New type of composite vacuum annealing equipment

Abstract

This invention discloses a novel composite vacuum annealing device. The device comprises x annealing modules, each including a vacuum chamber and a heat source. The heat source is disposed within the vacuum chamber, and the x vacuum chambers are controllably connected. The sample to be annealed can be transferred between the x vacuum chambers. Specifically, m of the annealing modules use infrared heat sources, and n use resistance heat sources, where x ≥ 2, m ≥ 1, and n ≥ 1. This invention combines the advantages of rapid heating with the good heat retention of resistance heating, and is further enhanced by the periodic reciprocating motion of a vacuum-assisted external loading plate. This effectively improves the temperature uniformity during long-term annealing and also allows for the long-term annealing of large-sized samples.

Description

Technical Field

[0001] This utility model specifically relates to a novel composite vacuum annealing device, belonging to the technical field of annealing equipment. Background Technology

[0002] Currently, conventional drying equipment, such as drying ovens, is mainly of the resistance temperature detector (RTD) type. These methods suffer from long heating and holding times, primarily relying on gas conduction for heat, requiring preheating of the chamber before use and reheating afterward. The heating process of the sample to be annealed within the chamber is lengthy and prone to uneven heating. Infrared heaters, on the other hand, are prone to temperature overload, making temperature control difficult during continuous annealing. Furthermore, infrared vacuum equipment has relatively poor temperature accuracy, making it unsuitable for prolonged, uniform annealing. Utility Model Content

[0003] The main purpose of this invention is to provide a novel composite vacuum annealing device that combines the advantages of rapid heating by infrared heating and good heat preservation by resistance heating. It is also supplemented by the periodic reciprocating motion of the vacuum loading plate, which can effectively improve the temperature uniformity during long-term annealing and can also accommodate long-term annealing of large-sized samples, thereby overcoming the shortcomings of the prior art.

[0004] To achieve the aforementioned objectives, the technical solution adopted by this utility model includes:

[0005] This utility model discloses a novel composite vacuum annealing device, comprising: x annealing modules, each annealing module including a vacuum chamber and a heat source, the heat source being disposed in the vacuum chamber, the x vacuum chambers being controllably connected, and the sample to be annealed being transferable between the x vacuum chambers, wherein the heat source of m of the annealing modules is an infrared heat source, the heat source of n of the annealing modules is a resistance heat source, x≥2, m≥1, n≥1.

[0006] In a typical implementation, the annealing module further includes a stage disposed in the vacuum chamber, the stage being used to support the sample to be annealed, and the heat source being disposed on the upper and lower sides of the stage along a first direction.

[0007] Furthermore, the stage has translational degrees of freedom to reciprocate along the second direction and / or vertical degrees of freedom to reciprocate along the first direction, wherein the first direction intersects the second direction and the second direction is parallel to the extension direction of the stage surface.

[0008] In a typical implementation, the stage includes a carrier plate and a drive roller assembly. The carrier plate is disposed on the drive roller assembly and is driven in conjunction with the drive roller assembly. When the drive roller assembly rotates, the carrier plate can be driven to perform translational motion along the second direction.

[0009] Furthermore, the transmission roller assembly includes multiple freely rotatable rollers, which are arranged sequentially along the second direction.

[0010] Furthermore, the plurality of rollers are driven to each other, wherein at least one of the rollers is driven to a rotation drive mechanism, or the plurality of rollers are independent of each other, and each of the rollers is independently driven to a rotation drive mechanism.

[0011] Furthermore, the platform also includes a rotation drive mechanism, which is connected to the roller drive mechanism and is used to drive the roller to rotate.

[0012] In another typical implementation, the platform includes a carrier plate and a lifting frame, the carrier plate is fixed on the lifting frame, and the lifting frame is capable of extending and retracting along the first direction, or the lifting frame is capable of moving along the first direction.

[0013] Furthermore, the platform also includes a lifting drive mechanism, which is connected to the lifting frame and is used to drive the lifting frame to extend, retract, or move.

[0014] In another typical implementation, the platform includes a carrier plate, a transmission roller assembly, and a lifting frame. The carrier plate is disposed on the transmission roller assembly and is in transmission cooperation with the transmission roller assembly. The transmission roller assembly is disposed on the lifting frame. When the transmission roller assembly rotates, the carrier plate can be driven to perform translational movement along the second direction. The lifting frame can extend or retract along the first direction, or the lifting frame can move along the first direction.

[0015] Furthermore, the transmission roller assembly includes multiple freely rotatable rollers, which are arranged sequentially along the second direction.

[0016] Furthermore, the plurality of rollers are driven to each other, wherein at least one of the rollers is driven to a rotation drive mechanism, or the plurality of rollers are independent of each other, and each of the rollers is independently driven to a rotation drive mechanism.

[0017] Furthermore, the platform also includes a rotation drive mechanism and a lifting drive mechanism. The rotation drive mechanism is connected to the roller and is used to drive the roller to rotate. The lifting drive mechanism is connected to the lifting frame and is used to drive the lifting frame to extend, retract, or move.

[0018] In a typical implementation, the annealing module further includes a temperature measuring mechanism disposed in the vacuum chamber, which is used at least to measure the surface temperature of the sample to be annealed.

[0019] Furthermore, the infrared heat source and the vacuum chamber are configured as a first annealing module, and the resistance heat source and the vacuum chamber are configured as a second annealing module, with at least one vacuum chamber of the first annealing module directly connected to a vacuum chamber of the second annealing module.

[0020] Furthermore, the infrared heat source and the vacuum chamber are configured as a first annealing module, and the resistance heat source and the vacuum chamber are configured as a second annealing module. x vacuum chambers are connected in sequence, and the first annealing module and the second annealing module are alternately arranged in sequence.

[0021] Furthermore, the annealing module includes an annealing chamber, and the vacuum chamber is disposed inside the annealing chamber, with x annealing chambers connected in sequence.

[0022] In a typical implementation, the infrared heat source includes an infrared lamp, a fixed housing, and a heating bracket. The infrared lamp is mounted on the fixed housing, the fixed housing is fixedly mounted on the heater bracket, and the heater bracket is fixed in the vacuum chamber.

[0023] In a typical implementation, the resistance heat source includes a resistance heating plate, which is fixed in the vacuum chamber.

[0024] Compared with the prior art, the advantages of this utility model include:

[0025] This utility model provides a novel composite vacuum annealing device, which has infrared heating annealing and resistance heating annealing modules. By using multiple heating annealing modules in combination, it combines the advantages of rapid heating of infrared heating annealing and continuous and uniform heating of resistance heating, and can achieve rapid temperature rise.

[0026] The present invention provides a novel composite vacuum annealing equipment that heats up rapidly while maintaining a stable and continuous annealing temperature at a set temperature for an extended period of time, thus meeting the requirements for long-term annealing and providing a uniform and controllable annealing environment temperature.

[0027] This utility model provides a novel composite vacuum annealing device that uses multiple annealing modules connected in series to achieve annealing of large-sized samples. Furthermore, this novel composite vacuum annealing device can be easily integrated into linear production line processes, seamlessly combining with the linear production line steps requiring annealing. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the external structure of a novel composite vacuum annealing device provided in a typical embodiment of this utility model;

[0030] Figure 2 This is a top view of a novel composite vacuum annealing device provided in a typical embodiment of this utility model;

[0031] Figure 3 This is a schematic diagram of the internal structure of the first annealing module provided in a typical embodiment of this utility model;

[0032] Figure 4 This is a schematic diagram of the internal structure of the second annealing module provided in a typical embodiment of this utility model. Detailed Implementation

[0033] In view of the shortcomings of the prior art, the inventors of this case, through long-term research and extensive practice, have proposed the technical solution of this utility model. The following will further explain and illustrate the technical solution, its implementation process, and principles in conjunction with the accompanying drawings and specific embodiments. Unless otherwise specified, the components involved in the embodiments of this utility model, such as rotary drive motors, linear drive motors, rollers, infrared lamps, resistance heating plates, telescopic lifting frames, and guide rails, are all known in the art, and their specific structures and product models are not limited here.

[0034] In a typical implementation case, please refer to Figure 1 and Figure 2 A novel composite vacuum annealing device includes a series of annealing modules 100 connected in sequence. The annealing modules 100 are used to anneal samples to be annealed, and the samples to be annealed can be transferred between the series of annealing modules 100.

[0035] Please refer to the following for details. Figures 1-4The annealing module 100 includes an annealing chamber 110 and a heat source. The annealing chamber 110 has a vacuum chamber 111 inside, and the heat source is set in the vacuum chamber 111. The annealing chambers 110 of the series of annealing modules 100 are connected in sequence, and the vacuum chambers 111 of the series of annealing modules 100 are controllably connected. The sample to be annealed can be transferred between the vacuum chambers of the series of annealing modules 100. The heat source of m annealing modules 100 is an infrared heat source, and the heat source of n annealing modules 100 is a resistance heat source, where m≥1 and n≥1.

[0036] It should be noted that the annealing chamber 110 can be a structure known in the art, and the way and structure of forming the vacuum chamber 111 inside it are also known in the art. At the same time, the structure in which the annealing chambers 110 of the series of annealing modules 100 are connected in sequence, and the structure and method of controllable communication between the vacuum chambers 111 are also known in the art, and are not specifically limited here. Obviously, the annealing chamber 110 is provided with a door and other structures that allow the sample to be annealed to enter and exit, and can be opened and closed. These are all conventional structures known in the art, and since they are not considered as improvements to this utility model, they will not be described in detail here.

[0037] Specifically, the annealing module using an infrared heat source is defined as the first annealing module 100-1, and the annealing module using a resistance heat source is defined as the second annealing module 100-2. The first annealing module 100-1 and the second annealing module 100-2 are identical in structure except for the heat source. The first annealing module 100-1 and the second annealing module 100-2 can be alternately arranged sequentially. Figure 1 and Figure 2 The two annealing modules shown can be understood as a set of adjacent and connected first annealing module 100-1 and second annealing module 100-2.

[0038] For details, please refer to Figure 3The first annealing module 100-1 includes at least two sets of infrared heat sources, which are respectively located at the top and bottom of the vacuum chamber 111. Of course, more infrared heat sources can also be arranged around the vacuum chamber 111. More specifically, the infrared heat sources used in the first annealing module 100-1 include infrared lamps 5, a fixed housing 6, and a heating bracket (not shown in the figure). The infrared lamps 5 are mounted on the fixed housing 6, which is fixedly mounted on the heater bracket, which is fixed to the annealing chamber 110. More specifically, the fixed housing 6 is not a completely enclosed structure; it has an opening facing the sample to be annealed. More specifically, the inner wall of the fixed housing 6 can be provided with a coating that has a reflective / focusing effect or a reflective / focusing mirror to reflect / focus the infrared light emitted by the infrared lamps 5. Of course, these coatings or reflective / focusing mirrors with reflective / focusing effects are known in the art and are not specifically limited here. More specifically, each group of infrared heat sources may include multiple infrared lamps 5, which can be arranged in parallel. The number, power, and other functional parameters of the infrared lamps 5 can be set according to specific needs, and no specific restrictions are imposed here. It should be noted that the fixing connection method and structure between the fixed housing 6 and the heater bracket, and between the heater bracket and the annealing box 110, can all adopt structures / methods known in the art, and no specific limitations are imposed here.

[0039] For details, please refer to Figure 4 The second annealing module 100-2 includes at least two sets of resistance heat sources, which are respectively located at the top and bottom of the vacuum chamber 111. Of course, more resistance heat sources can also be arranged around the vacuum chamber 111. More specifically, the resistance heat source used in the second annealing module 100-2 includes a resistance heating plate 3, which can be fixedly mounted on the annealing chamber 110. It should be noted that the specific dimensions, performance, and other parameters of the resistance heating plate 3 can be selected and set according to specific requirements. The fixing connection method and structure between the resistance heating plate 3 and the annealing chamber 110 can adopt structures / methods known in the art, and are not specifically limited here.

[0040] Specifically, the common structure of the annealing module will be described in detail below. The annealing module 100 also includes a stage, which is disposed in the vacuum chamber 111. The stage is used to hold the sample to be annealed, and the heat source can be disposed on the upper and lower sides of the stage along the first direction.

[0041] More specifically, to improve the uniformity of heating during annealing of the sample, the stage is configured to have translational degrees of freedom (reciprocating along a second direction) and / or vertical degrees of freedom (reciprocating along a first direction). The translational degree of freedom along the second direction allows the stage to cyclically reciprocate along that direction, ensuring uniform heating of different areas of the sample. The vertical degrees of freedom in the first direction can change the distance between the sample and the heat source. Specifically, the first and second directions intersect, and the second direction is parallel to the extension direction of the stage surface. Preferably, the first and second directions are perpendicular; that is, the first direction can be... Figure 3 , Figure 4 The vertical direction in the middle, the second direction can be Figure 3 , Figure 4 The left and right directions in the middle.

[0042] As a typical implementation, the stage only has translational freedom for reciprocating motion along the second direction. Please refer again. Figure 3 and Figure 4 The stage includes a carrier plate 1, a transmission roller assembly, and a rotation drive mechanism. The transmission roller assembly includes multiple freely rotatable rollers 2, which are arranged in parallel along a second direction. The rotation drive mechanism is connected to the rollers 2. The carrier plate 1 is mounted on the rollers 2 and is driven by the rollers 2. When the rollers 2 rotate, the carrier plate 1 can be driven to perform translational motion along the second direction. Specifically, the rollers 2 drive the carrier plate 1 to translate by rotating on their own. When the rollers 2 are driven to rotate forward or backward by the rotation drive mechanism, the carrier plate 1 can reciprocate along the second direction. That is, the reciprocating translational motion of the carrier plate 1 can be achieved by driving the rollers 2 to rotate forward and backward alternately.

[0043] It should be noted that the transmission structure / method between the rollers 2 and the carrier plate 1 is known in the art. The carrier plate 1 can be directly placed on multiple rollers 2, and the two are transmitted through the frictional force of their contact. Of course, a transmission belt can also be provided between the multiple rollers 2, and the transmission belt is in transmission cooperation with the multiple rollers 2. The carrier plate 1 is placed on the transmission belt or directly fixed to the transmission belt. Similarly, the multiple rollers 2 can be connected in a transmission manner, with at least one roller 2 acting as a driving wheel and directly connected to the rotation drive mechanism. Alternatively, the multiple rollers 2 can be independent of each other, with each roller 2 independently connected to the rotation drive mechanism, which can be a rotary drive motor, etc.

[0044] As another typical implementation scheme, the stage only has the degree of freedom for vertical movement along the first direction. Please refer to [link / reference needed]. Figure 3 and Figure 4The platform includes a carrier plate 1, a lifting frame 4, and a lifting drive mechanism. The carrier plate 1 is fixed on the lifting frame 4, which is fixed on the annealing box 110. The lifting frame 4 can extend or retract in a first direction, or it can move in a first direction. The lifting drive mechanism is connected to the lifting frame 4 in a transmission manner. The lifting drive mechanism realizes the lifting of the carrier plate 1 by driving the lifting frame 4 to extend or retract in the first direction or to move in the first direction.

[0045] It should be noted that the retractable lifting frame 4 structure is known in the art. For example, the lifting frame 4 can be a telescopic frame with an X-shaped structure, etc. Of course, when the lifting frame 4 adopts a non-retractable structure, a guide rail extending along the first direction can also be provided in the vacuum chamber. The lifting frame 4 is movably engaged with the guide rail, and the lifting drive mechanism drives the lifting frame to move along the guide rail, thereby realizing lifting. For example, the lifting drive mechanism can be a linear drive motor or a cylinder, etc.

[0046] As another typical implementation, the stage is configured to simultaneously possess translational degrees of freedom for reciprocating motion along a second direction and vertical degrees of freedom for reciprocating motion along a first direction. Please refer again. Figure 3 and Figure 4 The platform includes a carrier plate 1, a transmission roller assembly, a lifting frame 4, and a rotation drive mechanism. The transmission roller assembly includes multiple freely rotatable rollers 2, which are arranged in parallel along a second direction. The rollers 2 are mounted on the lifting frame 4, and the rotation drive mechanism is connected to the rollers 2. The carrier plate 1 is set on the rollers 2 and is in transmission cooperation with them. The lifting frame 4 is connected to the lifting drive mechanism, and the transmission roller assembly and the carrier plate 1 can be raised and lowered synchronously. In this method, the carrier plate achieves reciprocating translational motion and lifting motion in the same way as the two methods mentioned above, and will not be described again here.

[0047] Specifically, the annealing module 100 also includes a temperature measuring mechanism, which is located in a vacuum chamber. The temperature measuring mechanism is used to measure at least the surface temperature of the carrier plate and the sample to be annealed. More specifically, the temperature measuring mechanism may include one or more temperature sensors, the specific placement and product model of which are not limited here.

[0048] This invention provides a novel composite vacuum annealing device with infrared heating annealing and resistance heating annealing modules. By using multiple heating annealing modules in combination, it combines the advantages of rapid heating of infrared heating annealing and continuous and uniform heating of resistance heating, enabling rapid temperature rise. Furthermore, this novel composite vacuum annealing device, while rapidly heating, can maintain a stable and continuous annealing temperature at a set point for an extended period, meeting the requirements for long-term annealing. The annealing environment temperature is uniform and controllable. In addition, this novel composite vacuum annealing device, using multiple annealing modules connected in series, can anneal large-size samples. Moreover, this novel composite vacuum annealing device can be easily integrated into linear production line processes, seamlessly combining with the linear production line steps requiring annealing.

[0049] This utility model provides a novel composite vacuum annealing device that enables rapid heating. Furthermore, it can handle the annealing of large-size samples and the step-by-step annealing experimental setup can be integrated with existing production lines for added benefits. It should be understood that the above embodiments are merely illustrative of the technical concept and features of this utility model, intended to enable those skilled in the art to understand and implement the invention, and should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A novel composite vacuum annealing equipment, characterized in that, include: There are x annealing modules, each annealing module including a vacuum chamber and a heat source. The heat source is disposed in the vacuum chamber. The x vacuum chambers are controllably connected, and the sample to be annealed can be transferred between the x vacuum chambers. Among them, the heat source of m annealing modules is an infrared heat source, and the heat source of n annealing modules is a resistance heat source, where x≥2, m≥1, and n≥1.

2. The novel composite vacuum annealing equipment according to claim 1, characterized in that: The annealing module also includes a stage, which is disposed in the vacuum chamber and is used to support the sample to be annealed. The heat source is disposed on the upper and lower sides of the stage along a first direction.

3. The novel composite vacuum annealing equipment according to claim 2, characterized in that: The stage has translational degrees of freedom to reciprocate along a second direction and / or vertical degrees of freedom to reciprocate along the first direction, wherein the first direction intersects the second direction and the second direction is parallel to the extension direction of the stage surface.

4. The novel composite vacuum annealing equipment according to claim 3, characterized in that: The platform includes a carrier plate and a transmission roller assembly. The carrier plate is disposed on the transmission roller assembly and is in transmission cooperation with the transmission roller assembly. When the transmission roller assembly rotates, the carrier plate can be driven to perform translational movement along the second direction.

5. The novel composite vacuum annealing equipment according to claim 4, characterized in that: The transmission roller assembly includes multiple freely rotatable rollers, which are arranged sequentially along the second direction.

6. The novel composite vacuum annealing equipment according to claim 5, characterized in that: The rollers are driven to each other, wherein at least one roller is driven to a rotation drive mechanism, or the rollers are independent of each other, and each roller is independently driven to a rotation drive mechanism.

7. The novel composite vacuum annealing equipment according to claim 6, characterized in that: The platform also includes a rotation drive mechanism, which is connected to the roller drive mechanism and is used to drive the roller to rotate.

8. The novel composite vacuum annealing equipment according to claim 3, characterized in that: The platform includes a carrier plate and a lifting frame. The carrier plate is fixed on the lifting frame, and the lifting frame is capable of extending and retracting along the first direction, or the lifting frame is capable of moving along the first direction.

9. The novel composite vacuum annealing equipment according to claim 8, characterized in that: The platform also includes a lifting drive mechanism, which is connected to the lifting frame and is used to drive the lifting frame to extend, retract, or move.

10. The novel composite vacuum annealing equipment according to claim 3, characterized in that: The platform includes a carrier plate, a transmission roller assembly, and a lifting frame. The carrier plate is disposed on the transmission roller assembly and is in transmission cooperation with the transmission roller assembly. The transmission roller assembly is disposed on the lifting frame. When the transmission roller assembly rotates, the carrier plate can be driven to perform translational movement along the second direction. The lifting frame can extend or retract along the first direction, or the lifting frame can move along the first direction.

11. The novel composite vacuum annealing equipment according to claim 10, characterized in that: The transmission roller assembly includes multiple freely rotatable rollers, which are arranged sequentially along the second direction.

12. The novel composite vacuum annealing equipment according to claim 11, characterized in that: The rollers are driven to each other, wherein at least one roller is driven to a rotation drive mechanism, or the rollers are independent of each other, and each roller is independently driven to a rotation drive mechanism.

13. The novel composite vacuum annealing equipment according to claim 12, characterized in that: The platform also includes a rotation drive mechanism and a lifting drive mechanism. The rotation drive mechanism is connected to the roller and is used to drive the roller to rotate. The lifting drive mechanism is connected to the lifting frame and is used to drive the lifting frame to extend, retract, or move.

14. The novel composite vacuum annealing equipment according to claim 1 or 2, characterized in that: The annealing module also includes a temperature measuring mechanism, which is disposed inside the vacuum chamber and is used at least to measure the surface temperature of the sample to be annealed.

15. The novel composite vacuum annealing equipment according to claim 1, characterized in that: The infrared heat source and the vacuum cavity are configured as a first annealing module, and the resistance heat source and the vacuum cavity are configured as a second annealing module. At least one vacuum cavity of the first annealing module is directly connected to the vacuum cavity of one of the second annealing modules.

16. The novel composite vacuum annealing equipment according to claim 15, characterized in that: The infrared heat source and the vacuum cavity are configured as a first annealing module, and the resistance heat source and the vacuum cavity are configured as a second annealing module. x vacuum cavities are connected in sequence, and the first annealing module and the second annealing module are alternately arranged in sequence.

17. The novel composite vacuum annealing equipment according to claim 15, characterized in that: The annealing module includes an annealing chamber, and the vacuum chamber is disposed inside the annealing chamber. x annealing chambers are connected in sequence.

18. The novel composite vacuum annealing equipment according to claim 1, characterized in that: The infrared heat source includes an infrared lamp, a fixed housing, and a heating bracket. The infrared lamp is mounted on the fixed housing, the fixed housing is fixedly mounted on the heating bracket, and the heating bracket is fixed inside the vacuum chamber.

19. The novel composite vacuum annealing equipment according to claim 1, characterized in that: The resistance heat source includes a resistance heating plate, which is fixed inside the vacuum chamber.

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