Horizontal crystal bar cleaning device

Abstract

The utility model relates to the technical field of semiconductor manufacturing discloses a horizontal type crystal bar cleaning device, including two bearing mechanisms and three cleaning mechanisms, two bearing mechanisms are intervally arranged in the second direction, the bearing mechanism includes support frame, first drive unit and pivot, first drive unit is located in support frame, pivot is rotatably connected with support frame, one end of pivot is drivingly connected with the output end of first drive unit, and first drive unit drives pivot rotation, the cleaning mechanism includes base, second drive unit, shower nozzle assembly and brush, second drive unit is located in base, and the output end of second drive unit is connected with shower nozzle assembly and brush, the utility model has the advantages of: not needing to clamp the side wall or end of crystal bar, avoiding the surface damage of crystal bar, and only needing to clean the surface of crystal bar once, thereby improving cleaning efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a horizontal crystal rod cleaning device. Background Technology

[0002] In the wafer forming process, the crystal ingot undergoes initial processing such as cutting, cleaning, grinding, and edge chamfering. After the crystal ingot is ground and chamfered, some tiny silicon powder particles or oil stains caused by manual handling will adhere to the surface of the crystal ingot. At the same time, during the transfer or storage of the crystal ingot, the crystal ingot is exposed to the air, and dust and other impurities in the air will adhere to the surface of the crystal ingot. These impurities will wear down the wafer during the subsequent crystal ingot cutting process. Therefore, it is necessary to clean the surface of the crystal ingot.

[0003] In the prior art, the crystal rod cleaning device needs to clamp the side wall or end of the crystal rod, which results in the surface of the clamping part of the crystal rod not being cleaned. The clamping position of the crystal rod needs to be adjusted and a secondary cleaning process is required, which has low cleaning efficiency. At the same time, the surface of the crystal rod is easily damaged during the clamping process. Utility Model Content

[0004] The purpose of this invention is to provide a horizontal crystal rod cleaning device that eliminates the need to clamp the sidewalls or ends of the crystal rod, thus avoiding damage to the surface of the crystal rod. At the same time, it only requires cleaning the surface of the crystal rod once, thereby improving cleaning efficiency.

[0005] To achieve the above objectives, this utility model provides a horizontal crystal rod cleaning device, comprising two support mechanisms and three cleaning mechanisms;

[0006] The two support mechanisms are spaced apart in the second direction. Each support mechanism includes a support frame, a first drive unit, and a rotating shaft. The first drive unit is disposed on the support frame, and the rotating shaft is rotatably connected to the support frame. One end of the rotating shaft is connected to the output end of the first drive unit. The side wall of the rotating shaft abuts against the side wall of the crystal rod to support the crystal rod. The first drive unit drives the rotating shaft to rotate, thereby driving the crystal rod to rotate around an axis parallel to the first direction. The first direction and the second direction are perpendicular to each other.

[0007] Two cleaning mechanisms are respectively located at both ends of the crystal rod in the first direction, and one cleaning mechanism is located at one end of the crystal rod in the second direction. Each cleaning mechanism includes a base, a second drive unit, a nozzle assembly, and a brush. The second drive unit is located on the base, and its output end is connected to the nozzle assembly and the brush. The second drive unit is used to drive the nozzle assembly and the brush to move in the first direction and the second direction to clean the crystal rod close to its sidewall or both end faces.

[0008] Furthermore, the first drive unit includes a first motor, a drive pulley, a driven pulley, and a synchronous belt. The first motor is located at one end of the connecting frame in the first direction. The output shaft of the first motor is fixedly connected to the drive pulley, and the driven pulley is fixedly connected to one end of the rotating shaft. The drive pulley and the driven pulley are driven by the synchronous belt.

[0009] The first motor operates, driving the drive wheel to rotate, which in turn causes the shaft to rotate, thereby driving the crystal rod to rotate.

[0010] Furthermore, the two ends of the rotating shaft are provided with limiting rings for restricting the crystal rod to move axially, and the diameter of the limiting rings is larger than the diameter of the rotating shaft.

[0011] Furthermore, the second drive unit includes a linear module and a slide cylinder. The linear module is connected to the base, and the output end of the linear module is connected to the slide cylinder. The output end of the slide cylinder is connected to the brush, and the nozzle assembly is provided above the brush. The movement directions of the output end of the linear module and the output end of the slide cylinder are perpendicular to each other.

[0012] Furthermore, the nozzle assembly has a water inlet and a plurality of nozzles, the water inlet being connected to an external water source, and the plurality of nozzles being spaced apart along the length of the nozzle assembly.

[0013] Furthermore, the brush includes a brush base and brush bristles, and the distance from the tip of the brush bristles to the crystal rod is greater than the distance from the water outlet of the nozzle to the crystal rod.

[0014] Furthermore, the projection of the brush holder onto the horizontal plane is T-shaped.

[0015] Furthermore, bearings are fitted at both ends of the rotating shaft, and the support frame has limiting grooves corresponding to the bearings.

[0016] Compared with the prior art, the horizontal crystal rod cleaning device of this utility model has the following advantages: two supporting mechanisms are spaced apart in the second direction. Each supporting mechanism includes a support frame, a first driving unit, and a rotating shaft. The first driving unit is located on the support frame, and the rotating shaft is rotatably connected to the support frame. One end of the rotating shaft is drivenly connected to the output end of the first driving unit. The side wall of the rotating shaft abuts against the side wall of the crystal rod to support it. Furthermore, the first driving unit drives the rotating shaft to rotate, thereby causing the crystal rod to rotate around an axis parallel to the first direction. That is, during the cleaning process, the crystal rod is placed between the rotating shafts of the two supporting mechanisms. The first driving units of the two supporting mechanisms work synchronously to drive the rotating shafts to rotate, thereby causing the crystal rod to rotate. There is no need to clamp the side wall or end of the crystal rod, avoiding surface damage to the crystal rod, and at the same time, avoiding partial surface obstruction of the crystal rod. In addition, three cleaning mechanisms are provided, two of which are located at both ends of the crystal rod in the first direction, and one cleaning mechanism is located at one end of the crystal rod in the second direction. Each cleaning mechanism includes a base, a second drive unit, a nozzle assembly, and a brush. The second drive unit is located on the base, and the output end of the second drive unit is connected to the nozzle assembly and the brush. The second drive unit is used to drive the nozzle assembly and the brush to move in the first and second directions to clean the sidewalls or both ends of the crystal rod. By using three cleaning mechanisms to clean the sidewalls and both ends of the crystal rod simultaneously, only the surface of the crystal rod needs to be cleaned once, thus improving cleaning efficiency. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the horizontal crystal rod cleaning device according to an embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram showing the distribution of the support mechanism of the horizontal crystal rod cleaning device according to an embodiment of this utility model;

[0019] Figure 3 This is a schematic diagram of the supporting mechanism of the horizontal crystal rod cleaning device according to an embodiment of the present invention;

[0020] Figure 4 This is a schematic diagram showing the distribution of the cleaning mechanism in the horizontal crystal rod cleaning device according to an embodiment of this utility model;

[0021] Figure 5 This is a schematic diagram of the cleaning mechanism of the horizontal crystal rod cleaning device according to an embodiment of the present invention.

[0022] In the diagram, 1 is the bearing mechanism; 11 is the support frame; 111 is the limiting groove; 12 is the first drive unit; 121 is the first motor; 122 is the driving wheel; 123 is the driven wheel; 124 is the synchronous belt; 13 is the rotating shaft; 131 is the limiting ring; 132 is the bearing; 2 is the cleaning mechanism; 21 is the base; 22 is the second drive unit; 221 is the linear module; 222 is the slide cylinder; 23 is the nozzle assembly; 231 is the water inlet; 232 is the nozzle; 24 is the brush; 241 is the brush holder; 242 is the brush bristles; X is the first direction; Y is the second direction; a is the crystal rod. Detailed Implementation

[0023] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0024] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "inner", "outer" and other terms used in this utility model to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0025] In the description of this utility model, it should be understood that the terms "first," "second," etc., are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0026] like Figures 1 to 5 As shown, a preferred embodiment of the horizontal crystal rod cleaning device of this utility model includes two supporting mechanisms 1 and three cleaning mechanisms 2. For ease of explanation, the length direction of the supporting mechanism 1 is defined as the first direction X, and the width direction is defined as the second direction Y. The first direction X and the second direction Y are perpendicular to each other. Wherein, as... Figure 2As shown, two support mechanisms 1 are spaced apart in the second direction Y. The two support mechanisms 1 cooperate to support the crystal rod a and simultaneously drive the crystal rod a to rotate. Specifically, each support mechanism 1 includes a support frame 11, a first drive unit 12, and a rotating shaft 13. The first drive unit 12 is mounted on the support frame 11, and the rotating shaft 13 is rotatably connected to the support frame 11. One end of the rotating shaft 13 is connected to the output end of the first drive unit 12. The side wall of the rotating shaft 13 abuts against the side wall of the crystal rod a to support the crystal rod. The first drive unit 12 drives the rotating shaft 13 to rotate, thereby driving the crystal rod a to rotate around an axis parallel to the first direction X. In this invention, because the first drive units 12 of the two support mechanisms work synchronously to drive the rotating shaft 13 to rotate, thereby driving the crystal rod a to rotate, there is no need to clamp the side wall or end of the crystal rod a, which avoids surface damage to the crystal rod during clamping. Simultaneously, it avoids partial obstruction of the crystal rod surface, facilitating cleaning in one operation.

[0027] In this embodiment, in order to improve cleaning efficiency, such as Figure 1 , Figure 4 As shown, two cleaning mechanisms 2 are respectively located at both ends of the crystal rod a in the first direction X, and one cleaning mechanism 2 is located at one end of the crystal rod in the second direction Y. Specifically, the cleaning mechanism 2 includes a base 21, a second drive unit 22, a nozzle assembly 23, and a brush 24. The second drive unit 22 is located on the base 21, and its output end is connected to the nozzle assembly 23 and the brush 24. The second drive unit 22 is used to drive the nozzle assembly 23 and the brush 24 to move in the first direction X and the second direction Y to clean the sidewalls or both ends of the crystal rod a. By cooperating with the three cleaning mechanisms 2, the two ends and the sidewalls of the crystal rod a can be cleaned simultaneously, improving the cleaning efficiency.

[0028] Furthermore, in some embodiments, to simplify the structure of the first driving unit 12, such as... Figure 3 As shown, the first drive unit 12 includes a first motor 121, a driving wheel 122, a driven wheel 123, and a synchronous belt 124. The first motor 121 is located at one end of the connecting frame in the first direction X. The output shaft of the first motor 121 is fixedly connected to the driving wheel 122, and the driven wheel 123 is fixedly connected to one end of the rotating shaft 13. The driving wheel 122 and the driven wheel 123 are driven by the synchronous belt 124. When the first motor 121 operates, it drives the driving wheel 122 to rotate, thereby causing the rotating shaft 13 to rotate. Since the side wall of the rotating shaft 13 abuts against the side wall of the crystal rod, the crystal rod is driven to rotate through friction. In this embodiment, the two first drive units 12 have the same rotation speed and rotation direction.

[0029] Furthermore, the crystal rod is placed between the two rotating shafts 13 to prevent axial movement of the crystal rod during rotation, which could cause the crystal rod to slide off the support mechanism 1. Figure 2 , Figure 3 As shown, the two ends of the rotating shaft 13 are provided with limiting rings 131 to restrict the axial movement of the crystal rod. The diameter of the limiting rings 131 is larger than the diameter of the rotating shaft 13. When the crystal rod is placed, it is located between the two limiting rings 131, and the mechanical limiting prevents the crystal rod from slipping.

[0030] Furthermore, to facilitate the rotatable connection between the rotating shaft 13 and the support frame 11, such as... Figure 3 As shown, bearings 132 are fitted at both ends of the rotating shaft 13. In order to facilitate the installation and positioning of the bearings 132, the support frame 11 is provided with a positioning groove 111 corresponding to the bearings 132.

[0031] Furthermore, in order to simplify the structure of the second drive unit 22 and reduce costs, such as Figure 4 As shown, the second drive unit 22 includes a linear module 221 and a sliding cylinder 222. The linear module 221 is fixedly connected to the base 21. The output end of the linear module 221 is connected to the sliding cylinder 222, and the output end of the sliding cylinder 222 is connected to a brush 24. A nozzle assembly 23 is provided above the brush 24. The movement directions of the output ends of the linear module 221 and the sliding cylinder 222 are perpendicular to each other. That is, the movement direction of the output end of the linear module 221 is either the first direction X or the second direction Y. When the movement direction of the output end of the linear module 221 is the first direction X, the movement direction of the output end of the sliding cylinder 222 is the second direction Y; when the movement direction of the output end of the linear module 221 is the second direction Y, the movement direction of the output end of the sliding cylinder 222 is the first direction X. In this embodiment, the linear module 221 can drive the brush 24 to reciprocate in the first direction X or the second direction Y, and move closer to or away from the crystal rod through the sliding cylinder 222, thereby realizing the cleaning and resetting of the crystal rod.

[0032] Furthermore, to facilitate water supply during cleaning of the crystal rod surface, the nozzle assembly 23 has a water inlet 231 and multiple nozzles 232. The water inlet 231 is connected to an external water source, and the multiple nozzles 232 are spaced apart along the length of the nozzle assembly 23. The nozzle assembly 23 has internal water flow channels, and the water inlet 231 and the multiple nozzles 232 are connected through these channels. In other words, the water inlet 231 is connected to an external water source via a water pipe to supply water, and the multiple nozzles 232 facilitate uniform water spraying onto the surface of the crystal rod.

[0033] Furthermore, to facilitate the configuration of the brush 24, the brush 24 includes a brush base 241 and brush bristles 242. The distance from the tip of the brush bristles 242 to the crystal rod is greater than the distance from the outlet of the nozzle 232 to the crystal rod. This configuration avoids interference between the nozzle 232 and the crystal rod during cleaning. In this embodiment, the brush base 241 is positioned parallel to the mid-plane of the horizontal plane, close to the axis of the crystal rod. This increases the contact area between the brush bristles 242 and the surface of the crystal rod, improving cleaning efficiency. In this embodiment, the nozzle assembly 23 is fixedly mounted above the brush base 241, and can be connected by pins or screws.

[0034] Furthermore, to facilitate fixing the brush holder 241 to the output end of the slide cylinder 222, the projection of the brush holder 241 on the horizontal plane is T-shaped. In this embodiment, the brush holder 241 and the slide cylinder 222 are fixed together by screws.

[0035] The working process of this utility model is as follows: the crystal rod is placed between two rotating shafts 13, the rotating shafts 13 are rotated by the first driving unit 12, thereby driving the crystal rod to rotate, and then the second driving unit 22 drives the nozzle assembly 23 and the brush 24 to approach the crystal rod to complete the tilting.

[0036] In summary, this utility model embodiment provides a horizontal crystal rod cleaning device. Two support mechanisms 1 are spaced apart in the second direction Y. Each support mechanism 1 includes a support frame 11, a first drive unit 12, and a rotating shaft 13. The first drive unit 12 is disposed on the support frame 11, and the rotating shaft 13 is rotatably connected to the support frame 11. One end of the rotating shaft 13 is drively connected to the output end of the first drive unit 12. The side wall of the rotating shaft 13 abuts against the side wall of the crystal rod to support it. The first drive unit 12 drives the rotating shaft 13 to rotate, thereby causing the crystal rod to rotate around an axis parallel to the first direction X. That is, during the cleaning process, the crystal rod is placed between the rotating shafts 13 of the two support mechanisms 1. The first drive units 12 of the two support mechanisms work synchronously to drive the rotating shafts 13 to rotate, thereby causing the crystal rod to rotate. There is no need to clamp the side wall or end of the crystal rod, avoiding surface damage to the crystal rod and preventing partial surface obstruction of the crystal rod. In addition, three cleaning mechanisms 2 are provided, two of which are located at both ends of the crystal rod in the first direction X, and one cleaning mechanism 2 is located at one end of the crystal rod in the second direction Y. Each cleaning mechanism 2 includes a base 21, a second drive unit 22, a nozzle assembly 23, and a brush 24. The second drive unit 22 is located on the base 21, and the output end of the second drive unit 22 is connected to the nozzle assembly 23 and the brush 24. The second drive unit 22 is used to drive the nozzle assembly 23 and the brush 24 to move in the first direction X and the second direction Y to clean the side wall or both ends of the crystal rod. By using three cleaning mechanisms 2 to clean the side wall and both ends of the crystal rod simultaneously, only the surface of the crystal rod needs to be cleaned once, thus improving the cleaning efficiency.

[0037] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A horizontal crystal rod cleaning device, characterized in that: It includes two load-bearing mechanisms and three cleaning mechanisms; The two support mechanisms are spaced apart in the second direction. Each support mechanism includes a support frame, a first drive unit, and a rotating shaft. The first drive unit is disposed on the support frame, and the rotating shaft is rotatably connected to the support frame. One end of the rotating shaft is connected to the output end of the first drive unit. The side wall of the rotating shaft abuts against the side wall of the crystal rod to support the crystal rod. The first drive unit drives the rotating shaft to rotate, thereby driving the crystal rod to rotate around an axis parallel to the first direction. The first direction and the second direction are perpendicular to each other. Two cleaning mechanisms are respectively located at both ends of the crystal rod in the first direction, and one cleaning mechanism is located at one end of the crystal rod in the second direction. Each cleaning mechanism includes a base, a second drive unit, a nozzle assembly, and a brush. The second drive unit is located on the base, and its output end is connected to the nozzle assembly and the brush. The second drive unit is used to drive the nozzle assembly and the brush to move in the first direction and the second direction to clean the crystal rod close to its sidewall or both end faces.

2. The horizontal crystal rod cleaning device as described in claim 1, characterized in that: The first drive unit includes a first motor, a drive wheel, a driven wheel, and a synchronous belt. The first motor is located at one end of the support frame in the first direction. The output shaft of the first motor is fixedly connected to the drive wheel, and the driven wheel is fixedly connected to one end of the rotating shaft. The drive wheel and the driven wheel are driven by the synchronous belt. The first motor operates, driving the drive wheel to rotate, which in turn causes the shaft to rotate, thereby driving the crystal rod to rotate.

3. The horizontal crystal rod cleaning device as described in claim 1, characterized in that: The two ends of the rotating shaft are provided with limiting rings for restricting the crystal rod to move axially, and the diameter of the limiting rings is larger than the diameter of the rotating shaft.

4. The horizontal crystal rod cleaning device as described in claim 1, characterized in that: The second drive unit includes a linear module and a slide cylinder. The linear module is connected to the base. The output end of the linear module is connected to the slide cylinder. The output end of the slide cylinder is connected to the brush. The nozzle assembly is provided above the brush. The movement directions of the output end of the linear module and the output end of the slide cylinder are perpendicular to each other.

5. The horizontal crystal rod cleaning device as described in claim 1, characterized in that: The nozzle assembly has a water inlet and multiple nozzles. The water inlet is connected to an external water source, and the multiple nozzles are spaced apart along the length of the nozzle assembly.

6. The horizontal crystal rod cleaning device as described in claim 5, characterized in that: The brush includes a brush base and brush bristles, and the distance from the tip of the brush bristles to the crystal rod is greater than the distance from the water outlet of the nozzle to the crystal rod.

7. The horizontal crystal rod cleaning device as described in claim 6, characterized in that: The projection of the brush holder onto the horizontal plane is T-shaped.

8. The horizontal crystal rod cleaning device as described in claim 1, characterized in that: Bearings are fitted at both ends of the rotating shaft, and the support frame has limiting grooves corresponding to the bearings.

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