Chamber cold trap and chamber with heating function
By connecting cold trap coils in series in the cavity cold trap and setting the coil support plate at an angle, the problems of uneven water vapor cooling and inconvenient condensate discharge in the cavity cold trap are solved, achieving more efficient water vapor management and condensate treatment.
CN224316558UActive Publication Date: 2026-06-02IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
- Filing Date
- 2025-04-17
- Publication Date
- 2026-06-02
Smart Images
Figure CN224316558U_ABST
Abstract
This invention provides a cavity cold trap and a heating device cavity. The cavity cold trap is located at the bottom of the heating device cavity. The cavity cold trap includes multiple cold trap coils and a coil support plate installed at the bottom of the device cavity to support the cold trap coils. The cavity cold trap includes a refrigerant inlet and a refrigerant outlet. The multiple cold trap coils are connected in series. The refrigerant inlet is connected to the inlet of the first cold trap coil at the beginning of the multiple cold trap coils. The refrigerant outlet is connected to the outlet of the last cold trap coil at the end of the multiple cold trap coils. The inner surface of the coil support plate is inclined at a predetermined angle, and a drain port is provided on the coil support plate at a position lower than the supporting cold trap coil. This invention improves the uniformity of water vapor cooling and the convenience of condensate drainage.
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