Water cooling system and laser direct imaging apparatus

By employing a water-cooled machine and temperature control device in the laser direct imaging equipment to precisely control the temperature of multiple heat-generating components, the problems of localized high-temperature zones and uneven temperature distribution in the equipment are solved, thereby improving equipment stability and reducing costs.

CN224328324UActive Publication Date: 2026-06-05HANGZHOU XINJUNZHE MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202521024346.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-22
Publication Date
2026-06-05
Estimated Expiration
2035-05-22

AI Technical Summary

Technical Problem

The existing water cooling system of laser direct imaging equipment only cools the optical components and does not treat other heat sources, resulting in uneven temperature distribution in local high-temperature areas and inside the equipment, which increases the cost and complexity of the equipment.

Method used

A water chiller is used to precisely control the temperature of multiple heat-generating components through multiple branch pipes and temperature control devices, including water-cooled components, temperature control devices and temperature sensors. The temperature of the cooling water is adjusted by using a semiconductor refrigeration chip to achieve precise temperature control of multiple heat-generating components.

Benefits of technology

It enables precise temperature control of multiple heat-generating components in laser direct imaging equipment, improving equipment stability and reducing equipment cost and complexity.

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Abstract

The embodiment of the utility model provides a kind of water cooling system and laser direct imaging equipment, it is related to laser direct imaging equipment technical field.The water cooling system of laser direct imaging equipment includes water cooling machine, water cooling part and temperature regulating device.Water outlet main pipe and water inlet main pipe are connected on water cooling machine.Multiple water cooling parts are respectively installed on multiple heat-generating parts.Water cooling part is communicated with water outlet main pipe by first branch pipe.Water cooling part is also communicated with water inlet main pipe by second branch pipe.Temperature regulating device is installed on water cooling part.Temperature regulating device is used to adjust the temperature of cooling water into water cooling part.The utility model can adopt a set of water cooling machine to carry out accurate temperature control to multiple heat-generating components in laser direct imaging equipment simultaneously, improve equipment stability, without multiple water cooling machine equipment, reduce equipment cost.
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Description

Technical Field

[0001] This utility model relates to the field of laser direct imaging equipment technology, and more specifically, to a water cooling system and a laser direct imaging device. Background Technology

[0002] Laser Direct Imaging (LDI) technology has been widely used in high-precision PCB (printed circuit board) manufacturing. LDI equipment uses a high-energy laser beam to directly expose the design pattern onto a photosensitive material, thereby achieving pattern transfer. During operation, LDI equipment needs to handle high-power lasers and complex optical systems, generating a significant amount of heat from its internal components. In existing technologies, water-cooling systems are typically used to cool the core optical components.

[0003] However, this solution only applies water cooling to optical components, neglecting other heat sources. This leads to localized high-temperature zones near these heat sources during operation, potentially directly impacting the performance of adjacent components and gradually affecting the overall temperature distribution within the equipment through heat conduction. Furthermore, different optical components have varying operating characteristics, resulting in different water cooling and temperature control requirements. Meeting these requirements often necessitates configuring multiple independent water chillers, increasing both the overall cost and the system's complexity and maintenance difficulty. Utility Model Content

[0004] The purpose of this invention is to provide a water-cooling system and a laser direct imaging device, which can use a single water-cooling unit to simultaneously and precisely control the temperature of multiple heat-generating components in the laser direct imaging device, thereby improving device stability and reducing device costs.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a water cooling system, comprising:

[0007] A water chiller, wherein the water chiller is connected to an outlet main pipe and an inlet main pipe;

[0008] Multiple water-cooled components are installed on multiple heating elements. Each water-cooled component is connected to the main water outlet pipe via a first branch pipe and is also connected to the main water inlet pipe via a second branch pipe.

[0009] A temperature regulating device is installed on the water-cooled component and is used to regulate the temperature of the cooling water entering the water-cooled component.

[0010] In an optional embodiment, the temperature regulating device includes a first heat exchange block, a temperature regulating element, and a second heat exchange block. The inlet of the first heat exchange block is connected to the first branch pipe, the outlet of the first heat exchange block is connected to the inlet of the water-cooling element, the inlet of the second heat exchange block is connected to the outlet of the water-cooling element, and the outlet of the second heat exchange block is connected to the second branch pipe. The temperature regulating element is disposed between the first heat exchange block and the second heat exchange block for exchanging heat between the first heat exchange block and the second heat exchange block.

[0011] In an optional embodiment, the temperature regulating element is a semiconductor refrigeration chip, which includes a first surface and a second surface. The first surface is attached to the first heat exchange block, and the second surface is attached to the second heat exchange block, so that the first surface absorbs the heat from the first heat exchange block, and the second surface releases heat towards the second heat exchange block; or the second surface absorbs the heat from the second heat exchange block, and the first surface releases heat towards the first heat exchange block.

[0012] In an optional embodiment, the thermoelectric cooler is connected to a positive / negative electrode switch.

[0013] In an optional embodiment, the thermoelectric cooler is also connected to a voltage regulator.

[0014] In an optional embodiment, both the first heat exchange block and the second heat exchange block are provided with fins.

[0015] In an optional embodiment, the water cooling system further includes a plurality of temperature sensors, each of which is disposed on the heating element.

[0016] In an optional embodiment, the water cooling system further includes a controller, with multiple temperature sensors electrically connected to the controller, which in turn is electrically connected to the water chiller and the temperature control device.

[0017] In an optional embodiment, the heating element includes a light source, a laser imaging element, a linear motor, a positioning camera, and a grating ruler.

[0018] Secondly, this utility model provides a laser direct imaging device, including the water cooling system described in any of the foregoing embodiments.

[0019] The beneficial effects of the water-cooling system and laser direct imaging device provided in this embodiment of the invention include:

[0020] This utility model's water-cooling system includes a water chiller, water-cooled components, and a temperature control device. The water chiller is connected to an outlet main pipe and an inlet main pipe. Multiple water-cooled components are respectively installed on multiple heat-generating components. Each water-cooled component is connected to the outlet main pipe via a first branch pipe. Each water-cooled component is also connected to the inlet main pipe via a second branch pipe. The temperature control device is installed on each water-cooled component. The temperature control device is used to adjust the temperature of the cooling water entering the water-cooled component. The water chiller is used to provide cooling water at a specific temperature. This utility model, by setting multiple first and second branch pipes to connect to multiple heat-generating components respectively, enables a single water chiller to separately cool and control the temperature of multiple heat-generating components in a laser direct imaging device. By setting temperature control devices on each water-cooled component to regulate the temperature of the cooling water entering each component, precise temperature control of multiple heat-generating components is achieved. This utility model allows for simultaneous and precise temperature control of multiple heat-generating components in a laser direct imaging device using a single water chiller, improving equipment stability and eliminating the need for multiple water chiller systems, thus reducing equipment costs. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the water cooling system provided in this embodiment;

[0023] Figure 2 This is a schematic diagram of the temperature control device provided in this embodiment.

[0024] Icons: 100-Water cooling system; 10-Water chiller; 11-Outlet main pipe; 12-Inlet main pipe; 20-Water cooling component; 21-First branch pipe; 22-Second branch pipe; 30-Temperature control device; 31-First heat exchange block; 32-Second heat exchange block; 33-Semiconductor cooling chip; 34-Positive / negative pole switcher; 35-Voltage regulator; 40-Controller; 41-Temperature sensor; 201-Light source; 202-Laser imaging component; 203-Linear motor; 204-Positioning camera; 205-Grating ruler base. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0030] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0031] Please refer to Figure 1 The water cooling system 100 provided by this utility model is applied to laser direct imaging equipment and is used to perform water cooling and temperature control on multiple heat-generating components in the laser direct imaging equipment.

[0032] This water-cooling system 100 includes a water chiller 10, water-cooled components 20, and a temperature control device 30. The water chiller 10 is connected to an inlet main pipe 12 and an outlet main pipe 11. Multiple water-cooled components 20 are respectively installed on multiple heat-generating components. Each water-cooled component 20 is connected to the outlet main pipe 11 via a first branch pipe 21. Each water-cooled component 20 is also connected to the inlet main pipe 12 via a second branch pipe 22. The temperature control device 30 is installed on each water-cooled component 20. The temperature control device 30 is used to regulate the temperature of the cooling water entering the water-cooled components 20.

[0033] Understandably, the water chiller 10 is used to provide cooling water at a certain temperature to cool down multiple heat-generating components of the laser direct imaging device and to provide a certain amount of power to the cooling water to ensure its circulation.

[0034] In this embodiment, the water-cooling component 20 is a metal block with internal water channels, which directly contacts the heating element and absorbs its heat. Cooling water is introduced into the water-cooling component 20 to remove the heat from the heating element. In this embodiment, the water-cooling component 20 is a copper block. In other embodiments, the water-cooling component 20 can also be made of other materials, such as an aluminum block. As long as heat can be transferred quickly, this invention does not limit the material of the water-cooling component 20.

[0035] Specifically, cooling water flows out from the outlet of the water chiller 10, enters the main outlet pipe 11, and then flows from the main outlet pipe 11 into the first branch pipe 21. The temperature is then adjusted by the temperature regulating device 30 before entering the water-cooled component 20. The water-cooled component 20 exchanges heat with the heat-generating component, thereby lowering the temperature of the heat-generating component. The cooled water after heat exchange flows out from the water-cooled component 20 into the second branch pipe 22, then flows back from the second branch pipe 22 into the main inlet pipe 12, and subsequently enters the water chiller 10 again. The water chiller 10 cools the cooled water after heat exchange, completing the water cooling cycle.

[0036] The water-cooling system 100 of this embodiment connects multiple first branch pipes 21 and second branch pipes 22 to multiple heat-generating components, enabling a single water chiller 10 to separately cool and control the temperature of multiple heat-generating components in the laser direct imaging device. Furthermore, by installing temperature regulating devices 30 on each water-cooled component 20, the temperature of the cooling water entering each water-cooled component 20 is adjusted, thereby achieving precise temperature control for multiple heat-generating components. In other words, the water-cooling system 100 of this embodiment can output cooling water at different temperatures to multiple water-cooled components 20 using only one water chiller 10 to meet the temperature control requirements of different heat-generating components, eliminating the need for multiple water chillers 10 to output cooling water separately, thus reducing equipment costs.

[0037] Furthermore, in this embodiment, the water cooling system 100 also includes a plurality of temperature sensors 41. The temperature sensors 41 are respectively disposed on the heat-generating elements. The temperature sensors 41 are used to detect the temperature of different heat-generating elements, thereby facilitating the temperature control device 30 to adjust the cooling water temperature for different heat-generating elements respectively.

[0038] Furthermore, the water cooling system 100 also includes a controller 40. Multiple temperature sensors 41 are electrically connected to the controller 40. The controller 40 is also electrically connected to the water chiller 10 and the temperature control device 30. It is understood that the temperature sensors 41 are used to detect the temperature of different heat-generating components and transmit the temperature signals to the controller 40. Based on the temperatures of the different heat-generating components, the controller 40 controls the power of the water chiller 10 and the temperature control device 30, thereby adjusting the cooling water temperature and achieving precise temperature control for the different heat-generating components.

[0039] Specifically, in this embodiment, the heating element includes a light source 201, a laser imaging element 202, a linear motor 203, a positioning camera 204, and a grating ruler base 205. The light source 201, laser imaging element 202, linear motor 203, positioning camera 204, and grating ruler base 205 are arranged sequentially along the water outlet direction of the chiller's main outlet pipe 11. That is, after cooling water flows out of the chiller, it sequentially enters the light source 201, laser imaging element 202, linear motor 203, positioning camera 204, and grating ruler base 205. Of course, in other embodiments, the installation order of the light source 201, laser imaging element 202, linear motor 203, positioning camera 204, and grating ruler base 205 can be set as needed, and this utility model does not limit this.

[0040] Please refer to Figure 2 , Figure 2 This is a schematic diagram of the temperature control device 30 in this embodiment. Specifically, the temperature control device 30 includes a first heat exchange block 31, a temperature control element, and a second heat exchange block 32. The inlet of the first heat exchange block 31 is connected to the first branch pipe 21, and the outlet of the first heat exchange block 31 is connected to the inlet of the water-cooled component 20. The inlet of the second heat exchange block 32 is connected to the outlet of the water-cooled component 20, and the outlet of the second heat exchange block 32 is connected to the second branch pipe 22. The temperature control element is disposed between the first heat exchange block 31 and the second heat exchange block 32 for exchanging heat between the first heat exchange block 31 and the second heat exchange block 32.

[0041] Understandably, cooling water flows out of the outlet of the water chiller 10, enters the main outlet pipe 11, and then flows from the main outlet pipe 11 into the first branch pipe 21. From the first branch pipe 21, it enters the first heat exchange block 31, and then from the first heat exchange block 31 into the water-cooled component 20. After absorbing heat from the heat-generating components in the water-cooled component 20, the cooling water enters the second heat exchange block 32, then enters the second branch pipe 22, and then flows back to the main inlet pipe 12. Subsequently, it re-enters the water chiller 10, where it cools the cooled water after heat exchange, completing the water-cooling cycle. The first heat exchange block 31 and the second heat exchange block 32 exchange heat through a temperature regulating element. That is, the temperature regulating element can absorb heat from the first heat exchange block 31, thereby regulating the temperature of the cooling water entering the water-cooled component 20.

[0042] Specifically, in this embodiment, the temperature regulating element is a thermoelectric cooler 33. The thermoelectric cooler 33 includes a first surface and a second surface. The first surface is attached to the first heat exchange block 31, and the second surface is attached to the second heat exchange block 32, so that the first surface absorbs heat from the first heat exchange block 31, and the second surface releases heat towards the second heat exchange block 32; or the second surface absorbs heat from the second heat exchange block 32, and the first surface releases heat towards the first heat exchange block 31. It can be understood that the thermoelectric cooler 33 has two states: a first state where the first surface absorbs heat and the second surface releases heat; and a second state where the first surface releases heat and the second surface absorbs heat. Furthermore, the thermoelectric cooler 33 can switch between these two states.

[0043] Specifically, the thermoelectric cooler 33 is connected to a positive / negative electrode switch 34. It can be understood that when the thermoelectric cooler 33 is energized, current flows through it, allowing heat to be absorbed on one side and dissipated on the other. The positive / negative electrode switch 34 is used to change the direction of the current within the thermoelectric cooler 33, thereby switching the direction of heat absorption and dissipation.

[0044] Furthermore, the thermoelectric cooler 33 is also connected to a voltage regulator 35. The voltage regulator 35 is used to adjust the cooling or heating power of the thermoelectric cooler 33, thereby more precisely regulating the temperature of the cooling water entering the cooling element.

[0045] In this embodiment, when the temperature sensor 41 detects that the temperature of the heating element is too high, the controller 40 controls the thermoelectric cooler 33 to absorb heat on the first side and release heat on the second side, thereby reducing the cooling water temperature of the first heat exchange block 31, and consequently reducing the cooling water temperature of the cooling element, thus improving the cooling effect of the cooling element. When the temperature sensor 41 detects that the temperature of the heating element is too low, the controller 40 controls the thermoelectric cooler 33 to absorb heat on the second side and release heat on the first side, thereby increasing the cooling water temperature of the first heat exchange block 31, and consequently increasing the cooling water temperature of the cooling element, thus reducing the cooling effect of the cooling element. By setting the thermoelectric cooler 33, the temperature of the cooling water entering the cooling element can be precisely controlled to meet the heat dissipation requirements of the heating element, keeping the temperature of the heating element within a certain range, and improving the stability of the equipment.

[0046] Furthermore, in this embodiment, both the first heat exchange block 31 and the second heat exchange block 32 are provided with fins (not shown). It can be understood that in this embodiment, both the first heat exchange block 31 and the second heat exchange block 32 are metal blocks with internal water channels, and multiple fins are spaced apart within the water channels. This lengthens the flow path of the cooling water within the first heat exchange block 31 and the second heat exchange block 32, enhancing the heat exchange effect of the cooling water within the first heat exchange block 31 and the second heat exchange block 32.

[0047] The beneficial effects of the water-cooling system 100 and the laser direct imaging device provided in this embodiment of the invention include:

[0048] The water-cooling system 100 of this invention includes a water chiller 10, water-cooled components 20, and a temperature regulating device 30. The water chiller 10 is connected to an outlet main pipe 11 and an inlet main pipe 12. Multiple water-cooled components 20 are respectively installed on multiple heating elements. Each water-cooled component 20 is connected to the outlet main pipe 11 via a first branch pipe 21. Each water-cooled component 20 is also connected to the inlet main pipe 12 via a second branch pipe 22. The temperature regulating device 30 is installed on each water-cooled component 20. The temperature regulating device 30 is used to adjust the temperature of the cooling water entering the water-cooled component 20. The water chiller 10 is used to provide cooling water at a certain temperature. This invention, by setting multiple first branch pipes 21 and second branch pipes 22 to connect to multiple heating elements respectively, enables a single water chiller 10 to separately cool and control the temperature of multiple heating elements in a laser direct imaging device. By setting temperature regulating devices 30 on each water-cooled component 20, the temperature of the cooling water entering each water-cooled component 20 is adjusted, thereby achieving precise temperature control of multiple heating elements. This invention enables precise temperature control of multiple heating components in a laser direct imaging device using a single water chiller 10, thereby improving device stability and eliminating the need for multiple water chiller 10 devices, thus reducing equipment costs.

[0049] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A water-cooling system, characterized in that, include: A water chiller, wherein the water chiller is connected to an outlet main pipe and an inlet main pipe; Multiple water-cooled components are installed on multiple heating elements. Each water-cooled component is connected to the main water outlet pipe via a first branch pipe and is also connected to the main water inlet pipe via a second branch pipe. A temperature regulating device is installed on the water-cooled component and is used to regulate the temperature of the cooling water entering the water-cooled component.

2. The water cooling system according to claim 1, characterized in that, The temperature control device includes a first heat exchange block, a temperature control element, and a second heat exchange block. The inlet of the first heat exchange block is connected to the first branch pipe, the outlet of the first heat exchange block is connected to the inlet of the water-cooling element, the inlet of the second heat exchange block is connected to the outlet of the water-cooling element, and the outlet of the second heat exchange block is connected to the second branch pipe. The temperature control element is disposed between the first heat exchange block and the second heat exchange block for exchanging heat between the first heat exchange block and the second heat exchange block.

3. The water cooling system according to claim 2, characterized in that, The temperature regulating element is a semiconductor refrigeration chip, which includes a first side and a second side. The first side is attached to the first heat exchange block, and the second side is attached to the second heat exchange block, so that the first side absorbs the heat from the first heat exchange block, and the second side releases heat towards the second heat exchange block; or the second side absorbs the heat from the second heat exchange block, and the first side releases heat towards the first heat exchange block.

4. The water cooling system according to claim 3, characterized in that, The semiconductor cooling chip is connected to a positive and negative electrode switch.

5. The water cooling system according to claim 3, characterized in that, The semiconductor refrigeration chip is also connected to a voltage regulator.

6. The water cooling system according to claim 2, characterized in that, Both the first heat exchange block and the second heat exchange block are provided with fins.

7. The water cooling system according to claim 1, characterized in that, The water cooling system also includes multiple temperature sensors, which are respectively disposed on the heating element.

8. The water cooling system according to claim 7, characterized in that, The water cooling system also includes a controller, and multiple temperature sensors are electrically connected to the controller, which is in turn electrically connected to the water chiller and the temperature control device.

9. The water cooling system according to claim 1, characterized in that, The heating element includes a light source, a laser imaging element, a linear motor, a positioning camera, and a grating ruler.

10. A laser direct imaging device, characterized in that, Includes the water cooling system as described in any one of claims 1-9.