Laser device

Abstract

The utility model discloses a kind of laser equipment, belong to the technical field of semiconductor processing equipment, laser equipment includes support seat, galvanometer, jackscrew, threaded adjusting piece, abutting piece, threaded locking piece;Support seat is equipped with adjusting screw hole, mounting screw hole, jacking screw hole and optical path passage;Galvanometer includes mirror seat with installation bottom surface and installation side face;Installation side face is equipped with light inlet passage, installation bottom surface is equipped with light outlet passage and locking screw hole, jackscrew is rotatably mounted in support seat by jacking screw hole;Installation bottom surface is abutted to jackscrew, threaded adjusting piece is rotatably mounted in support seat by adjusting screw hole, abutting piece is mounted on installation side face and is abutted to threaded adjusting piece, threaded locking piece is rotatably mounted in support seat by mounting screw hole;Threaded locking piece is connected with mirror seat by locking screw hole, light inlet passage, light outlet passage, optical path passage are sequentially communicated.The laser equipment of the utility model can avoid the condition that spot appears eccentric, and can improve laser processing quality.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor processing equipment, and in particular to a laser device. Background Technology

[0002] Laser lift-off equipment utilizes the characteristic that the photon energy of a laser beam is concentrated in GaN (gallium nitride) and Al2O3 (aluminum oxide) or AlN (aluminum nitride). Ultraviolet lasers penetrate sapphire substrates and act only on the GaN layer, decomposing GaN into liquid Ga and gaseous N2 within a very small interlayer region, thus achieving the purpose of lifting the sapphire substrate. The most crucial aspect of laser lift-off equipment is the optical path; the degree of beam eccentricity and the reflectivity of the beam after passing through the galvanometer field mirror are extremely important. Currently, the galvanometer mount in laser equipment is mainly mounted on a support base. The mounting side of the mount has an input channel, and the mounting bottom has an output channel. During installation, the mounting bottom of the mount is mounted on the support base. To ensure the perpendicularity of the beam, the perpendicularity between the mounting side and the mounting bottom of the mount needs to be extremely high to guarantee that the beam from the galvanometer will not show any eccentricity. However, to date, mainstream galvanometer manufacturers are limited by traditional casting processes and machining precision. The perpendicularity between the mounting side and the mounting bottom of the mirror mount generally has machining errors. The perpendicularity between the mounting side and the mounting bottom of the mirror mount is not high and cannot be improved. The existing assembly process lacks an effective dynamic compensation mechanism and cannot eliminate tolerances through subsequent adjustments, resulting in the spot being off-center, which affects the quality of laser processing. Utility Model Content

[0003] The purpose of this utility model embodiment is to provide a laser device that can avoid the phenomenon of laser spot eccentricity and improve the quality of laser processing.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A laser device, comprising:

[0006] The support base is provided with an adjusting screw hole, a mounting screw hole, a lifting screw hole, and an optical path channel; the optical path channel and the mounting screw hole are both located between the adjusting screw hole and the lifting screw hole;

[0007] A galvanometer includes a mount disposed above the support base and having a mounting bottom surface and a mounting side surface; the mounting side surface is provided with a light inlet channel, and the mounting bottom surface is provided with a light outlet channel and a locking screw hole;

[0008] A set screw is rotatably mounted to the support base through the set screw hole; the mounting bottom surface abuts against the set screw;

[0009] A threaded adjusting component is rotatably mounted on the support base via the adjusting screw hole;

[0010] Abutting member; installed on the mounting side and abutting against the threaded adjusting member;

[0011] as well as

[0012] A threaded locking component is rotatably mounted on the support base through the mounting screw hole; the threaded locking component is threadedly connected to the mirror base through the locking screw hole;

[0013] The light inlet channel, the light outlet channel, and the optical path channel are connected in sequence.

[0014] Optionally, the light-gathering channel is located in the central region of the mounting side, and the abutment is installed in the central region of the mounting side and has a light-avoiding channel communicating with the light-gathering channel.

[0015] Optionally, the laser device further includes a sleeve and an aperture; the sleeve is provided with a dimming channel extending in a vertical direction, the aperture is installed in the sleeve and located in the dimming channel, the sleeve passes through the optical path channel and is threadedly connected to the galvanometer, and the dimming channel is connected to the light output channel.

[0016] Optionally, the sleeve is provided with a bracket, the bracket is located within the dimming channel, and the aperture is mounted on the bracket.

[0017] Optionally, there are multiple brackets and multiple apertures, each corresponding to the other. The multiple brackets are arranged at intervals along the vertical direction, and the multiple apertures are arranged at intervals along the vertical direction.

[0018] Optionally, the laser device further includes a stage and a reflecting aluminum mirror disposed on the stage; the stage is horizontally arranged, and the sleeve, the reflecting aluminum mirror, and the stage are arranged sequentially along the vertical direction.

[0019] Optionally, the laser device further includes a reflector disposed on the support base; the light intake channel is located on the reflection path of the reflector.

[0020] Optionally, there are multiple mounting threaded holes arranged at intervals, and the optical path channel is located within the area enclosed by the multiple mounting threaded holes.

[0021] Optionally, the mounting bottom surface and the mounting side surface are arranged sequentially along a first horizontal direction, the adjusting screw holes are multiple and spaced out extending into a second horizontal direction, the lifting screw holes are multiple and spaced out extending into a second horizontal direction, and the first horizontal direction and the second horizontal direction are perpendicular to each other.

[0022] Optionally, the galvanometer has a cavity, and a lens assembly is provided inside the cavity. The light inlet channel, the cavity, the light outlet channel, and the optical path channel are connected in sequence.

[0023] The beneficial effects of this invention are as follows: The mirror mount of this laser equipment is installed on the support base through the cooperation of a set screw, a threaded adjustment component, abutment component, and threaded locking component. The installation angle of the mirror mount can be adjusted by rotating the set screw and the threaded adjustment component. After adjustment, the threaded adjustment component locks the mount in place. This effectively improves the situation of beam spot eccentricity, preventing beam spot misalignment and avoiding damage to the wafer processing caused by low energy density due to beam spot eccentricity. Adjusting the installation angle of the mirror mount also improves the power reflectivity before and after the galvanometer, reducing energy loss and improving the quality of laser processing. Attached Figure Description

[0024] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0025] Figure 1 This is an exploded view of the laser equipment; the set screw, threaded adjustment component, and threaded locking component are omitted from the drawing.

[0026] Figure 2 This is a structural diagram of a laser device, omitting the set screw, thread adjustment component, and thread locking mechanism.

[0027] Figure 3 A schematic diagram showing the fit between the support base and the abutment component;

[0028] Figure 4 A top view showing the fit between the support base, reflector, and abutment.

[0029] Figure 5 The front view showing the fit between the support base, sleeve, aperture, reflecting aluminum mirror, and platform.

[0030] Explanation of reference numerals in the attached figures:

[0031] 11. Support base; 12. Galvanometer; 13. Abutment; 14. Sleeve; 15. Aperture; 16. Stage; 17. Reflecting aluminum mirror; 18. Bracket; 19. Reflecting mirror;

[0032] 111. Adjusting the screw hole; 112. Installing the screw hole; 113. Lifting the screw hole; 114. Optical path channel;

[0033] 121. Mirror mount; 122. Mounting base; 123. Mounting side; 124. Light inlet channel; 125. Light outlet channel; 126. Locking screw hole;

[0034] 131. Avoid the light path;

[0035] 141. Dimming Channel. Detailed Implementation

[0036] To make the technical problems solved by this utility model, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0037] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "fixed," "linked," "communicated," "abutting," "clamping," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] In the description herein, it should be understood that the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationships shown in the accompanying drawings, and are used only for ease of description and simplification of operation. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are merely used for distinction in description and have no special meaning.

[0040] In the description of this specification, references to terms such as "an embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0041] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0042] Unless otherwise stated or defined, the term "and / or" as used in this invention includes any and all combinations of one or more of the associated listed items.

[0043] For ease of description, unless otherwise stated, the terms "up" and "down" in the following text refer to the same direction as "top" and "bottom". Figure 1 Its vertical direction is consistent with the horizontal direction mentioned below, which is consistent with the vertical direction. Figure 4 Its left-right direction is consistent, and the front-back direction and the second horizontal direction mentioned below are also consistent with it. Figure 4 Its vertical direction is consistent.

[0044] like Figures 1 to 5 As shown, this embodiment provides a laser device, including a support base 11, a galvanometer 12, a set screw, a threaded adjustment component, an abutment component 13, and a threaded locking component. The abutment component 13 is a plate, and the threaded adjustment component and threaded locking component are threaded fasteners such as screws and bolts. The set screw, threaded adjustment component, and threaded locking component are not shown in the figure. The support base 11 can be mounted on the machine base of the laser device. The support base 11 is installed using a level to ensure that the upper surface of the support base 11 is horizontal. The galvanometer 12 is mounted on the upper surface of the support base 11.

[0045] The support base 11 is provided with adjusting screw holes 111, mounting screw holes 112, lifting screw holes 113, and an optical path channel 114 extending vertically. The adjusting screw holes 111, mounting screw holes 112, lifting screw holes 113, and optical path channel 114 are arranged at intervals and all pass through the support base 11 from top to bottom. The adjusting screw holes 111 and lifting screw holes 113 are arranged at intervals along the horizontal direction, and the optical path channel 114 and mounting screw holes 112 are both located between the adjusting screw holes 111 and lifting screw holes 113.

[0046] The galvanometer 12 includes a mount 121 and optical path components such as lenses disposed within the mount 121. The composition of the optical path components inside the mount 121 is prior art and will not be described further here. The mount 121 is positioned above the support base 11 and has a mounting bottom surface 122 and a mounting side surface 123. The mounting side surface 123 faces left, and the mounting bottom surface 122 faces downward toward the upper surface of the support base 11. The mounting side surface 123 has a light inlet channel 124 extending from left to right. The mounting bottom surface 122 has a light outlet channel 125 and a locking screw hole 126, which are spaced apart and both extend upward. When the laser emitter mounted on the laser device emits laser light, the laser light enters the mount 121 through the light inlet channel 124, is reflected by the optical path components inside the mount 121, and exits through the light outlet channel 125.

[0047] The set screw is rotatably mounted to the support base 11 through the set screw hole 113. The mounting bottom surface 122 abuts against the upper end of the set screw from top to bottom. The threaded adjustment component is rotatably mounted to the support base 11 through the adjustment screw hole 111, and can be moved up and down by rotating the threaded adjustment component. The abutment 13 is mounted on the mounting side 123, with its lower end facing down abutting against the threaded adjustment component, and can be moved up and down by rotating the threaded adjustment component.

[0048] The threaded locking component is rotatably mounted on the support base 11 via the mounting screw hole 112. Rotating the threaded locking component allows it to move up and down. The threaded locking component is threadedly connected to the mirror base 121 via the locking screw hole 126, thereby locking the mirror base 121. The light inlet channel 124, the light outlet channel 125, and the optical path channel 114 are connected in sequence.

[0049] During laser equipment installation, the support is first placed on the laser equipment's platform. A level and spirit level are used to ensure the mounting surface 122 of the mirror mount 121 is horizontal. The readings should not differ by more than 10 μm between the top and bottom, and between the left and right sides, ensuring the upper surface of the support 11 is horizontal. Then, the galvanometer 12 is installed on the support 11. During installation, the threaded locking component is threaded into the locking screw hole 126 of the support 11, but not tightened. The set screw presses upward against the mounting surface 122 of the mirror mount 121, and the threaded adjustment component presses upward against the abutment 13 on the mirror mount 121. By rotating the threaded adjustment component and the set screw, the mirror mount 121 is slightly oscillated to adjust the verticality of the laser spot until the laser light exiting the light channel 125 from the mirror mount 121 and entering the light path channel 114 is emitted vertically to form a laser spot. This achieves fine-tuning of the position and angle of the mirror mount 121, completing the adjustment and installation of the galvanometer 12. After the galvanometer 12 is installed, the mounting bottom surface 122 of the mirror base 121 abuts against the set screw, and the abutting part 13 on the mounting side 123 of the mirror base 121 abuts against the threaded adjustment part to support the mirror base 121. Finally, the mirror base 121 is locked by tightening the threaded locking part to prevent the mirror base 121 from moving.

[0050] Thus, the laser equipment of this application can adjust the position and angle of the mirror mount 121 via the threaded adjustment component and the set screw, thereby achieving adjustment of the position and angle of the galvanometer 12. Finally, the laser beam can be precisely and vertically projected onto the spot after passing through the galvanometer 12. By adjusting the position and angle of the galvanometer 12, the problem of spot eccentricity can be effectively improved, preventing the low energy density caused by spot eccentricity, avoiding damage to wafer processing, and improving the processing quality of wafers and other semiconductors. In addition, by adjusting the position and angle of the galvanometer 12, the power reflectivity of the galvanometer 12 can also be improved, reducing energy loss and increasing the processing efficiency of wafers and other semiconductors.

[0051] Optionally, the light inlet channel 124 is located in the central area of ​​the mounting side 123, and the abutment 13 is mounted in the central area of ​​the mounting side 123 and has a clearance light channel 131 communicating with the light inlet channel 124. In existing galvanometers 12, the light inlet channel 124 is generally located in the center of the mounting side 123. To improve the stability and ease of adjustment of the abutment 13, the mounting height of the abutment 13 needs to be centered, and the length of the abutment 13 in the front-to-back direction needs to be relatively long. Therefore, a clearance light inlet channel 124 needs to be provided on the abutment 13 to prevent the abutment 13 from blocking the light inlet channel 124. The laser emitted by the laser emitter enters the light inlet channel 124 through the clearance light channel 131.

[0052] In one embodiment, the laser device further includes a sleeve 14 and an aperture 15. The sleeve 14 has a dimming channel 141 extending vertically. The aperture 15 is mounted on the sleeve 14 and located within the dimming channel 141. The sleeve 14 passes through the optical path channel 114 and is threadedly connected to the galvanometer 12. The dimming channel 141 communicates with the light output channel 125. The light spot can be adjusted by using the aperture 15 within the sleeve 14.

[0053] Furthermore, the sleeve 14 is provided with a bracket 18, which is located inside the dimming channel 141. The aperture 15 is installed on the bracket 18. The aperture 15 is a cross aperture, and the bracket 18 is a cross aperture frame, thus realizing the installation of the aperture 15.

[0054] Optionally, there are multiple brackets 18 and apertures 15, each corresponding to the other. Multiple brackets 18 are arranged at intervals along the vertical direction, and multiple apertures 15 are arranged at intervals along the vertical direction. In this embodiment, there are three brackets 18 and three apertures 15, arranged at intervals from top to bottom.

[0055] In one embodiment, the laser device further includes a stage 16 and a reflecting aluminum mirror 17 disposed on the stage 16. The stage 16 is horizontally arranged, and the sleeve 14, the reflecting aluminum mirror 17, and the stage 16 are arranged in sequence along the vertical direction, so that the laser can irradiate the reflecting aluminum mirror 17 from top to bottom.

[0056] In one embodiment, the laser device further includes a reflector 19 disposed on the support base 11. The light inlet channel 124 is located on the reflection path of the reflector 19. There are two reflectors 19. The laser emitted by the laser emitter is reflected from the first reflector 19 and then horizontally illuminates the second reflector 19. The laser light is reflected by the second reflector 19 and then horizontally illuminates the light inlet channel 124, completing the layout of the laser light path.

[0057] This application utilizes the cooperation of sleeve 14, aperture 15, stage 16, and reflecting aluminum mirror 17 to adjust the verticality of the laser beam, avoiding laser spot misalignment. If spot misalignment is detected during adjustment, it can be corrected by adjusting mirror mount 121. Before adjusting the laser verticality, the support base 11 and mirror mount 121 are installed, and then sleeve 14 is threadedly connected to mirror mount 121. Aperture 15 is then installed inside sleeve 14 via bracket 18. Next, stage 16 is placed below sleeve 14, and reflecting aluminum mirror 17 is placed on stage 16. During laser verticality adjustment, the laser emitter is driven to emit laser light, which passes through two reflecting mirrors 19 and enters galvanometer 12 through light inlet channel 124 of mirror mount 121. Then, it exits downwards through light outlet channel 125 into sleeve 14, allowing the laser to pass through three apertures 15 sequentially. The three apertures 15 are then arbitrarily placed on bracket 18 and their positions are continuously changed. Next, place white paper at each aperture 15 and adjust the angle and position of the galvanometer 12 by adjusting the set screw and threaded adjustment piece. Observe the light spot below the galvanometer 12. After the light spot passes through all apertures 15, tighten the threaded adjustment piece to prevent it from rotating. Then, disassemble the sleeve 14 and install the field lens so that the laser enters the field lens after exiting the galvanometer 12. Finally, tighten the threaded locking piece.

[0058] Furthermore, the laser equipment also includes a laser emitter and a reflector assembly. The laser emitter and 19 sets of reflectors are both mounted on the machine base. The laser emitted by the laser emitter is reflected by the lenses of the reflector assembly and enters the light inlet channel 124 of the galvanometer 12.

[0059] In one embodiment, there are multiple mounting threaded holes spaced apart, and the optical path channel 114 is located within the area enclosed by the multiple mounting threaded holes. Each mounting threaded hole is fitted with a threaded locking element. In this embodiment, the diameter of the optical path channel 114 is larger than the diameter of the mounting threaded holes, and there are four mounting threaded holes spaced apart circumferentially along the optical path channel 114. The four locking threaded holes correspond one-to-one with the four mounting threaded holes. The optical path channel 114 and the four mounting threaded holes are all located between the lifting screw hole 113 and the adjusting screw hole 111.

[0060] Alternatively, the mounting screw hole 112 can also be a through hole without threads, and the locking threaded locking member passes through the through hole and is threadedly connected to the mirror base 121 of the galvanometer 12 to achieve locking.

[0061] Furthermore, the mounting base 122 and mounting side 123 are arranged sequentially along a first horizontal direction. Multiple adjusting screw holes 111 are arranged at intervals extending into a second horizontal direction, and multiple lifting screw holes 113 are arranged at intervals extending into the second horizontal direction. The first and second horizontal directions are perpendicular to each other. For example, three adjusting screw holes 111 are arranged at intervals from front to back, and each adjusting screw hole 111 is fitted with a threaded adjusting element. Two lifting screw holes 113 are arranged at intervals from front to back, and both lifting screw holes 113 are fitted with set screws. The mounting side 123 and mounting base 122 are arranged sequentially from left to right and connected sequentially, while the adjusting screw holes 111, mounting screw holes 112, and lifting screw holes 113 are arranged at intervals from left to right. Thus, when the threaded locking component is threadedly connected to the locking screw hole 126 of the galvanometer 12 but not tightened, the left and right ends and the front and rear ends of the mirror base 121 can be finely adjusted up and down by rotating different set screws and different threaded adjustment components, so as to realize the position and angle adjustment of the mirror base 121. After the adjustment is completed, the locking component is tightened to achieve locking.

[0062] Optionally, the abutment 13 is installed on the mounting side 123 by threaded fasteners, which facilitates the inspection and replacement of the abutment 13.

[0063] In one embodiment, the galvanometer 12 is provided with a cavity, and the cavity is provided with optical path components such as lens assemblies. The light inlet channel 124, the cavity, the light outlet channel 125, and the optical path channel 114 are connected in sequence.

[0064] The technical principles of this utility model have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this utility model and should not be construed as limiting the scope of protection of this utility model in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this utility model without any inventive effort, and these embodiments will all fall within the scope of protection of this utility model.

Claims

1. A laser apparatus, characterized by, include: The support base (11) is provided with an adjusting screw hole (111), a mounting screw hole (112), a lifting screw hole (113), and an optical path channel (114); the optical path channel (114) and the mounting screw hole (112) are both located between the adjusting screw hole (111) and the lifting screw hole (113); The galvanometer (12) includes a mirror base (121) disposed above the support base (11) and having a mounting bottom surface (122) and a mounting side surface (123); the mounting side surface (123) is provided with a light inlet channel (124), and the mounting bottom surface (122) is provided with a light outlet channel (125) and a locking screw hole (126); The set screw is rotatably mounted on the support base (11) through the set screw hole (113); the mounting bottom surface (122) abuts against the set screw; A threaded adjusting component is rotatably mounted on the support base (11) through the adjusting screw hole (111); Abutting member (13); mounted on the mounting side (123) and abutting against the threaded adjusting member; as well as The threaded locking component is rotatably mounted on the support base (11) through the mounting screw hole (112); the threaded locking component is threadedly connected to the mirror base (121) through the locking screw hole (126); The light inlet channel (124), the light outlet channel (125), and the optical path channel (114) are connected in sequence.

2. The laser apparatus according to claim 1, characterized by, The light inlet channel (124) is located in the central region of the mounting side (123), and the abutment (13) is installed in the central region of the mounting side (123) and has a light avoidance channel (131) communicating with the light inlet channel (124).

3. The laser device according to claim 1, characterized in that, It also includes a sleeve (14) and an aperture (15); the sleeve (14) is provided with a dimming channel (141) extending in the vertical direction, the aperture (15) is installed in the sleeve (14) and located in the dimming channel (141), the sleeve (14) passes through the optical path channel (114) and is threadedly connected to the galvanometer (12), and the dimming channel (141) is connected to the light output channel (125).

4. The laser device according to claim 3, characterized in that, The sleeve (14) is provided with a bracket (18), the bracket (18) is located in the dimming channel (141), and the aperture (15) is installed on the bracket (18).

5. The laser device according to claim 4, characterized in that, There are multiple brackets (18) and multiple apertures (15) that correspond one-to-one. Multiple brackets (18) are arranged at intervals along the vertical direction, and multiple apertures (15) are arranged at intervals along the vertical direction.

6. The laser device according to any one of claims 3 to 5, characterized in that, It also includes a stage (16) and a reflective aluminum mirror (17) disposed on the stage (16); the stage (16) is horizontally arranged, and the sleeve (14), the reflective aluminum mirror (17) and the stage (16) are arranged in sequence along the vertical direction.

7. The laser device according to any one of claims 1 to 5, characterized in that, It also includes a reflector (19) disposed on the support base (11); the light inlet channel (124) is located on the reflection path of the reflector (19).

8. The laser device according to any one of claims 1 to 5, characterized in that, The mounting screw holes (112) are multiple and spaced apart, and the optical path channel (114) is located in the area enclosed by the multiple mounting screw holes (112).

9. The laser device according to any one of claims 1 to 5, characterized in that, The mounting bottom surface (122) and the mounting side surface (123) are arranged sequentially along the first horizontal direction. There are multiple adjusting screw holes (111) that are spaced apart and extend into the second horizontal direction. There are multiple lifting screw holes (113) that are spaced apart and extend into the second horizontal direction. The first horizontal direction and the second horizontal direction are perpendicular to each other.

10. The laser device according to any one of claims 1 to 5, characterized in that, The galvanometer (12) has a cavity, and a lens assembly is provided in the cavity. The light inlet channel (124), the cavity, the light outlet channel (125), and the optical path channel (114) are connected in sequence.

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