An adaptive substrate positioning block for a uniform gel baking process

Abstract

The utility model relates to a kind of self-adapting substrate positioning blocks for uniform glue baking process, including support module, and with the top corner limiting module being connected to support module, the support module is used to support substrate, the top corner limiting module is used to limit the movement of substrate in horizontal direction;The support module includes a bottom plate;The top corner limiting module includes a top corner limiting block, including first side surface and second side surface thereon, the first side surface and second side surface are perpendicular to the bottom plate, and the first side surface and second side surface are set on the same side of the bottom plate;The first side surface and second side surface have a certain included angle between them.The substrate positioning block provided by the utility model can ensure that the substrate is still stably positioned within the normal error range of the mechanical arm, while reducing the pollution and indentation on the back of the substrate.

Description

Technical Field

[0001] This utility model relates to the field of spin coating and baking, and in particular to an adaptive substrate positioning block for spin coating and baking processes. Background Technology

[0002] Positioning blocks for photomasks are key components in the semiconductor spin coating process. Their main function is to precisely position the photomask (such as a silicon wafer or photomask) in the hot plate heating area after photoresist spin coating, ensuring uniform heating of the photomask.

[0003] like Figure 1 As shown, the original positioning block and the substrate have a sloping contact surface. When the robotic arm used to place the substrate in the design position determined by the positioning block accumulates errors due to long-term use, the landing point of the substrate will be offset from the design position, which will cause the substrate to tilt. This will result in uneven baking temperature distribution of the substrate and ultimately abnormal critical dimension uniformity (CDU) after development.

[0004] Therefore, there is an urgent need to design a substrate positioning block that can solve the above problems. Utility Model Content

[0005] Based on this, the purpose of this utility model is to overcome the defects or deficiencies of the prior art and provide an adaptive substrate positioning block for a spin coating and baking process, comprising:

[0006] A support module and a apex corner limiting module connected to the support module, wherein the support module is used to support the substrate and the apex corner limiting module is used to limit the movement of the substrate in the horizontal direction;

[0007] The support module includes a base plate;

[0008] The top corner limiting module is fixedly connected to the base plate.

[0009] In one embodiment, the top corner limiting module includes a first side plate and a second side plate, the first side plate and the second side plate being vertically and fixedly connected to the bottom plate, and the first side plate and the second side plate being disposed on the same side of the bottom plate; the first side plate and the second side plate having a certain included angle.

[0010] In one embodiment, the apex corner limiting module includes an apex corner limiting block, which includes a first side surface and a second side surface. The first side surface and the second side surface are perpendicular to the base plate and are disposed on the same side of the base plate. The first side surface and the second side surface have a certain included angle.

[0011] Compared to existing technologies, the adaptive substrate positioning block provided by this invention ensures that the substrate can still be stably positioned within the normal error range of the robotic arm.

[0012] In one embodiment, the included angle between the first side plate and the second side plate is 90°.

[0013] In one embodiment, the included angle between the first side surface and the second side surface is 90°.

[0014] In one embodiment, the support module further includes a protrusion disposed on the base plate.

[0015] In one embodiment, a fixing module connected to the support module and / or the support module is further included, the fixing module being used to fix the substrate positioning block.

[0016] In one embodiment, the fixing module is a fixing pin fixedly disposed in the base plate at the end face away from the contact with the substrate.

[0017] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a substrate positioning block structure in the prior art;

[0019] Figure 2 This is a schematic diagram of the substrate positioning block structure of the present invention, which has a first side plate and a second side plate.

[0020] Figure 3 This is a schematic diagram of the substrate positioning block structure with a top corner limiting block according to the present invention;

[0021] Figure 4 For the present utility model in Figure 2 A schematic diagram of a substrate positioning block structure with protrusions based on the above.

[0022] Figure 5 For the present utility model in Figure 3 A schematic diagram of a substrate positioning block structure with protrusions. Detailed Implementation

[0023] The present invention will now be described in detail with reference to the accompanying drawings.

[0024] like Figure 1 As shown in Embodiment 1 of this utility model, an adaptive substrate positioning block for a uniform coating baking process is provided, including a support module 10 and a top corner limiting module 20 connected to the support module 10. The support module 10 is used to support the substrate, and the top corner limiting module 20 is used to limit the movement of the substrate in the horizontal direction.

[0025] The support module 10 includes a base plate 11; specifically, the base plate 11 is in contact with the substrate, so the base plate 11 needs to provide sufficient contact area to distribute the weight of the substrate and prevent the base plate 11 from deforming or being damaged.

[0026] In one embodiment, such as Figure 2 As shown, the top corner limiting module 20 includes a first side plate 21 and a second side plate 22. The first side plate 21 and the second side plate 22 are perpendicularly connected to the bottom plate 11, and the first side plate 21 and the second side plate 22 are disposed on the same side of the bottom plate 11; there is a certain included angle between the first side plate 21 and the second side plate 22.

[0027] Furthermore, in order to prevent the substrate from moving in the horizontal direction and to accommodate substrates of various shapes, the included angle between the first side plate 21 and the second side plate 22 is 90°, that is, they are vertically arranged.

[0028] In one embodiment, such as Figure 3 As shown, in order to improve actual production efficiency and simplify production processes, the top corner limiting module 20 includes a top corner limiting block 23, which includes a first side surface 23A and a second side surface 23B. The first side surface 23A and the second side surface 23B are perpendicular to the base plate 11, and the first side surface 23A and the second side surface 23B are located on the same side of the base plate 11; there is a certain included angle between the first side surface 23A and the second side surface 23B.

[0029] Furthermore, in order to prevent the substrate from moving in the horizontal direction and to accommodate substrates of various shapes, the included angle between the first side surface 23A and the second side surface 23B is 90°, that is, it is set vertically.

[0030] like Figure 4 , Figure 5 As shown, since the base plate 11 is in direct contact with the substrate, contamination and indentations may occur on the surface where the substrate contacts the base plate 11. Therefore, in order to obtain the support strength provided by the support module 10 while solving the above problems, the support module 10 also includes a protrusion 12 disposed on the base plate 11. At this time, the surface contact between the substrate and the base plate 11 is changed to a point contact between the substrate and the protrusion 12.

[0031] Furthermore, it also includes a fixing module connected to the support module 10 and / or the support module 10, the fixing module being used to fix the substrate positioning block, so that when the substrate is placed on the support module 10, the substrate can be fixed relative to the hot plate; in this application, the fixing module is a fixing pin fixedly disposed in the base plate away from the end face that contacts the substrate.

[0032] In practical applications, at least two adaptive substrate positioning blocks are required to support and position the substrate, specifically including a first positioning block and a second positioning block. In this application, the substrate is a square plate, and one apex of the substrate is positioned on the first positioning block, while the other apex opposite its diagonal is positioned on the second positioning block.

[0033] Furthermore, in order to ensure that the base plate can still be correctly positioned when the robotic arm deviates normally, the relative distance between the first positioning block and the second positioning block is equal to the distance between the two corners of the first positioning block and the second positioning block, respectively, plus the normal deviation distance of the robotic arm.

[0034] Compared with existing technologies, the adaptive substrate positioning block provided by this utility model ensures that the substrate can be stably positioned within the normal error range of the robotic arm, while reducing contamination and indentations on the back of the substrate.

[0035] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to limit the embodiments of this application. The singular forms “a,” “the,” and “the” used in the embodiments and claims of this application are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that, unless otherwise stated, “a plurality” means two or more; the terms “first,” “second,” “third,” etc., are used only to distinguish and not to describe a particular order or sequence, nor should they be construed as indicating or implying relative importance. The term “and / or” as used herein refers to and includes any or all possible combinations of one or more associated listed items. When the above description relates to drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. In the description of this application, those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An adaptive substrate positioning block for a spin coating and baking process, characterized in that, include: A support module and a apex corner limiting module connected to the support module, wherein the support module is used to support the substrate and the apex corner limiting module is used to limit the movement of the substrate in the horizontal direction; The support module includes a base plate; The top corner limiting module is fixedly connected to the base plate.

2. The adaptive substrate positioning block according to claim 1, characterized in that: The top corner limiting module includes a first side plate and a second side plate. The first side plate and the second side plate are vertically and fixedly connected to the bottom plate, and the first side plate and the second side plate are disposed on the same side of the bottom plate. There is a certain angle between the first side plate and the second side plate.

3. The adaptive substrate positioning block according to claim 1, characterized in that: The apex corner limiting module includes an apex corner limiting block, which includes a first side surface and a second side surface. The first side surface and the second side surface are perpendicular to the base plate and are located on the same side of the base plate. The first side surface and the second side surface have a certain included angle.

4. The adaptive substrate positioning block according to claim 2, characterized in that: The included angle between the first side plate and the second side plate is 90°.

5. The adaptive substrate positioning block according to claim 3, characterized in that: The included angle between the first side surface and the second side surface is 90°.

6. The adaptive substrate positioning block according to claim 4 or 5, characterized in that: The support module also includes protrusions disposed on the base plate.

7. The adaptive substrate positioning block according to claim 6, characterized in that: It also includes a fixing module connected to the support module and / or the support module, the fixing module being used to fix the substrate positioning block.

8. The adaptive substrate positioning block according to claim 7, characterized in that: The fixing module is a fixing pin that is fixedly installed in the base plate on the end face away from the contact with the substrate.

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