Multi-wire saw with sizing function
By installing a wire guide plate between the winding chamber and the cutting chamber of the multi-wire cutting machine and blowing air to remove mortar, the problem of contaminant accumulation in the winding chamber is solved, extending the service life of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TONGWEI MICROELECTRONICS CO LTD
- Filing Date
- 2025-04-28
- Publication Date
- 2026-06-09
Smart Images

Figure CN224334734U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wire cutting technology, and more specifically, to a multi-wire cutting machine with a blower function. Background Technology
[0002] Multi-wire dicing machines are one of the most common pieces of equipment in wafer processing. They typically consist of a winding chamber, a dicing chamber, and dicing wires that circulate between the two chambers.
[0003] The inventors discovered that the winding chamber of multi-wire cutting machines using related technologies generally has a short service life. Utility Model Content
[0004] The purpose of this invention is to provide a multi-wire cutting machine with a blower function, which can effectively extend the service life of the winding chamber and the entire equipment.
[0005] The embodiments of this utility model can be implemented as follows:
[0006] In a first aspect, this utility model provides a multi-wire cutting machine with a blown pulp function, comprising:
[0007] The chassis has a winding chamber and a cutting chamber inside, and a partition is provided between the winding chamber and the cutting chamber. The partition is provided with a mounting groove.
[0008] A wire guide plate is installed in the mounting groove. The wire guide plate is provided with a wire guide hole and an air blowing hole. One end of the air blowing hole is connected to the wire guide hole, and the other end is used to connect to a compressed air source to blow air onto the cutting line passing through the wire guide hole, thereby removing the mortar on the cutting line.
[0009] In an optional embodiment, the axis of the air blowing hole forms an angle with the axis of the wire passing hole.
[0010] In an optional embodiment, the axis of the air blowing hole is out of plane from the axis of the wire passing hole.
[0011] In an optional embodiment, the number of air holes is multiple, and the multiple air holes are evenly spaced around the axis of the wire hole.
[0012] In an optional embodiment, the end of the air blowing hole opposite to the wire passage hole is provided with an internal thread.
[0013] In an optional embodiment, the wire guide plate is provided with a protective sleeve surrounding the wire guide hole on the side facing the cutting chamber.
[0014] In an optional embodiment, the inner hole of the protective cylinder is frustum-shaped, and the diameter of the inner hole of the protective cylinder gradually increases along the direction from the winding chamber to the cutting chamber.
[0015] In an optional embodiment, the axis of the protective cylinder coincides with the axis of the wire passage hole.
[0016] In an optional embodiment, a circular mounting hole is provided around the mounting groove, and an oblong mounting hole is provided on the edge of the cable guide plate. The connector passes through the circular mounting hole and the oblong mounting hole to mount the cable guide plate onto the partition plate.
[0017] In an optional embodiment, there are multiple mounting slots and multiple wire guides, with each wire guide being installed in a corresponding manner at one of the multiple mounting slots.
[0018] The beneficial effects of the multi-wire cutting machine with blown pulp function provided by this utility model include:
[0019] This multi-wire cutting machine includes a chassis and a wire guide plate. The chassis contains a winding chamber and a cutting chamber, separated by a partition with mounting slots. The wire guide plate is installed in the mounting slots and features wire guide holes and air blowing holes. One end of the air blowing hole connects to the wire guide hole, while the other end connects to a compressed air source to blow air onto the cutting wire passing through the wire guide hole, thereby removing slurry from the cutting wire. This minimizes the amount of slurry adhering to the cutting wire from entering the winding chamber, reducing the amount of slurry falling into the winding chamber and slowing the accumulation of contaminants such as crystals and particulate matter. This reduces the impact of contaminants on the winding chamber, improves the working environment within the winding chamber, and ultimately extends the service life of the winding chamber and the entire machine. Attached Figure Description
[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 A schematic diagram of the structure of a multi-wire cutting machine with a blower function provided in an embodiment of this utility model;
[0022] Figure 2 This is a schematic diagram of the wire guide plate provided in an embodiment of the present utility model.
[0023] Icons: 100-Chassis; 110-Cutting chamber; 120-Winding chamber; 130-Baffle; 132-Circular mounting hole; 134-Mounting groove; 200-Wire guide plate; 202-Protective cylinder; 210-Wire guide hole; 212-Rounded corner; 220-Air blow hole; 222-Internal thread; 230-Oval mounting hole; 300-Cutting wire; 400-Connector. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0027] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0028] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0029] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.
[0030] Multi-wire cutting machines in related technologies typically include a chassis and a partition. The partition is located inside the chassis, dividing the interior into a winding chamber and a cutting chamber. The cutting chamber is used for cutting objects to be cut (such as silicon carbide crystal rods), while the winding chamber is used to install winding devices, electrical control devices, etc. The cutting wire (such as diamond wire) passes through two wire holes in the partition (one for the cutting wire to travel from the cutting chamber to the winding chamber, and the other for the cutting wire to travel from the winding chamber to the cutting chamber), so as to reciprocate between the winding chamber and the cutting chamber to achieve the cutting of the object to be cut.
[0031] When a cutting wire cuts an object within the cutting chamber, mortar is typically sprayed onto the cutting area simultaneously to reduce wire wear and improve cutting efficiency. However, this can also cause mortar to adhere to the cutting wire and enter the winding chamber, where it can fall into various locations. This leads to the accumulation of contaminants such as crystals and particulate matter, polluting the winding chamber, affecting the normal operation of related equipment, and ultimately shortening the lifespan of the winding chamber and the entire equipment.
[0032] In response to the above situation, this utility model provides a multi-wire cutting machine with a blown mortar function, which can blow off the mortar adhering to the cutting wire as it enters the winding chamber from the cutting chamber, thereby minimizing the amount of mortar entering the winding chamber with the cutting wire. This effectively slows down the accumulation of contaminants such as crystals and particles in the winding chamber caused by mortar falling, thereby improving the working environment of the winding chamber, ensuring the normal operation of various devices in the winding chamber, and extending the service life of the winding chamber and the entire equipment.
[0033] The following description, in conjunction with the accompanying drawings, details the overall structure, working principle, and technical effects of the multi-wire cutting machine with blown pulp function provided by this utility model.
[0034] Please refer to Figure 1 and Figure 2 This multi-wire cutting machine with a blown pulp function is used to cut various objects to be cut, including silicon carbide crystal rods. It includes a chassis 100 and a wire guide plate 200.
[0035] The chassis 100 contains a winding chamber 120 and a cutting chamber 110, with a partition 130 between them. The partition 130 has a mounting groove 134. A wire guide plate 200 is installed in the mounting groove 134, and includes a wire guide hole 210 and an air blowing hole 220. One end of the air blowing hole 220 connects to the wire guide hole 210, and the other end connects to a compressed air source to blow air onto the cutting wire 300 passing through the wire guide hole 210, thereby removing slurry from the cutting wire 300. This minimizes the risk of slurry entering the winding chamber 120 and falling back down, reducing the accumulation of contaminants such as crystals and particulate matter within the winding chamber 120. This improves the working environment of the winding chamber 120, ensures the efficient operation of all devices within the winding chamber 120, and ultimately extends the service life of the winding chamber 120 and the entire equipment.
[0036] The number of mounting slots 134 and the number of wire guide plates 200 are the same, and their numbers can be set as needed. In this embodiment, there are multiple mounting slots 134 and multiple wire guide plates 200. Multiple wire guide plates 200 are installed one-to-one in multiple mounting slots 134 to accommodate the passage of multiple cutting lines 300.
[0037] The relative positions of the wire guide plate 200 and the mounting groove 134 can be set as needed. In this embodiment, the wire guide plate 200 is installed on the side of the mounting groove 134 adjacent to the cutting chamber 110, and a portion of the wire guide plate 200 extends into the mounting groove 134. In other embodiments, the wire guide plate 200 can also be installed on the side of the mounting groove 134 adjacent to the winding chamber 120; the wire guide plate 200 can also partially penetrate the mounting groove 134 or be completely located outside the mounting groove 134.
[0038] The cable guide plate 200 can be installed on the partition plate 130 with different structures as needed. In this embodiment, the cable guide plate 200 is detachably installed on the mounting groove 134 of the partition plate 130 via the connector 400. Specifically, a circular mounting hole 132 is provided around the mounting groove 134, and an oblong mounting hole 230 is provided on the edge of the cable guide plate 200.
[0039] The number of circular mounting holes 132 is the same as the number of oblong mounting holes 230. The number of both can be set as needed. In this embodiment, there are two circular mounting holes 132, and correspondingly, there are also two oblong mounting holes 230. The two circular mounting holes 132 are located on opposite sides of the mounting groove 134, and the two oblong mounting holes 230 are located on opposite sides of the wire hole 210. The two oblong mounting holes 230 correspond one-to-one with the two circular mounting holes 132.
[0040] The connector 400 passes through corresponding circular mounting holes 132 and oblong mounting holes 230 to mount the wire guide plate 200 onto the partition 130. Further, the connector 400 can be a bolt and a nut. The head of the bolt abuts against the side of the partition 130 opposite to the cutting chamber 110, and the stud of the bolt passes through the corresponding circular mounting holes 132 and oblong mounting holes 230 in sequence before connecting to the nut. The nut abuts against the side of the wire guide plate 200 opposite to the winding chamber 120, thereby enabling the wire guide plate 200 to be detachably installed.
[0041] The purpose of using the oblong mounting hole 230 is to allow the position of the wire guide plate 200 to be adjusted within a certain range, thereby improving its installation flexibility. In this embodiment, the oblong mounting hole 230 can extend horizontally, allowing the position of the wire guide plate 200 to be adjusted horizontally within a certain range. In other embodiments, the oblong mounting hole 230 can also extend vertically, allowing the position of the wire guide plate 200 to be adjusted vertically within a certain range.
[0042] It is understood that in other embodiments, the number of circular mounting holes 132 and oblong mounting holes 230 may also be three or four, etc., to improve the stability of the wiring plate 200 installation. In other embodiments, the wiring plate 200 may also be installed on the partition 130 by snap-fit, so as to reduce or omit the use of bolts, nuts and other connecting parts 400.
[0043] Please refer to again Figure 2 The wire guide hole 210 can adopt different structures as needed. In this embodiment, the wire guide hole 210 is a cylindrical hole located at the center of the wire guide plate 200. The diameter of the wire guide hole 210 is 8-10mm, and can be selected as 8mm, 8.5mm, 9mm, 9.5mm or 10mm. The end of the wire guide hole 210 facing away from the cutting chamber 110 is provided with a rounded corner 212 to facilitate the passage of the cutting line 300.
[0044] The number and structure of the air blowing holes 220 can be set as needed. In this embodiment, there are multiple air blowing holes 220, which are arranged at intervals around the axis of the wire through hole 210. Specifically, the number of air blowing holes 220 can be two, three, or four. In other embodiments, the number of air blowing holes 220 can also be only one, in order to simplify the processing technology and reduce manufacturing costs.
[0045] The axis of the air blowing hole 220 forms an angle with the axis of the wire passage hole 210 to improve the air blowing effect on the wire passage hole 210, thereby improving the removal effect of mortar on the cutting line 300 passing through the wire passage hole 210. Specifically, the angle between the axis of the air blowing hole 220 and the axis of the wire passage hole 210 can be 40°-50°, such as 40°, 42°, 45°, 47° or 50°.
[0046] To further improve the removal effect of the air blowing holes 220 on the mortar on the cutting line 300, in this embodiment, the axis of the air blowing holes 220 is out of plane with the axis of the wire passage hole 210. When multiple air blowing holes 220 blow air simultaneously, a spiral blowing effect can be formed within the wire passage hole 210, thereby effectively removing the mortar from the cutting line 300. In other embodiments, the axis of the air blowing holes 220 is coplanar with the axis of the wire passage hole 210, i.e., they intersect.
[0047] Furthermore, to facilitate connection with a compressed air source, in this embodiment, the end of the air blowing hole 220 opposite to the wire hole 210 is provided with an internal thread 222. The purpose of providing the internal thread 222 is to facilitate establishing a connection with the compressed air source (which can be an external compressed air source or a compressed air source integrated into the device). The compressed air source can be equipped with an air pipe with an external threaded connector, which can be threadedly connected to the internal thread 222 of the air blowing hole 220. Threaded connections offer the advantages of simple and convenient installation and removal. It should be noted that in other embodiments, the air blowing hole 220 may not have the internal thread 222, and may connect to the compressed air source's air pipe in other ways, such as a snap-fit connection.
[0048] Please refer to again Figure 2 In order to protect the wire guide hole 210 and the cutting wire 300 passing through the wire guide hole 210, in this embodiment, a protective cylinder 202 is provided around the wire guide hole 210 on the side of the wire guide plate 200 facing the cutting chamber 110. The axis of the protective cylinder 202 coincides with the axis of the wire guide hole 210, and the inner diameter of the protective cylinder 202 is larger than the outer diameter of the wire guide hole 210.
[0049] While the protective cylinder 202 provides protection for the wire hole 210 and the cutting wire 300, it also somewhat obstructs the flow of mortar blown off the cutting wire 300. Therefore, in this embodiment, the inner hole of the protective cylinder 202 is frustum-shaped, and the diameter of the inner hole of the protective cylinder 202 gradually increases along the direction from the winding chamber 120 to the cutting chamber 110. In this way, the mortar blown off the cutting wire 300 into the inner hole of the protective cylinder 202 can flow smoothly back to the cutting chamber 110 along the inner wall of the protective cylinder 202.
[0050] The working principle and process of this multi-wire cutting machine with blown pulp function are as follows:
[0051] Please refer to again Figure 1 and Figure 2When the cutting wire 300 enters the winding chamber 120 from the cutting chamber 110 along the preset direction X, the compressed air source is activated. The compressed gas generated by the compressed gas passes through multiple air pipes and multiple air blowing holes 220 in sequence and is then blown simultaneously towards the wire passage hole 210 (a pressure regulating valve with a display instrument can be installed on the air pipe to adjust the air pressure of each air pipe as needed). This causes a spiral airflow to flow towards the cutting chamber 110 in the wire passage hole 210, thereby blowing off the mortar adhering to the cutting wire 300. This effectively prevents the mortar from affecting the working environment of the winding chamber 120 as it enters the winding chamber 120 with the cutting wire 300. The blown-off mortar flows out of the wire passage hole 210 and falls onto the inner wall of the protective cylinder 202, and then flows back into the cutting chamber 110 along the inner wall of the protective cylinder 202.
[0052] Through the above working process, this multi-wire cutting machine can greatly reduce or even prevent slurry adhering to the cutting wire 300 from entering the winding chamber 120, reduce the amount of slurry falling into the winding chamber 120, slow down the accumulation of contaminants such as crystals and particulate matter in the winding chamber 120, thereby reducing the impact of contaminants on the winding chamber 120, improving the working environment in the winding chamber 120, and thus extending the service life of the winding chamber 120 and the entire equipment.
[0053] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.
Claims
1. A multi-wire cutting machine with a blown pulp function, characterized in that, include: A chassis (100) is provided inside the chassis (100) with a winding chamber (120) and a cutting chamber (110). A partition (130) is provided between the winding chamber (120) and the cutting chamber (110). A mounting groove (134) is provided on the partition (130). A wire guide plate (200) is installed in the mounting groove (134). The wire guide plate (200) is provided with a wire guide hole (210) and an air blowing hole (220). One end of the air blowing hole (220) is connected to the wire guide hole (210), and the other end is used to connect to a compressed air source to blow air onto the cutting wire (300) passing through the wire guide hole (210) to remove the mortar on the cutting wire (300).
2. The multi-wire cutting machine with blown pulp function according to claim 1, characterized in that, The axis of the air blowing hole (220) forms an angle with the axis of the wire passing hole (210).
3. The multi-wire cutting machine with blown pulp function according to claim 2, characterized in that, The axis of the air blowing hole (220) is out of plane from the axis of the wire passing hole (210).
4. The multi-wire cutting machine with blown pulp function according to claim 2, characterized in that, The number of air holes (220) is multiple, and the multiple air holes (220) are evenly spaced around the axis of the wire hole (210).
5. The multi-wire cutting machine with blown pulp function according to claim 1, characterized in that, The air blowing hole (220) is provided with an internal thread (222) at the end opposite to the wire hole (210).
6. The multi-wire cutting machine with blown pulp function according to claim 1, characterized in that, The wire guide plate (200) is provided with a protective sleeve (202) surrounding the wire guide hole (210) on the side facing the cutting chamber (110).
7. The multi-wire cutting machine with a blower function according to claim 6, characterized in that, The inner hole of the protective cylinder (202) is frustum-shaped, and the diameter of the inner hole of the protective cylinder (202) gradually increases along the direction from the winding chamber (120) to the cutting chamber (110).
8. The multi-wire cutting machine with a blower function according to claim 6, characterized in that, The axis of the protective cylinder (202) coincides with the axis of the wire hole (210).
9. The multi-wire cutting machine with blown pulp function according to claim 1, characterized in that, The mounting groove (134) is surrounded by a circular mounting hole (132), and the edge of the wire guide plate (200) is provided with an oblong mounting hole (230). The connector (400) passes through the circular mounting hole (132) and the oblong mounting hole (230) to install the wire guide plate (200) onto the partition plate (130).
10. The multi-wire cutting machine with blown pulp function according to claim 1, characterized in that, There are multiple mounting slots (134) and multiple wire guides (200), and the multiple wire guides (200) are installed in the multiple mounting slots (134) in a one-to-one correspondence.