A thermal field protection piece, a thermal field insulation structure and a single crystal furnace

Abstract

This utility model provides a thermal field protection component, a thermal field insulation structure, and a single crystal furnace, comprising: a first solid felt layer and a first reinforcing layer; the first reinforcing layer is disposed on one side of the first solid felt layer, the density of the first reinforcing layer is greater than the density of the first solid felt layer, and the thermal conductivity of the first reinforcing layer is greater than the thermal conductivity of the first solid felt layer. In this utility model, the thermal field protection component has strong insulation performance, high hardness and strength, and strong corrosion resistance. Thus, when the thermal field protection component is applied to the bottom of the thermal field, it can reduce the probability of deformation and corrosion of the thermal field protection component, improve the stability and reliability of the crystal pulling process, and extend the service life of the thermal field protection component.

Description

Technical Field

[0001] This utility model relates to the field of crystal pulling technology, and in particular to a thermal protection component, a thermal insulation structure, and a single crystal furnace. Background Technology

[0002] Currently, in the hot zone of a Czochralski single crystal furnace, the insulation structure at the bottom of the hot zone is composed of stacked protective plates, soft felt, and solid felt. However, the protective plates are prone to deformation during use, causing bulging in the middle, which can lead to sparking of the graphite electrodes of the heater and failure to pull crystals during the crystal pulling process. Soft felt, due to its material properties, is prone to corrosion and has a short service life. Utility Model Content

[0003] In view of the above problems, the present invention provides a thermal field protection component, a thermal field insulation structure, and a single crystal furnace to overcome or at least partially solve the above problems.

[0004] To address the aforementioned problems, this utility model discloses a thermal field protection component, comprising: a first solid felt layer and a first reinforcing layer;

[0005] The first reinforcing layer is disposed on one side of the first solid felt layer, the density of the first reinforcing layer is greater than the density of the first solid felt layer, and the thermal conductivity of the first reinforcing layer is greater than the thermal conductivity of the first solid felt layer.

[0006] The embodiments of this utility model have the following advantages:

[0007] In this invention, the thermal field protection component includes a first solid felt layer and a first reinforcing layer disposed on the first solid felt layer. Since the density of the first reinforcing layer is greater than that of the first solid felt layer, the thermal conductivity of the first reinforcing layer is greater than that of the first solid felt layer. Thus, under the action of the first solid felt layer, the thermal insulation characteristics of the thermal field protection component can be effectively guaranteed. Under the action of the first reinforcing layer, the strength and hardness of the thermal field protection component can be effectively guaranteed. Furthermore, since the first reinforcing layer is disposed on one side of the first solid felt layer, the corrosion resistance of one side surface of the thermal field protection component can be improved. Thus, when the thermal field protection component is applied to the bottom of the thermal field, the probability of deformation and corrosion of the thermal field protection component can be reduced, the stability and reliability of the crystal pulling process can be improved, and the service life of the thermal field protection component can be extended. Attached Figure Description

[0008] Figure 1 This is a structural schematic diagram of a thermal field protection component according to this utility model;

[0009] Figure 2 This is a structural schematic diagram of a thermal insulation component according to this utility model;

[0010] Figure 3 This is a structural schematic diagram of a ring-shaped heat insulation component according to this utility model;

[0011] Figure 4 This is a schematic diagram of a thermal insulation structure according to the present invention;

[0012] Figure 5 This is a top view of a thermal insulation structure according to this utility model.

[0013] Explanation of reference numerals in the attached figures:

[0014] 10. Thermal protection component; 11. First reinforcing layer; 111. First clearance hole; 112. First through hole; 12. First felt layer; 121. Second clearance hole; 122. Second through hole; 123. First limiting part; 20. Thermal insulation component; 21. Second reinforcing layer; 22. Second felt layer; 221. Second limiting part; 30. Annular insulation component; 31. Insulation ring; 311. First ring body; 312. Second ring body; 32. Reinforcing ring; 33. Reinforcing ring. Detailed Implementation

[0015] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0016] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0017] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] One of the core concepts of this utility model embodiment lies in disclosing a thermal field protection component 10, such as... Figure 1 As shown, the thermal field protection component 10 includes: a first solid felt layer 12 and a first reinforcing layer 11; the first reinforcing layer 11 is disposed on one side of the first solid felt layer 12, the density of the first reinforcing layer 11 is greater than the density of the first solid felt layer 12, and the thermal conductivity of the first reinforcing layer 11 is greater than the thermal conductivity of the first solid felt layer 12.

[0020] In this invention, the thermal protection component 10 includes a first solid felt layer 12 and a first reinforcing layer 11 disposed on the first solid felt layer 12. Since the density of the first reinforcing layer 11 is greater than that of the first solid felt layer 12, the thermal conductivity of the first reinforcing layer 11 is also greater than that of the first solid felt layer 12. In this embodiment, the porosity of the first reinforcing layer 11 is low. Thus, under the action of the first solid felt layer 12, the thermal insulation characteristics of the thermal protection component 10 can be effectively guaranteed. Under the action of the first reinforcing layer 11, the strength and hardness of the thermal protection component 10 can also be effectively guaranteed. Furthermore, since the first reinforcing layer 11 is disposed on one side of the first solid felt layer 12, the corrosion resistance of one side surface of the thermal protection component 10 can be improved. Therefore, when the thermal protection component 10 is applied to the bottom of the thermal field, the probability of deformation and corrosion of the thermal protection component 10 can be reduced, improving the stability and reliability of the crystal pulling process and extending the service life of the thermal protection component 10.

[0021] The thermal protection component 10 described in this embodiment can be applied in a single crystal furnace. The furnace includes a heater, a quartz crucible, and crucible sides. The quartz crucible can be placed inside the crucible sides, which provide support. The heater can be fitted outside the crucible sides to radiate heat to the quartz crucible, thus achieving crystal pulling. The thermal protection component 10 can be positioned below the bottom of the crucible sides to prevent heat loss and ensure a suitable thermal environment during crystal pulling.

[0022] In this embodiment of the invention, the thermal protection component 10 includes a first solid felt layer 12 and a first reinforcing layer 11 disposed on one side of the first solid felt layer 12. The first solid felt layer 12 can be made of solid felt and has good thermal insulation properties. The first reinforcing layer 11 has good strength and hardness. The combination of the first reinforcing layer 11 and the first solid felt layer 12 can enhance the strength and hardness of the thermal protection component 10. Since the solid felt has a certain structural strength, the thickness of the first reinforcing layer 11 can be set to be relatively thin. In this way, while ensuring the strength and hardness of the thermal protection component 10, the first reinforcing layer 11 can be avoided from being too heavy, thereby reducing the probability of deformation of the thermal protection component 10. Moreover, the amount used can be reduced to achieve the purpose of reducing costs.

[0023] Specifically, the density of the first reinforcing layer 11 is greater than that of the first solid felt layer 12, and the thermal conductivity of the first reinforcing layer 11 is greater than that of the first solid felt layer 12, which makes the first reinforcing layer 11 more resistant to corrosion. Since the first reinforcing layer 11 is disposed on one side of the first solid felt layer 12, the corrosion resistance of one side surface of the thermal field protection component 10 is stronger.

[0024] In this embodiment of the invention, the first reinforcing layer 11 and the first solid felt layer 12 are combined, enabling the thermal protection component 10 to possess good heat insulation, high strength and hardness, and strong corrosion resistance. Thus, when the thermal protection component 10 is installed in the single crystal furnace, the first reinforcing layer 11 can be located between the crucible side and the first solid felt layer 12, allowing the thermal protection component 10 to block heat loss. Furthermore, the side closer to the crucible side has stronger corrosion resistance, reducing the probability of the thermal protection component 10 being corroded in a high-temperature environment. Moreover, the high strength and hardness of the first reinforcing layer 11 can also prevent damage to the thermal protection component 10 caused by bumps, friction, or impacts during installation.

[0025] Specifically, the first reinforcing layer 11 can be disposed on one side of the first solid felt layer 12 by adhesive bonding or other connection processes. In this embodiment of the present invention, the first reinforcing layer 11 and the first solid felt layer 12 are disposed in one component, which can reduce repetitive actions during the disassembly and assembly process when the thermal protection component 10 is installed in the single crystal furnace, thereby reducing the working time.

[0026] Specifically, the first reinforcing layer 11 and the first solid felt layer 12 can be bonded together by applying adhesive. The amount of adhesive can be relatively small, which can increase the porosity of the first solid felt layer 12, that is, more air fills the gaps between the fibers of the first solid felt layer 12; it can also reduce the thermal bridging effect, that is, the continuous heat conduction path (thermal bridge) formed by the colloid is reduced, which hinders the heat from being conducted to the outside through the first solid felt layer 12.

[0027] In some optional embodiments, the first reinforcing layer 11 is made of carbon-carbon composite material, the density of the first reinforcing layer 11 is in the range of 1.3 g / cm3 - 1.5 g / cm3, and the thermal conductivity of the first reinforcing layer 11 is greater than or equal to 25 W / mK. This can effectively ensure the strength and hardness of the first reinforcing layer 11, thereby reducing the probability of deformation of the thermal protection component 10 and reducing the corrosion resistance of the thermal protection component 10, so as to ensure the reliability and stability of the crystal pulling process.

[0028] Specifically, the material of the first reinforcing layer 11 can be a carbon-carbon composite material, which may include carbon fiber reinforcement, carbon matrix, additives or coatings. The additives may include elements such as boron and silicon or ceramic particles such as silicon carbide and boron nitride, so as to ensure the hardness, strength and corrosion resistance of the first reinforcing layer 11.

[0029] For example, the density of the first reinforcing layer 11 can be 1.3 g / cm³, 1.31 g / cm³, or 1.35 g / cm³. 3 The thermal conductivity of the first reinforcing layer 11 can be 25w / mk, 27w / mk, 29w / mk, 30w / mk, 31w / mk, 33w / mk, 40w / mk, 50w / mk, etc., with values ​​of 1.36g / cm3, 1.4g / cm3, 1.44g / cm3, 1.49g / cm3, 1.5g / cm3, etc.

[0030] In some alternative embodiments, the density of the first solid felt layer 12 ranges from 0.11 g / cm³ to 0.15 g / cm³. 3 The thermal conductivity of the first solid felt layer 12 is less than or equal to 0.3 W / mK, so as to effectively ensure the thermal insulation of the thermal field protection component 10.

[0031] For example, the density of the first solid felt layer 12 can be 0.11 g / cm³, 0.122 g / cm³, or 0.13 g / cm³. 3 The thermal conductivity of the first solid felt layer 12 can be 0.11w / mk, 0.15w / mk, 0.141w / mk, 0.148w / mk, 0.2w / mk, 0.22w / mk, 0.26w / mk, 0.29w / mk, 0.3w / mk, etc., with values ​​of 0.136g / cm3, 0.14g / cm3, 0.141g / cm3, 0.148g / cm3, 0.15g / cm3, etc.

[0032] In some alternative embodiments, the thickness of the first reinforcing layer 11 is less than the thickness of the first solid felt layer, so that the first reinforcing layer 11 is not too thick, which can prevent the middle area of ​​the first reinforcing layer 11 or the first solid felt layer from sinking and deforming.

[0033] Furthermore, the thickness of the first reinforcing layer 11 ranges from 2mm to 5mm, and the thickness of the first solid felt layer 12 ranges from 30mm to 100mm, so as to effectively and rationally design the thickness of the first reinforcing layer 11 and the first solid felt layer 12, so that the thermal protection component 10 can have both good thermal insulation and high strength and hardness.

[0034] For example, the thickness of the first reinforcing layer 11 can be 2mm, 2.7mm, 3mm, 3.3mm, 4mm, 4.3mm, 4.6mm, 5mm, etc., and the thickness of the first solid felt layer 12 can be 30mm, 32mm, 39mm, 40mm, 46mm, 50mm, 60mm, 75mm, 88mm, 90mm, 95mm, 100mm, etc.

[0035] In some alternative embodiments, the edge region of the first reinforcing layer 11 is provided with a first clearance hole 111 that extends through its thickness direction, and the first felt layer 12 is provided with a second clearance hole 121 that extends through its thickness direction, with the second clearance hole 121 and the first clearance hole 111 facing each other.

[0036] In this embodiment of the present invention, the second clearance hole 121 and the first clearance hole 111 are opposite to each other and can penetrate along the thickness direction of the thermal field protection member 10. In this way, when the thermal field protection member 10 is applied to the bottom of the thermal field, the second clearance hole 121 and the first clearance hole 111 can be used to avoid the graphite electrode of the heater, so as to ensure that the heater is energized and performs thermal radiation.

[0037] Specifically, the first clearance hole 111 can be a circular hole, an elliptical hole, or a polygonal hole, etc., and the second clearance hole 121 can be a circular hole, an elliptical hole, or a polygonal hole, etc. The shapes of the first clearance hole 111 and the second clearance hole 121 can be the same or different, and the opening size of the first clearance hole 111 and the second clearance hole 121 can be the same or different. In this embodiment of the present invention, no specific limitation is made in this regard.

[0038] Specifically, the number of first clearance holes 111 and second clearance holes 121 may be the same or different. For example, one clearance hole may be opposite to a second clearance hole 121, or one clearance hole may be opposite to two second clearance holes 121, or two clearance holes may be opposite to one second clearance hole 121.

[0039] In some alternative embodiments, the central region of the first reinforcing layer 11 is provided with a first through hole 112 extending through its thickness direction, and the first felt layer 12 is provided with a second through hole 122 extending through its thickness direction, the second through hole 122 being opposite to the first through hole 112.

[0040] In this embodiment of the present invention, the second through hole 122 is opposite to the first through hole 112 and can penetrate along the thickness direction of the thermal field protection component 10. In this way, when the thermal field protection component 10 is applied to the bottom of the thermal field, the second clearance hole 121 and the first clearance hole 111 can be used to avoid the drag bar, so as to support the crucible side through the drag bar, thereby ensuring the stability of the quartz crucible and thus ensuring the stability during the crystal pulling process.

[0041] Specifically, the first through hole 112 can be a circular hole, an elliptical hole, or a polygonal hole, etc., and the second through hole 122 can be a circular hole, an elliptical hole, or a polygonal hole, etc. The shapes of the first through hole 112 and the second through hole 122 can be the same or different, and the opening size of the first through hole 112 and the second through hole 122 can be the same or different. In this embodiment of the present invention, no specific limitation is made in this regard.

[0042] In some alternative embodiments, the first reinforcing layer 11 and the first felt layer 12 are both annular structures, making the thermal protection component 10 annular, which can improve the compatibility of the thermal protection component 10 with the single crystal furnace, thereby ensuring the convenience of installing the thermal protection component 10 into the single crystal furnace.

[0043] The thermal protection component 10 described in this embodiment of the present invention has at least the following advantages:

[0044] In this invention, the thermal field protection component 10 includes a first solid felt layer 12 and a first reinforcing layer 11 disposed on the first solid felt layer 12. Since the density of the first reinforcing layer 11 is greater than that of the first solid felt layer 12, the thermal conductivity of the first reinforcing layer 11 is greater than that of the first solid felt layer 12, and the thickness of the first reinforcing layer 11 is less than that of the first solid felt layer 12, the thermal insulation characteristics of the thermal field protection component 10 can be effectively guaranteed under the action of the first solid felt layer 12. The strength and hardness of the thermal field protection component 10 can also be effectively guaranteed under the action of the first reinforcing layer 11. Furthermore, since the first reinforcing layer 11 is disposed on one side of the first solid felt layer 12, the corrosion resistance of one side surface of the thermal field protection component 10 can be improved. Thus, when the thermal field protection component 10 is applied to the bottom of the thermal field, the probability of deformation and corrosion of the thermal field protection component 10 can be reduced, the stability and reliability of the crystal pulling process can be improved, and the service life of the thermal field protection component 10 can be extended.

[0045] Secondly, this utility model also discloses a thermal insulation structure, such as... Figure 4 and Figure 5 As shown, it includes a thermal insulation component 20 and the aforementioned thermal protection component 10; the thermal insulation component 20 is disposed on the side of the first solid felt layer 12 away from the first reinforcing layer 11.

[0046] In this embodiment of the utility model, the thermal insulation component 20 and the thermal protection component 10 are stacked and spliced ​​together, which can further enhance the thermal insulation performance of the thermal insulation component 20, so as to ensure the stability of the thermal environment during the crystal pulling process.

[0047] Specifically, the thermal insulation component 20 and the thermal protection component 10 can be fixed as a whole, or the thermal insulation component 20 and the thermal protection component 10 can be detachably connected. When replacing the thermal insulation structure, only one component can be replaced, which can reduce the replacement cost and usage cost of the thermal insulation structure.

[0048] In some optional embodiments, the thermal insulation component 20 includes a second solid felt layer 22 and a second reinforcing layer 21, wherein the second reinforcing layer 21 is disposed on the side of the second solid felt layer 22 close to the first solid felt layer 12; the density of the second reinforcing layer 21 is greater than the density of the second solid felt layer 22, and the thermal conductivity of the second reinforcing layer 21 is greater than the thermal conductivity of the second solid felt layer 22.

[0049] In this embodiment of the present invention, the thermal insulation performance of the thermal insulation component 20 can be guaranteed by the second solid felt layer 22, and the strength and hardness of the thermal insulation component 20 can be guaranteed by the second reinforcing layer 21, so that the thermal insulation component 20 can combine thermal insulation and deformation resistance.

[0050] Specifically, the second solid felt layer 22 can be made of solid felt, which allows the thermal insulation component 20 to have good thermal insulation performance. Since the second solid felt layer 22 has a certain strength and hardness, the second reinforcing layer 21 can be made thinner, so that the second reinforcing layer 21 will not be too heavy and deform, and the manufacturing cost of the thermal insulation component 20 can also be reduced.

[0051] Optionally, the second felt layer 22 has an insulation zone and a reinforcing zone surrounding the insulation zone on the side facing the first felt layer 12; at least a portion of the second reinforcing layer 21 is disposed in the reinforcing zone; and at least a portion of the first felt layer 12 is embedded in the insulation zone of the second felt layer 22.

[0052] In this embodiment of the present invention, at least a portion of the second reinforcing layer 21 is disposed in the reinforcing area of ​​the second solid felt layer 22, which can also enhance the surface corrosion resistance of the thermal insulation component 20. At least a portion of the first solid felt layer 12 is embedded in the insulation area of ​​the second solid felt layer 22, which can improve the reliability of the connection between the first solid felt layer 12 and the second solid felt layer 22.

[0053] In some alternative embodiments, such as Figure 4 As shown, the first fixed felt layer 12 is provided with a first limiting part 123 at the location of the heat preservation area, and the second fixed felt layer 22 is provided with a second limiting part 221 opposite to the first limiting part 123. The second limiting part 221 is fastened to the first limiting part 123.

[0054] Specifically, when assembling the thermal insulation component 20 and the thermal protection component 10, the first limiting part 123 and the second limiting part 221 can also serve a positioning function, thereby improving the ease of assembling the thermal insulation structure. One of the first limiting part 123 and the second limiting part 221 can be a limiting protrusion, and the other can be a groove, such as... Figure 2 As shown, the second limiting part 221 can be a groove, and at least a portion of the first felt layer 12 is embedded in the groove.

[0055] Specifically, the reinforcing zone surrounds the insulation zone, and the insulation zone can be connected to the side of the first solid felt layer 12 away from the first reinforcing layer 11, so that the reinforcing zone protrudes from the insulation zone. The thermal field protection component 10 and the thermal field insulation component 20 are combined so that the circumferential direction of the thermal field insulation structure can form a stepped surface, and the thermal field insulation structure can be assembled with the insulation cylinder in the single crystal furnace through the stepped surface.

[0056] Specifically, the second reinforcing layer 21 can be made of carbon-carbon composite material, which gives it high hardness and strength, as well as good wear resistance. When the thermal insulation component 20 is installed inside the single crystal furnace, the second reinforcing layer 21 can contact the insulation cylinder, which can reduce the wear of the insulation cylinder on the surface of the thermal insulation component 20 during long-term use. Moreover, during installation, it can also prevent personnel from stepping on it and damaging the surface coating of the thermal insulation component 20.

[0057] Specifically, the second solid felt layer 22 and the second reinforcing layer 21 can be combined to form a component. The second solid felt layer 22 and the second reinforcing layer 21 can be fixed by means of bonding or snap-fitting. When the second reinforcing layer 21 and the second solid felt layer 22 are fixed by applying glue, the porosity of the second solid felt layer 22 can be increased, the density of the second solid felt layer 22 can be reduced, the thermal conductivity coefficient can be reduced, and the thermal insulation performance of the second solid felt layer 22 can be improved by reducing the amount of glue applied.

[0058] In some optional embodiments, the second reinforcing layer 21 is made of carbon-carbon composite material, the density of the second reinforcing layer 21 is in the range of 1.3 g / cm3 - 1.5 g / cm3, and the thermal conductivity of the second reinforcing layer 21 is greater than or equal to 25 W / mK, which can ensure the strength, hardness and corrosion resistance of the second reinforcing layer 21.

[0059] For example, the density of the second reinforcing layer 21 can be 1.3 g / cm³, 1.35 g / cm³, or 1.39 g / cm³. 3The thermal conductivity of the second reinforcing layer 21 can be 1.4 g / cm3, 1.41 g / cm3, 1.43 g / cm3, 1.48 g / cm3, 1.5 g / cm3, etc., and the thermal conductivity of the second reinforcing layer 21 can be 25 W / mK, 28 W / mK, 35 W / mK, 40 W / mK, 42 W / mK, 50 W / mK, 56 W / mK, etc.

[0060] In some alternative embodiments, the density of the second felt layer 22 ranges from 0.13 g / cm³ to 0.18 g / cm³. 3 The thermal conductivity of the second solid felt layer 22 is less than or equal to 0.3 W / mK, which can effectively ensure the heat insulation performance of the second solid felt layer 22.

[0061] For example, the density of the second solid felt layer 22 can be 0.13 g / cm³, 0.135 g / cm³, or 0.14 g / cm³. 3 The thermal conductivity of the second solid felt layer 22 can be 0.1w / mk, 0.18w / mk, 0.19w / mk, 0.2w / mk, 0.21w / mk, 0.26w / mk, 0.3w / mk, etc., with values ​​of 0.15g / cm3, 0.165g / cm3, 0.17g / cm3, 0.178g / cm3, 0.18g / cm3, etc.

[0062] Optionally, the thickness of the second reinforcing layer 21 is less than the thickness of the second solid felt layer 22, so that the second reinforcing layer 21 and the second solid felt layer 22 are combined to ensure the structural strength and hardness of the thermal insulation component 20. In addition, the second reinforcing layer 21 is designed to be thinner, which can reduce the risk of deformation caused by excessive weight of the second reinforcing layer 21.

[0063] Furthermore, the thickness of the second reinforcing layer 21 ranges from 0.5mm to 1mm, and the thickness of the second solid felt layer 22 ranges from 100mm to 200mm, so as to rationally design the thickness of the second reinforcing layer 21 and the second solid felt layer 22, so that the thermal insulation component 20 can have both good thermal insulation performance and high structural strength and hardness.

[0064] For example, the thickness of the second reinforcing layer 21 can be 0.5mm, 0.58mm, 0.6mm, 0.69mm, 0.72mm, 0.85mm, 0.9mm, 1.0mm, etc., and the thickness of the second felt layer 22 can be 100mm, 110mm, 123mm, 135mm, 140mm, 146mm, 150mm, etc.

[0065] Specifically, during the crystal pulling process, the temperature of the graphite electrode is relatively high, and the temperature of the thermal insulation structure near the graphite electrode is also relatively high, making it more susceptible to corrosion and damage. Therefore, in some optional embodiments of this utility model, the thermal insulation structure further includes an annular insulation element 30, which is used to pass through the graphite electrode; the annular insulation element 30 passes through the thermal protection element 10 and / or the thermal insulation element 20.

[0066] In this embodiment of the utility model, by providing an annular heat insulation component 30 for inserting graphite electrodes, the annular heat insulation component 30 can be replaced separately, which facilitates the reduction of replacement costs and usage costs of the thermal insulation structure.

[0067] Specifically, the annular insulation component 30 can be installed in the thermal protection component 10, or the annular insulation component 30 can be installed in both the thermal protection component 10 and the thermal insulation component 20, or the annular insulation component 30 can be installed in the thermal insulation component 20.

[0068] In this embodiment of the utility model, the thermal protection component 10 and the thermal insulation component 20 can be fixedly connected, and the number of components in the thermal insulation structure can be reduced. By only removing and replacing or cleaning the annular insulation component 30, the effect of quick disassembly and assembly can be achieved, saving time.

[0069] Specifically, the annular insulation component 30 can be an equal-diameter ring or a non-equal-diameter ring.

[0070] Specifically, the annular insulation component 30 is respectively inserted into the thermal field protection component 10 and the thermal field insulation component 20. The annular insulation component 30 can be spliced ​​and fixed with the thermal field protection component 10 and the thermal field insulation component 20 respectively. The specific connection method can be adhesive, snap-fit ​​connection or other feasible connection methods. This utility model embodiment does not specifically limit this.

[0071] Specifically, inserting the annular insulation component 30 into the thermal field protection component 10 and the thermal field insulation component 20 makes the inner diameter of the hole used by the thermal field insulation structure to avoid the graphite electrode smaller. After disassembling the annular insulation component 30, the inner diameter of the hole used by the thermal field insulation structure to avoid the graphite electrode becomes larger, so that the annular insulation component 30 can be adapted to various different types of heaters, improving the versatility of the thermal field insulation structure.

[0072] In some alternative embodiments, such as Figure 3 As shown, the annular insulation component 30 includes an insulation ring 31 and a reinforcing ring 33, with the reinforcing ring 33 disposed on the inner wall of the insulation ring 31; the density of the reinforcing ring 33 is greater than that of the insulation ring 31, and the thermal conductivity of the reinforcing ring 33 is greater than that of the insulation ring 31.

[0073] In this embodiment of the utility model, the addition of a reinforcing ring 33 can improve the wear resistance and corrosion resistance of the annular insulation component 30, slow down the corrosion rate, extend the service life of the annular insulation component 30, and also reduce costs.

[0074] Specifically, the reinforcing ring 33 can be bonded to the insulation ring 31 by applying glue, or it can be snapped together with the insulation ring 31 by snapping.

[0075] Optionally, the annular insulation component 30 further includes a reinforcing ring 32, which is disposed on one side of the insulation ring 31; the density of the reinforcing ring 32 is greater than that of the insulation ring 31, and the thermal conductivity of the reinforcing ring 32 is greater than that of the insulation ring 31.

[0076] In this embodiment of the utility model, the reinforcing ring 32 is combined with the insulation ring 31, so that the annular insulation component 30 can have good insulation performance, high strength and hardness, and strong surface corrosion resistance.

[0077] Specifically, the reinforcing ring 32 can be glued to the insulation ring 31, or it can be snapped together with the insulation ring 31.

[0078] Specifically, the side of the reinforcing ring 32 that is away from the insulation ring 31 is flush with the side of the first reinforcing layer 11 that is away from the first solid felt layer 12, which can improve the assembly quality between the thermal insulation structure and other thermal insulation components 20 and avoid interference.

[0079] Specifically, the side of the insulation ring 31 away from the reinforcing ring 32 can be flush with the side of the second solid felt layer 22 away from the second reinforcing layer 21, so as to improve the assembly quality between the thermal insulation structure and other thermal insulation components 20 and avoid interference.

[0080] In some optional embodiments, the reinforcing ring 32 is made of carbon-carbon composite material, the density of the reinforcing ring 32 is in the range of 0.8 g / cm3 - 1.0 g / cm3, and the thermal conductivity of the reinforcing ring 32 is greater than or equal to 15 W / mK, which can effectively ensure the strength, hardness and corrosion resistance of the reinforcing ring 32.

[0081] For example, the density of reinforcing ring 32 can be 0.8 g / cm3, 0.84 g / cm3, 0.86 g / cm3, 0.9 g / cm3, 0.95 g / cm3, 0.98 g / cm3, 1.0 g / cm3, etc., and the thermal conductivity of reinforcing ring 32 can be 15 W / mK, 19 W / mK, 23 W / mK, 29 W / mK, 35 W / mK, 40 W / mK, 56 W / mK, etc.

[0082] In some alternative embodiments, the density of the reinforcing ring 33 ranges from 0.8 g / cm3 to 1.0 g / cm3, and the thermal conductivity of the reinforcing ring 33 is greater than or equal to 15 W / mK, so as to effectively ensure the hardness, strength and wear resistance of the reinforcing ring 33.

[0083] For example, the density of the reinforcing ring 33 can be 0.8 g / cm3, 0.85 g / cm3, 0.89 g / cm3, 0.9 g / cm3, 0.95 g / cm3, 0.98 g / cm3, 1.0 g / cm3, etc., and the thermal conductivity of the reinforcing ring 33 can be 15 W / mK, 20 W / mK, 26 W / mK, 29 W / mK, 35 W / mK, 40 W / mK, 56 W / mK, etc.

[0084] In some optional embodiments, the density of the insulation ring 31 ranges from 0.11 g / cm3 to 0.18 g / cm3, and the thermal conductivity of the insulation ring 31 is less than or equal to 0.3 W / mK, so as to effectively ensure the insulation performance of the insulation ring 31.

[0085] Specifically, the insulation ring 31 can be made of a solid felt. For example, the density of the insulation ring 31 can be 0.11 g / cm³, 0.12 g / cm³, 0.15 g / cm³, 0.164 g / cm³, 0.172 g / cm³, or 0.18 g / cm³. 3 The thermal conductivity of the insulation ring 31 can be 0.1w / mk, 0.16w / mk, 0.19w / mk, 0.2w / mk, 0.23w / mk, 0.25w / mk, 0.3w / mk, etc.

[0086] Optionally, the thickness of the reinforcing ring 33 is less than the thickness of the insulation ring 31, so that the reinforcing ring 33 can be combined with the insulation ring 31 to enhance the wear resistance of the inner surface of the annular insulation component 30, and also reduce the cost of use. The thickness of the reinforcing ring 32 is less than the thickness of the insulation ring 31, so that the reinforcing ring 32 can be combined with the insulation ring 31 to enhance the wear resistance of the upper surface of the annular insulation component 30, and also reduce the cost of use.

[0087] Furthermore, the thickness of the reinforcing ring 32 ranges from 2mm to 5mm, and the thickness of the reinforcing ring 33 ranges from 2mm to 5mm. By rationally designing the thickness of the reinforcing ring 32 and the reinforcing ring 33, the strength and hardness of the annular insulation component 30 can be improved.

[0088] For example, the thickness of the reinforcing ring 32 can be 2mm, 2.5mm, 3mm, 3.6mm, 4mm, 4.3mm, 4.9mm, 5mm, etc., and the thickness of the reinforcing ring 33 can be 2mm, 2.6mm, 3mm, 3.8mm, 4mm, 4.5mm, 4.9mm, 5mm, etc.

[0089] In some alternative embodiments, the annular insulation member 30 includes a first ring body 311 and a second ring body 312 connected to each other. At least a portion of the first ring body 311 is embedded in the first solid felt layer 12, and at least a portion of the second ring body 312 is embedded in the second solid felt layer 22. The outer diameter of the first ring body 311 decreases along the direction from the thermal field protection member 10 to the thermal field insulation member 20. Alternatively, the outer wall surface of the annular insulation member 30 has a conical structure.

[0090] In this embodiment of the present invention, the outer diameter of the first ring 311 decreases along the direction from the thermal field protection member 10 to the thermal field insulation member 20, or the outer wall of the annular insulation member 30 is a conical structure, so that the circumference of the first ring 311 forms an inclined surface, so that the first ring 311 can be tightly fitted with the first solid felt layer 12, avoiding the heat leakage phenomenon caused by the gap in the straight cylinder design, thereby improving the heat insulation performance of the thermal field insulation structure.

[0091] Specifically, the first ring 311 can be a frustum structure or a stepped structure, etc.

[0092] Specifically, the inner diameters of the first ring 311 and the second ring 312 can be the same to avoid the graphite electrode. The thickness of the first ring 311 can be 30mm-80mm. For example, the thickness of the first ring 311 can be 30mm, 40mm, 550mm, 60mm, 78mm, 80mm, etc.

[0093] Specifically, the side of the first ring body 311 facing away from the second ring body 312 can be flush with the side of the thermal field protection component 10 facing away from the thermal field insulation component 20, and the side of the second ring body 312 facing away from the first ring body 311 can be flush with the side of the thermal field insulation component 20 facing away from the thermal field protection component 10.

[0094] In some alternative embodiments, the thermal insulation structure further includes a protective sleeve, wherein the annular insulation element 30 has a clearance channel for the graphite electrode to pass through; the protective sleeve is located within the clearance channel and is used to isolate the annular insulation element 30 and the graphite electrode.

[0095] In this embodiment of the invention, a protective sleeve can also be used to isolate the annular insulation component 30 and the graphite electrode, which can also prevent the graphite electrode from short-circuiting and improve the stability of the thermal environment.

[0096] Specifically, the protective sleeve can be made of quartz, but considering that the main component of quartz is silicon dioxide, which reacts with carbon in the graphite electrode at high temperatures (as shown in the equation: SiO□(s) + C(s) → CO(g) + SiO(g), where S represents solid and g represents gas), the protective sleeve can be made of ceramic paper. The ceramic paper can be made of materials such as silicon nitride, boron nitride, or aluminum oxide.

[0097] Furthermore, the protective sleeve is made of ceramic paper, which makes the sleeve thinner and allows for a smaller hole to avoid the electrodes, thus reducing the inner diameter of the annular insulation component 30. Additionally, the ceramic paper can be used to wrap the graphite electrodes, further reducing the gap between the protective sleeve and the graphite electrodes, thereby further reducing the inner diameter of the annular insulation component 30. This further reduces heat loss, improves the insulation performance of the thermal insulation structure, and prevents volatiles from entering the thermal field, resulting in virtually no corrosion or damage to the graphite electrodes and a very low corrosion rate for the annular insulation component 30. Under these conditions, the thermal insulation structure can be used for 3-5 furnaces without disassembly or cleaning, saving 10-20 minutes per unit in disassembly and assembly time.

[0098] Specifically, the inner diameter of the annular insulation component 30 can be controlled within the range of 85mm-120mm. For example, if the protective sleeve is made of ceramic paper, the inner diameter of the annular insulation component 30 can be designed to be 85mm, 90mm, 96mm, 100mm, 112mm, 118mm, 120mm, etc.

[0099] Specifically, the inner diameter of the annular insulation component 30 can refer to the inner diameter of the insulation ring 31, or it can refer to the inner diameter of the reinforcing component.

[0100] In this embodiment of the invention, compared with the existing thermal insulation structure at the bottom of the hot zone, the thermal insulation structure of this invention can be used to insulate the bottom of the hot zone in the single crystal furnace. The power consumption can be reduced by 2kw-4kw, the assembly and disassembly time of the thermal insulation structure can be reduced by 10 minutes / unit-20 minutes / unit, and the service life of the thermal insulation structure can be increased by 3-5 months.

[0101] The thermal insulation structure described in this embodiment of the present invention can achieve the same beneficial effects as the thermal protection component described above, and will not be repeated here.

[0102] Thirdly, this utility model also discloses a single crystal furnace, which may include a furnace body and a thermal field protection component as described above, or a thermal field insulation structure as described above, disposed within the furnace body.

[0103] The single crystal furnace described in this embodiment of the present invention can achieve the same beneficial effects as the above-mentioned thermal protection components or thermal insulation structures, and will not be described in detail here.

[0104] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0105] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0106] The above provides a detailed description of the thermal field protection component, thermal field insulation structure, and single crystal furnace provided by this utility model. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A thermal field protection component (10), characterized in that, include: The first solid felt layer (12) and the first reinforcing layer (11); The first reinforcing layer (11) is disposed on one side of the first solid felt layer (12); the density of the first reinforcing layer (11) is greater than the density of the first solid felt layer (12), and the thermal conductivity of the first reinforcing layer (11) is greater than the thermal conductivity of the first solid felt layer (12).

2. The thermal protection component (10) according to claim 1, characterized in that, The first reinforcing layer (11) is made of carbon-carbon composite material, the density of the first reinforcing layer (11) is 1.3g / cm3-1.5g / cm3, and the thermal conductivity of the first reinforcing layer (11) is greater than or equal to 25w / mk; And / or, the density of the first solid felt layer (12) is 0.11 g / cm3-0.15 g / cm3, and the thermal conductivity of the first solid felt layer (12) is less than or equal to 0.3 W / mK.

3. The thermal field protection component (10) according to claim 1, characterized in that, Both the first reinforcing layer (11) and the first solid felt layer (12) are annular structures.

4. The thermal field protection component (10) according to claim 1, characterized in that, The thickness of the first reinforcing layer (11) is less than the thickness of the first solid felt layer (12); Alternatively, the thickness of the first reinforcing layer (11) may be in the range of 2mm-5mm, and the thickness of the first solid felt layer (12) may be in the range of 30mm-100mm.

5. A thermal insulation structure, characterized in that, Includes thermal insulation component (20) and thermal protection component (10) as described in any one of claims 1-4; The thermal insulation component (20) is disposed on the side of the first solid felt layer (12) away from the first reinforcing layer (11).

6. The thermal insulation structure according to claim 5, characterized in that, The thermal insulation component (20) includes a second solid felt layer (22) and a second reinforcing layer (21); The second reinforcing layer (21) is disposed on the side of the second felt layer (22) close to the first felt layer (12); The density of the second reinforcing layer (21) is greater than that of the second solid felt layer (22), and the thermal conductivity of the second reinforcing layer (21) is greater than that of the second solid felt layer (22).

7. The thermal insulation structure according to claim 6, characterized in that, The material of the second reinforcing layer (21) is carbon-carbon composite material, the density range of the second reinforcing layer (21) is 1.3g / cm-1.5g / cm3, and the thermal conductivity of the second reinforcing layer (21) is greater than or equal to 25w / mk; And / or, the density of the second solid felt layer (22) is in the range of 0.13 g / cm3-0.18 g / cm3, and the thermal conductivity of the second solid felt layer (22) is less than or equal to 0.3 W / mK.

8. The thermal insulation structure according to claim 6, characterized in that, The second solid felt layer (22) has an insulation zone and a reinforcing zone surrounding the insulation zone on the side facing the first solid felt layer (12); At least a portion of the second reinforcing layer (21) is disposed in the reinforcing region; At least a portion of the first solid felt layer (12) is embedded in the insulation area of ​​the second solid felt layer (22).

9. The thermal insulation structure according to claim 6, characterized in that, The thickness of the second reinforcing layer (21) is less than the thickness of the second felt layer (22); Alternatively, the thickness of the second reinforcing layer (21) may be in the range of 0.5 mm to 1 mm, and the thickness of the second solid felt layer (22) may be in the range of 100 mm to 200 mm.

10. The thermal insulation structure according to claim 6, characterized in that, The thermal insulation structure also includes an annular insulation component (30); The annular insulation component (30) is inserted into the thermal field protection component (10) and / or the thermal field insulation component (20).

11. The thermal insulation structure according to claim 10, characterized in that, The annular insulation component (30) includes: an insulation ring (31) and a reinforcing ring (33), wherein the reinforcing ring (33) is disposed on the inner wall of the insulation ring (31); The density of the reinforcing ring (33) is greater than that of the insulating ring (31), and the thermal conductivity of the reinforcing ring (33) is greater than that of the insulating ring (31).

12. The thermal insulation structure according to claim 11, characterized in that, The annular insulation component (30) further includes a reinforcing ring (32), which is disposed on one side of the insulation ring (31); The density of the reinforcing ring (32) is greater than that of the insulating ring (31), and the thermal conductivity of the reinforcing ring (32) is greater than that of the insulating ring (31).

13. The thermal insulation structure according to claim 12, characterized in that, The reinforcing ring (32) is made of carbon-carbon composite material, and its density ranges from 0.8 g / cm³ to 1.0 g / cm³. 3 The thermal conductivity of the reinforcing ring (32) is greater than or equal to 15 W / mK; And / or, the reinforcing ring (33) is made of carbon-carbon composite material, the density of the reinforcing ring (33) is in the range of 0.8 g / cm3-1.0 g / cm3, and the thermal conductivity of the reinforcing ring (33) is greater than or equal to 15 W / mK; And / or, the density range of the insulation ring (31) is 0.11 g / cm3-0.18 g / cm3, and the thermal conductivity of the insulation ring (31) is less than or equal to 0.3 W / mK.

14. The thermal insulation structure according to claim 12, characterized in that, The thickness of the reinforcing ring (33) is less than the thickness of the insulation ring (31), and the thickness of the reinforcing ring (32) is less than the thickness of the insulation ring (31); Alternatively, the thickness of the reinforcing ring (32) may be in the range of 2mm-5mm, and the thickness of the reinforcing ring (33) may be in the range of 2mm-5mm.

15. The thermal insulation structure according to claim 10, characterized in that, The annular insulation component (30) includes a first ring body (311) and a second ring body (312) connected to each other. At least a portion of the first ring body (311) is embedded in the first solid felt layer (12), and at least a portion of the second ring body (312) is embedded in the second solid felt layer (22). The outer diameter of the first ring body (311) decreases along the direction from the thermal field protection component (10) to the thermal field insulation component (20). Alternatively, the outer wall of the annular insulation component (30) may have a conical structure.

16. The thermal insulation structure according to claim 10, characterized in that, The thermal insulation structure also includes ceramic paper; the annular insulation component (30) is provided with a clearance channel; The ceramic paper is located within the clearance channel and is used to isolate the annular insulation component (30) and the graphite electrode.

17. A single crystal furnace, characterized in that, It includes a furnace body and a thermal protection component (10) as described in any one of claims 1-4 disposed in the furnace body, or a thermal insulation structure as described in any one of claims 5-16.

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