Evaporation apparatus with liquid leakage detection processing function

Abstract

This utility model relates to the field of vacuum evaporation technology, and more particularly to an evaporation equipment with leakage detection and handling functions, including an evaporation shell, a cooling unit, a leakage detection unit, an auxiliary detection unit, and an execution unit. The evaporation shell has an evaporation chamber, and the cooling sections of multiple cooling pipes of the cooling unit are located within the evaporation chamber, containing coolant. The detection end of the leakage detection unit is located within the evaporation chamber, and the detection unit is used to detect whether there is a coolant leak within the evaporation chamber. The auxiliary detection unit can detect the temperature and / or flow rate of the return section of multiple cooling pipes, and the execution unit can control the on / off state of the inlet section of multiple cooling pipes. Once the leakage detection unit detects a leak, the auxiliary detection unit can determine which cooling pipe is leaking. After identifying the leaking pipe, the execution unit can then block the leaking cooling pipe to prevent further leakage, thereby reducing the damage to components, minimizing downtime, and ensuring production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, and in particular to an evaporation equipment with leakage detection and treatment function. Background Technology

[0002] Vacuum evaporation coating is the main production method for composite current collector materials. During the coating process, the evaporation source structure needs to be continuously cooled as the evaporation proceeds. The equipment cavity contains numerous water pipes. During vacuum coating, the temperature at the evaporation source reaches over 2000 degrees Celsius, resulting in significant heat accumulation and radiation. Water pipes exposed to this heat radiation are prone to rupture and leakage.

[0003] After the equipment undergoes vacuum coating, the observation window only shows the quality of the coating surface and cannot directly indicate the operating status of various parts of the equipment. When water leaks in the pipelines inside the equipment chamber, the operator will only notice it when the leaking water stains are directly visible in the observation window. By this time, a large amount of water has already accumulated inside the equipment, causing adverse effects on internal components, resulting in prolonged downtime and production disruptions. Utility Model Content

[0004] The purpose of this invention is to provide a vapor deposition equipment with leakage detection and treatment functions, which helps to reduce the damage to components caused by leakage, reduce downtime, and ensure production efficiency.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A vapor deposition apparatus with leakage detection and handling functions is provided, comprising:

[0007] A vapor deposition housing, wherein the vapor deposition housing has a vapor deposition chamber;

[0008] A cooling unit, wherein the cooling sections of multiple cooling pipes of the cooling unit are located within the vapor deposition chamber, and the cooling pipes contain coolant;

[0009] A leakage detection unit is provided, wherein the detection end of the leakage detection unit is disposed inside the vapor deposition chamber, and the detection unit is used to detect whether there is a coolant leak inside the vapor deposition chamber;

[0010] An auxiliary detection unit is provided, which is capable of detecting the temperature and / or flow rate of the return section of multiple cooling pipes;

[0011] An execution unit is provided, which is capable of controlling the on / off state of the liquid inlet sections of the multiple cooling pipes.

[0012] Optionally, the leakage detection unit includes a leakage detection sensor, and the detection end of the leakage detection sensor is disposed on the bottom plate of the vapor deposition chamber.

[0013] Optionally, multiple sets of leakage detection sensors are provided, and the detection ends of the multiple sets of leakage detection sensors are evenly spaced on the bottom plate of the vapor deposition chamber.

[0014] Optionally, the auxiliary detection unit includes a temperature sensor, which is disposed outside the vapor deposition chamber and is used to detect the temperature of the return section of the cooling pipe.

[0015] And / or, the auxiliary detection unit includes a flow sensor, which is disposed outside the vapor deposition chamber and is used to detect the flow rate of the return section of the cooling pipeline.

[0016] Optionally, the temperature sensor and the flow sensor are integrated into a single flow-temperature sensor.

[0017] Optionally, the execution unit includes a pneumatic control valve, which is disposed on the liquid inlet section of the cooling pipeline located outside the vapor deposition chamber.

[0018] Optionally, the execution unit further includes a solenoid valve for controlling the air path of the pneumatic control valve.

[0019] Optionally, the execution unit further includes an alarm component for issuing an alarm signal when coolant leaks.

[0020] Optionally, the alarm component includes a light alarm component and / or a sound alarm component.

[0021] Optionally, it also includes an intelligent control unit, which includes a host computer and a programmable logic controller (PLC). The leakage detection unit, the auxiliary detection unit, and the PLC are all signal-connected to the host computer, and the execution unit is signal-connected to the PLC.

[0022] The beneficial effects of this utility model are:

[0023] This invention provides a vapor deposition equipment with leakage detection and handling functions, including a vapor deposition shell, a cooling unit, a leakage detection unit, an auxiliary detection unit, and an execution unit. The vapor deposition shell contains a vapor deposition chamber, and the cooling sections of multiple cooling pipes in the cooling unit are located within the vapor deposition chamber, containing coolant. The detection end of the leakage detection unit is located within the vapor deposition chamber, and the detection unit is used to detect whether there is a coolant leak within the vapor deposition chamber. The auxiliary detection unit can detect the temperature and / or flow rate of the return sections of multiple cooling pipes, and the execution unit can control the opening and closing of the inlet sections of multiple cooling pipes. Once the leakage detection unit detects a leak, the auxiliary detection unit can determine which specific cooling pipe is leaking. After identifying the leaking pipe, the execution unit can block the inlet section of the leaking cooling pipe, thus preventing further leakage, reducing damage to components caused by leakage, minimizing downtime, and ensuring production efficiency. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the vapor deposition equipment and supporting facilities with leakage detection and treatment functions provided in this embodiment of the utility model;

[0025] Figure 2 This is a schematic diagram of the control principle of the vapor deposition equipment with leakage detection and treatment function provided in this embodiment of the utility model;

[0026] Figure 3 This is a schematic diagram of a leakage detection and treatment method for a vapor deposition equipment with leakage detection and treatment function provided in this embodiment of the present invention.

[0027] In the picture:

[0028] 1. Evaporation shell; 2. Cooling piping; 21. Liquid inlet section; 22. Cooling section; 23. Liquid return section;

[0029] 3. Leakage detection sensor; 4. Integrated flow and temperature sensor; 5. Pneumatic control valve; 6. Solenoid valve island; 7. Alarm component; 8. Host computer; 9. Programmable logic controller; 10. Evaporation source;

[0030] 100. Factory mold temperature controller; 200. Main inlet valve; 300. Main return valve; 400. Manual control valve. Detailed Implementation

[0031] The technical solution of this utility model will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the drawings, not all of them.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] Vacuum evaporation coating is the main production method for composite current collector materials. During the coating process, the evaporation source structure needs to be continuously cooled as the evaporation proceeds. The equipment cavity contains numerous water pipes. During the vacuum coating process, the temperature at the evaporation source reaches over 2000 degrees Celsius, resulting in significant heat accumulation and radiation. Water pipes exposed to this heat radiation are prone to rupture and leakage.

[0035] After the equipment undergoes vacuum coating, the observation window only shows the quality of the coating surface and cannot directly indicate the operating status of various parts of the equipment. When water leaks in the pipelines inside the equipment chamber, the operator will only notice it when the leaking water stains are directly visible in the observation window. By this time, a large amount of water has already accumulated inside the equipment, causing adverse effects on internal components, resulting in prolonged downtime and production disruptions.

[0036] Therefore, this embodiment provides a vapor deposition equipment with leakage detection and treatment function to solve the above problems. The vapor deposition equipment with leakage detection and treatment function helps to reduce the degree of damage to components caused by leakage, reduce downtime, and ensure production efficiency.

[0037] like Figures 1-3As shown, the vapor deposition equipment with leakage detection and handling function in this embodiment includes a vapor deposition housing 1, a cooling unit, a leakage detection unit, an auxiliary detection unit, and an execution unit. The vapor deposition housing 1 has a vapor deposition chamber, and the cooling sections 22 of multiple cooling pipes 2 of the cooling unit are located within the vapor deposition chamber, containing coolant. The detection end of the leakage detection unit is located within the vapor deposition chamber, and the detection unit is used to detect whether there is a coolant leak within the vapor deposition chamber. The auxiliary detection unit can detect the temperature and / or flow rate of the return section 23 of the multiple cooling pipes 2, and the execution unit can control the opening and closing of the inlet section 21 of the multiple cooling pipes 2. Once the leakage detection unit detects a leak, the auxiliary detection unit can determine which specific cooling pipe 2 is leaking. After identifying the leaking pipe, the execution unit can block the inlet section 21 of the leaking cooling pipe 2, thus preventing further leakage, reducing the damage to components caused by leakage, minimizing downtime, and ensuring production efficiency.

[0038] Optionally, each cooling pipe 2 includes an inlet section 21, a cooling section 22, and a return section 23. The coolant discharged from the mold temperature controller 100 enters the inlet section 21 of multiple cooling pipes 2, absorbs heat as it flows through the cooling section 22, and then returns to the mold temperature controller 100 via the return section 23 for cooling, thus achieving coolant recycling. Optionally, the inlet section 21 and the return section 23 of multiple cooling pipes 2 are located outside the vapor deposition chamber, while only the cooling section 22 is located inside the vapor deposition chamber. It is the cooling section 22 that may leak.

[0039] Optionally, the leakage detection unit includes a leakage detection sensor 3, the detection end of which is disposed on the bottom plate of the vapor deposition chamber. Optionally, in this embodiment, an infrared reflective optical sensor can be used as the leakage detection sensor 3, and a ceramic housing can be used to improve temperature resistance. The infrared reflective optical sensor utilizes the principle of infrared reflection to detect leaks of minute amounts of liquid, exhibiting high sensitivity and short response time, thereby further improving the sensitivity and timeliness of leakage detection.

[0040] Optionally, multiple sets of leakage detection sensors 3 are provided, and the detection ends of the multiple sets of leakage detection sensors 3 are evenly spaced on the bottom plate of the vapor deposition chamber to form a leakage detection zone, so as to ensure that leakage can be detected in time at any location of the cooling pipe 2.

[0041] Optionally, the auxiliary detection unit includes a temperature sensor, which is located outside the vapor deposition chamber. The temperature sensor is used to detect the temperature of the return section 23 of the cooling pipe 2. When leakage occurs in the cooling section 22 of the cooling pipe 2, the flow rate of the coolant decreases. When the coolant absorbs the corresponding heat, its temperature will be higher. Therefore, when the temperature of the return section 23 rises abnormally, it indicates that there may be a leakage in the cooling pipe 2.

[0042] Optionally, the auxiliary detection unit includes a flow sensor, which is located outside the vapor deposition chamber and is used to detect the flow rate of the return section 23 of the cooling pipe 2. When leakage occurs in the cooling section 22 of the cooling pipe 2, the flow rate of the coolant decreases. Therefore, when the flow rate of the return section 23 decreases abnormally, it indicates that there may be a leakage in the cooling pipe 2.

[0043] Optionally, in this embodiment, the temperature sensor and the flow sensor are integrated into a single flow-temperature sensor 4 to simplify the system composition. Optionally, multiple single flow-temperature sensors 4 are provided, with at least one single flow-temperature sensor 4 configured on each cooling pipe 2, to ensure that the temperature and flow rate of the return section 23 of multiple cooling pipes 2 can be obtained in a timely manner.

[0044] Optionally, the execution unit includes a pneumatic control valve 5, which is installed on the liquid inlet section of the cooling pipe 2 located outside the vapor deposition chamber. The pneumatic control valve 5 can control the opening and closing of the liquid inlet section 21 of the cooling pipe 2. When a leakage occurs in a cooling section 22 of a certain cooling pipe 2, the pneumatic control valve 5 blocks the liquid inlet section 21 of that cooling pipe 2, thereby preventing further leakage and avoiding excessive leakage in the vapor deposition chamber.

[0045] Optionally, the execution unit further includes a solenoid valve, which is used to control the air path of the pneumatic control valve 5. Optionally, in this embodiment, multiple pneumatic control valves 5 and solenoid valves are provided to correspond one-to-one with multiple cooling pipes 2. Optionally, in this embodiment, multiple solenoid valves are integrated into a solenoid valve island 6.

[0046] Optionally, the execution unit further includes an alarm component 7, which is used to issue an alarm signal in the event of coolant leakage. Optionally, the alarm component 7 includes a light alarm component and / or an audible alarm component. Optionally, the light alarm component includes a tri-color light, which provides a warning through different colored lights. Optionally, the audible alarm component includes a buzzer, which sounds to warn of a leak. Optionally, alarm text can also be displayed on the control panel to immediately attract the attention of personnel.

[0047] Optionally, the vapor deposition equipment with leakage detection and handling function also includes an intelligent control unit, which includes a host computer 8 and a programmable logic controller 9. The leakage detection unit, the auxiliary detection unit, and the programmable logic controller 9 are all connected to the host computer 8 by signal, and the execution unit is connected to the programmable logic controller 9 by signal.

[0048] Optionally, the leakage detection sensor 3 and multiple integrated flow and temperature sensors 4 are all connected to the host computer 8 via signal connection. The host computer 8 can then obtain the leakage signal transmitted by the leakage detection sensor 3 and the temperature and flow information of multiple cooling pipes 2 transmitted by the multiple integrated flow and temperature sensors 4 at any time.

[0049] Optionally, multiple solenoid valves and alarm components 7 are connected to the programmable logic controller 9 via signal connections.

[0050] Optionally, the evaporation source 10 is located inside the evaporation chamber. The evaporation source 10 releases a large amount of heat, which may cause leakage in the cooling pipe 2.

[0051] Optionally, a manual control valve 400 is provided at the end of the return section 23 of each cooling pipe 2, a main inlet valve 200 is provided at the inlet end of the main coolant pipe, and a main return valve 300 is provided at the return end of the main coolant pipe.

[0052] like Figure 3 As shown, the leakage detection and handling method of the vapor deposition equipment with leakage detection and handling function includes the following steps: First, the leakage detection sensor 3 detects whether there is a leakage. Once a leakage occurs, it sends a leakage signal to the host computer 8. The host computer 8 receives the leakage signal and acquires the detection results of multiple integrated flow and temperature sensors 4. The multiple integrated flow and temperature sensors 4 detect the temperature and flow of multiple cooling pipes 2 respectively and send the results to the host computer 8. The host computer 8 determines which cooling pipe 2 has abnormal temperature and flow results, and the abnormality matches the leakage phenomenon, and transmits this information to the programmable logic controller 9. The programmable logic controller 9 controls the alarm component 7 to sound an alarm so that the staff can be aware of the leakage immediately. At the same time, the programmable logic controller 9 controls the solenoid valve corresponding to the leaking cooling pipe 2 to work. The solenoid valve controls the air path of the corresponding pneumatic control valve 5 so that the pneumatic control valve 5 blocks the leaking cooling pipe 2, which can immediately stop the leakage, prevent the accumulation of leakage in the vapor deposition chamber, reduce the damage to components caused by leakage, reduce downtime, and ensure production efficiency.

[0053] The normal coating process of the vapor deposition equipment involves several steps: First, the equipment is inspected to ensure there are no abnormalities. Then, the vapor deposition chamber 1 is shut down and evacuated to create a vacuum. Next, all cooling pipes 2 are opened to prepare for cooling the vapor deposition chamber. When the vacuum level in the vapor deposition chamber reaches the required level, coating begins, and the evaporation source 10 starts heating. Heat accumulation and radiation continue inside the vapor deposition chamber. Operators continuously monitor the flow rate and temperature of the multiple cooling pipes 2. Coating continues as long as the flow rate and temperature of the multiple cooling pipes 2 remain normal. After coating is completed, the equipment is devastated with a single button press. After devastating, the chamber is opened for PM treatment.

[0054] Based on the actual liquid path conditions within the vapor deposition chamber and the impact of leakage, the severity of leakage can be categorized into several levels. For different levels of leakage, audible, visual, and panel alarms can be set to represent different phenomena, and the specific information of the leaking cooling pipe 2 is displayed on the panel for easy understanding by staff.

[0055] Cooling piping 2 includes electrode liquid cooling piping, motor liquid cooling piping, shutter liquid cooling piping, dust liquid cooling piping, mask liquid cooling piping, shield coolant piping, and cavity cold replenishment piping. Level 1 leakage is the most serious, specifically manifested as leakage in the cavity cold replenishment piping, electrode liquid cooling piping, motor liquid cooling piping, mask liquid cooling piping, shield liquid cooling piping, main drum liquid cooling piping, ion source power supply liquid cooling piping, and ion source coolant piping. Level 2 leakage is a relatively serious situation, specifically manifested as leakage in the motor protective cover liquid cooling piping, bottom box liquid cooling piping, and evaporator source liquid cooling plate liquid cooling piping. Level 3 leakage is the least serious situation, specifically manifested as leakage in the guide tank liquid cooling piping.

[0056] The coating control process in case of leakage includes:

[0057] S100: Preparations before coating are complete;

[0058] S200: The equipment is closed, and a vacuum is evacuated;

[0059] S300: Evaporation source 10 is heated, and coating begins;

[0060] S400: No abnormalities occurred during the coating process; continue with S500 and subsequent actions. Leakage occurred during the coating process; proceed with S410 and subsequent actions.

[0061] S410: Leakage detection sensor 3 detects leakage in the vapor deposition chamber and transmits a signal.

[0062] S420: The host computer 8 receives the leakage signal transmitted by the leakage detection sensor 3;

[0063] S430: The host computer 8 identifies the temperature and flow rate of the return section 23 of each cooling pipe 2 and confirms the cooling pipe 2 that is leaking.

[0064] S440: The host computer 8 sends a control signal to the programmable logic controller 9;

[0065] S450: Programmable logic controller 9 controls the solenoid valve of the leaking cooling pipe 2;

[0066] S460: The solenoid valve performs an action, which controls the corresponding pneumatic control valve 5 to perform an action. The pneumatic control valve 5 blocks the leaking cooling pipe 2, and stops the leakage in the vapor deposition chamber.

[0067] S470: Directly executes the S600 coating completion action;

[0068] S500: Continuous coating.

[0069] S600: Coating complete.

[0070] S700: Cavity cleaning.

[0071] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A vapor deposition equipment with leakage detection and handling functions, characterized in that, include: A vapor deposition shell (1) having a vapor deposition chamber inside; The cooling unit has a cooling section (22) of multiple cooling pipes (2) located in the vapor deposition chamber, and the cooling pipes (2) contain coolant. A leakage detection unit is provided, wherein the detection end of the leakage detection unit is disposed inside the vapor deposition chamber, and the detection unit is used to detect whether there is a coolant leak inside the vapor deposition chamber; An auxiliary detection unit is provided, which is capable of detecting the temperature and / or flow rate of the return section (23) of multiple cooling pipes (2); An execution unit is capable of controlling the on / off state of the liquid inlet sections (21) of the multiple cooling pipes (2).

2. The vapor deposition equipment with leakage detection and treatment function according to claim 1, characterized in that, The leakage detection unit includes a leakage detection sensor (3), and the detection end of the leakage detection sensor (3) is disposed on the bottom plate of the vapor deposition chamber.

3. The vapor deposition equipment with leakage detection and treatment function according to claim 2, characterized in that, The leakage detection sensor (3) is provided in multiple sets, and the detection ends of the multiple sets of leakage detection sensors (3) are evenly spaced on the bottom plate of the vapor deposition chamber.

4. The vapor deposition equipment with leakage detection and handling function according to claim 1, characterized in that, The auxiliary detection unit includes a temperature sensor, which is located outside the vapor deposition chamber and is used to detect the temperature of the return section (23) of the cooling pipe (2). And / or, the auxiliary detection unit includes a flow sensor, which is disposed outside the vapor deposition chamber and is used to detect the flow rate of the return section (23) of the cooling pipe (2).

5. The vapor deposition equipment with leakage detection and treatment function according to claim 4, characterized in that, The temperature sensor and the flow sensor are integrated into a single flow-temperature sensor (4).

6. The vapor deposition equipment with leakage detection and treatment function according to any one of claims 1-5, characterized in that, The execution unit includes a pneumatic control valve (5), which is located on the liquid inlet section of the cooling pipeline (2) outside the vapor deposition chamber.

7. The vapor deposition equipment with leakage detection and treatment function according to claim 6, characterized in that, The execution unit also includes a solenoid valve, which is used to control the air path of the pneumatic control valve (5).

8. The vapor deposition equipment with leakage detection and treatment function according to any one of claims 1-5, characterized in that, The execution unit also includes an alarm component (7) for issuing an alarm signal when coolant leaks.

9. The vapor deposition equipment with leakage detection and treatment function according to claim 8, characterized in that, The alarm component (7) includes a light alarm component and / or a sound alarm component.

10. The vapor deposition equipment with leakage detection and treatment function according to any one of claims 1-5, characterized in that, It also includes an intelligent control unit, which includes a host computer (8) and a programmable logic controller (9). The leakage detection unit, the auxiliary detection unit, and the programmable logic controller (9) are all connected to the host computer (8) by signal, and the execution unit is connected to the programmable logic controller (9) by signal.

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