to the top surface of a fixed plate; the first direction moving slider is slidably connected to the first direction moving guide rail; a first connecting plate is fixedly connected to the upper surface of the first direction moving slider; the output shaft of the first direction moving drive source is fixedly connected to one side of the first connecting plate.

2. The graphite fixture plate cleaning equipment according to claim 1, characterized in that, The second directional movement component includes a second directional movement guide rail, a second directional movement slider, and a second directional movement drive source; the second directional movement guide rail is fixedly connected to the upper end face of the first connecting plate along the width direction of the worktable; the second directional movement slider is slidably connected to the second directional movement guide rail.

3. The graphite fixture plate cleaning equipment according to claim 2, characterized in that, The upper end of the second-direction moving slider is fixedly connected to a second connecting plate; the fixed end of the second-direction moving drive source is disposed at the top of the first connecting plate; the output end of the second-direction moving drive source is fixedly connected to one side of the second connecting plate.

4. The graphite fixture plate cleaning equipment according to claim 3, characterized in that, The third-party directional moving component includes a third-party directional moving drive source; the fixed end of the third-party directional moving drive source is fixedly connected to the second connecting plate; the output shaft of the third-party directional moving drive source is fixedly connected to a material picking plate; a guide rod is also provided between the material picking plate and the second connecting plate; and a suction cup unit is arrayed at the lower end of the material picking plate.

5. The graphite fixture plate cleaning equipment according to claim 4, characterized in that, The transport trolley is equipped with a feeding fixture; the feeding fixture includes a first feeding rotating shaft and a first feeding slider, a second feeding rotating shaft and a second feeding slider; the first feeding rotating shaft and the second feeding rotating shaft are respectively threadedly slidably connected to the first feeding slider and the second feeding slider.

6. The graphite fixture plate cleaning equipment according to claim 5, characterized in that, The top ends of the first and second feeding sliders are respectively fixedly connected to the first feeding connecting plate and the second feeding connecting plate; the feeding fixture also includes a feeding fixture base plate, a first feeding moving guide rail, a first feeding moving slider, a second feeding moving guide rail, and a second feeding moving slider.

7. The graphite fixture plate cleaning equipment according to claim 6, characterized in that, The first and second feeding guide rails are respectively disposed on the upper end of the feeding fixture base plate along the length and width directions of the feeding fixture base plate; the first and second feeding sliders are slidably connected to the first and second feeding guide rails; the top ends of the first and second feeding sliders are fixedly connected to the bottom ends of the first and second feeding connecting plates, respectively.

8. The graphite fixture plate cleaning equipment according to claim 7, characterized in that, The conveying mechanism includes a conveyor belt assembly, a width-adjusting rotating shaft, and a width-adjusting slider; the width-adjusting rotating shaft and the width-adjusting slider are threadedly slidably connected; the width-adjusting slider is U-shaped; and the conveyor belt assembly is disposed at the upper end of the width-adjusting slider.

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