A heating table structure for a vacuum cavity

Abstract

The utility model relates to heating platform structure technical field especially relates to a kind of heating platform structure for vacuum cavity.Its technical scheme includes vacuum cavity and with the lower cavity component of vacuum cavity moulding, the lower cavity component includes lower cavity plate and heating plate component, vacuum joint and at least one group of collar joint are fixedly installed on lower cavity plate, oil passage is equipped in the heating plate component, temperature measuring thermocouple component is fixedly installed on lower cavity component, and the temperature measuring thermocouple component real-time monitoring heating plate component's temperature.The utility model improves the temperature of reaction cavity to suitable range, makes the active particle movement speed of oxygen plasma accelerate, and the chemical reaction rate of photoresist is significantly improved, realizes the uniform distribution of cavity temperature, and promotes to ensure the plasma reaction consistency of each area of workpiece surface.

Description

Technical Field

[0001] This utility model relates to the field of heating stage structure technology, and in particular to a heating stage structure for a vacuum chamber. Background Technology

[0002] Plasma resist strippers utilize plasma technology. By applying sufficient energy to a gas, it is ionized to form a plasma state. The "active" components in the plasma, such as ions, electrons, atoms, and active groups, undergo physical or chemical reactions with the material on the object's surface, thereby achieving the purpose of surface treatment. Some types of photoresist may be difficult to completely decompose and remove at low temperatures. Plasma resist strippers without heating plates may not provide enough energy to completely remove these photoresists, resulting in residues that can affect subsequent processes. Utility Model Content

[0003] The purpose of this invention is to address the problems existing in the background technology by proposing a heating stage structure for a vacuum chamber that raises the temperature of the reaction chamber to a suitable range, thereby accelerating the movement speed of active particles in the oxygen plasma.

[0004] The technical solution of this utility model is: a heating stage structure for a vacuum cavity, comprising a vacuum cavity and a lower cavity assembly that is molded with the vacuum cavity, wherein the lower cavity assembly comprises a lower cavity plate and a heating plate assembly;

[0005] A vacuum connector and at least one set of compression fittings are fixedly installed on the lower cavity plate. The vacuum connector is connected to a vacuum pump group. The compression fittings include a circulating oil inlet connector and a circulating oil outlet connector. The heating plate assembly has an oil passage inside. The oil passage is connected to an external hot and cold circulation machine through the compression fittings to form a circulation loop.

[0006] A gap structure is provided between the lower cavity plate and the heating plate assembly, and the gap structure is maintained by a support member;

[0007] A temperature-measuring thermocouple assembly is fixedly installed on the lower cavity assembly, and the temperature-measuring thermocouple assembly monitors the temperature of the heating plate assembly in real time.

[0008] Optionally, the gap structure includes a support column and a sealing ring fixedly installed between the lower cavity plate and the heating plate assembly, with sealing rings fixedly installed on both sides of the sealing ring.

[0009] Optionally, the sealing ring is made of fluororubber.

[0010] Optionally, the heating plate assembly includes a metal heating plate and a plug mounted on the metal heating plate. The metal heating plate has a through-type oil passage with one inlet and one outlet. The plug seals the end of the oil passage with a sealing ring.

[0011] Optionally, the temperature measuring thermocouple assembly includes a thermocouple, a thermocouple clamping block, an elastomer, and a sealing ring. The thermocouple passes through the elastomer and is fixed by the thermocouple clamping block to form a first seal. The sealing ring is located between the temperature measuring thermocouple assembly and the lower cavity plate and deforms under pressure to form a second seal.

[0012] Optionally, the vacuum chamber is provided with an observation window for monitoring the internal state of the chamber.

[0013] Optionally, the lower cavity plate is connected to the vacuum cavity mold, and a sealing ring is provided on the contact surface.

[0014] In summary, this application includes at least one of the following beneficial technical effects:

[0015] Compared with plasma degumming machines without heating tables, this invention increases the temperature during the process, which accelerates the chemical reaction rate between active particles in the plasma and the material surface, thereby improving the degumming effect. The heating table can make the cavity temperature uniformly distributed, ensuring the consistency of plasma reaction in different areas of the workpiece surface.

[0016] Further increasing the temperature of the reaction chamber to a suitable range accelerates the movement speed of the active particles in the oxygen plasma, significantly improving the chemical reaction rate with the photoresist, achieving a uniform temperature distribution in the chamber, and ensuring the consistency of plasma reaction in all areas of the workpiece surface, thus avoiding photoresist residue caused by excessively low local temperatures. Attached Figure Description

[0017] Figure 1 This is a structural diagram of the heating platform.

[0018] Figure 2 Schematic diagram of the lower cavity assembly Figure 1 ;

[0019] Figure 3 Schematic diagram of the lower cavity assembly Figure 2 ;

[0020] Figure 4 Schematic diagram of the lower cavity assembly Figure 3 ;

[0021] Figure 5 This is a cross-sectional schematic diagram of the lower cavity assembly;

[0022] Figure 6 Schematic diagram of the metal heating plate Figure 1 ;

[0023] Figure 7 Schematic diagram of the metal heating plate Figure 2 ;

[0024] Figure 8This is a schematic diagram of the structure of a temperature-measuring thermocouple assembly.

[0025] Reference numerals: 1. Vacuum chamber; 11. Observation window; 2. Lower chamber assembly; 21. Lower chamber plate; 211. Metal heating plate; 212. Plug; 213. Oil inlet; 214. Oil outlet; 22. Heating plate assembly; 23. Vacuum connector; 24. Temperature measuring thermocouple assembly; 241. Thermocouple; 242. Thermocouple clamp; 243. Elastomer; 244. Sealing ring; 25. Circulating oil inlet connector; 26. Circulating oil outlet connector; 27. Support column; 28. Sealing ring; 29. ​​Sealing ring. Detailed Implementation

[0026] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0027] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0028] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] like Figures 1 to 4 As shown, the present invention proposes a heating stage structure for a vacuum cavity, including a vacuum cavity 1 and a lower cavity assembly 2 that is molded with the vacuum cavity 1. The lower cavity plate 21 is connected to the vacuum cavity 1 for mold molding, and a sealed space is formed inside the vacuum cavity 1. A sealing ring is provided on the contact surface to ensure the airtightness of the mold mold. The vacuum cavity 1 is provided with an observation window 11 to observe plasma glow discharge. The lower cavity assembly 2 includes a lower cavity plate 21 and a heating plate assembly 22.

[0032] In one embodiment, the heating plate assembly 22 includes a metal heating plate 211 and a plug 212 mounted on the metal heating plate 211. The metal heating plate 211 has a through-type oil passage with one inlet and one outlet. The plug 212 seals the end of the oil passage with a sealing ring. The metal heating plate 211 forms an oil passage with one inlet and one outlet and has an oil inlet 213 and an oil outlet 214.

[0033] As one implementation method, such as Figures 3 to 7 As shown, the heating stage structure of this embodiment also includes a vacuum connector 23 and at least one set of compression fittings fixedly installed on the lower cavity plate 21. The vacuum connector 23 is connected to a vacuum pump group for extracting gas from the vacuum cavity 1 to create a vacuum environment, which is conducive to the generation of plasma and the reaction. The compression fitting includes a circulating oil inlet connector 25 and a circulating oil outlet connector 26. The heating plate assembly 22 is provided with an oil passage. The oil passage is connected to an external hot and cold circulation machine through the compression fitting to form a circulation loop, so that the hot oil circulates inside the metal heating plate 211. The oil inlet 213 is connected to the circulating oil inlet connector 25, and the oil outlet 214 is connected to the circulating oil outlet connector 26.

[0034] Furthermore, a gap structure is provided between the lower cavity plate 21 and the heating plate assembly 22 to facilitate the vacuum pump to extract gas from the vacuum chamber 1. The gap structure includes a support column 27 and a sealing ring 28 fixedly installed between the lower cavity plate 21 and the heating plate assembly 22. Sealing rings 29 are fixedly installed on both sides of the sealing ring 28. The sealing rings 29 are made of fluororubber material, so that the circulating oil inlet connector 25 and the circulating oil outlet connector 26 form a sealed oil passage with the heating plate assembly 22.

[0035] As one implementation method, such as Figure 8 As shown, the heating platform structure of this embodiment also includes a temperature-measuring thermocouple assembly 24 fixedly installed on the lower cavity assembly 2. The temperature-measuring thermocouple assembly 24 monitors the temperature of the heating plate assembly 22 in real time. The temperature-measuring thermocouple assembly 24 includes a thermocouple 241, a thermocouple block 242, an elastomer 243, and a sealing ring 244. The thermocouple 241 passes through the elastomer 243 and is fixed by the thermocouple block 242 to form a first seal. The sealing ring 244 is located between the temperature-measuring thermocouple assembly 24 and the lower cavity plate 21 and deforms under pressure to form a second seal.

[0036] In this embodiment, during the heating stage: the host computer sets the target temperature, the electric heating tube of the hot and cold circulation machine heats the thermally conductive silicone oil to the set value, and the oil pump of the hot and cold circulation machine presses the hot oil into the serpentine pipe inside the metal heating plate 211. The surface of the metal heating plate 211 is heated by the metal heat conduction, and the metal heating plate 211 transfers heat to the area carrying the photoresist through heat radiation and heat conduction, thereby achieving the temperature environment required for the decomposition of photoresist.

[0037] Cooling stage: When thermocouple 241 detects that the temperature of metal heating plate 211 exceeds the threshold, the hot and cold circulation machine starts the cooling system. Hot oil flows into the heat exchanger through the pipeline and exchanges heat with the cooling water. The oil temperature drops to the set range, and the cooled oil flows back to metal heating plate 211 to avoid the temperature from getting too high.

[0038] Temperature equilibrium stage: The oil pump of the hot and cold circulation machine maintains a constant flow rate to ensure that the flow rate of heat transfer oil in the oil circuit is uniform and to avoid local overheating of the metal heating plate 211. The host computer PID algorithm automatically adjusts the heating power and cooling water flow rate according to the deviation between the real-time temperature and the set value to form a closed-loop control.

[0039] The above specific embodiments are merely several optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A heating table structure for a vacuum chamber, characterized by ,include: Vacuum cavity (1) and lower cavity assembly (2) molded together with vacuum cavity (1), the lower cavity assembly (2) including lower cavity plate (21) and heating plate assembly (22); A vacuum connector (23) and at least one set of compression fittings are fixedly installed on the lower cavity plate (21). The vacuum connector (23) is connected to a vacuum pump group. The compression fittings include a circulating oil inlet connector (25) and a circulating oil outlet connector (26). The heating plate assembly (22) has an oil passage inside. The oil passage is connected to an external hot and cold circulation machine through the compression fittings to form a circulation loop. A gap structure is provided between the lower cavity plate (21) and the heating plate assembly (22), and the gap structure is maintained by a support member; A temperature measuring thermocouple assembly (24) is fixedly installed on the lower cavity assembly (2), and the temperature measuring thermocouple assembly (24) monitors the temperature of the heating plate assembly (22) in real time.

2. The heating table structure for a vacuum chamber according to claim 1, wherein The gap structure includes a support column (27) and a sealing ring (28) fixedly installed between the lower cavity plate (21) and the heating plate assembly (22), and sealing rings (29) are fixedly installed on both sides of the sealing ring (28).

3. The heating table structure for a vacuum chamber according to claim 2, wherein The sealing ring (29) is made of fluororubber.

4. The heating table structure for a vacuum chamber according to claim 3, wherein The heating plate assembly (22) includes a metal heating plate (211) and a plug (212) installed on the metal heating plate (211). The metal heating plate (211) has a through-type oil passage with one inlet and one outlet. The plug (212) seals the end of the oil passage with a sealing ring.

5. The heater table structure for a vacuum chamber according to claim 4, wherein The temperature measuring thermocouple assembly (24) includes a thermocouple (241), a thermocouple clamp (242), an elastomer (243), and a sealing ring (244). The thermocouple (241) passes through the elastomer (243) and is fixed by the thermocouple clamp (242) to form a first seal. The sealing ring (244) is located between the temperature measuring thermocouple assembly (24) and the lower cavity plate (21) and is deformed under pressure to form a second seal.

6. The heating table structure for a vacuum chamber according to claim 5, wherein The vacuum chamber (1) is provided with an observation window (11) for monitoring the internal state of the chamber.

7. The heater table structure for a vacuum chamber according to claim 6, wherein The lower cavity plate (21) is molded and connected to the vacuum cavity (1), and a sealing ring is provided on the contact surface.

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