A multi-stage filtering device for CVD dust resource utilization
Through multi-stage filtration devices and material optimization, the problem of difficult CVD dust filtration has been solved, achieving efficient resource recovery and low-cost operation, and improving filtration efficiency and the purity of recycled materials.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HUANGGANG TCL ENVIRONMENTAL TECH CO LTD
- Filing Date
- 2025-05-09
- Publication Date
- 2026-06-09
AI Technical Summary
Dust generated by the CVD process is difficult to filter effectively, leading to resource waste and environmental pollution. Traditional filtration devices have low filtration efficiency, are prone to clogging, have high operating costs, and produce low-purity recycled products.
It adopts a multi-stage filtration device, including filter basket, filter bag and screw structure, combined with rotating support rod and handwheel design, which facilitates filter bag replacement. It uses PTFE and PP material filter basket and bag, and achieves high-efficiency interception and impurity removal through multi-stage filtration.
It improves resource utilization, reduces processing costs, enhances filtration efficiency, increases the purity of recovered materials, and reduces equipment clogging and maintenance frequency.
Smart Images
Figure CN224331617U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of fluorine-containing waste resource recovery technology, specifically a multi-stage filtration device for CVD dust resource recovery. Background Technology
[0002] Chemical vapor deposition (CVD) processes generate large amounts of dust containing silicon, fluorine, and other components. Direct emission of this dust not only pollutes the environment but also wastes resources such as fluorine and silicon. Currently, industrially collected CVD dust is complex in composition and difficult to utilize directly. Traditional filtration methods are ineffective, hindering its direct use in the production of high-value-added products like ammonium fluorosilicate. Insufficient filtration efficiency is a major issue; ordinary filtration devices have limited capacity to retain micron- and submicron-sized particles, and some fine dust particles easily penetrate the filter media, affecting recovery rates. Equipment is prone to scaling and clogging; fluorides and ammonium salts in the dust readily absorb moisture and agglomerate, forming hard scale on the filter media surface, increasing system resistance, requiring frequent cleaning or filter replacement, and resulting in high operating costs. Low purity of the recovered products leads to high impurity content in the recovered fluorosilicates, requiring additional purification before use in chemical production. Therefore, a multi-stage filtration device for CVD dust resource recovery is proposed to address these problems. Utility Model Content
[0003] To address the shortcomings of existing technologies, this invention provides a multi-stage filtration device for CVD dust resource utilization, which has advantages such as improved resource utilization and reduced processing costs, thus solving the problems mentioned in the background technology.
[0004] To achieve the above objectives, this utility model provides the following technical solution: a multi-stage filtration device for CVD dust resource utilization, comprising a filter device body, a top cover provided on the top of the filter device body, and a filtration mechanism provided inside the filter device body.
[0005] Furthermore, the filtration mechanism includes a filter basket, a filter bag, and a screw. The screw is located outside the filter basket, and a filter bag pressure plate is provided above the filter basket. The upper surface of the filter bag pressure plate contacts the upper end of the filter basket and is fixed by a PTFE-lined nut.
[0006] Furthermore, a sealing ring is provided on the top of the filter device body, and the filter device body and the top cover are connected by eye bolts.
[0007] Furthermore, a fixed support is fixedly connected to one side of the main body of the filter device, and a rotating support rod is rotatably connected to the top of the fixed support. An internally threaded sleeve is fixedly connected to one end of the rotating support rod, and a threaded shaft is internally threaded to the internally threaded sleeve. A handwheel is connected to the upper end of the threaded shaft, and the lower end of the threaded shaft is connected to the top cover of the filter device through the support rod.
[0008] Furthermore, a through hole is provided at the center of the main body of the filter device, and an inlet pipe and an outlet pipe are connected to the bottom of the main body of the filter device, with the inlet pipe communicating with the through hole.
[0009] Furthermore, the filter bag pressure plate is provided with four distribution holes, which are arranged in a circular array around the center line of the filtration device. The top cover is provided with an exhaust port, and a pressure gauge is fixedly connected to the exhaust port.
[0010] Furthermore, the main body of the filter device is made of carbon steel, and an anti-corrosion lining is fixedly connected inside. The filter basket is made of PTFE material, and the filter bag is made of PP material.
[0011] Compared with the prior art, the technical solution of this application has the following beneficial effects:
[0012] This CVD dust resource recovery multi-stage filtration device, through the setting of rotating support rods, handwheels, threaded shafts, and support rods, allows for easy replacement of filter bags. When the filter bags need to be replaced, simply unscrew the lifting eye screws and rotate the upper handwheel to raise the top cover. At this point, the top cover can be rotated and placed aside by rotating the support rods. Then, unscrew the PTFE-lined nut to remove the filter bag pressure plate, and then remove the filter basket that needs to be replaced. Replacement is convenient. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of this utility model;
[0014] Figure 2 This is a top sectional view of the present invention;
[0015] Figure 3 This is a schematic diagram of multiple filtration mechanisms connected in parallel according to this utility model.
[0016] In the diagram: 1. Filter device body, 2. Top cover, 3. Lifting eye screw, 4. Filter basket, 5. Filter bag, 6. Screw, 7. Sealing ring, 8. Filter bag pressure plate, 9. PTFE-lined nut, 10. Fixed support, 11. Rotary support rod, 12. Internal threaded sleeve, 13. Threaded shaft, 14. Handwheel, 15. Support rod, 16. Inlet pipe, 17. Through hole, 18. Outlet pipe, 19. Exhaust port, 20. Pressure gauge, 21. Distribution hole. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0018] Please see Figure 1-2The multi-stage filtration device for CVD dust resource utilization in this embodiment includes a filter device body 1, a top cover 2 on the top of the filter device body 1, and a filtration mechanism inside the filter device body 1.
[0019] The filtration mechanism includes a filter basket 4, a filter bag 5, and a screw 6. The screw 6 is located on the outside of the filter basket 4. A filter bag pressure plate 8 is provided above the filter basket 4. The upper surface of the filter bag pressure plate 8 contacts the upper end of the filter basket 4 and is fixed by a PTFE-lined nut 9. A sealing ring 7 is provided on the top of the filter device body 1. The filter device body 1 and the top cover 2 are connected by a lifting eye screw 3.
[0020] Secondly, a fixed support 10 is fixedly connected to one side of the filter device body 1, and a rotating support rod 11 is rotatably connected to the top of the fixed support 10. An internal threaded sleeve 12 is fixedly connected to one end of the rotating support rod 11, and a threaded shaft 13 is internally threaded connected to the internal threaded sleeve 12. A handwheel 14 is connected to the upper end of the threaded shaft 13, and the lower end of the threaded shaft 13 is connected to the top cover 2 of the filter device through a support rod 15.
[0021] Furthermore, a through hole 17 is provided at the center of the filter body 1, and an inlet pipe 16 and an outlet pipe 18 are connected to the bottom of the filter body 1. The inlet pipe 16 is connected to the through hole 17. Four distribution holes 21 are provided on the filter bag pressure plate 8. The distribution holes 21 and the filter bag 5 are arranged in a circular array around the center line of the filter device. An exhaust port 19 is provided on the top cover 2, and a pressure gauge 20 is fixedly connected to the exhaust port 19.
[0022] In addition, the main body of the filter device 1 is made of carbon steel and has an anti-corrosion lining for internal fixed connection. The filter basket 4 is made of PTFE material and the filter bag 5 is made of PP material, which can effectively remove impurities such as aluminum, chromium and iron present in the raw solution and further improve the purity of ammonium fluorosilicate.
[0023] See Figure 3 This technical solution is based on a multi-stage parallel application of the filtration mechanism, including four parallel filtration devices (22, 23, 24, 25). Each filtration device has a ball valve at both its inlet and outlet. Filtering device 23 and 24 are connected by a connecting pipe, with a ball valve 34 in the middle, a ball valve 35 at the front end connected to the outlet of filtration device 23, and a ball valve 36 at the rear end connected to the inlet of filtration device 24. A liquid inlet pipe is located between filtration devices 24 and 25, and a liquid outlet pipe is connected to the connecting pipe between filtration devices 23 and 24. By controlling the opening and closing of each ball valve, different filtration paths can be switched.
[0024] The working process is as follows: Open the feed valve 32 and discharge valve 33 of filter device D; open the feed valve 30 and discharge valve 31 of filter device C; close the stage ball valve 36; open the stage ball valves 34 and 35; open the feed valve 26 and discharge valve 27 of filter device 22; open the feed valve 28 and discharge valve 27 of filter device 22. The dissolved CVD dust liquid flows into filter device 24 and filter device 25 through the feed pipe from the main valve, and enters the filter structure through the through hole 17. The dissolved CVD raw liquid then passes through the filter bag 5. Impurities remain inside the filter bag 5, and the clean solution flows out from the outlet pipe 18. An exhaust port 19 is provided on the top of the equipment, and a pressure gauge 20 is provided on the exhaust port. The exhaust can be set according to the actual pressure requirements. When the filter bag 5 needs to be replaced, unscrew the lifting eye screw 3 and rotate the upper handwheel to raise the top cover 2 of the filter device. At this time, the top cover 2 of the filter device can be rotated and placed aside by rotating the support rod 11. Then, unscrew the PTFE-lined nut 9 to remove the filter bag 5 that needs to be replaced. After initial filtration, the liquid flows out through the discharge pipe. The liquid then changes direction through the connecting pipe between the filter device 23 and the filter device 24, and enters the filter device 22 and the filter device 23 through the feed pipe for fine filtration. Finally, it is output through the discharge pipe.
[0025] By adjusting the feed valve combination and filter bag combination, coarse filtration of a single filter device, series filtration of two filter devices, parallel filtration of two filter devices, and series-parallel connection of multiple filter devices can be achieved to realize the filtration forms of pre-interception stage, main filtration stage and fine treatment stage, which can be adapted to the material conditions on site.
[0026] The working principle of the above embodiments is as follows:
[0027] This CVD dust resource recovery multi-stage filtration device, through the setting of rotating support rod 11, handwheel 14, threaded shaft 13 and support rod 15, when the filter bag 5 needs to be replaced, unscrew the lifting eye screw 3, rotate the upper handwheel 14 to raise the top cover 2, at this time the top cover 2 can be rotated and placed aside by rotating support rod 11, then unscrew the PTFE-lined nut 9 to remove the filter bag 5 pressure plate, and then remove the filter basket 4 that needs to be replaced, making replacement convenient.
[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A multi-stage filtration device for CVD dust resource utilization, comprising a filtration device body (1), characterized in that: The filter device body (1) is provided with a top cover (2) on the top, and a filter mechanism is provided inside the filter device body (1); The filtration mechanism includes a filter basket (4), a filter bag (5) and a screw (6). The screw (6) is located outside the filter basket (4). A filter bag pressure plate (8) is provided above the filter basket (4). The upper surface of the filter bag pressure plate (8) contacts the upper end of the filter basket (4) and is fixed by a PTFE-lined nut (9).
2. The CVD dust resource recovery multi-stage filtration device according to claim 1, characterized in that: The filter device body (1) is provided with a sealing ring (7) on the top, and the filter device body (1) and the top cover (2) are connected by a lifting eye screw (3).
3. The CVD dust resource recovery multi-stage filtration device according to claim 1, characterized in that: A fixed support (10) is fixedly connected to one side of the main body (1) of the filter device. A rotating support rod (11) is rotatably connected to the top of the fixed support (10). An internal threaded sleeve (12) is fixedly connected to one end of the rotating support rod (11). A threaded shaft (13) is internally threaded to the internal threaded sleeve (12). A handwheel (14) is connected to the upper end of the threaded shaft (13). The lower end of the threaded shaft (13) is connected to the top cover (2) of the filter device through a support rod (15).
4. The CVD dust resource recovery multi-stage filtration device according to claim 1, characterized in that: A through hole (17) is provided at the center of the main body (1) of the filter device. An inlet pipe (16) and an outlet pipe (18) are connected to the bottom of the main body (1). The inlet pipe (16) is connected to the through hole (17).
5. A multi-stage filtration device for CVD dust resource recovery according to claim 1, characterized in that: The filter bag pressure plate (8) is provided with four distribution holes (21). The distribution holes (21) and the filter bag (5) are arranged in a circular array around the center line of the filtration device. The top cover (2) is provided with an exhaust port (19). A pressure gauge (20) is fixedly connected to the exhaust port (19).
6. The CVD dust resource recovery multi-stage filtration device according to claim 1, characterized in that: The main body (1) of the filter device is made of carbon steel and has an anti-corrosion lining fixedly connected inside. The filter basket (4) is made of PTFE and the filter bag (5) is made of PP.