An AGV vehicle

Abstract

The embodiment of the application discloses an AGV, which comprises a walking base and a vehicle body located above the walking base, the vehicle body is provided with at least one slot for accommodating a wafer box, the walking base comprises a base framework and walking mechanisms symmetrically arranged at the bottom of both sides of the base framework; the walking mechanism comprises a first driven wheel, a driving wheel assembly and a second driven wheel arranged in sequence along the length direction of the walking base; the first driven wheel is fixedly installed at the front part of the base framework; the driving wheel assembly and the second driven wheel are connected through a connecting rod, the middle part of the connecting rod is pivotally connected to the base framework; a shock absorber is arranged between the driving wheel assembly and the base framework. Through the embodiment of the application, the problems of driving wheel floating and losing power and the second driven wheel losing ground due to uneven ground are effectively avoided.

Description

Technical Field

[0001] This application relates to the field of wafer automation production technology, specifically to an AGV (Automated Guided Vehicle) trolley. Background Technology

[0002] In semiconductor smart manufacturing scenarios, the efficient and stable transportation of wafer cassettes is crucial to the operational efficiency of cleanrooms. Traditional AGVs (Automated Guided Vehicles) often use rigid chassis and single drive wheels. When traveling on uneven areas such as workshop floor joints or ramps, the drive wheels are prone to temporary suspension due to bumps, causing power interruption or path deviation, and in severe cases, the risk of wafer cassettes tipping over.

[0003] In existing improvement solutions, while independent suspension driven wheels can alleviate bump problems, their complex structure leads to redundant chassis layout and low space utilization. Fixed pivot drive wheel sets, although able to handle unilateral undulations, cannot achieve dynamic load balancing across multiple wheel sets, and still suffer from alternating drive wheel failure under continuous bumpy conditions. Especially when the drive wheels are airborne, the vehicle is forced to stop abruptly due to power loss, while the driven wheels experience insufficient ground contact, causing loss of vehicle posture control. Therefore, there is an urgent need for an automated conveying device that can simultaneously address the problems of drive wheel power loss due to airborne suspension and driven wheel ground contact failure, to meet the stringent requirements of semiconductor manufacturing for transportation stability. Utility Model Content

[0004] This application aims to solve at least one technical problem existing in the prior art. Specifically, the embodiments of this application provide an AGV (Automated Guided Vehicle) to solve the problems that the drive wheels are prone to floating and losing power, and the driven wheels are prone to grounding failure in the prior art.

[0005] The objective of this application can be achieved through the following technical solutions:

[0006] This application provides an AGV (Automated Guided Vehicle) trolley, including a traveling base and a body located above the traveling base. The body has at least one slot for accommodating a wafer cassette. The characteristic of this application is that...

[0007] The walking base includes a base frame and walking mechanisms symmetrically arranged at the bottom of both sides of the base frame;

[0008] The walking mechanism includes a first driven wheel, a drive wheel assembly, and a second driven wheel arranged sequentially along the length of the walking base, wherein;

[0009] The first driven wheel is fixedly installed at the front of the base frame;

[0010] The drive wheel assembly is connected to the second driven wheel via a connecting rod, with the middle of the connecting rod pivotally connected to the base frame.

[0011] A shock absorber is installed between the drive wheel assembly and the base frame.

[0012] Optionally, a bearing seat is fixedly installed at the rear of the middle area of ​​the base frame, and a through-rotating shaft is provided in the middle of the connecting rod, with both ends of the shaft rotatably installed in the bearing seat.

[0013] Optionally, the drive wheel assembly includes a drive wheel, a servo motor, and a motor reducer; the drive wheel is mounted on the outside of the connecting rod, the servo motor is connected to the drive wheel via the motor reducer, and the servo motor and the motor reducer are integrated and mounted on the inside of the connecting rod.

[0014] Optionally, the link includes a horizontally extending middle section, and a first inclined section and a second inclined section extending downward from both ends of the middle section.

[0015] The drive wheel assembly is mounted at the end of the first inclined section, and the second driven wheel is mounted at the end of the second inclined section.

[0016] Optionally, the shock absorber is tilted downwards from the direction of the second driven wheel towards the drive wheel assembly.

[0017] Optionally, both the first driven wheel and the second driven wheel are shock-absorbing directional wheels.

[0018] Optionally, the upper surface of the walking base is equipped with a main control box, a secondary control box, and a support frame;

[0019] The main control box is located in the rear area of ​​the walking base, and the auxiliary control box extends from the side of the main control box along the side of the walking base in a direction away from the main control box.

[0020] The support frame extends laterally from the middle of the main control box and is fixed to the top of the auxiliary control box. The surface of the walking base between the main control box and the auxiliary control box and the support frame are provided with slots.

[0021] Optionally, four slots are provided, arranged in a rectangular array on the surface of the walking base and the support frame between the main control box and the auxiliary control box.

[0022] Optionally, a first sensor and a second sensor are installed in the slot, with at least three second sensors arranged around the first sensor; the first sensor is configured to sense whether a wafer cassette is placed in the slot; the second sensor is configured to sense whether the edge of the wafer cassette is at a preset position in the slot.

[0023] Optionally, horizontal radars are symmetrically arranged in two diagonal areas of the chassis, and vertical radars are installed on the top of both side walls of the vehicle body.

[0024] The front center and rear center sections of the vehicle body are equipped with front and rear ground-detection radars, respectively.

[0025] The detection direction of the horizontal radar is parallel to the plane of the walking base;

[0026] The vertical radar's detection direction is perpendicular to the plane of the walking base;

[0027] The detection directions of the front and rear ground-detecting radars are tilted at an angle of 30°-45° to the horizontal plane.

[0028] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0029] The application utilizes a linkage structure to link the drive wheel assembly with the second driven wheel. When uneven ground causes the drive wheel to lift, the second driven wheel is pressed down via the linkage, using leverage to force the drive wheel to remain grounded and prevent power interruption. Similarly, when uneven ground causes the second driven wheel to lift, the drive wheel can also be pressed down via the linkage to force the second driven wheel to remain grounded, preventing the second driven wheel from lifting off the ground and causing loss of vehicle control. Furthermore, the application incorporates shock absorbers to significantly reduce vehicle body vibration, further ensuring the drive wheel remains grounded and improving the stability of wafer cassette transport. Attached Figure Description

[0030] The present application will be further described below with reference to the accompanying drawings.

[0031] Figure 1 This is a schematic diagram of the overall structure of the AGV vehicle in one embodiment of this application;

[0032] Figure 2 This is a schematic diagram of the overall structure of the AGV vehicle from another perspective in one embodiment of this application;

[0033] Figure 3 This is a partial structural diagram of the AGV vehicle in one embodiment of this application;

[0034] Figure 4 This is a schematic diagram of another partial structure of the AGV vehicle in one embodiment of this application.

[0035] Explanation of reference numerals in the attached figures:

[0036] 100. Walking base; 101. Base frame; 102. First driven wheel; 103. Drive wheel assembly; 1031. Drive wheel; 1032. Servo motor; 1033. Motor reducer; 104. Second driven wheel; 105. Connecting rod; 1051. Middle section; 1052. First tilting section; 1052. Second tilting section; 106. Shock absorber; 107. Bearing seat; 200. Body; 201. Slot; 202. Main control box; 203. Sub-control box; 204. Support frame; 205. First sensor; 206. 207. Sensor; 208. Stop; 209. Tag reader; 210. Pad; 300. Positioning pin; 301. Horizontal radar; 302. Vertical radar; 303. Front ground radar; 304. Rear ground radar; 305. Acoustic sensor; 306. Main power switch; 307. Voice announcer; 308. USB expansion board; 309. 10-inch touch screen; 310. Rear dashcam; 311. Three-color traffic lights; 312. WIFI antenna; 313. Battery module; 314. Charging interface; 400. Wafer box. Detailed Implementation

[0037] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0038] Please see Figure 1 , Figure 3 and Figure 4 As shown, in some embodiments, this application provides an AGV (Automated Guided Vehicle) including a base 100 and a body 200. The body 200 is located above the base 100 and has at least one slot 201 for accommodating a wafer cassette 400. The base 100 is a key support structure for the entire AGV, and its stability directly affects the operational stability of the vehicle.

[0039] The walking base 100 includes a base frame 101 and a walking mechanism. The base frame 101 forms the basic framework of the walking base 100 and is made of high-strength steel to support the weight of the vehicle itself and the wafer cassette 400 it carries.

[0040] The walking mechanism is symmetrically arranged on both sides of the bottom of the base frame 101. This symmetrical layout ensures the balance of the vehicle during travel. The walking mechanism includes a first driven wheel 102, a drive wheel assembly 103, and a second driven wheel 104 arranged sequentially along the length of the walking base 100. The first driven wheel 102 is fixedly installed at the front of the base frame 101 and connected to the base frame 101 by bolts or other fasteners, ensuring its stable position during travel and providing stable contact with the ground for guidance. The drive wheel assembly 103 and the second driven wheel 104 are connected by a connecting rod 105. The middle of the connecting rod 105 is pivotally connected to the base frame 101, making the drive wheel assembly 103 and the second driven wheel 104 a linked whole, which can flexibly adjust the angle and position according to the ground conditions. The shock absorber 106 is located between the drive wheel assembly 103 and the base frame 101. Its two ends are connected to the drive wheel assembly 103 and the base frame 101 respectively. When encountering bumpy roads, the shock absorber 106 can effectively buffer the vibration and prevent the drive wheel 1031 from floating due to vibration, thus ensuring the stability of the car's driving.

[0041] This application uses a pivotal linkage structure of link 105 to link the drive wheel assembly 103 and the second driven wheel 104. When uneven ground causes the drive wheel 1031 to lift, the second driven wheel 104 is pressed down via link 105, using leverage to force the drive wheel 1031 to remain grounded, preventing power interruption. Similarly, when uneven ground causes the second driven wheel 104 to lift, the drive wheel 1031 can also be pressed down via link 105, forcing the second driven wheel 104 to remain grounded, preventing the second driven wheel 104 from leaving the ground and causing the vehicle body 200 to lose control. Simultaneously, this application also uses a shock absorber 106 to significantly reduce vehicle body 200 bumps, further forcing the drive wheel 1031 to remain grounded, improving the transport stability of the wafer cassette 400.

[0042] Please see Figure 3 and Figure 4 As shown, in some embodiments, a bearing seat 107 is fixedly installed at the rear of the middle region of the base frame 101. The bearing seat 107 is a "U"-shaped metal frame, and the bearing seat 107 is fixedly connected to the base frame 101 by bolts or welded mounting plates. A pair of bearings are installed inside the bearing seat 107. A through-type rotating shaft is provided in the middle of the connecting rod 105, and both ends of the rotating shaft are rotatably installed in the bearing seat 107, realizing the movable connection between the connecting rod 105 and the bearing seat 107, thereby allowing the connecting rod 105 to rotate horizontally around the bearing seat 107. This arrangement makes the connecting rod 105 swing more flexibly and without axial movement, avoiding the problem of gaps caused by wear in traditional articulated shafts, improving the reliability of the mechanism, ensuring that the trolley can drive stably under various road conditions, reducing the risk of transportation interruption due to mechanism failure, and improving the continuity of production.

[0043] Please see Figure 3 and Figure 4 As shown, in some embodiments, the drive wheel assembly 103 includes a drive wheel 1031, a servo motor 1032, and a motor reducer 1033. The drive wheel 1031 is mounted on the outside of the connecting rod 105 and is fixed to the output shaft of the motor reducer 1033 by a key connection, ensuring the stability and reliability of power transmission. The servo motor 1032 and the motor reducer 1033 are integrated and mounted on the inside of the connecting rod 105. The housing of the motor reducer 1033 is fixed to the inner side of the connecting rod 105 by multiple bolts arranged in a matrix. The motor is fixed to the side of the motor reducer 1033 away from the connecting rod 105, forming a compact and stable drive system, reducing space occupation and facilitating reasonable layout within the limited space of the AGV.

[0044] Meanwhile, each drive wheel 1031 is independently equipped with a servo motor 1032 and a motor reducer 1033 assembly, enabling each drive wheel 1031 to have independent steering drive function, which greatly improves the motion control accuracy and multi-directional posture adjustment flexibility of the AGV, and can better adapt to complex production site environments and frequent direction change transportation needs.

[0045] Please see Figure 3 and Figure 4 As shown, in some embodiments, the link 105 includes a horizontally extending middle section 1051, a first inclined section 1052 and a second inclined section 1052 extending downward from both ends of the middle section 1051.

[0046] The angle between the first inclined section 1052 and the middle section 1051 is 120°-160°, preferably 135°. The end of the first inclined section 1052 is provided with a mounting hole, and a bearing is provided in the mounting hole. The shaft of the drive wheel 1031 passes through the inner ring of the bearing and is interference-fitted with it.

[0047] The second inclined section 1052 is symmetrically arranged at both ends of the middle section 1051 with the first inclined section 1052, and the second driven wheel 104 is installed on the end face of the second inclined section 1052.

[0048] The special structural design of the 105 linkage optimizes the layout of the AGV's walking mechanism, improves space utilization, lowers the center of gravity, enhances driving stability, reduces the risk of the AGV tipping over due to bumps or slopes, improves the safety and reliability of the transportation process, helps extend the AGV's service life, and reduces maintenance costs.

[0049] Please see Figure 3As shown, in some embodiments, the shock absorber 106 is inclined downwards from the direction of the second driven wheel 104 toward the drive wheel assembly 103, with an angle of 30°-60°, for example, 45°, with the horizontal plane. The upper end of the shock absorber 106 is pivotally connected to the chassis frame located above the middle section 1051 of the connecting rod 105 via a spherical bearing, and the lower end is pivotally connected to the first inclined section 1052 via another spherical bearing. Specifically, the shock absorber 106 may be a spring + hydraulic damping structure shock absorber 106.

[0050] This application uses a shock absorber 106 that is tilted to absorb both vertical and horizontal impact forces (such as lateral forces during steering) to reduce body roll 200.

[0051] Please see Figure 3 and Figure 4 As shown, in some embodiments, both the first driven wheel 102 and the second driven wheel 104 are shock-absorbing directional wheels. Specifically, shock-absorbing springs or rubber pads are provided between the first driven wheel 102 and the base frame 101, and between the second driven wheel 104 and the connecting rod 105. The shock-absorbing springs or rubber pads have good elasticity and can effectively absorb vibrations and impacts from the ground, reducing the bumps during the vehicle's movement.

[0052] By setting shock-absorbing elements between the driven wheel and the connecting structure, the shock absorption performance of the AGV is further improved, making the vehicle more stable during travel and better able to adapt to ground conditions with different flatness.

[0053] Please see Figure 1 and Figure 2 As shown, in some embodiments, the upper surface of the traveling base 100 is provided with a main control box 202, a secondary control box 203, and a support frame 204. The main control box 202 is located in the rear area of ​​the traveling base 100, serving as the control center of the entire AGV. It houses key components such as control circuit boards, processors, and power management modules, used to control the vehicle's driving, navigation, task execution, and other functions. The secondary control box 203 extends laterally from the side of the traveling base 100 away from the main control box 202, working in conjunction with it. It can house auxiliary control modules, sensor processing units, and other equipment, increasing the expandability and flexibility of the control system. The support frame 204 extends laterally from the middle of the main control box 202 and is fixed to the top of the secondary control box 203, while also providing an installation base for the slot 201 above the secondary control box 203.

[0054] The separate arrangement of the main control box 202 and the auxiliary control box 203 greatly reduces the length of the box along the width direction of the traveling base 100, allowing the AGV to be narrower overall, enabling it to operate in confined areas. Furthermore, the slots 201 can be rationally arranged, ensuring stable transportation of the wafer cassette 400 and reducing the risk of damage during transport.

[0055] Please see Figure 1 and Figure 2 As shown, in some embodiments, four slots 201 are provided, arranged in a rectangular array on the surface of the traveling base 100 and the support frame 204 between the main control box 202 and the auxiliary control box 203. Two slots 201 located on the surface of the traveling base 100 and the support frame 204 are distributed along the length of the traveling base 100. This rectangular array distribution of the four slots 201 fully utilizes the cargo space of the AGV, improves transportation efficiency, and can meet the needs of batch transportation of wafer cassettes 400 in the semiconductor manufacturing process.

[0056] Please see Figure 1 and Figure 2 As shown, in some embodiments, each slot 201 is equipped with a first sensor 205 and a second sensor 206. There are at least three second sensors 206, which are evenly arranged around the first sensor 205. The first sensor 205 is typically a photoelectric sensor or a pressure sensor, used to sense whether a wafer cassette 400 is placed in the slot 201. When the wafer cassette 400 is placed in the slot 201, the first sensor 205 can detect this in a timely manner and send a signal back to the control system. The second sensor 206 can be a proximity sensor or an image recognition sensor, used to sense whether the edge of the wafer cassette 400 is at a preset position within the slot 201, ensuring that the wafer cassette 400 is correctly and stably placed within the slot 201, avoiding safety hazards or displacement during transportation caused by improper placement.

[0057] On the outer side of each slot 201, three blocks 207 are respectively set along the three edges of the wafer cassette 400. Each block 207 has a downward-sloping guide surface on its top to guide the wafer cassette 400 into the slot 201. On the other side of the slot 201, a tag reader 208 is installed. The tag reader 208 is generally a barcode scanner or RFID reader, which can quickly and accurately read the tag information on the wafer cassette 400. The tag stores important data such as the wafer cassette 400 number, wafer specifications, and production batch. The slot 201 is also equipped with multiple pads 209 and multiple positioning pins 210. The pads 209 are usually made of soft rubber or foam material with a certain thickness. The shape and size of the positioning pins 210 are adapted to the positioning holes pre-set on the bottom of the wafer cassette 400, and can be accurately inserted into the positioning holes to achieve precise positioning and stable fixation of the wafer cassette 400 in the slot 201.

[0058] Please see Figure 1 and Figure 2 As shown, in some embodiments, horizontal radars 300 are symmetrically arranged in two diagonal areas of the walking base 100, vertical radars 301 are installed on the top of the side walls of the vehicle body 200, and front ground-detecting radars 302 and rear ground-detecting radars 303 are respectively installed in the middle of the front end and the middle of the rear end of the vehicle body 200. The detection direction of the horizontal radars 300 is parallel to the plane of the walking base 100, and is used to detect the distance and position of obstacles in the direction of vehicle travel, thereby realizing obstacle avoidance. The detection direction of the vertical radars 301 is perpendicular to the plane of the walking base 100, and is used to detect the environmental height information on both sides of the vehicle body 200, such as the height of shelves, walls, etc., to prevent the vehicle from colliding with surrounding facilities during travel. The front ground-detecting radar 302 and the rear ground-detecting radar 303 are tilted at an angle of 30°-45° to the horizontal plane. They are mainly used to detect the undulations of the ground in front of and behind the vehicle, predict the road conditions in advance, adjust the driving posture and speed, and ensure that the vehicle passes smoothly. This reduces the risk of vehicle bumps and wafer cell 400 damage caused by uneven road surfaces, improves transportation quality, and ensures the continuity and stability of the semiconductor manufacturing process.

[0059] Please see Figure 1 and Figure 2 As shown, in some embodiments, two symmetrical ultrasonic sensors 304 are provided on both sides of the rear end face of the walking base 100 to detect the distance to obstacles within a certain range behind the vehicle, assisting in obstacle avoidance during reversing and backward movement. The ultrasonic sensors 304 measure the distance to obstacles by emitting and receiving ultrasonic signals, and have advantages such as fast detection speed, high accuracy, and low cost.

[0060] A main power switch 305 is installed in the middle of the rear end of the walking base 100 to facilitate the operator to control and manage the power supply of the entire AGV.

[0061] The rear panel of the main control box 202 is equipped with a voice broadcaster 306, a USB expansion board, a 10-inch touchscreen, and a rear-view dashcam 309. The voice broadcaster 306 can be used to play system prompts and alarm information. The USB expansion board provides an interface for connecting external devices, facilitating data transmission and software upgrades. The 10-inch touchscreen 308 serves as the human-machine interface, displaying the vehicle's operating status and task information, and can receive commands from the operator. The rear-view dashcam 309 records the driving situation behind the vehicle, providing a basis for accident analysis and troubleshooting.

[0062] The top of the main control box 202 is equipped with a front driving recorder, a three-color signal light 310, and a WIFI antenna 311. The front driving recorder records the driving situation ahead, the three-color signal light 310 is used to display the working status and operating mode of the car, and the WIFI antenna 311 enables wireless communication between the car and the external network, which is convenient for remote monitoring and management.

[0063] The walking base 100 is equipped with a charging module, which includes a battery module 312 and a charging interface 313. The battery module 312 is located between the first driven wheel 102 and the drive wheel assembly 103, making full use of the space. The charging interface 313 is located on the front end of the walking base 100, which facilitates connection with charging equipment for charging.

[0064] The foregoing has provided a detailed description of one embodiment of this application, but the description is merely a preferred embodiment and should not be construed as limiting the scope of this application. All equivalent variations and modifications made within the scope of this application should still fall within the patent coverage of this application.

[0065] It should be noted that the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Descriptions in this application regarding directions such as "left," "right," "left side," "right side," "upper part," "lower part," "top," and "bottom" are defined based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, not to indicate or imply that the described structure must be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0066] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

Claims

1. An AGV (Automated Guided Vehicle) comprising a base and a body located above the base, the body having at least one slot for accommodating a wafer cassette, characterized in that, The walking base includes a base frame and walking mechanisms symmetrically arranged at the bottom of both sides of the base frame; The walking mechanism includes a first driven wheel, a drive wheel assembly, and a second driven wheel arranged sequentially along the length of the walking base, wherein; The first driven wheel is fixedly installed at the front of the base frame; The drive wheel assembly is connected to the second driven wheel via a connecting rod, and the middle of the connecting rod is pivotally connected to the base frame. A shock absorber is provided between the drive wheel assembly and the base frame.

2. The AGV trolley according to claim 1, characterized in that, A bearing seat is fixedly installed at the rear of the middle area of ​​the base frame, and a through-rotating shaft is provided in the middle of the connecting rod. Both ends of the rotating shaft are rotatably installed in the bearing seat.

3. The AGV trolley according to claim 1, characterized in that, The drive wheel assembly includes a drive wheel, a servo motor, and a motor reducer; the drive wheel is mounted on the outside of the connecting rod, the servo motor is connected to the drive wheel via the motor reducer, and the servo motor and the motor reducer are integrated and mounted on the inside of the connecting rod.

4. The AGV trolley according to claim 1, characterized in that, The link includes a horizontally extending middle section, and a first inclined section and a second inclined section extending downward from both ends of the middle section. The drive wheel assembly is mounted at the end of the first inclined section, and the second driven wheel is mounted at the end of the second inclined section.

5. The AGV trolley according to claim 1, characterized in that, The shock absorber is inclined downwards from the direction of the second driven wheel toward the drive wheel assembly.

6. The AGV trolley according to claim 1, characterized in that, Both the first driven wheel and the second driven wheel are shock-absorbing directional wheels.

7. The AGV trolley according to claim 1, characterized in that, The upper surface of the walking base is provided with a main control box, a secondary control box, and a support frame; The main control box is located in the rear area of ​​the walking base, and the auxiliary control box extends from the side of the main control box along the side of the walking base in a direction away from the main control box; The support frame extends laterally from the middle of the main control box and is fixed to the top of the secondary control box. The groove is provided on the surface of the walking base between the main control box and the secondary control box and on the support frame.

8. The AGV trolley according to claim 7, characterized in that, The slots are provided in four places, arranged in a rectangular array on the surface of the walking base and the support frame between the main control box and the auxiliary control box.

9. The AGV trolley according to claim 1, characterized in that, The slot is equipped with a first sensor and a second sensor, and there are at least three second sensors arranged around the first sensor; the first sensor is configured to sense whether a wafer cassette is placed in the slot. The second sensor is configured to sense whether the edge of the wafer cell is in a preset position within the slot.

10. The AGV trolley according to any one of claims 1-9, characterized in that, Horizontal radars are symmetrically arranged in two diagonal areas of the chassis, and vertical radars are installed on the top of both side walls of the vehicle body. The front center and rear center of the vehicle body are respectively equipped with a front ground-detecting radar and a rear ground-detecting radar, wherein: The detection direction of the horizontal radar is parallel to the plane of the walking base; The detection direction of the vertical radar is perpendicular to the plane of the walking base; The detection directions of the front and rear ground-detecting radars are tilted at an angle of 30°-45° to the horizontal plane.

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