A detection device

Abstract

This utility model relates to the field of semiconductor testing technology, specifically to a testing device, which includes: a device for carrying a chip; a first driving component, which is horizontally slidably connected to a testing stage along a first direction; a second driving component, which is horizontally slidably connected to the first driving component along a direction perpendicular to the first driving component; a third driving component, which includes a carrying part and a supporting part, wherein the carrying part drives the supporting part to move toward the chip, and the supporting part is slidably connected to an adjusting shaft along a vertical direction; a vision module, which is fixedly mounted on the adjusting shaft along a vertical direction; and a suction head, which is fixedly mounted on the adjusting shaft along a vertical direction. The suction head and the vision module are relatively stationary, and the adjusting shaft drives the suction head to approach the product to be tested. This application enables the vision module to be finely adjusted to improve the adjustment accuracy, effectively avoids missed or false detections of poor solder joints due to inaccurate focus, and improves the reliability of the testing results.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a testing device. Background Technology

[0002] In the semiconductor industry, the bonding process between the chip and the substrate is a crucial step in the entire manufacturing process. COF (Chip On Frame) technology achieves a highly efficient and compact packaging method by directly connecting the gold bumps of the integrated circuit (IC) to the flexible circuit board (Flm). Specifically, COF technology uses a thermoforming process to bond the gold bumps on the chip to the inner leads on the flexible circuit board; this process is called Inner Lead Bonding (ILB). To further improve the reliability and strength of the bonding, Flip Chip Bonder equipment combines flip chip technology with tape-and-reel packaging technology, utilizing a eutectic process to achieve high-strength IC bonding.

[0003] In this high-precision manufacturing process, the accuracy of lead soldering is crucial. Currently, lead dimensions have reached the 7-micron level, and there are strict requirements for the misalignment of the IC gold bumps and the flexible circuit board bonding positions: a misalignment within 3 microns is considered acceptable. Due to the high precision requirements, dual cameras are now added to inspect the soldering quality of the IC leads at both ends after bonding, thereby ensuring a high yield rate. Simultaneously, the cameras collect 10 sets of bonding deviations between the IC and the flexible circuit board, and the software calculates the average offset of these 10 sets. This offset value is fed back to the front-end ILB machine, which performs positional offset compensation, thus better ensuring the stability of the front-end ILB machine. Existing inspection equipment is insufficient to meet the design requirements. Utility Model Content

[0004] The purpose of this invention is to provide a testing device to solve the problem of re-inspection after the gold bump pads of existing integrated circuits (ICs) are combined with flexible circuit boards (Flm), thereby improving the yield of finished products.

[0005] The technical solution of this utility model is: a testing device, comprising: a testing stage for carrying chips;

[0006] The first drive assembly is horizontally slidably connected to the detection stage along the first direction;

[0007] The second drive component is horizontally slidably connected to the first drive component along a direction perpendicular to the first direction;

[0008] The third driving component includes a carrier and a support. The carrier drives the support to move toward the chip. The support is slidably connected to an adjustment shaft in the vertical direction. A vision module is fixed to the adjustment shaft in the vertical direction. A suction head is fixed to the adjustment shaft in the vertical direction. The suction head and the vision module are relatively stationary. The adjustment shaft drives the suction head to approach the product to be inspected.

[0009] Preferably, the support extends toward the adjustment shaft, and the support is semi-enclosed and slidably connected relative to the adjustment shaft.

[0010] Preferably, the adjusting shaft is slidably connected to a positioning element in the vertical direction, and the suction head is fixed to the positioning element.

[0011] Preferably, the positioning member has a first groove and a second groove on the same side, the first groove and the second groove are distributed in a vertical direction, the vision module is embedded in the first groove and the second groove, the third drive component includes a fastener, the fastener is threadedly connected to the positioning member, and the vision module is clamped between the fastener and the positioning member.

[0012] Preferably, the vision module is provided in two sets, and the vision modules are arranged in the same direction on the first driving component.

[0013] Preferably, the detection stage is provided with a first guide rail arranged along a first direction, the first driving component is slidably connected to the first guide rail, and the first driving component is in two groups, each group of the first driving component carrying the second driving component, the third driving component and the vision module.

[0014] Preferably, the third drive assembly includes a cam, the support portion is fixedly mounted on the second drive assembly, the support portion is slidably connected to the support portion in a vertical direction, the cam is eccentrically rotated and connected to the support portion in a vertical plane, and the bottom of the support portion abuts against the outer contour of the cam.

[0015] Preferably, the bearing part is threadedly connected to a third knob, the output end of the third knob abuts against the outer contour of the cam, and a lifting rod is fixedly provided at the bottom of the support part. Both the lifting rod and the third knob abut against the outer contour of the cam, and the axis of the lifting rod is perpendicular to the axis of the third knob.

[0016] Preferably, the support portion is fixedly provided with a limiting member, the bearing portion is provided with a limiting groove, and the limiting member moves vertically within the limiting groove.

[0017] Compared with the prior art, the advantages of this utility model are:

[0018] (1) Due to the high precision requirements, the quality of the pin soldering position at both ends of the 1C after pin bonding is detected by dual vision modules, so as to ensure the yield rate of output. At the same time, the camera will collect 10 sets of bonding deviations between 1C and flexible circuit board, calculate the average offset of 10 sets by software, and feed the offset value back to the front-end ILB machine. The machine will perform position offset compensation, so as to better ensure the stability of the front-end ILB machine.

[0019] (2) The coordinated operation of the first drive component and the second drive component provides the device with precise two-dimensional plane movement capability for detection. The device can quickly adapt to the detection requirements of chips of different sizes without the need to replace the device or make complex adjustments, which significantly improves the versatility of the device. The eccentric rotation of the cam in the vertical plane controls the vertical adjustment accuracy, so that the support part can control the vision module to make fine adjustments according to the outer contour of the cam to improve the adjustment accuracy. It can effectively avoid the failure to detect or false detection of poor solder joints due to inaccurate focus, and improve the reliability of the detection results. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0021] Figure 1 This is a schematic diagram of the structure of a detection device according to Embodiment 1 of this utility model;

[0022] Figure 2 This is a schematic diagram of the structure of a detection device according to Embodiment 2 of this utility model;

[0023] Figure 3 This is a schematic diagram of the structure of the third drive component described in this utility model;

[0024] Figure 4 This is an exploded structural diagram of the third driving component described in this utility model;

[0025] Figure 5 This is a schematic diagram of the installation structure of the lighting module described in this utility model.

[0026] Explanation of reference numerals in the attached figures:

[0027] 1. Inspection table; 2. First drive assembly; 21. First slider; 22. First knob; 3. Second drive assembly; 31. Second slider; 32. Second knob; 4. Third drive assembly; 41. Bearing part; 42. Cam; 43. Support part; 44. Lifting rod; 45. Third knob; 46. Third guide rail; 47. Limiting component; 471. Limiting groove; 48. Adjusting shaft; 49. Positioning component; 491. First groove; 492. Second groove; 5. First guide rail; 6. Second guide rail; 7. Fastener; 8. Vision module; 9. Suction head. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0030] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Example 1

[0032] like Figures 1 to 5 As shown, a testing device for detecting whether a chip has a cold solder joint includes a testing stage 1, a first driving component 2, a second driving component 3, and a third driving component 4. The first driving component 2 is slidably connected to the testing stage 1 along a first direction, the second driving component 3 is slidably connected to the first driving component 2 along a direction perpendicular to a second direction, and the third driving component 4 is slidably connected to the second driving component 3 along a vertical direction.

[0033] The output of the third driving component 4 is equipped with a vision module 8 for chip inspection and a suction head 9 for adjusting the chip's state. The first driving component 2 and the second driving component 3 drive the vision module 8 to position the chip on the inspection stage 1 to accommodate chips of different sizes. The third driving component 4 drives the vision module 8 and the suction head 9 to move vertically, controlling the focal length of the vision module 8 and its visible range. This ensures clear imaging of chip surfaces of varying thicknesses and heights, avoiding missed or false detections of poor solder joints due to inaccurate focal length, effectively identifying minute solder joint defects, reducing the missed and false detection rates, and improving the reliability of the inspection results.

[0034] The top surface of the testing station 1 is configured as a horizontal plane. The chip to be tested can be fed by a feeding mechanism or manually. This embodiment exemplifies a strip-shaped integrated chip (not shown in the figure), which has multiple soldered chips arranged in an adjustable manner. The chip passes through the testing station 1 in a first direction via the feeding mechanism. In actual testing, chips of different sizes are mapped to strip-shaped integrated chips of different sizes.

[0035] A first guide rail 5 is fixedly mounted on the top end face of the testing station 1. The first guide rail 5 is located near the edge of the top of the testing station 1, reserving a testing area for chip testing. A second guide rail 6 is arranged along a first direction. The first driving component 2 includes a first slider 21 and a first knob 22. The first slider 21 is slidably connected to the first guide rail 5 along the first direction, and the first knob 22 controls the sliding of the first slider 21. Specifically, the first knob 22 controls the sliding of the first slider 21 through a lead screw transmission mechanism to precisely control the sliding stroke of the first slider 21.

[0036] The first slider 21 is provided with a second guide rail 6, which is horizontally fixed to the top of the first slider 21 along a direction perpendicular to the first direction. That is, the second guide rail 6 extends upward towards the detection area, but does not exceed the detection area, thus preventing the field of view of the vision module 8 from covering the chip to be detected within the undetected detection area. The second sliding assembly includes a second slider 31 and a second knob 32. The second slider 31 is slidably connected to the second guide rail 6 along the second direction, and the second knob 32 controls the sliding of the second slider 31. Specifically, the second knob 32 controls the sliding of the second slider 31 through a lead screw transmission mechanism to precisely control the sliding stroke of the second slider 31. In other variations, the first drive assembly 2 and the second drive assembly 3 can be linear modules or pneumatic sliding assemblies.

[0037] The third drive assembly 4 includes a carrier portion 41 and a support portion 43. The carrier portion 41 drives the support portion 43 to slide, that is, the support portion 43 slides relative to the carrier portion 41 toward the direction closer to the chip. Compared with the existing stroke adjustment mechanism, the third drive assembly 4 increases the adjustment stroke to accommodate larger products, enabling the equipment to directly handle larger products without replacing the equipment or redesigning the mechanism, thus significantly improving the versatility of the equipment.

[0038] The support portion 41 is slidably connected to an adjusting shaft 48 arranged in a vertical direction, and the suction head 9 is fixed on the adjusting shaft 48. The support portion 43 extends toward the adjusting shaft 48, and the support portion 43 is semi-enclosed and slidably connected to the adjusting shaft 48. Preferably, the support portion 43 is semi-enclosed and slidably connected to the adjusting shaft 48.

[0039] More preferably, a positioning member 49 is slidably provided on the side of the adjusting shaft 48 away from the support part 43. That is, the positioning member 49 is located between the suction head 9 and the adjusting shaft 48. The suction head 9 is slidably connected to the adjusting shaft 48 through the positioning member 49. Specifically, both the positioning member 49 and the support part 43 are in contact with the outer surface of the adjusting shaft 48 to improve the movement accuracy of the positioning member 49 and reduce the risk of the positioning member 49 shaking.

[0040] The positioning member 49 has a first groove 491 and a second groove 492 on its side opposite to the adjusting shaft 48. Specifically, the first groove 491 and the second groove 492 are both concentric arc grooves. In this embodiment, the curvature of the first groove 491 is different from that of the second groove 492 to adapt to the outer contour of the suction head 9. The outer contour of the suction head 9 fits into the first groove 491 and the second groove 492, so that the axis of the suction head 9 is vertically set, avoiding the suction head 9 from tilting and affecting the detection accuracy. The third drive assembly 4 also includes a fastener 7, which is threadedly connected to the positioning member 49. The suction head 9 is clamped between the fastener 7 and the positioning member 49 to fix the suction head 9. At the same time, the fastener 7 can be quickly disassembled to facilitate the replacement or maintenance of the suction head 9.

[0041] The vision module 8 is fixed to the suction head 9, which extends toward the inspection stage 1. The vision module 8 performs visual inspection on the chip to ensure that the features of the chip being inspected are accurately captured, thereby improving the inspection accuracy and reliability.

[0042] In this embodiment, the first guide rail 5 is slidably connected to two sets of first drive components 2. The two sets of first drive components 2 are independent of each other. Each set of first drive components 2 carries the second drive component 3, the third drive component 4, the vision module 8 and the suction head 9, so as to improve detection efficiency and detection accuracy.

[0043] Example 2:

[0044] The third drive assembly 4 includes a cam 42, and a support portion 41 is fixedly mounted on the second drive assembly 3. Specifically, the support portion 41 is fixedly mounted on the second slider 31 and slides with the second slider 31 in a direction perpendicular to the first direction. A support portion 43 slides vertically and is connected to the support portion 41. The cam 42 is eccentrically rotated in the vertical plane and connected to the support portion 41. The bottom of the support portion 43 abuts against the outer contour of the cam 42. Preferably, a lifting rod 44 is fixedly mounted at the bottom of the support portion 43. The central axis of the lifting rod 44 is a vertical axis, and the lifting rod 44 extends downward to abut against the outer contour of the cam 42. Preferably, the diameter of the abutting end of the lifting rod 44 and the cam 42 is reduced to decrease the contact area between the lifting rod 44 and the cam 42, thereby reducing friction and wear, improving motion accuracy and power transmission efficiency, and making its operation smoother.

[0045] The bearing part 41 is threadedly connected to a third knob 45. The output end of the third knob 45 abuts against the outer contour of the cam 42. The bottom of the support part 43 is fixedly provided with a lifting rod 44. Both the lifting rod 44 and the third knob 45 abut against the outer contour of the cam 42. The axis of the lifting rod 44 is perpendicular to the axis of the third knob 45, that is, the axis of the third knob 45 is a horizontal axis.

[0046] Multiple third guide rails 46 are fixedly mounted on the side of the support part 41 opposite to the cam 42. The side wall of the support part 43 is slidably connected to the third guide rails 46. That is, the cam 42 and the third guide rails 46 are located on two opposite sides of the support part 41. The third guide rails 46 provide a clear lifting path for the support part 43, ensuring that the support part 43 will not deviate from the predetermined trajectory during lifting. The arrangement of multiple third guide rails 46 makes the force on the support part 43 more distributed, avoiding deformation or damage caused by excessive force at a single point, thereby improving the stability of the support part 43 during lifting.

[0047] The support part 43 is fixedly provided with a limiting member 47, and the bearing part 41 is provided with a limiting groove 471. The limiting member 47 moves vertically within the limiting groove 471. Specifically, the limiting groove 471 is an oblong groove along the vertical direction. The limiting groove 471 restricts the upper and lower limits of the movement of the support part 43, so that the limiting member 47 has a certain amount of fine adjustment space within the limiting groove 471. This facilitates the precise adjustment of the position of the support part 43 according to actual needs, and helps to ensure accuracy and reliability during operation.

[0048] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A testing device, characterized in that, include: Testing station (1), used to hold the chip; The first drive assembly (2) is horizontally slidably connected to the detection stage (1) along the first direction; The second drive component (3) is horizontally slidably connected to the first drive component (2) along a direction perpendicular to the first direction; The third driving component (4) includes a carrier (41) and a support (43). The carrier (41) drives the support (43) to move toward the chip. The support (43) is slidably connected to an adjustment shaft (48) in the vertical direction. The vision module (8) is fixed to the adjustment shaft (48) in the vertical direction; The suction head (9) is fixed vertically to the adjustment shaft (48). The suction head (9) and the vision module (8) are relatively stationary. The adjustment shaft (48) drives the suction head (9) to approach the product to be inspected.

2. The detection device according to claim 1, characterized in that: The support (43) extends toward the adjustment shaft (48) and is semi-enclosed and slidably connected to the adjustment shaft (48).

3. The detection device according to claim 2, characterized in that: The adjusting shaft (48) is slidably connected to the positioning element (49) in the vertical direction, and the suction head (9) is fixed to the positioning element (49).

4. The detection device according to claim 3, characterized in that: The positioning member (49) has a first groove (491) and a second groove (492) on the same side. The first groove (491) and the second groove (492) are distributed in the vertical direction. The vision module (8) is embedded in the first groove (491) and the second groove (492). The third drive component (4) includes a fastener (7). The fastener (7) is threadedly connected to the positioning member (49). The vision module (8) is clamped between the fastener (7) and the positioning member (49).

5. The detection device according to claim 1, characterized in that: The vision module (8) is provided in two sets, and the vision module (8) is arranged in the same direction on the first driving component (2).

6. The detection device according to claim 1, characterized in that: The detection stage (1) is provided with a first guide rail (5) arranged along a first direction. The first drive component (2) is slidably connected to the first guide rail (5). The first drive component (2) consists of two groups, and each group of the first drive component (2) carries the second drive component (3), the third drive component (4), and the vision module (8).

7. The detection device according to claim 1, characterized in that: The third drive assembly (4) includes a cam (42), the support part (41) is fixed to the second drive assembly (3), the support part (41) is fixed to the second drive assembly (3), the support part (43) is slidably connected to the support part (41) in the vertical direction, the cam (42) is eccentrically rotated in the vertical plane and connected to the support part (41), and the bottom of the support part (43) abuts against the outer contour of the cam (42).

8. The detection device according to claim 7, characterized in that: The bearing part (41) is threadedly connected to a third knob (45). The output end of the third knob (45) abuts against the outer contour of the cam (42). The bottom of the support part (43) is fixedly provided with a lifting rod (44). Both the lifting rod (44) and the third knob (45) abut against the outer contour of the cam (42). The axis of the lifting rod (44) is perpendicular to the axis of the third knob (45).

9. The detection device according to claim 8, characterized in that: The support part (43) is fixed with a limiting member (47), and the bearing part (41) has a limiting groove (471). The limiting member (47) moves vertically within the limiting groove (471).

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