A waste liquid cooling device

Abstract

The utility model provides a kind of waste liquid cooling device, it is related to sewage treatment technical field, including: liquid collecting tank, high-temperature waste liquid flows into liquid collecting tank by multiple liquid inlet pipeline;Cooling coil, cooling coil is located in liquid collecting tank, and cooling water circulation is carried out with external process cooling water system;Liquid outlet pipe, with the bottom of liquid collecting tank communication;First temperature sensor is equipped in liquid collecting tank, liquid outlet valve is equipped on liquid outlet pipe, and liquid outlet valve and first temperature sensor are electrically connected.Affirmative effect is to integrate liquid collecting, cooling and liquid discharge in the same equipment, realize the cooling of high-temperature waste liquid and the strict control to the temperature of discharged high-temperature waste liquid, and structure integration, reduce equipment floor space;Temperature sensor is arranged in liquid collecting tank, waste liquid temperature in tank is detected at any time, when waste liquid temperature meets discharge requirement, just can open liquid outlet valve and discharge, realize strict temperature control, avoid high-temperature damage plant service exhaust pipe.

Description

Technical Field

[0001] This utility model relates to the field of wet cleaning technology, and in particular to a waste liquid cooling device. Background Technology

[0002] Cleaning equipment is widely used in the semiconductor industry, and waste liquid cooling devices are an indispensable part of the equipment. If high-temperature waste liquid is not cooled and is directly discharged into the plant system, it will damage the plant's waste disposal system and cause incalculable losses.

[0003] The waste discharge pipes in factories are typically made of PVC. Ordinary PVC generally has a temperature resistance range of -10℃ to 60℃. Beyond this range, the performance of PVC will significantly decrease. When the temperature exceeds 80℃, PVC begins to soften, its mechanical properties decline, and it may melt and break at temperatures exceeding 100℃.

[0004] Therefore, a cooling device is needed that can cool high-temperature waste liquid and strictly control the discharge temperature of high-temperature waste liquid to avoid damage to the plant's waste discharge pipe. Utility Model Content

[0005] To address the problems existing in the prior art, this utility model provides a waste liquid cooling device, comprising:

[0006] Waste liquid flows into the collection tank through multiple inlet pipes;

[0007] Cooling coil, which is located in the liquid collection tank and circulates cooling water with the external process cooling water system;

[0008] A drain pipe is connected to the bottom of the collection tank;

[0009] The liquid collection tank is equipped with a first temperature sensor, and the drain pipe is equipped with a drain valve, which is electrically connected to the first temperature sensor.

[0010] Preferably, the liquid collection tank is divided into an inner tank and an outer tank with the top connected, and the cooling coil is disposed inside the inner tank.

[0011] Preferably, the inner tank is connected to the top of the liquid collection tank through a first branch pipe of the connecting pipe, and a first liquid level sensor is provided on the first branch pipe.

[0012] Preferably, the outer tank is connected to the top of the liquid collection tank through a second branch pipe of the connecting pipe, and a second liquid level sensor is provided on the second branch pipe.

[0013] Preferably, the inner groove is provided with an inner lining layer.

[0014] Preferably, the inner lining is made of polytetrafluoroethylene material.

[0015] Preferably, a leak detection hole is provided at the bottom of the outer tank, and a leak sensor is provided at the leak detection hole.

[0016] Preferably, it also includes an overflow tank, the inlet of which is connected to the overflow port of the collection tank via a pipe, and the drain port of the overflow tank is connected to the drain pipe.

[0017] Preferably, the overflow tank is equipped with a second temperature sensor.

[0018] Preferably, the overflow tank's drain outlet is also connected to the collection tank via a return pipe, and a water pump is installed on the return pipe.

[0019] The above technical solution has the following advantages or beneficial effects:

[0020] 1. The functions of liquid collection, cooling and drainage are integrated into the same equipment. The integrated structure reduces the space occupied by the equipment and enables the cooling of high-temperature waste liquid and strict control of the temperature of the discharged high-temperature waste liquid.

[0021] 2. A temperature sensor is installed in the collection tank to monitor the temperature of the waste liquid inside the tank at all times. The drain valve can only be opened for discharge when the temperature of the waste liquid meets the discharge requirements, so as to achieve strict temperature control and avoid damage to the plant's waste discharge pipe by high temperature. Attached Figure Description

[0022] Figure 1 A schematic diagram of the structure of a waste liquid cooling device is shown in a preferred embodiment of this utility model.

[0023] Figure 2 This is a topological diagram of a waste liquid cooling device in a preferred embodiment of the present invention. Detailed Implementation

[0024] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. The present invention is not limited to this embodiment; other embodiments that conform to the spirit of the present invention may also fall within its scope.

[0025] In a preferred embodiment of this utility model, based on the above-mentioned problems existing in the prior art, a waste liquid cooling device is provided, such as... Figure 1 and Figure 2 The following are included:

[0026] Waste liquid flows into collection tank 1 through multiple inlet pipes 2;

[0027] Cooling coil 3 is located in the liquid collection tank 1 and circulates cooling water with the external process cooling water system PCW.

[0028] Drain pipe 4 is connected to the bottom of collection tank 1;

[0029] The liquid collection tank 1 is equipped with a first temperature sensor TC1, and the drain pipe 4 is equipped with a drain valve 41, which is electrically connected to the first temperature sensor TC1.

[0030] Specifically, in this embodiment, the liquid collection system (specifically, the liquid collection tank 1), the cooling system (specifically, the cooling coil 3), and the draining system (specifically, the drain pipe 4 and the drain valve 41) are integrated into the same device to achieve cooling of high-temperature waste liquid and strict control of the temperature of the discharged high-temperature waste liquid. Furthermore, the integrated structure reduces the space occupied by the equipment.

[0031] High-temperature waste liquid flows into the collection tank 1 and exchanges heat with the cooling coil 3. The cooling coil 3 is evenly coiled on the inner wall of the collection tank 1 to enhance the heat exchange effect. The cooling coil 3 circulates cooling water with the process cooling water system PCW. The material of the cooling coil 3 and the coolant can be changed, or more efficient methods such as phase change cooling can be used. For the utilization of waste heat from high-temperature waste liquid, a heat storage system can be expanded. The phase change liquid absorbs heat from the waste liquid, achieving a phase change such as from solid to liquid. This change can achieve more efficient heat storage and conversion.

[0032] A first temperature sensor TC1 is installed in the collection tank 1 to detect the temperature of the waste liquid in the tank at all times. Only when the temperature of the waste liquid meets the discharge requirements can the drain valve 41 be opened for discharge, so as to achieve strict temperature control and avoid damage to the plant's waste discharge pipe by high temperature.

[0033] In a preferred embodiment of the present invention, the liquid collection tank 1 is divided into an inner tank 11 and an outer tank 12 connected at the top. The outer tank 12 is used to receive the high-temperature waste liquid overflowing from the inner tank 11, and the cooling coil 3 is arranged inside the inner tank 11.

[0034] Specifically, the inside of the collection tank 1 is divided into an inner tank 11 and an outer tank 12. The inner tank 11 is equipped with a cooling coil 3 to cool the waste liquid. The outer tank 12 is for overflow; when the liquid level in the inner tank 11 is too high, it will overflow into the outer tank 12.

[0035] In a preferred embodiment of the present invention, the inner tank 11 is connected to the top of the liquid collection tank 1 through the first branch pipe 131 of the connecting pipe 13, and the first branch pipe 131 is provided with a first liquid level sensor LS1.

[0036] In a preferred embodiment of the present invention, the outer tank 12 is connected to the top of the liquid collection tank 1 through the second branch pipe 132 of the connecting pipe 13, and the second branch pipe 132 is provided with a second liquid level sensor LS2.

[0037] Specifically, liquid level sensors are installed on the connecting pipe 13 of the inner tank 11 and the outer tank 12 for safety detection. When the first liquid level sensor LS1 and the second liquid level sensor L2 detect abnormal liquid levels, it indicates a problem with the equipment (for example, if the first liquid level sensor LS1 detects that the liquid level in the inner tank 11 exceeds the set normal range, while the second liquid level sensor LS2 does not detect liquid in the outer tank 12, it means that the inner tank 11 is not overflowing but has an abnormal liquid level. This situation may be due to a fault in the inlet pipe, resulting in insufficient liquid intake and a low liquid level in the inner tank 11; or the second liquid level sensor LS2 detects liquid in the outer tank 12, indicating that the inner tank 11 is overflowing; or the first liquid level sensor LS1 detects that the liquid level in the inner tank 11 exceeds the set normal range, while the second liquid level sensor LS2 detects liquid in the outer tank 12. This situation may be due to a fault in the drain pipe, resulting in the liquid not being discharged in time, causing both the inner tank 11 and the outer tank 12 to be full and exceed the capacity limit). The equipment needs to be stopped for inspection.

[0038] In a preferred embodiment of the present invention, the inner groove 11 is provided with an inner lining layer.

[0039] In a preferred embodiment of this invention, the inner lining is made of polytetrafluoroethylene (PTFE).

[0040] In a preferred embodiment of the present invention, a leak detection hole is provided at the bottom of the outer groove 12, and a leak sensor is provided at the leak detection hole.

[0041] Specifically, in this embodiment, considering the volume requirements of the cooling waste liquid, the collection tank is designed as a pressure vessel, and a polytetrafluoroethylene lining is provided in the inner tank 11 to ensure that the waste liquid will not corrode the metal tank and extend the service life of the equipment.

[0042] A leak detection hole is opened at the bottom of the outer tank 12, and a leak sensor is installed below the leak detection hole to detect whether the inner lining of the tank is damaged.

[0043] In a preferred embodiment of the present invention, an overflow tank 5 is also included. The inlet of the overflow tank 5 is connected to the overflow port of the collection tank 1 through a pipe A, and the drain port of the overflow tank 5 is connected to the drain pipe 4.

[0044] In a preferred embodiment of the present invention, the drain port of the overflow tank 5 is also connected to the collection tank 1 through the return pipe 51, and a water pump P is provided on the return pipe 51.

[0045] Specifically, it also includes an overflow tank 5, which is used when liquid overflows from the collection tank 1, indicating a problem with the cooling system of the collection tank 1 (the temperature does not meet the discharge requirements, leading to liquid accumulation). At this time, the collection tank 1 is prohibited from receiving high-temperature liquid, and the temperature sensors of both the collection tank 1 and the overflow tank 5 will provide feedback to control the drain pipe to prevent discharge. The collection tank 1 and the overflow tank 5 will form a large circulation loop, with water circulating through the water pump P and the return pipe 51, and forming a circulating cooling system with the cooling coil 3 inside the collection tank 1. The purpose of this circulation between the collection tank 1 and the overflow tank 5 is to accelerate cooling and improve heat exchange efficiency through hot and cold convection.

[0046] In a preferred embodiment of the present invention, a second temperature sensor TC2 is provided in the overflow tank 5.

[0047] Specifically, overflow tank 5 serves as an extension of the collection tank. When the collection tank 5 meets the discharge requirements, the waste liquid first enters the overflow tank 5 for a second temperature check. This temperature check is then performed against the first temperature sensor TC1 inside the collection tank 1. If the temperature meets the discharge requirements, the waste liquid can be discharged into the plant system. If the temperature does not meet the discharge requirements, the waste liquid cannot be discharged into the plant system, and the system will simultaneously check for any problems with the equipment components.

[0048] The cooling device is also equipped with an exhaust port 6, which is used to release pressure when the pressure in the liquid collection tank 1 is too high.

[0049] The cooling device is also equipped with a clean and dry air inlet 7, and a four-color light 8, which is used to warn and indicate the equipment's operating status when a fault occurs by emitting different lights, such as a green light for normal operation and a red light for equipment failure.

[0050] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made using the content of this specification and illustrations should be included within the protection scope of the present utility model.

Claims

1. A waste liquid cooling device, characterized in that, include: Waste liquid flows into the collection tank through multiple inlet pipes; Cooling coil, which is located in the liquid collection tank and circulates cooling water with the external process cooling water system; A drain pipe is connected to the bottom of the collection tank; The liquid collection tank is equipped with a first temperature sensor, and the drain pipe is equipped with a drain valve, which is electrically connected to the first temperature sensor.

2. The cooling device according to claim 1, characterized in that, The collection tank is divided into an inner tank and an outer tank that are connected at the top, and the cooling coil is located inside the inner tank.

3. The cooling device according to claim 2, characterized in that, The inner tank is connected to the top of the liquid collection tank through a first branch pipe of the connecting pipe, and a first liquid level sensor is provided on the first branch pipe.

4. The cooling device according to claim 2, characterized in that, The outer tank is connected to the top of the liquid collection tank through a second branch pipe of the connecting pipe, and a second liquid level sensor is provided on the second branch pipe.

5. The cooling device according to claim 3, characterized in that, The inner groove is provided with an inner lining layer.

6. The cooling device according to claim 5, characterized in that, The inner lining is made of polytetrafluoroethylene.

7. The cooling device according to claim 2, characterized in that, A leak detection hole is provided at the bottom of the outer tank, and a leak sensor is provided at the leak detection hole.

8. The cooling device according to claim 1, characterized in that, It also includes an overflow tank, the inlet of which is connected to the overflow port of the collection tank via a pipe, and the drain port of the overflow tank is connected to the drain pipe.

9. The cooling device according to claim 8, characterized in that, The overflow tank is equipped with a second temperature sensor.

10. The cooling device according to claim 8, characterized in that, The overflow tank's drain outlet is also connected to the collection tank via a return pipe, and a water pump is installed on the return pipe.

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