Drying apparatus

By optimizing the air intake and return components and duct connections of the drying equipment, a high-efficiency hot air circulation system is formed, which solves the problem of heat loss and improves the utilization rate of thermal energy while reducing energy consumption.

CN224316709UActive Publication Date: 2026-06-02CHANGZHOU S C EXACT EQUIP

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHANGZHOU S C EXACT EQUIP
Filing Date
2025-07-23
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

In existing drying equipment, the contact area between hot air and the box body is too large when hot air circulates in the box-type air inlet structure, resulting in serious heat loss and increased energy consumption.

Method used

By directly connecting the fans of the air intake and return air components to the air intake and return air ducts, the contact area of ​​hot air during pipeline transmission is reduced. The hot air path is optimized through circulation pipes and connecting bends. Combined with the design of air guide hoods and return air hoods, a highly efficient hot air circulation system is formed.

Benefits of technology

It improves thermal energy utilization, reduces heat loss, lowers energy consumption, and increases the energy efficiency ratio of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model belongs to the field of drying technology, specifically relating to equipment for drying silicon wafers conveyed in baskets, and more particularly to a drying device. The drying device includes: a drying unit with an air inlet assembly at the top and a return air assembly at the bottom; a circulation assembly connecting the return air assembly and the air inlet assembly, and for sending the hot air recovered by the return air assembly into the air inlet assembly; wherein the circulation assembly includes: an air inlet pipe connected to the air inlet of the air inlet assembly; a return air pipe connected to the air outlet of the return air assembly; and a circulation pipe connected to both the air inlet pipe and the return air pipe. By directly connecting the fans of the air inlet assembly and the return air assembly to the corresponding air inlet and return air pipes, the contact area between the hot air and the pipes during return air is reduced, heat loss during pipe transmission is suppressed, and thermal energy utilization is improved.
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Description

Technical Field

[0001] This utility model belongs to the field of drying technology, specifically relating to equipment for drying silicon wafers conveyed in flower baskets, and more particularly to a drying equipment. Background Technology

[0002] Currently, the most common cleaning equipment is the tank-type equipment and the chain-type equipment. The tank-type equipment uses baskets to carry silicon wafers, and a robotic arm can make the baskets clean in each cleaning tank. After cleaning, the wafers are dried.

[0003] In drying equipment, hot air is circulated through a return air structure and enters the box-type air inlet structure. Due to the large volume of the box cavity, the contact area between the hot air and the box increases during the circulation process. Heat is severely lost through the box wall, which easily leads to heat loss and thus excessive energy consumption of the drying equipment.

[0004] Therefore, how to reduce heat loss during return air in a box-type air intake structure is a technical problem that urgently needs to be solved.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one drying apparatus.

[0007] In a first aspect, embodiments of this disclosure provide a drying apparatus, comprising:

[0008] The drying device has an air inlet assembly at the top and a return air assembly at the bottom.

[0009] A circulation component that connects the return air component to the inlet air component and is used to send the hot air recovered by the return air component into the inlet air component;

[0010] The loop component includes:

[0011] An air inlet duct, which is connected to the air inlet of the air inlet assembly;

[0012] A return air duct, which is connected to the air outlet of the return air assembly;

[0013] A circulation pipe, which is connected to the air inlet pipe and the air return pipe.

[0014] In one optional embodiment, connecting bends are provided at both ends of the circulation pipe;

[0015] The circulation pipe is connected to the air inlet pipe and the air return pipe through a corresponding connecting bend.

[0016] In one optional embodiment, the air inlet pipe is provided with a makeup air inlet;

[0017] The air intake is connected to the outside air.

[0018] In one optional embodiment, the air intake assembly includes:

[0019] Air intake fan and air guide shroud;

[0020] The air guide hood is installed on top of the drying device;

[0021] The air inlet of the air intake fan is connected to the air intake pipe;

[0022] The air outlet of the air inlet fan is connected to the air guide shroud.

[0023] In one alternative embodiment, the return air assembly includes:

[0024] Return air fan and return air hood;

[0025] The return air hood is installed at the bottom of the drying device;

[0026] The air outlet of the return air fan is connected to the return air duct;

[0027] The return air inlet of the return air fan is connected to the air guide shroud.

[0028] In one optional embodiment, the drying device is provided with multiple layers of drying stations;

[0029] The air intake assembly and the air return assembly are arranged opposite to each other;

[0030] The multi-layer drying station is located between the air inlet assembly and the air return assembly.

[0031] In one optional embodiment, each drying station is equipped with an electronic eye;

[0032] The drying equipment also includes a control module;

[0033] The electronic eye is adapted to capture images of the drying station and send them to the control module.

[0034] In one alternative embodiment, the drying device includes a housing;

[0035] A drying chamber is provided inside the housing;

[0036] The drying chamber is divided into multiple layers, with each layer corresponding to a drying station.

[0037] In one optional embodiment, a roller shutter door is provided at the fitting point between the drying chamber of the housing and the corresponding drying station.

[0038] In one optional embodiment, the drying station has two layers.

[0039] The beneficial effects of this utility model are that by directly connecting the fans of the air inlet assembly and the air return assembly to the corresponding air inlet pipe and air return pipe, the contact area between hot air and the pipe during return air is reduced, heat loss during pipe transmission is suppressed, and heat energy utilization is improved.

[0040] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0041] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0042] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0043] Figure 1 This is a schematic diagram of the structure of the drying equipment provided in the embodiments of this disclosure;

[0044] Figure 2 This is a schematic diagram of a portion of the structure of the drying equipment provided in an embodiment of this disclosure;

[0045] Figure 3 This is a partial electrical control schematic diagram of the drying equipment provided in an embodiment of this disclosure.

[0046] In the diagram: 100, Drying device; 110, Air inlet assembly; 111, Air inlet fan; 112, Air guide hood; 120, Return air assembly; 121, Return air fan; 122, Return air hood; 130, Drying station; 140, Electronic eye; 150, Housing; 160, Drying chamber; 170, Roller shutter door; 200, Circulation assembly; 210, Air inlet duct; 211, Make-up air inlet; 220, Return air duct; 230, Circulation duct; 240, Connecting bend. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0048] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0049] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0050] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0051] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0052] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0053] Research has revealed that structural defects in existing hot air circulation systems are the core cause of low energy efficiency. Specifically, the hot air entering the air intake box from the return air structure has an excessively large heat exchange area with the box, resulting in significant heat loss through the box walls and easy heat loss.

[0054] Based on the above research, this disclosure provides a drying device that directly connects the fans of the air inlet assembly 110 and the air return assembly 120 to the corresponding air inlet pipe 210 and air return pipe 220, thereby suppressing heat loss during pipeline transmission and improving thermal energy utilization.

[0055] The shortcomings of the above solutions are the result of the utility model inventor's practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as contributions made by the utility model inventor to this disclosure.

[0056] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0057] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0058] Please see Figure 1At least one embodiment provides a drying device, including: a drying apparatus 100, which has an air inlet assembly 110 at its top and a return air assembly 120 at its bottom; a circulation assembly 200, which connects the return air assembly 120 to the air inlet assembly 110 and is used to send the hot air recovered by the return air assembly 120 into the air inlet assembly 110; wherein, the circulation assembly 200 includes: an air inlet pipe 210, which is connected to the air inlet of the air inlet assembly 110; a return air pipe 220, which is connected to the air outlet of the return air assembly 120; and a circulation pipe 230, which is connected to the air inlet pipe 210 and the return air pipe 220.

[0059] By directly connecting the fans of the air intake assembly 110 and the return air assembly 120 to the corresponding air intake duct 210 and return air duct 220, the contact area between hot air and the duct during return air is reduced, heat loss during duct transmission is suppressed, and thermal energy utilization is improved.

[0060] Please continue reading. Figure 1 The circulation pipe 230 is provided with connecting bends 240 at both ends; the circulation pipe 230 is connected to the air inlet pipe 210 and the air return pipe 220 through the corresponding connecting bends 240.

[0061] By setting connecting bends 240 at both ends of the circulation pipe 230, the return air path of the circulation pipe 230 to the inlet pipe 210 and the return air pipe 220 is optimized, reducing the impact between hot air and the pipe wall, reducing the energy loss when the airflow turns, and further improving the hot air circulation efficiency.

[0062] The air inlet duct 210 is equipped with a makeup air inlet 211, which is connected to the outside air. The makeup air inlet 211 on the air inlet duct 210 can introduce fresh outside air, balance the air pressure fluctuations in the duct, and ensure the stable operation of the hot air circulation system.

[0063] Please continue reading. Figure 1 The air intake assembly 110 includes an air intake fan 111 and an air guide shroud 112; the air guide shroud 112 covers the top of the drying device 100; the air inlet of the air intake fan 111 is connected to the air intake pipe 210; and the air outlet of the air intake fan 111 is connected to the air guide shroud 112.

[0064] The air inlet assembly 110 adopts an independent air inlet fan 111 and air guide shroud 112 structure. The air guide shroud 112 directs the hot air to a specific direction, so that the hot air is evenly distributed on the top of the drying chamber 160, thereby improving the heat transfer efficiency.

[0065] Please continue reading. Figure 1The return air assembly 120 includes a return air fan 121 and a return air hood 122; the return air hood 122 covers the bottom of the drying device 100; the air outlet of the return air fan 121 is connected to the return air pipe 220; the return air inlet of the return air fan 121 is connected to the air guide hood 112.

[0066] The return air assembly 120 is equipped with a return air fan 121 and a return air hood 122 to form a negative pressure return air system. The return air hood 122 efficiently collects the hot air at the bottom of the drying chamber 160, reducing the lateral diffusion of hot air before it is discharged. Combined with the directional airflow function of the air guide hood 112, the hot air is recycled.

[0067] Please continue to participate. Figure 1 The drying device 100 has multiple drying stations 130 stacked on top of each other; the air inlet assembly 110 and the air return assembly 120 are arranged opposite to each other; the multiple drying stations 130 are arranged between the air inlet assembly 110 and the air return assembly 120.

[0068] The multi-layer drying station 130's stacked design makes full use of the three-dimensional space. Combined with the relative arrangement of the air inlet component 110 and the return air component 120, it forms a hot air circulation channel that runs through the top and bottom, greatly shortening the hot air transmission path and achieving higher drying capacity and energy efficiency ratio within a limited equipment volume.

[0069] Please see Figure 1 and Figure 2 Each drying station 130 is equipped with an electronic eye 140; the drying equipment also includes a control module; the electronic eye 140 is adapted to capture images of the drying station 130 and send them to the control module.

[0070] The electronic eye 140 detects whether the flower basket is on the drying station 130, thereby ensuring the stability of the drying equipment operation.

[0071] Please continue reading. Figure 1 and Figure 2 The drying device 100 includes a housing 150; a drying chamber 160 is provided inside the housing 150; the drying chamber 160 is divided into multiple layers of cavities stacked on top of each other, that is, each layer of cavity corresponds to a drying station 130. A roller shutter door 170 is provided at the fitting point between the drying chamber 160 of the housing 150 and the corresponding drying station 130.

[0072] The layered structure of the drying chamber 160 corresponds one-to-one with the drying station 130. In conjunction with the opening and closing control of the roller shutter door 170, the heat loss of the drying station 130 is reduced, and the energy utilization rate of the drying equipment is improved.

[0073] In a preferred embodiment, the drying station 130 has two layers.

[0074] The beneficial effects of this utility model are as follows: This utility model provides a drying device including: a drying device 100, which has an air inlet assembly 110 at the top and a return air assembly 120 at the bottom; a circulation assembly 200, which connects the return air assembly 120 to the air inlet assembly 110 and is used to send the hot air recovered by the return air assembly 120 into the air inlet assembly 110; wherein, the circulation assembly 200 includes: an air inlet pipe 210, which is connected to the air inlet of the air inlet assembly 110; a return air pipe 220, which is connected to the air outlet of the return air assembly 120; and a circulation pipe 230, which is connected to the air inlet pipe 210 and the return air pipe 220. By directly connecting the fans of the air inlet assembly 110 and the return air assembly 120 to the corresponding air inlet pipe 210 and return air pipe 220, the contact area between the hot air and the pipes during return air is reduced, heat loss during pipe transmission is suppressed, and the thermal energy utilization rate is improved.

[0075] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0076] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0077] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0078] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature and another element or feature illustrated in the figures. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0079] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0080] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A drying device, characterized in that, include: The drying device (100) has an air inlet assembly (110) at its top and a return air assembly (120) at its bottom. A circulation component (200) connects the return air component (120) to the inlet air component (110) and is used to send the hot air recovered by the return air component (120) into the inlet air component (110); The loop component (200) includes: An air inlet pipe (210) is connected to the air inlet of the air inlet assembly (110); A return air duct (220) is connected to the air outlet of the return air assembly (120); The circulation pipe (230) is connected to the air inlet pipe (210) and the air return pipe (220).

2. The drying equipment as described in claim 1, characterized in that, The two ends of the circulation pipe (230) are respectively provided with connecting bends (240); The circulation pipe (230) is connected to the air inlet pipe (210) and the air return pipe (220) through a corresponding connecting bend (240).

3. The drying equipment as described in claim 1, characterized in that, The air inlet pipe (210) is provided with an air supply port (211); The air supply vent (211) is connected to the outside air.

4. The drying equipment as described in claim 1, characterized in that, The air intake assembly (110) includes: Air intake fan (111) and air guide shroud (112); The air guide shroud (112) is installed on top of the drying device (100); The air inlet of the air intake fan (111) is connected to the air intake pipe (210); The air outlet of the air intake fan (111) is connected to the air guide shroud (112).

5. The drying equipment as described in claim 4, characterized in that, The return air assembly (120) includes: Return air fan (121) and return air hood (122); The return air hood (122) is installed over the bottom of the drying device (100); The air outlet of the return air fan (121) is connected to the return air duct (220); The return air inlet of the return air fan (121) is connected to the air guide shroud (112).

6. The drying equipment as described in claim 1, characterized in that, The drying device (100) is provided with multiple drying stations (130) stacked together. The air intake assembly (110) and the air return assembly (120) are arranged opposite to each other; The multi-layer drying station (130) is arranged between the air inlet assembly (110) and the air return assembly (120).

7. The drying equipment as described in claim 6, characterized in that, Each drying station (130) on each floor is equipped with an electronic eye (140). The drying equipment also includes a control module; The electronic eye (140) is adapted to capture images of the drying station (130) and send them to the control module.

8. The drying equipment as described in claim 7, characterized in that, The drying device (100) includes a housing (150); A drying chamber (160) is provided inside the housing (150). The drying chamber (160) is divided into multiple layers of chambers stacked on top of each other, that is, each layer of chamber corresponds to a drying station (130).

9. The drying equipment as described in claim 8, characterized in that, The drying chamber (160) of the housing (150) is provided with a roller shutter door (170) at the fitting point of the corresponding drying station (130).

10. The drying equipment as described in claim 6, characterized in that, The drying station (130) has two layers.