Converging tube assembly and single crystal furnace

Abstract

The application belongs to the technical field of single crystal furnaces, and particularly relates to a flow guide cylinder assembly and a single crystal furnace. The flow guide cylinder assembly comprises a flow guide cylinder, a flow guide cylinder end cover and a flow guide cylinder hanger, the flow guide cylinder hanger comprises a connecting assembly arranged between the flow guide cylinder and the flow guide cylinder end cover, and a molybdenum rod for locking and separating with the connecting assembly. The connection relationship between the flow guide cylinder hanger and the flow guide cylinder is controlled through locking and separating between the molybdenum rod and the connecting assembly. Since the connecting assembly is arranged between the flow guide cylinder and the flow guide cylinder end cover, the flow guide cylinder can form effective physical isolation between the lower end of the flow guide cylinder hanger and the high-temperature environment in the single crystal furnace, thereby effectively avoiding the oxidation and corrosion problems of the connecting assembly contained in the lower end of the flow guide cylinder hanger caused by high temperature.

Description

Technical Field

[0001] This application belongs to the field of single crystal furnace technology, specifically relating to flow guide tube components and single crystal furnaces. Background Technology

[0002] During the operation of the single crystal furnace, the guide tube is suspended on the water-cooled screen and rises and falls together with the water-cooled screen. The bottom end of the guide tube is generally exposed to the environment of the single crystal furnace. Due to continuous exposure to the high temperature environment inside the single crystal furnace, surface oxidation and corrosion occur, which significantly reduces the service life. Utility Model Content

[0003] One objective of this application is to provide a flow guide assembly to solve the oxidation problem caused by the bottom end of the suspension component being exposed to the high-temperature environment inside the single crystal furnace.

[0004] Another objective of this application is to provide a single crystal furnace, wherein the single crystal furnace includes the above-described flow guide tube assembly.

[0005] According to an embodiment of this application, a first aspect provides a flow guide assembly, the flow guide assembly comprising: a flow guide, a flow guide end cap, and a flow guide hanger, wherein the flow guide end cap is located on the upper end face of the flow guide, and the flow guide hanger comprises:

[0006] A connecting component is disposed between the upper end face of the guide tube and the end cap of the guide tube;

[0007] A molybdenum rod, the upper end of which is located outside the end cap of the guide tube and is used to suspend the guide tube assembly, and the lower end of which passes through the end cap of the guide tube and can be selectively locked or unlocked with the connecting assembly.

[0008] In one embodiment, the lower end of the molybdenum rod has a mating portion, which is locked to the connecting assembly when in a first position and unlocked from the connecting assembly when in a second position.

[0009] In one embodiment, the dimension of the mating part along a first direction is greater than the dimension along a second direction, wherein both the first direction and the second direction are perpendicular to the axial direction of the molybdenum rod, and there is a predetermined angle between the first direction and the second direction, and the mating part switches between the first position and the second position by rotating the predetermined angle.

[0010] In one embodiment, the upper end of the molybdenum rod has a detachably connected connecting portion, the size of which is larger than the outer diameter of the molybdenum rod.

[0011] In one embodiment, the connecting assembly includes at least a mounting plate with a through channel extending axially along the molybdenum rod. When the mating part is in the first position, it can pass through the through channel to unlock. When the mating part is in the second position, both ends of the mating part abut against the bottom edge of the through channel along the first direction to lock.

[0012] In one embodiment, the bottom of the mounting plate is provided with a receiving groove that is recessed inward from the bottom surface of the mounting plate, and the receiving groove provides rotational space for the mating part to switch between the first position and the second position.

[0013] In one embodiment, the mounting plate is further provided with a recessed groove extending inward from the bottom of the receiving groove, the groove communicating with the receiving groove and the through channel, the groove accommodating the mating portion when in the second position.

[0014] In one embodiment, the connecting component further includes fasteners, and the mounting plate is mounted on the upper end face of the guide tube via the fasteners. The mounting plate and the fasteners are both made of graphene.

[0015] In one embodiment, the end cap of the guide tube is provided with a mounting groove on the side facing the guide tube, and the connecting component is located in the mounting groove.

[0016] According to an embodiment of this application, a second aspect provides a single crystal furnace, including the aforementioned flow guide assembly.

[0017] The flow guide tube assembly provided in this application includes a flow guide tube, a flow guide tube end cap, and a flow guide tube hanger. The flow guide tube hanger includes a connecting component disposed between the flow guide tube and the flow guide tube end cap, and a molybdenum rod for locking and separating from the connecting component. In this flow guide tube assembly, the connecting component is built into the upper end face of the flow guide tube and the flow guide tube end cap. The lower end of the molybdenum rod passes through the flow guide tube end cap and can be selectively locked and unlocked with the connecting component, so that the lower end of the connecting component is not exposed to the single crystal furnace environment. The connection relationship between the flow guide tube hanger and the flow guide tube is controlled by locking and separating the molybdenum rod and the connecting component. Since the connecting component is disposed between the flow guide tube and the flow guide tube end cap, the flow guide tube can form an effective physical isolation between the lower end of the flow guide tube hanger and the high-temperature environment inside the single crystal furnace, thereby effectively avoiding oxidation and corrosion problems caused by high temperature to the connecting component contained in the lower end of the flow guide tube hanger. Attached Figure Description

[0018] Figure 1 This is an exploded view of the flow guide tube assembly in one embodiment of this application;

[0019] Figure 2 This is a schematic diagram of the structure of the molybdenum rod in one embodiment of this application;

[0020] Figure 3 This is a schematic diagram of the connecting plate in one embodiment of this application;

[0021] Figure 4 This is a schematic diagram of the molybdenum rod in the first position according to an embodiment of this application;

[0022] Figure 5 This is a schematic diagram of the molybdenum rod in the second position in one embodiment of this application;

[0023] Figure 6 This is a schematic diagram of the connecting plate in another embodiment of this application;

[0024] Figure 7 This is a schematic diagram of the structure of the guide tube end cap in one embodiment of this application;

[0025] Figure 8 This is a schematic diagram of the operation of the guide tube and the guide tube end cap in one embodiment of this application.

[0026] Explanation of the attached drawing numbers:

[0027] 100. Molybdenum rod; 110. Mating part; 120. Connecting part;

[0028] 200. Connecting component; 210. Mounting plate; 211. Through channel; 212. Groove;

[0029] 213. Reception slot;

[0030] 310. Flow guide tube; 320. Flow guide tube end cap; 322. Mounting groove; 330. Flow guide tube hanger. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0032] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model.

[0033] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this utility model can be implemented. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0034] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0035] As mentioned in the background, during the operation of a single crystal furnace, the flow guide tube is suspended on a water-cooled screen and rises and falls together with the screen. The bottom end of the flow guide tube, suspended on the water-cooled screen, is generally exposed to the single crystal furnace environment. Due to continuous exposure to the high temperature environment inside the furnace, surface oxidation and corrosion occur, significantly reducing its service life. To better address this problem, the researchers in this application propose a flow guide tube assembly to solve the oxidation problem caused by the bottom end of the suspension component being exposed to the high temperature environment inside the single crystal furnace.

[0036] like Figure 1 As shown, Figure 1 This is an exploded view of a guide tube assembly according to an embodiment of this application. The guide tube assembly includes a guide tube 310, a guide tube end cap 320, and a guide tube hanger 330. The guide tube end cap 320 is located on the upper end face of the guide tube 310. The guide tube hanger 330 includes a connecting component 200 and a molybdenum rod 100. The connecting component 200 is disposed between the upper end face of the guide tube 310 and the guide tube end cap 320. The upper end of the molybdenum rod 100 is located outside the guide tube end cap 320 for suspending the guide tube assembly, and the lower end passes through the guide tube end cap 320 and can be selectively locked or unlocked with the connecting component 200.

[0037] In this embodiment, the connecting component 200 in the guide tube bracket 330 is disposed between the guide tube 310 and the guide tube end cap 320, forming a physical isolation barrier between the connecting component 200 and the inside of the single crystal furnace. This effectively prevents the connecting component 200 from being directly exposed to the high-temperature environment inside the single crystal furnace, thereby reducing the risk of oxidation or corrosion of the connecting component 200 due to high temperature. Simultaneously, the molybdenum rod 100 in the guide tube bracket 330 passes through the guide tube end cap 320 and is locked or unlocked with the connecting component 200 built between the upper end face of the guide tube 310 and the guide tube end cap 320. This gives the guide tube assembly a detachable structure, facilitating installation and maintenance.

[0038] In one embodiment, see Figure 1 and Figure 2 As shown, the lower end of the molybdenum rod 100 has a mating part 110, such as... Figure 4As shown, when the mating part 110 is in the first position, it is locked with the connecting assembly 200, as... Figure 5 As shown, when the mating part 110 is in the second position, it is unlocked from the connecting component 200.

[0039] In this embodiment, the lower end of the molybdenum rod 100 is provided with a mating part 110, which enables selective locking or unlocking of the lower end of the molybdenum rod 100 with the connecting assembly 200 after passing through the guide tube end cap 320.

[0040] In one embodiment, the dimension of the mating portion 110 along the first direction is larger than the dimension along the second direction, wherein both the first and second directions are perpendicular to the axial direction of the molybdenum rod 100, and a predetermined angle is formed between the first and second directions. The first direction can be referred to... Figure 2 The direction pointed to by the middle arrow 'a'; for the second direction, please refer to [reference needed]. Figure 2 The direction pointed to by the middle arrow b indicates that the mating part 110 switches between a first position and a second position by rotating by a predetermined angle. That is, the plane containing the first direction and the second direction is perpendicular to the axial direction of the molybdenum rod 100.

[0041] In this embodiment, the mating part 110 is rod-shaped, with its length direction being a first direction and its length greater than its diameter. The dimension of the mating part 110 in the first direction is greater than its dimension in the second direction, giving the mating part 110 directionality. This allows the mating part 110 to be locked with the connecting component 200 when it is in a first position and unlocked when it is in a second position. By forming a mechanical limiting fit between the mating part 110 and the connecting component 200, such as forming a snap-fit ​​structure or a mechanical fastening connection structure, the locking or unlocking of the molybdenum rod 100 and the connecting component 200 is achieved.

[0042] In one embodiment, the second direction is perpendicular to the first direction, that is, the predetermined angle between the first direction and the second direction is 90°. Accordingly, the mating part 110 rotates 90° from the first position to the second position, so that the locking of the molybdenum rod 100 and the connecting assembly 200 is switched to unlocking.

[0043] In one embodiment, see Figure 1 As shown, the upper end of the molybdenum rod 100 has a detachable connecting portion 120, the size of which is larger than the outer diameter of the molybdenum rod 100.

[0044] In this embodiment, the upper end of the molybdenum rod 100 is provided with a connecting portion 120. The connecting portion 120 forms a detachable connection with the water-cooled screen, such as a threaded connection, so that the molybdenum rod 100 can be fixed to the water-cooled screen through the connecting portion 120, thereby restricting the rotation of the molybdenum rod 100 body during use. The connecting portion 120 of the molybdenum rod 100 is larger than the outer diameter of the molybdenum rod 100, which helps to provide an axial limiting function during the fixing process and prevents the molybdenum rod 100 from moving in the axial direction. Especially when the molybdenum rod 100 and the connecting assembly 200 form a snap-fit ​​structure, the axial rotation of the molybdenum rod 100 may cause the fit between the molybdenum rod 100 and the connecting assembly 200 to fail. By setting the connecting portion 120 to fix the molybdenum rod 100, the problem of the molybdenum rod 100 disengaging from the connecting assembly 200 due to the rotation of the molybdenum rod 100 can be effectively avoided, thereby improving the connection stability and reliability of the guide tube assembly.

[0045] In one embodiment, see Figures 3 to 5 As shown, the connecting assembly 200 includes at least a mounting plate 210. The mounting plate 210 is provided with a through channel 211 that extends through the molybdenum rod 100 axially. When the mating part 110 is in the second position, it can pass through the through channel 211 to unlock. When the mating part 110 is in the first position, both ends of it abut against the bottom edge of the through channel 211 in the first direction and cannot pass through the through channel 211 to lock.

[0046] In this embodiment, the connecting assembly 200 includes a mounting plate 210 disposed in the axial direction of the molybdenum rod 100. The mounting plate 210 has a through channel 211. The mating portion 110 of the molybdenum rod 100 can switch between locked and unlocked states with the connecting assembly 200 by changing its position relative to the through channel 211. The through channel 211 matches the shape of the mating portion 110. The mating portion 110 is directional, so that the through channel 211 is also directional. That is, the dimension of the through channel 211 along the first direction is larger than the dimension along the second direction, and the dimension along the first direction matches the dimension of the mating portion 110 along the first direction, and the dimension along the second direction matches the dimension of the mating portion 110 along the second direction. When the mating portion 110 is in the second position, see [reference needed]. Figure 5 As shown, the first direction of the mating part 110 coincides with the first direction of the through channel 211, allowing the mating part 110 to pass through the through channel 211 without mechanical interference, thus achieving unlocking. When the mating part 110 is in the first position, refer to... Figure 4As shown, the first direction of the mating part 110 coincides with the second direction of the through channel 211. The dimension of the mating part 110 in the first direction is larger than the dimension of the through channel 211 in the second direction. The mating part 110 makes mechanical contact with the bottom edge of the through channel 211, thereby forming an axial limiting fit relationship between the mating part 110 and the bottom edge of the through channel 211, and forming a snap-fit ​​structure to achieve a locking state between the molybdenum rod 100 and the connecting assembly 200. The change in position of the mating part 110 from the first position to the second position can be achieved by external force.

[0047] In this embodiment, after the mating portion 110 of the molybdenum rod 100 passes through the through channel 211 in the connecting assembly 200, the upper end of the molybdenum rod 100 is driven to rotate around the axis by a predetermined angle from above the guide tube end cap 320, so that the mating portion 110 and the through channel 211 form an axial limiting fit relationship, thereby achieving a locked state. When it is necessary to achieve the unlocked state, the mating portion 110 can be rotated back to the angle position aligned with the through channel 211, so that the mating portion 110 can pass through the through channel 211 again and disengage from the connecting assembly 200.

[0048] In one embodiment, see Figure 6 As shown, the bottom of the mounting plate 210 is provided with a receiving groove 213 that is recessed inward from the bottom surface of the mounting plate 210. The receiving groove 213 provides rotational space for the mating part 110 to switch between a first position and a second position.

[0049] In this embodiment, the bottom of the mounting plate 210 is provided with a receiving groove 213 that is recessed inward from the bottom surface of the mounting plate 210. The receiving groove 213 provides the necessary rotation space for the mating part 110 at the lower end of the molybdenum rod 100 to switch between the first position and the second position, ensuring that the mating part 110 can complete the angle adjustment around the axis of the molybdenum rod 100, thereby realizing the switching of locking and unlocking operations between the molybdenum rod 100 and the connecting assembly 200. In addition, the setting of the receiving groove 213 restricts the diffusion path of friction particles formed between the mating part 110 and the upper end surface of the mounting plate 210 or the guide tube 310 during rotation, which can prevent debris particles from entering the single crystal furnace cavity to a certain extent, thereby reducing the interference of foreign objects on the crystal growth process.

[0050] Specifically, the receiving groove 213 can be a circle with the maximum size of the mating part 110 as its diameter or a square with the maximum size of the mating part 110 as its side length. As described above, the mating part 110 has a maximum size in the first direction, and the receiving groove 213 can be a circle with the size of the mating part 110 in the first direction as its diameter or a square with the size of the mating part 110 in the first direction as its side length.

[0051] Furthermore, in one embodiment, see [reference] Figure 6 As shown, the mounting plate 210 is also provided with a groove 212 that is recessed inward from the bottom of the receiving groove 213. The groove 212 communicates with the receiving groove 213 and the through channel 211. The groove 212 accommodates the mating part 110 when it is in the second position.

[0052] In this embodiment, when the mating part 110 changes from the first position to the second position, the mating part 110 can be accommodated inside the groove 212 provided in the mounting plate 210. The groove 212 communicates with the receiving groove 213 and the through channel 211, so that after the mating part 110 passes through the through channel 211 and changes from the first position to the second position, it can be embedded inside the groove 212. The groove 212 in the mounting plate 210 forms a limiting relationship for the mating part 110 of the molybdenum rod 100, thereby reducing the risk of the molybdenum rod 100 rotating axially and causing the mating part 110 to disengage from the through channel 211 of the mounting plate 210.

[0053] In one embodiment, the connecting component 200 further includes fasteners, and the mounting plate 210 is mounted on the upper surface of the guide tube 310 by the fasteners. The material of the mounting plate 210 and the material of the fasteners are both graphene.

[0054] In this embodiment, the connecting assembly 200 includes fasteners for fixing the mounting plate 210 to the upper end face of the guide tube 310. Both the mounting plate 210 and the fasteners are made of graphene. Graphene has high thermal conductivity and excellent high-temperature resistance, which can maintain the structural integrity of the mounting plate 210 and the fasteners during the operation of the single crystal furnace, reducing the risk of structural deformation or mechanical performance degradation caused by the high-temperature environment inside the single crystal furnace.

[0055] In one embodiment, see Figure 7 and Figure 8 As shown, the guide tube end cap 320 is provided with an installation groove 322 on the side facing the guide tube 310, and the connecting component 200 is located in the installation groove 322.

[0056] In this embodiment, by placing the connecting component 200 inside the mounting groove 322, the connecting component 200 is positioned within the enclosed space formed between the guide tube end cap 320 and the guide tube 310. This structurally achieves the covering and shielding of the connecting component 200, thereby reducing the oxidation effect on the connecting component 200 caused by the high-temperature environment inside the single crystal furnace. Simultaneously, metal debris or friction particles generated during the assembly or disassembly of the connecting component 200 and the molybdenum rod 100 are confined within the mounting groove 322, helping to reduce the risk of foreign objects entering the single crystal furnace cavity.

[0057] This application also proposes a single crystal furnace, wherein the single crystal furnace includes the above-described flow guide tube assembly.

[0058] In this embodiment, the single crystal furnace includes the aforementioned guide tube assembly. Since the connecting component 200 in the guide tube hanger 330 is positioned between the guide tube 310 and the guide tube end cap 320, a physical isolation is formed between the connecting component 200 and the high-temperature environment inside the single crystal furnace. This prevents the connecting component 200 from being directly exposed to the high-temperature environment, thereby reducing the risk of oxidation or corrosion caused by high temperatures. Simultaneously, the molybdenum rod 100 passes through the guide tube end cap 320 and is locked or unlocked with the connecting component 200 located at the upper end of the guide tube 310, giving the guide tube assembly a detachable structure for easy installation and maintenance.

[0059] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0060] The above embodiments merely illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A flow guide tube assembly, characterized in that, include: The flow guide tube (310), the flow guide tube end cap (320), and the flow guide tube hanger (330) are provided. The flow guide tube end cap (320) is located on the upper end face of the flow guide tube (310), and the flow guide tube hanger (330) includes: A connecting assembly (200) is disposed between the upper end face of the guide tube (310) and the guide tube end cap (320); A molybdenum rod (100) has its upper end located outside the guide tube end cap (320) for suspending the guide tube assembly, and its lower end passes through the guide tube end cap (320) and is selectively locked or unlocked with the connecting assembly (200).

2. The guide tube assembly according to claim 1, characterized in that: The lower end of the molybdenum rod (100) has a mating part (110), which is locked with the connecting assembly (200) when it is in a first position, and unlocked from the connecting assembly (200) when it is in a second position.

3. The guide tube assembly according to claim 2, characterized in that: The mating part (110) has a larger dimension along a first direction than along a second direction, wherein both the first and second directions are perpendicular to the axial direction of the molybdenum rod (100), and there is a predetermined angle between the first and second directions. The mating part (110) switches between the first and second positions by rotating the predetermined angle.

4. The guide tube assembly according to claim 1, characterized in that: The upper end of the molybdenum rod (100) has a detachable connecting part (120), the size of which is larger than the outer diameter of the molybdenum rod (100).

5. The guide tube assembly according to claim 3, characterized in that: The connecting assembly (200) includes at least a mounting plate (210), which has a through channel (211) extending axially along the molybdenum rod (100). When the mating part (110) is in the second position, it can pass through the through channel (211) to unlock. When the mating part (110) is in the first position, both ends of the mating part (110) abut against the bottom edge of the through channel (211) along the first direction to lock.

6. The guide tube assembly according to claim 5, characterized in that, The mounting plate (210) has a receiving groove (213) recessed inward from the bottom surface of the mounting plate (210), and the receiving groove (213) provides rotational space for the mating part (110) to switch between the first position and the second position.

7. The guide tube assembly according to claim 6, characterized in that: The mounting plate (210) is also provided with a groove (212) recessed inward from the bottom of the receiving groove (213), the groove (212) communicating with the receiving groove (213) and the through channel (211), and the groove (212) accommodating the mating part (110) when in the second position.

8. The guide tube assembly according to claim 5, characterized in that: The connecting component (200) also includes fasteners, and the mounting plate (210) is mounted on the upper surface of the guide tube (310) by the fasteners. The material of the mounting plate (210) and the material of the fasteners are both graphene.

9. The guide tube assembly according to claim 1, characterized in that: The end cap (320) of the guide tube is provided with a mounting groove (322) on the side facing the guide tube (310), and the connecting component (200) is located in the mounting groove (322).

10. A single crystal furnace, characterized in that: The guide tube assembly includes any one of claims 1 to 9.

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