Metal mesh chain and furnace apparatus

Abstract

The utility model belongs to drying equipment technical field especially, it relates to a kind of metal net chain and furnace body equipment, wherein metal net chain, including: several net chain bearing unit, wherein the two sides of the net chain bearing unit are thimble bearing surface, and middle is sparse surface;Wherein, sparse surface connects two sides thimble bearing surface, and its weaving density is less than thimble bearing surface, to reduce the weight of entire metal net chain, to reduce the power consumption of metal net chain.

Description

Technical Field

[0001] This utility model belongs to the field of drying equipment technology, and in particular relates to a metal mesh chain and furnace body equipment. Background Technology

[0002] Silicon wafers need to be dried in a furnace during the production process. The silicon wafers circulate in the furnace through a metal mesh chain. In related technologies, the structure of the metal mesh chain is entirely a mesh chain structure. The entire surface of the mesh chain increases the energy consumption of the entire furnace equipment. Moreover, the furnace equipment is generally quite long, requiring a mesh chain as long as 6 meters. The power required to drive the entire mesh chain is insufficient, which also consumes more electricity.

[0003] Therefore, the high energy consumption during the drying process is a technical problem caused by the overall structure of the metal mesh chain that drives the silicon wafers to move inside the furnace. It is necessary to design a metal mesh chain and furnace equipment.

[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0005] This disclosure provides at least one metal mesh chain and furnace body device.

[0006] In a first aspect, embodiments of this disclosure provide a metal mesh chain, comprising:

[0007] Several network carrier units, among which

[0008] The two sides of the network chain bearing unit are pin bearing surfaces, and the middle is a sparse surface;

[0009] Among them, the sparse surface connects the two sides of the embossor bearing surface, and its weaving density is less than that of the embossor bearing surface.

[0010] In one optional embodiment, the second wave pins arranged parallel and equidistantly in the sparse surface are connected to the corresponding first wave pins arranged parallel and equidistantly in the ejector pin bearing surface.

[0011] Adjacent first wave pins are connected by a spiral mesh chain so that the weaving density of the pin bearing surface is greater than that of the sparse surface;

[0012] The spiral chain is folded inward at the end near the second wave pin and then connected to the corresponding first wave pin.

[0013] In one optional embodiment, the ratio of the sum of the lengths of the first wave pins corresponding to the two ejector pin bearing surfaces to the length of a second wave pin is (1.5-2.5):1.

[0014] In one alternative implementation, the angle of the second wave pin arched portion is the same as the angle of the first wave pin arched portion.

[0015] In one alternative implementation, the angle of the second wave pin arch is smaller than the angle of the first wave pin arch.

[0016] In one alternative implementation, the diameter of the second wave pin is larger than the diameter of the first wave pin.

[0017] In one optional embodiment, a plurality of ejector pins are provided on the spiral mesh chain of the ejector pin bearing surface, and the ejector pins of the two ejector pin bearing surfaces are staggered.

[0018] The ejector pin is tilted;

[0019] The pin is connected to the bottom surface of the spiral mesh chain.

[0020] In one alternative embodiment, a ceramic tube is fitted onto the ejector pin, and a stainless steel sleeve is provided between the lower end of the ceramic tube and the location where the ejector pin is connected to the spiral mesh chain.

[0021] Secondly, embodiments of this disclosure also provide a metal mesh chain, comprising:

[0022] Several network carrier units, among which

[0023] The two sides of the network chain bearing unit are pin bearing surfaces, and the middle is a sparse surface;

[0024] The ejector pin bearing surface includes: a plurality of parallel and equally spaced first wave pins;

[0025] Adjacent first wave pins are connected by a spiral mesh chain;

[0026] The sparse surface includes: a plurality of parallel and equally spaced second wave pins;

[0027] The first wave pin is connected to the corresponding second wave pin;

[0028] The spiral chain is folded inward at the end near the second wave pin and then connected to the corresponding first wave pin.

[0029] Thirdly, embodiments of this disclosure also provide a furnace body device, including:

[0030] The aforementioned metal mesh chain.

[0031] The beneficial effect of this utility model is that the metal mesh chain includes: a plurality of mesh chain carrying units, wherein the two sides of the mesh chain carrying unit are pin carrying surfaces and the middle is a sparse surface; wherein the sparse surface connects the two pin carrying surfaces and its weaving density is less than that of the pin carrying surfaces, thereby reducing the weight of the entire metal mesh chain and reducing the power consumption of the metal mesh chain.

[0032] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0033] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0034] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a metal mesh chain provided in an embodiment of the present disclosure;

[0036] Figure 2 A side view of a network link carrier unit provided in an embodiment of this disclosure;

[0037] Figure 3 This is a schematic diagram of a second wave pin angle provided in an embodiment of the present disclosure.

[0038] In the picture:

[0039] 1. Wire mesh support unit, 11. Pin support surface, 12. Sparse surface;

[0040] 2. First wave pin; 21. Spiral mesh chain;

[0041] 3. Second wave pin;

[0042] 4. Ejector pin, 41. Ceramic tube, 42. Stainless steel sleeve. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0044] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0045] Silicon wafers need to be dried in a furnace during the production process. The silicon wafers circulate in the furnace through a metal mesh chain. In related technologies, the structure of the metal mesh chain is entirely a mesh chain structure. The entire surface of the mesh chain increases the energy consumption of the entire furnace equipment. Moreover, the furnace equipment is generally quite long, requiring a mesh chain as long as 6 meters. The power required to drive the entire mesh chain is insufficient, which also consumes more electricity.

[0046] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0047] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0048] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0049] like Figure 1As shown, at least one disclosed embodiment provides a metal mesh chain, including: a plurality of mesh chain carrying units 1, wherein the mesh chain carrying unit 1 has pin carrying surfaces 11 on both sides and a sparse surface 12 in the middle; wherein the sparse surface 12 connects the pin carrying surfaces 11 on both sides, and its weaving density is less than that of the pin carrying surfaces 11, thereby reducing the weight of the entire metal mesh chain, so as to reduce the power consumption of the metal mesh chain.

[0050] In this embodiment, the sparse surface 12 includes: a plurality of parallel and equidistantly arranged second wave pins 3; the ejector pin bearing surface 11 includes: a plurality of parallel and equidistantly arranged first wave pins 2; the first wave pins 2 are connected to the corresponding second wave pins 3.

[0051] In this embodiment, adjacent first wave pins 2 are connected by a spiral mesh chain 21, while no spiral mesh chain 21 is provided between the second wave pins 3. This makes the weaving density of the sparse surface 12 less than that of the pin bearing surface 11, reducing the weight of the sparse surface 12 and thus reducing the weight of the entire metal mesh chain. The contact area between the metal mesh chain and the furnace is reduced, thereby reducing the power consumption of the furnace equipment with the metal mesh chain installed.

[0052] In this embodiment, the end of the spiral mesh chain 21 near the second wave pin 3 can be folded inward and welded to the corresponding first wave pin 2, thereby fixing the spiral mesh chain 21 and increasing the firmness of the pin bearing surface 11.

[0053] In this embodiment, the spiral mesh chain 21 can be formed by connecting several herringbone-shaped structures. The cooperation between the spiral mesh chain 21 and the first wave pin 2 makes the gap distribution in the pin bearing surface 11 uniform.

[0054] In one optional embodiment, the second wave pins 3 arranged parallel and equidistantly in the sparse surface 12 are connected to the corresponding first wave pins 2 arranged parallel and equidistantly in the pin bearing surface 11; adjacent first wave pins 2 are connected by a spiral mesh chain 21 so that the weaving density of the pin bearing surface 11 is greater than that of the sparse surface 12; the spiral mesh chain 21 is folded inward at one end near the second wave pin 3 and connected to the corresponding first wave pin 2.

[0055] In this embodiment, the inward folding of the spiral mesh chain 21 and its welding to the first wave pin 2 can improve the strength of the weld.

[0056] In one optional embodiment, the ratio of the sum of the lengths of the first wave pins 2 corresponding to the two pin bearing surfaces 11 to the length of a second wave pin 3 is (1.5-2.5):1.

[0057] In this embodiment, the sum of the lengths of the second wave pin 3 and the two first wave pins 2 can be 289 mm, the length of the second wave pin 3 can be 85 mm, the length of the first wave pin 2 is the distance between its two ends, and the length of the second wave pin 3 is the length between its two ends.

[0058] In this embodiment, the ejector pin bearing surface 11 and the sparse surface 12 may be made of stainless steel or Cr20Ni80 (nickel-chromium alloy) to withstand high temperatures.

[0059] In one alternative implementation, the angle of the arched portion of the second wave pin 3 is the same as the angle of the arched portion of the first wave pin 2.

[0060] In this embodiment, the arched angle of the second wave pin 3 and the arched angle of the first wave pin 2 can both be 135 degrees, etc. If the arched angle of the second wave pin 3 and the arched angle of the first wave pin 2 are the same, then the second wave pin 3 and the two first wave pins 2 of the same strip can be made by an integral molding process.

[0061] In this embodiment, the inner angle of the spiral mesh chain 21 can be 55 degrees and the side length can be 7.55 mm.

[0062] In this embodiment, the angle of the arched portion of the second wave pin 3 and the side length corresponding to the arched portion of the first wave pin 2 can be, but are not limited to, 7.55mm.

[0063] like Figure 3 As shown, in one optional embodiment, the angle of the arched portion of the second wave pin 3 is smaller than the angle of the arched portion of the first wave pin 2.

[0064] In this embodiment, the arched part of the second wave pin 3 has a smaller angle than the arched part of the first wave pin 2, which can make the number of waves on the sparse surface 12 more and the waves more dense, thereby increasing the toughness of the sparse surface 12 and preventing the sparse surface 12 from breaking. For example, the arched part of the second wave pin 3 can be an acute angle such as 85°.

[0065] In one alternative embodiment, the diameter of the second wave pin 3 is larger than the diameter of the first wave pin 2.

[0066] In this embodiment, the diameter of the second wave pin 3 can be made larger than the diameter of the first wave pin 2 by means of titanium plating, so as to increase the thickness and hardness, increase the toughness of the sparse surface 12, and avoid the sparse surface 12 from breaking.

[0067] In this embodiment, a protective layer can be applied to the outer wall of the second wave pin 3 to increase the diameter of the second wave pin 3, increase the toughness of the sparse surface 12, and prevent the sparse surface 12 from breaking.

[0068] like Figure 2 As shown, in one optional embodiment, a plurality of ejector pins 4 are provided on the spiral mesh chain 21 of the ejector pin bearing surface 11, and the ejector pins 4 of the two ejector pin bearing surfaces 11 are staggered; the ejector pins 4 are inclined; and the ejector pins 4 are connected to the bottom surface of the spiral mesh chain 21.

[0069] In this embodiment, the silicon wafer can be supported by the ejector pin 4, and the silicon wafer is suspended between the first wave pin 2 and the second wave pin 3.

[0070] In one optional embodiment, a ceramic tube 41 is sleeved on the ejector pin 4, and a stainless steel sleeve 42 is provided between the lower end of the ceramic tube 41 and the position where the ejector pin 4 is connected to the spiral mesh chain 21.

[0071] In this embodiment, the wear of the ejector pin 4 can be reduced and the service life of the ejector pin 4 can be extended by using the stainless steel sleeve 42 and the ceramic tube 41.

[0072] In this embodiment, the diameter of the ejector pin 4 can be 1.5 mm, the diameter of the spiral mesh chain 21 can be 1.4 mm, and the diameters of the first wave pin 2 and the second wave pin 3 can both be 1.6 mm when they are equal.

[0073] In this embodiment, the highest point of all the ejector pins 4 is on the same plane to stably support the silicon wafer.

[0074] In this embodiment, the outer diameter of the ceramic tube 41 can be 3.6 mm, and the ceramic tube 41 can be, but is not limited to, 95% alumina ceramic.

[0075] In this embodiment, the end of the spiral mesh chain 21 away from the second wave pin 3 can be directly welded to the corresponding first wave pin 2. The weld point is rounded, smooth and burr-free. The welding connection method can maintain the firm connection of the spiral mesh chain 21.

[0076] In this embodiment, the tilt angle of the ejector pin 4 can be approximately 16°.

[0077] At least one other disclosed embodiment also provides a metal mesh chain, comprising: a plurality of mesh chain support units 1, wherein the mesh chain support unit 1 has pin support surfaces 11 on both sides and a sparse surface 12 in the middle; the pin support surface 11 includes: a plurality of parallel and equally spaced first wave pins 2; adjacent first wave pins 2 are connected by a spiral mesh chain 21; the sparse surface 12 includes: a plurality of parallel and equally spaced second wave pins 3; the first wave pins 2 are connected to the corresponding second wave pins 3; the spiral mesh chain 21 is folded inward at one end near the second wave pin 3 and connected to the corresponding first wave pin 2.

[0078] At least one other disclosed embodiment also provides a furnace body device, including: the metal mesh chain described above.

[0079] In summary, this metal mesh chain includes: a plurality of mesh chain carrying units 1, wherein the two sides of the mesh chain carrying unit 1 are pin carrying surfaces 11, and the middle is a sparse surface 12; wherein the sparse surface 12 connects the two pin carrying surfaces 11, and its weaving density is less than that of the pin carrying surfaces 11, thereby reducing the weight of the entire metal mesh chain, so as to reduce the power consumption of the metal mesh chain.

[0080] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0081] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0082] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature and another element or feature illustrated in the figures. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0083] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A metal mesh chain, characterized in that, include: Several network link carrier units (1), among which The two sides of the network chain bearing unit (1) are pin bearing surfaces (11), and the middle is a sparse surface (12). Among them, the sparse surface (12) connects the two sides of the thimble bearing surface (11), and its weaving density is less than that of the thimble bearing surface (11).

2. The metal mesh chain as described in claim 1, characterized in that: The second wave pins (3) arranged in parallel and at equal intervals in the sparse surface (12) are connected to the first wave pins (2) arranged in parallel and at equal intervals in the pin bearing surface (11); Adjacent first wave pins (2) are connected by a spiral mesh chain (21) so that the weaving density of the pin bearing surface (11) is greater than that of the sparse surface (12). The spiral chain (21) is folded inward at one end near the second wave pin (3) and then connected to the corresponding first wave pin (2).

3. The metal mesh chain as described in claim 2, characterized in that: The ratio of the sum of the lengths of the first wave pins (2) corresponding to the two pin bearing surfaces (11) to the length of a second wave pin (3) is (1.5-2.5):

1.

4. The metal mesh chain as described in claim 2, characterized in that: The angle of the arched portion of the second wave pin (3) is the same as the angle of the arched portion of the first wave pin (2).

5. The metal mesh chain as described in claim 2, characterized in that: The angle of the arched portion of the second wave pin (3) is smaller than the angle of the arched portion of the first wave pin (2).

6. The metal mesh chain as described in claim 2, characterized in that: The diameter of the second wave pin (3) is greater than the diameter of the first wave pin (2).

7. The metal mesh chain as described in claim 2, characterized in that: A plurality of ejector pins (4) are provided on the spiral mesh chain (21) of the ejector pin bearing surface (11), and the ejector pins (4) of the two ejector pin bearing surfaces (11) are staggered. The ejector pin (4) is set at an angle; The pin (4) is connected to the bottom surface of the spiral mesh chain (21).

8. The metal mesh chain as described in claim 7, characterized in that: A ceramic tube (41) is fitted on the ejector pin (4), and a stainless steel sleeve (42) is provided between the lower end of the ceramic tube (41) and the position of the spiral mesh chain (21) connecting the ejector pin (4).

9. A metal mesh chain, characterized in that, include: Several network link carrier units (1), among which The two sides of the network chain bearing unit (1) are pin bearing surfaces (11), and the middle is a sparse surface (12). The ejector pin bearing surface (11) includes: a plurality of parallel and equally spaced first wave pins (2); Adjacent first wave pins (2) are connected by a spiral mesh chain (21); The sparse surface (12) includes: a plurality of parallel and equally spaced second wave pins (3); The first wave pin (2) is connected to the corresponding second wave pin (3); The spiral chain (21) is folded inward at one end near the second wave pin (3) and then connected to the corresponding first wave pin (2).

10. A furnace body device, characterized in that, include: The metal mesh chain as described in any one of claims 1-9.

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