Vertical crystal bar cleaning device

Abstract

This utility model relates to the field of semiconductor processing technology and discloses a vertical crystal rod cleaning device, including a vacuum adsorption platform, a linear motion component, and a rotating component. The vacuum adsorption platform is used to support vertically placed crystal rods. The rotating component includes a rotating unit, a first ring body, a second ring body, a flushing plate, and brushes. The rotating unit is located at the output end of the linear motion component. The first ring body is located at the output end of the rotating unit. Multiple flushing plates are arranged around the axis of the first ring body, with one end connected to the first ring body and the other end connected to the second ring body. Multiple brushes are arranged around the axis of the first ring body, with the brush bristles facing the axis of the first ring body. The beneficial effects of this utility model are: a vertical crystal rod cleaning device that improves cleaning efficiency, reduces device load, and lowers energy consumption and production costs.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a vertical crystal rod cleaning device. Background Technology

[0002] In the field of semiconductor and photovoltaic monocrystalline silicon material manufacturing, the surface cleanliness of crystal ingots directly affects the quality of subsequent cutting and processing. Current technologies generally employ a horizontal rotation cleaning method, where the crystal ingot is placed horizontally and held in place by a clamp on a drive unit. The drive unit rotates the ingot, bringing it into contact with the bristles of a brush. This cleaning process requires engineers to perform multiple steps, including ingot clamping and positioning, and brush adjustment, making the operation complex and resulting in low cleaning efficiency. Furthermore, because the crystal ingot is rotating during cleaning, its weight places a heavy load on the drive unit, requiring a high-power motor, which increases energy consumption and production costs. Utility Model Content

[0003] The purpose of this invention is to provide a vertical crystal rod cleaning device that improves cleaning efficiency, reduces device load, and lowers energy consumption and production costs.

[0004] To achieve the above objectives, this utility model provides a vertical crystal rod cleaning device, including a vacuum adsorption platform, a linear motion component, and a rotating component;

[0005] The vacuum adsorption platform is used to support vertically placed crystal rods;

[0006] The linear motion component is located on one side of the vacuum adsorption platform, and the output end of the linear motion component can reciprocate in the vertical direction;

[0007] The rotating assembly includes a rotating unit, a first ring body, a second ring body, a flushing plate, and a brush. The rotating unit is located at the output end of the linear motion assembly. The first ring body is located at the output end of the rotating unit, and the second ring body is located below the first ring body and is coaxially arranged with the first ring body.

[0008] The number of flushing plates is multiple, and they are arranged around the axis of the first ring body. One end of the flushing plate is connected to the first ring body, and the other end of the flushing plate is connected to the second ring body. The nozzle of the flushing plate is arranged facing the axis of the first ring body.

[0009] The number of brushes is multiple and they are arranged around the axis of the first ring body. One end of the brush is connected to the first ring body and the other end of the brush is connected to the second ring body. The bristles of the brush are arranged towards the axis of the first ring body.

[0010] The first ring, the second ring, the brush, and the nozzle assembly work together to form a cleaning chamber for inserting crystal rods.

[0011] Furthermore, the output end of the linear motion component is provided with an L-shaped connecting plate, which is fixedly connected to the rotating unit.

[0012] Furthermore, the linear motion assembly includes a base, a motor, a coupling, a lead screw, and a slider. The motor is located on the top of the base. The output end of the motor is connected to one end of the coupling, and the other end of the coupling is connected to the lead screw. The lead screw is rotatably connected to the base. The slider is sleeved on the lead screw and threadedly connected to the lead screw. The slider is fixedly connected to the L-shaped connecting plate.

[0013] Furthermore, the slider has guide protrusions on both sides in the width direction, and the base has guide grooves corresponding to the guide protrusions.

[0014] Furthermore, the flushing plate has a channel inside, a water inlet on one side of the flushing plate, and multiple nozzles on the other side of the flushing plate. The water inlet and the nozzles are connected through the channel.

[0015] Furthermore, the flushing plate is fitted against the side wall opposite to the brush.

[0016] Furthermore, the first ring body, the second ring body, and the flushing plate are connected by screws, and the first ring body, the second ring body, and the brush are connected by screws.

[0017] Furthermore, the projection of the nozzle onto the horizontal plane is located within the projection range of the first annular body onto the horizontal plane.

[0018] Compared with the prior art, the vertical crystal rod cleaning device of this utility model has the following advantages: the vacuum adsorption platform is used to support the vertically placed crystal rods, eliminating the need for clamping and reducing the difficulty of cleaning operations; the rotating assembly includes a rotating unit, a first ring body, a second ring body, a flushing plate, and a brush. The rotating unit is located at the output end of the linear motion assembly, and the flushing plate and brush are located between the first and second ring bodies, with the nozzle of the flushing plate facing the axis of the first ring body and the bristles of the brush facing the axis of the first ring body; the first ring body, the second ring body, the brush, and the nozzle assembly cooperate to form a cleaning chamber for crystal rod insertion. When crystal rods need to be cleaned, the crystal rods are placed vertically on the vacuum adsorption platform, and the linear motion assembly drives the rotating assembly to move downwards so that the crystal rods are inserted into the cleaning chamber. Subsequently, the rotating unit drives the first ring body, the second ring body, the flushing plate, and the brush to rotate, cleaning the side walls of the crystal rods. The operation is simple, the cleaning efficiency is improved, and the crystal rods are stationary during the cleaning process, reducing the load on the cleaning device, improving cleaning efficiency, and reducing energy consumption and production costs. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the vertical crystal rod cleaning device according to an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the rotating component of the vertical crystal rod cleaning device according to an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the linear motion component of the vertical crystal rod cleaning device according to an embodiment of this utility model;

[0022] Figure 4 This is a cross-sectional view of the linear motion component of the vertical crystal rod cleaning device according to an embodiment of this utility model.

[0023] In the diagram, 1 is the vacuum adsorption platform; 2 is the linear motion assembly; 21 is the base; 211 is the guide groove; 22 is the motor; 23 is the coupling; 24 is the lead screw; 25 is the slider; 251 is the guide protrusion; 3 is the rotating assembly; 30 is the cleaning chamber; 31 is the rotating unit; 32 is the first ring; 33 is the second ring; 34 is the flushing plate; 341 is the water inlet; 342 is the nozzle; 35 is the brush; 4 is the L-shaped connecting plate; and a is the crystal rod. Detailed Implementation

[0024] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "inner", "outer" and other terms used in this utility model to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0026] In the description of this utility model, it should be understood that the terms "first," "second," etc., are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0027] like Figures 1 to 4 As shown, the assembly includes a vacuum adsorption platform 1, a linear motion component 2, and a rotating component 3. The vacuum adsorption platform 1 supports the vertically placed crystal rod a for easy fixation. The linear motion component 2 is located on one side of the vacuum adsorption platform 1, and its output end can reciprocate vertically to drive the rotating component 3 closer to or further away from the crystal rod, thus cleaning and resetting the crystal rod after cleaning. To simplify the structure of the rotating component 3, it includes a rotating unit 31, a first ring 32, a second ring 33, a flushing plate 34, and a brush 35. The rotating unit 31 is located at the output end of the linear motion component 2, the first ring 32 is located at the output end of the rotating unit 31, and the second ring 33 is located below and coaxially arranged with the first ring 32. Multiple flushing plates 34 are arranged around the axis of the first ring 32 to provide rinsing water flow during cleaning. Figure 2 As shown, one end of the flushing plate 34 is connected to the first ring body 32, and the other end of the flushing plate 34 is connected to the second ring body 33. The nozzle 342 of the flushing plate 34 is positioned facing the axis of the first ring body 32. Multiple brushes 35 are arranged around the axis of the first ring body 32. One end of each brush 35 is connected to the first ring body 32, and the other end is connected to the second ring body 33. The bristles of each brush 35 are positioned facing the axis of the first ring body 32. The first ring body 32, the second ring body 33, the brushes 35, and the nozzle 342 assembly cooperate to form a cleaning chamber 30 for inserting the crystal rod a.

[0028] When cleaning crystal rod a is required, it is first placed vertically on the vacuum adsorption platform 1. The linear motion component 2 drives the rotating component 3 to move downwards, so that crystal rod a is inserted into the cleaning chamber 30. Then, the rotating unit 31 drives the first ring 32, the second ring 33, the water flushing plate 34, and the brush 35 to rotate. The nozzles of the water flushing plate 34 spray water, which, together with the brush 35, cleans the side wall of crystal rod a. After cleaning, the linear motion component 2 drives the rotating component 3 to move upwards to reset, and crystal rod a is removed from the cleaning chamber 30 and can be unloaded. The operation is simple, the cleaning efficiency is improved, and the crystal rod a is in a stationary state during the cleaning process, which reduces the load on the cleaning device, improves cleaning efficiency, and reduces energy consumption and production costs.

[0029] Furthermore, in this embodiment, to facilitate the linear motion component 2 driving the rotating component 3 to move in the vertical direction, refer to... Figure 1 , Figure 2 The output end of the linear motion component 2 is provided with an L-shaped connecting plate 4, which is fixedly connected to the rotating unit 31.

[0030] Furthermore, to simplify the structure of the linear motion component 2, in this embodiment, refer to... Figure 3 The linear motion assembly 2 includes a base 21, a motor 22, a coupling 23, a lead screw 24, and a slider 25. For example... Figure 1 , Figure 3 As shown, a motor 22 is mounted on the top of the base 21. The output end of the motor 22 is connected to one end of a coupling 23, and the other end of the coupling 23 is connected to a lead screw 24. The lead screw 24 is rotatably connected to the base 21. A slider 25 is sleeved on the lead screw 24 and threadedly connected to it. The slider 25 is fixedly connected to the L-shaped connecting plate 4. When the motor 22 operates, it drives the lead screw 24 to rotate, which in turn drives the slider 25 to slide along the axial direction of the lead screw 24, causing the L-shaped connecting plate 4 to move the rotating assembly 3 vertically. In this embodiment, the lead screw 24 and the base 21 are rotatably connected via bearings. Furthermore, to facilitate guiding the movement of the slider 25, see [reference needed]. Figure 3 , Figure 4 The slider 25 has guide protrusions 251 on both sides in the width direction, and the base 21 has guide grooves 211 corresponding to the guide protrusions 251, so as to prevent the slider 25 from shifting its position during movement and improve the structural stability of the linear motion component 2.

[0031] In this utility model of a vertical crystal rod cleaning device, to simplify the overall structure of the device, both the vacuum adsorption platform 1 and the rotating unit 31 are standard parts that can be directly purchased. In this embodiment, the vacuum adsorption platform 1 uses an SMC vacuum chuck, model ZNC80-S-CVS, and the model of the vacuum adsorption platform 1 can be selected according to the actual weight and size of the crystal rod. The rotating unit 31 uses a rotating platform of model DG200R, and the rotating platform can be selected according to actual design requirements.

[0032] Furthermore, to facilitate uniform water supply during crystal rod cleaning, such as Figure 2 As shown, the flushing plate 34 has an internal channel, a water inlet 341 on one side, and multiple nozzles 342 on the other side. These nozzles are spaced vertically apart, and the water inlet 341 and nozzles 342 are connected via a channel. In this embodiment, when the cleaning device is operating, the water inlet 341 is connected to an external water supply device to supply water for cleaning the crystal rod. The water inlet 341 is connected to the external water supply device via a rotary joint, which is a standard part and can be directly purchased. Furthermore, to facilitate the rapid rinsing of dirt brushed off the sidewall of the crystal rod by the brush 35 and improve cleaning efficiency, the flushing plate 34 is fitted against the opposite sidewall of the brush 35, so that the nozzles 342 are positioned close to the brush 35. When the brush 35 brushes dirt off the sidewall of the crystal rod, the water jet from the nozzles 342 can promptly wash the dirt away from the crystal rod. In this embodiment, there are two brushes 35 and two rinsing plates 34. The number of brushes 35 and rinsing plates 34 can be adjusted according to the size of the crystal rods to be cleaned and the efficiency requirements.

[0033] Furthermore, since the bristles of the brush 35 have a limited lifespan due to friction with the crystal rod surface during cleaning, in this embodiment, the first ring body 32, the second ring body 33, and the brush 35 are connected by screws to facilitate replacement of the brush 35. Even further, to facilitate replacement of the flushing plate 34, the first ring body 32, the second ring body 33, and the flushing plate 34 are also connected by screws. Furthermore, to avoid interference between the nozzle 342 and the crystal rod during cleaning, in this embodiment, the projection of the nozzle 342 on the horizontal plane is located within the projection range of the first ring body 32 on the horizontal plane.

[0034] In summary, this utility model embodiment provides a vertical crystal rod cleaning device. The vacuum adsorption platform 1 is used to support vertically placed crystal rods, eliminating the need for clamping the crystal rods and reducing the difficulty of the cleaning operation. The rotating component 3 includes a rotating unit 31, a first ring 32, a second ring 33, a flushing plate 34, and a brush 35. The rotating unit 31 is located at the output end of the linear motion component 2. The flushing plate 34 and the brush 35 are located between the first ring 32 and the second ring 33, with the nozzle 342 of the flushing plate 34 facing the axis of the first ring 32 and the bristles of the brush 35 facing the axis of the first ring 32. The first ring 32, the second ring 33, the brush 35, and the nozzle 342 assembly cooperate to form a cleaning chamber 30 for crystal rod insertion. When the crystal rod needs to be cleaned, it is placed vertically on the vacuum adsorption platform 1. The linear motion component 2 drives the rotating component 3 to move downward so that the crystal rod is inserted into the cleaning chamber 30. Then, the rotating unit 31 drives the first ring 32, the second ring 33, the flushing plate 34 and the brush 35 to rotate, cleaning the side wall of the crystal rod. The operation is simple and the cleaning efficiency is improved. During the cleaning process, the crystal rod is in a stationary state, which reduces the load on the cleaning device, improves the cleaning efficiency, and reduces energy consumption and production costs.

[0035] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A vertical crystal rod cleaning device, characterized in that: Includes a vacuum adsorption platform, linear motion components, and rotary components; The vacuum adsorption platform is used to support vertically placed crystal rods; The linear motion component is located on one side of the vacuum adsorption platform, and the output end of the linear motion component can reciprocate in the vertical direction; The rotating assembly includes a rotating unit, a first ring body, a second ring body, a flushing plate, and a brush. The rotating unit is located at the output end of the linear motion assembly. The first ring body is located at the output end of the rotating unit, and the second ring body is located below the first ring body and is coaxially arranged with the first ring body. The number of flushing plates is multiple, and they are arranged around the axis of the first ring body. One end of the flushing plate is connected to the first ring body, and the other end of the flushing plate is connected to the second ring body. The nozzle of the flushing plate is arranged facing the axis of the first ring body. The number of brushes is multiple and they are arranged around the axis of the first ring body. One end of the brush is connected to the first ring body and the other end of the brush is connected to the second ring body. The bristles of the brush are arranged towards the axis of the first ring body. The first ring, the second ring, the brush, and the nozzle assembly work together to form a cleaning chamber for inserting crystal rods.

2. The vertical crystal rod cleaning device as described in claim 1, characterized in that: The output end of the linear motion component is provided with an L-shaped connecting plate, which is fixedly connected to the rotating unit.

3. The vertical crystal rod cleaning device as described in claim 2, characterized in that: The linear motion assembly includes a base, a motor, a coupling, a lead screw, and a slider. The motor is located on the top of the base. The output end of the motor is connected to one end of the coupling, and the other end of the coupling is connected to the lead screw. The lead screw is rotatably connected to the base. The slider is sleeved on the lead screw and threadedly connected to the lead screw. The slider is fixedly connected to the L-shaped connecting plate.

4. The vertical crystal rod cleaning device as described in claim 3, characterized in that: The slider has guide protrusions on both sides in the width direction, and the base has guide grooves corresponding to the guide protrusions.

5. The vertical crystal rod cleaning device as described in claim 1, characterized in that: The flushing plate has a channel inside, a water inlet on one side of the flushing plate, and multiple nozzles on the other side of the flushing plate. The water inlet and the nozzles are connected through the channel.

6. The vertical crystal rod cleaning device as described in claim 1, characterized in that: The flushing plate is fitted to the side wall opposite to the brush.

7. The vertical crystal rod cleaning device as described in claim 1, characterized in that: The first ring body, the second ring body, and the flushing plate are connected by screws, and the first ring body, the second ring body, and the brush are connected by screws.

8. The vertical crystal rod cleaning device as described in claim 1, characterized in that: The projection of the nozzle onto the horizontal plane is within the projection range of the first annular body onto the horizontal plane.

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