Formic acid injection system
By introducing anti-splash components and staggered hole layout into the formic acid injection system, the problem of formic acid droplets splashing into the vacuum furnace was solved, thereby improving safety and equipment stability.
CN224332065UActive Publication Date: 2026-06-09ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
- Filing Date
- 2025-07-09
- Publication Date
- 2026-06-09
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Figure CN224332065U_ABST
Abstract
This utility model relates to the field of formic acid injection technology. A formic acid injection system includes a formic acid tank, a formic acid mixing tank, an active foaming gas inlet pipe, a passive foaming gas inlet pipe, a mixed gas outlet pipe, an anti-splash assembly, and a diaphragm valve. The formic acid outlet pipe of the formic acid tank is located at the bottom of the formic acid tank, the mixed formic acid inlet pipe of the formic acid mixing tank is located at the top of the formic acid mixing tank, and a diaphragm valve is installed at the inlet end of the mixed formic acid inlet pipe. The active foaming gas inlet pipe is located at the top of the formic acid mixing tank, the passive foaming gas inlet pipe is located at the top of the formic acid mixing tank, the anti-splash assembly is located in the upper part of the inside of the formic acid mixing tank, the foaming tube of the active foaming gas inlet pipe passes through the anti-splash assembly and is located at the bottom of the formic acid mixing tank, and the mixed gas outlet pipe is located at the top of the formic acid mixing tank. The anti-splash assembly can directly block liquid from splashing upwards, preventing splashed formic acid droplets from entering the vacuum furnace.
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