Probe fixing device with damping module and grinding machine

Abstract

The utility model discloses a kind of probe fixing device with damping module, including installation platform, the surface of installation platform is provided with hollow main shaft, installation platform side is provided with cantilever platform, it is connected with driving motor on cantilever platform through L type support, the output shaft of driving motor is connected with hollow main shaft through transmission belt, the body of driving motor is connected with damping sleeve, at least three shock absorbing legs are arranged on the bottom surface of damping sleeve, the bottom of shock absorbing leg is abutted with bottom plate, screw slide table is further arranged between installation platform and bottom plate;A kind of grinding device is also disclosed, using the probe fixing device described above.The utility model can reduce motor vibration, improve machining accuracy.

Description

Technical Field

[0001] This utility model relates to the field of STM probe grinding technology, specifically to a probe fixing device with a shock absorption module and a grinding machine. Background Technology

[0002] STM stands for Scanning Tunneling Microscope. Its working principle is based on the quantum tunneling effect. During detection, a probe is required, and the quality of the probe directly affects the imaging effect and measurement accuracy of the STM.

[0003] Currently, probes are typically processed using electrochemical etching or grinding methods to prepare their tips. Our company has developed a related grinding device to ensure processing accuracy and efficiency. During processing, two motors drive the device. The front end of the main motor is fixed by a clamp and connected to the spindle via a gear belt, thereby driving the spindle. The spindle has a hollow structure with a quick-release chuck at the end. The probe extends into the spindle from the tail end and extends out from the quick-release chuck and is fixed in place. The rotation of the spindle causes the probe to rotate. Since the probe is manually inserted into the spindle, it is suspended inside the spindle with its tail end suspended outside the spindle. Another motor drives a grinding wheel to rotate, thus achieving the grinding effect on the tip of the probe.

[0004] During the machining process, because the main motor is semi-suspended and fixed, the vibration generated by its rotation is transmitted to the spindle and then to the probe. The probe experiences slight oscillation during rotation, which affects machining accuracy and leads to poor machining results. Specifically, during rough grinding, it can cause the needle tip to become misaligned; during fine grinding, the vibration can cause the needle tip to be bent. Furthermore, the vibration during the operation of the main machine affects the lifespan of the spindle. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to provide a probe fixing device and a grinding machine with a shock absorption module, which can reduce the vibration amplitude of the drive motor, improve processing accuracy, and increase the yield.

[0006] To address the aforementioned technical problems, this utility model provides a probe fixing device with a shock-absorbing module, comprising an installation platform, a hollow main shaft on the surface of the installation platform, a cantilever platform on one side of the installation platform, an L-shaped bracket connecting the cantilever platform to a drive motor, the output shaft of the drive motor being connected to the hollow main shaft via a transmission belt, the body of the drive motor being connected to a shock-absorbing sleeve, at least three shock-absorbing legs on the bottom surface of the shock-absorbing sleeve, the bottom of the shock-absorbing legs abutting against a base plate, and a lead screw slide between the installation platform and the base plate.

[0007] Furthermore, the shock-absorbing outrigger includes a shock-absorbing support tube, a spring is installed inside the shock-absorbing support tube, and a telescopic outrigger is installed at the bottom of the shock-absorbing support tube, with one end of the telescopic outrigger extending into the shock-absorbing support tube and abutting against the spring.

[0008] Furthermore, a limiting ring is provided at the bottom of the shock-absorbing support tube, and a guide post is provided inside the limiting ring for the telescopic support foot. One end of the guide post is located inside the shock-absorbing support tube and is fixedly connected to the limiting plate, while the other end of the guide post is located outside and is connected to the pad foot.

[0009] Furthermore, a sealing plate is provided at the top of the shock-absorbing support tube, and a threaded rod is provided on the sealing plate. An internally threaded mounting block is provided on the shock-absorbing sleeve corresponding to the threaded rod, and the shock-absorbing support tube is locked to the internally threaded mounting block through the threaded rod.

[0010] Furthermore, the limiting ring and the shock-absorbing support tube are connected by threads.

[0011] Furthermore, a rubber pad layer is provided inside the shock-absorbing sleeve, and a radial locking hole is provided on the shock-absorbing sleeve, with a fixing bolt installed inside the radial locking hole.

[0012] Furthermore, the lead screw slide is fixedly mounted on the rotating platform, and one end of the rotating platform is shaft-connected to the base plate.

[0013] A grinding machine, comprising the probe fixing device described in any one of the above claims.

[0014] The beneficial effects of this utility model are:

[0015] The drive motor is assisted in being fixed by using a combination of shock-absorbing sleeves and shock-absorbing legs. During the operation of the drive motor, this can effectively alleviate the instability caused by the vibration of the drive motor, thereby improving the quality and yield of probe grinding. It also optimizes the working environment and reduces the harm of noise to the human body. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a utility model Figure 1 Another structural diagram from a different perspective;

[0018] Figure 3 This is a schematic diagram of the cross-sectional structure of the shock-absorbing support leg of this utility model;

[0019] Figure 4 This is a schematic diagram of the bottom structure of the shock-absorbing support leg of this utility model. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0021] Reference Figure 1 and Figure 2 As shown, one embodiment of the probe fixing device with shock absorption module of this utility model includes a mounting platform 1, a hollow main shaft 2 provided on the surface of the mounting platform, a cantilever platform 3 provided on one side of the mounting platform, an L-shaped bracket 4 connected to a drive motor 5 on the cantilever platform, the output shaft of the drive motor connected to the hollow main shaft through a transmission belt 6, the body of the drive motor connected to a shock absorption sleeve 7, at least three shock absorption legs 8 provided on the bottom surface of the shock absorption sleeve, the bottom of the shock absorption legs abutting against a base plate 9, and a lead screw slide 10 provided between the mounting platform and the base plate.

[0022] The probe is inserted from the tail end of the hollow spindle and extends from the head end. A quick-lock head is provided on the head end of the hollow spindle to clamp and fix the probe. Then, the drive motor drives the hollow spindle to rotate through the transmission belt. The hollow spindle drives the probe to rotate. In the above structure, the shock-absorbing legs can reduce the vibration generated by the drive motor during operation on the surface of the base plate, thereby playing a shock-absorbing role. This makes the drive motor rotate stably, and drives the rotating hollow spindle to rotate stably. In other words, the vibration of the probe fixed on the hollow spindle is effectively controlled. During the grinding process, the probe tip can effectively maintain the axial position, resulting in good grinding effect, high quality, and high efficiency.

[0023] Reference Figure 3 and Figure 4 As shown, the aforementioned shock-absorbing support leg includes a shock-absorbing support tube 11, a spring 12 installed inside the shock-absorbing support tube, and a telescopic support foot 13 at the bottom of the shock-absorbing support tube. One end of the telescopic support foot extends into the shock-absorbing support tube and abuts against the spring. When the drive motor vibrates during operation, the vibration is transmitted to the shock-absorbing support leg through the shock-absorbing sleeve fitted on the surface, where the shock-absorbing support leg provides shock absorption. Specifically, the shock-absorbing support tube and the shock-absorbing sleeve of the shock-absorbing support leg are fixed as one piece, while the telescopic support foot at the bottom can move axially upward on the shock-absorbing support tube and is subjected to force by the spring. The vibration of the drive motor is transmitted from the shock-absorbing sleeve to the shock-absorbing support tube, and the telescopic support foot abuts against the base plate. Therefore, the spring plays a deformation buffering role between the telescopic support foot and the shock-absorbing support tube, effectively absorbing and mitigating the transmitted vibration. Thus, the reaction force can effectively ensure the stable operation of the drive motor, ensuring that the probe will not vibrate due to the vibration generated by the drive motor when rotating.

[0024] The bottom of the aforementioned shock-absorbing support tube is provided with a limiting ring 14, and the telescopic outrigger is encased in a guide post 15 inside the limiting ring. One end of the guide post is located inside the shock-absorbing support tube and is fixedly connected to the limiting plate 16, while the other end of the guide post is located outside and is connected to the pad 17. The guide post achieves axial movement under the action of the limiting ring. Furthermore, the setting of the limiting plate and the pad prevents the telescopic outrigger from falling off the bottom of the shock-absorbing support tube. The limiting plate inside the shock-absorbing support tube also plays a guiding role, working in conjunction with the limiting ring and the guide post to achieve a good guiding effect, improve stability during axial movement, and the limiting plate also provides a larger contact area with the spring.

[0025] In this probe fixing device, the drive motor used is small and generally has a cylindrical structure. Therefore, the shock-absorbing sleeve can also be designed as a cylindrical structure with the internal structure consistent with the outer surface structure of the drive motor. It is designed to mimic the shape and is equipped with a rubber pad or rubber ring, which can further enhance the shock absorption effect. A radial locking hole 21 is provided on the shock-absorbing sleeve, and a fixing bolt is provided in the radial locking hole. The fixing bolt rotates and extends into the inside of the shock-absorbing sleeve, pressing the drive motor against the inner wall on the opposite side. The installation is quick and the fixing is reliable.

[0026] For ease of assembly, a sealing plate 18 is provided at the top of the shock-absorbing support tube, and a threaded rod 19 is provided on the sealing plate. An internally threaded mounting block 20 is provided on the shock-absorbing sleeve corresponding to the threaded rod. The shock-absorbing support tube is locked to the internally threaded mounting block via the threaded rod, and a limiting ring is threadedly connected to the shock-absorbing support tube. This allows the shock-absorbing support tube to be quickly locked to the threaded mounting block fixed on the shock-absorbing sleeve, facilitating easy assembly and disassembly. Different lengths of the shock-absorbing support tube can also be replaced, and it is easy to manufacture. Furthermore, the threaded limiting ring facilitates the assembly of the telescopic outriggers and the insertion of the spring, greatly reducing the assembly difficulty.

[0027] To allow adjustment of the probe tip's taper angle during grinding, a rotating platform 22 is fixedly mounted on the lead screw slide. One end of the rotating platform is connected to the base plate shaft. The rotation of the platform allows the probe to form a non-90-degree angle with the grinding wheel surface at the grinding position, resulting in taper angle structures of varying degrees after grinding. The three shock-absorbing legs, being in contact with the base plate, move automatically during the rotation of the rotating platform, eliminating the need for disassembly and ensuring excellent performance.

[0028] This application also provides a grinding machine, including the probe fixing device described above, and a Y-axis platform for fixing the grinding wheel. The rotating platform can drive the hollow spindle to swing and rotate, that is, the probe swings and rotates, thereby achieving the included angle between the probe and the grinding wheel to grind the probe tip with different taper requirements. The lead screw slide can drive the probe to move in the X-axis direction. The grinding wheel is fixed on the Y-axis platform and can move in the Y-axis direction to achieve grinding of the probe tip.

[0029] The above embodiments are merely preferred embodiments provided to fully illustrate the present utility model, and the protection scope of the present utility model is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present utility model are all within the protection scope of the present utility model.

Claims

1. A probe fixing device with a shock absorption module, characterized in that, The device includes an installation platform with a hollow main shaft on its surface. A cantilever platform is provided on one side of the installation platform. The cantilever platform is connected to a drive motor via an L-shaped bracket. The output shaft of the drive motor is connected to the hollow main shaft via a transmission belt. The body of the drive motor is connected to a shock-absorbing sleeve. At least three shock-absorbing legs are provided on the bottom surface of the shock-absorbing sleeve. The bottom of the shock-absorbing legs abuts against the base plate. A lead screw slide is also provided between the installation platform and the base plate.

2. The probe fixing device with a shock absorption module as described in claim 1, characterized in that, The shock-absorbing support leg includes a shock-absorbing support tube, a spring is installed inside the shock-absorbing support tube, and a telescopic support foot is installed at the bottom of the shock-absorbing support tube. One end of the telescopic support foot extends into the shock-absorbing support tube and abuts against the spring.

3. The probe fixing device with a shock absorption module as described in claim 2, characterized in that, The bottom of the shock-absorbing support tube is provided with a limiting ring, and the telescopic support foot includes a guide post set in the limiting ring. One end of the guide post is located inside the shock-absorbing support tube and is fixedly connected to the limiting plate, while the other end of the guide post is located outside and is connected to the pad foot.

4. The probe fixing device with a shock absorption module as described in claim 3, characterized in that, The top of the shock-absorbing support tube is provided with a sealing plate, and a threaded rod is provided on the sealing plate. An internal threaded mounting block is provided on the shock-absorbing sleeve corresponding to the threaded rod. The shock-absorbing support tube is locked to the internal threaded mounting block through the threaded rod.

5. The probe fixing device with a shock absorption module as described in claim 4, characterized in that, The limiting ring and the shock-absorbing support tube are connected by threads.

6. The probe fixing device with a shock absorption module as described in claim 1, characterized in that, The shock-absorbing sleeve is provided with a rubber pad layer inside, and a radial locking hole is provided on the shock-absorbing sleeve, with a fixing bolt installed in the radial locking hole.

7. The probe fixing device with a shock absorption module as described in claim 1, characterized in that, The lead screw slide is fixedly mounted on the rotating platform, and one end of the rotating platform is shaft-connected to the base plate.

8. A grinding mill, characterized in that, Includes the probe fixing device according to any one of claims 1-7.

Images