A coating workpiece disc with uniform coating

Abstract

This utility model discloses a coating workpiece tray with uniform coating, comprising a tray body, a main gear located in the center of the tray body, at least two secondary gears meshing with the main gear around the main gear on the tray body, each secondary gear meshing with a tertiary gear for connecting to the workpiece, a connecting tray coaxially mounted on the tertiary gears, an adjustment groove on the tray body radially parallel to the main gear, and an adjustment hole on the connecting tray corresponding to the adjustment groove. It also includes a third rotating shaft, fixedly connected to the tertiary gears, with the connecting tray sleeved on the third rotating shaft. The connecting tray includes a sleeve portion and a connecting portion, the outer diameter of the connecting portion being larger than the outer diameter of the sleeve portion, and the length of the sleeve portion being larger than the length of the connecting portion. This effectively improves the uniformity of the coating.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, specifically to a coated workpiece tray with uniform coating. Background Technology

[0002] A coating machine is a key piece of equipment that deposits thin films on the surface of a substrate using physical or chemical methods. Its core technologies include physical vapor deposition (PVD) and chemical vapor deposition (CVD). Its development began with the breakthrough of vacuum technology in the 20th century, and has gradually given rise to technologies such as magnetron sputtering, electron beam evaporation, and plasma-enhanced deposition (PECVD), which are widely used in semiconductors, optical devices, tool coatings, and new energy fields.

[0003] As a core component of the coating machine, the workpiece tray is responsible for fixing and manipulating the substrate, directly affecting the coating quality. Traditional coating machine workpiece trays can only fix the workpiece, which easily leads to uneven coating. Utility Model Content

[0004] The purpose of this invention is to provide a coated workpiece tray with uniform coating, which can effectively improve the uniformity of coating.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following solution:

[0006] A uniformly coated workpiece tray includes a tray body with a main gear at its center. At least two secondary gears meshing with the main gear are arranged around the main gear on the tray body. Each secondary gear meshes with a tertiary gear for connecting to a workpiece. A connecting plate is coaxially mounted on the tertiary gears. The tray body has an adjustment groove radially parallel to the main gear, and the connecting plate has an adjustment hole corresponding to the adjustment groove. A locking bolt is also included, passing through both the adjustment groove and the adjustment hole. Its function is that the arrangement of the main gear, secondary gears, and tertiary gears allows the main gear to drive each tertiary gear to rotate, achieving the effect of the workpiece rotating around each tertiary gear, thereby improving the uniformity of the coating. The adjustment groove and adjustment hole allow for fine-tuning of the position of the tertiary gears according to different speed requirements, and for replacing tertiary gears of different sizes to maintain meshing with the secondary gears, thus achieving the effect of fine-tuning the workpiece speed and spacing.

[0007] Furthermore, it also includes a third rotating shaft, which is fixedly connected to the third-stage gear, and a connecting disc is sleeved on the third rotating shaft. Its function is to achieve coaxial alignment between the third-stage gear and the connecting disc through the setting of the third rotating shaft.

[0008] Furthermore, the connecting plate includes a sleeve portion and a connecting portion, wherein the outer diameter of the connecting portion is larger than the outer diameter of the sleeve portion, and the length of the sleeve portion is greater than the length of the connecting portion. Its function is to reduce the overall weight and space occupied by the connecting plate through the sleeve portion.

[0009] Furthermore, the sleeve portion is located in the middle of the connecting portion, and the disc body has a placement groove extending radially along the main gear, with the sleeve portion located within the placement groove. Its function is that, by providing the placement groove, a portion of the sleeve portion can be installed, reducing the space occupied by the connecting disc and the disc body as a whole.

[0010] Furthermore, the connecting part is located within the placement groove, and the inner edge of the placement groove is provided with a supporting inner edge for supporting the connecting plate, and the adjustment groove is also provided with a supporting inner edge. Its function is to reduce the height space occupied by the connecting plate and the plate body as a whole by providing the supporting inner edge, and to restrict the movement of the connecting plate within the placement groove.

[0011] Furthermore, both the placement groove and the inner edge of the support are U-shaped. The opening width of the placement groove is greater than the outer diameter of the connecting part, and the opening width of the inner edge of the support is smaller than the outer diameter of the connecting part. This design, through the dimensional relationship between the placement groove, the connecting part, and the inner edge of the support, allows the connecting part to be placed on the inner edge of the support while it is located within the placement groove.

[0012] Furthermore, a bearing is provided between the sleeve portion and the third rotating shaft. The function of the bearing is to effectively reduce the resistance to rotation between the third rotating shaft and the sleeve portion.

[0013] Furthermore, it also includes a first rotating shaft, on which the main gear is fixedly connected, and the first rotating shaft is fixedly connected to the disc body. The first rotating shaft is used to connect to the output shaft of the motor. Its function is that, through the setting of the first rotating shaft, while driving the main gear to rotate and causing the three-stage gear to rotate on its own axis, it can also drive the disc body to rotate, causing the three-stage gear to revolve around the first rotating shaft.

[0014] Furthermore, the disc body is provided with a second rotating shaft, and the secondary gear is disposed on the second rotating shaft. The second rotating shaft is fixedly connected to the disc body, and the secondary gear is sleeved on the second rotating shaft, or the disc body is sleeved on the second rotating shaft, and the secondary gear is fixedly connected to the second rotating shaft. Its function is that, through the arrangement of the second rotating shaft, the secondary gear can rotate around the axis of the second rotating shaft.

[0015] Furthermore, a workpiece fixing disc is fixedly connected to the end of the third rotating shaft away from the third-stage gear. The workpiece fixing disc itself adopts existing technology and will not be described in detail. Its function is to enable the workpiece to rotate and move synchronously with the third-stage gear through the setting of the workpiece fixing disc.

[0016] The beneficial effects of this utility model are:

[0017] 1. By setting up the main gear, secondary gear, and tertiary gear, the main gear can drive each tertiary gear to rotate, achieving the effect of the workpiece on each tertiary gear rotating around the tertiary gear, thereby improving the uniformity of the coating; by setting up the adjustment groove and adjustment hole, the position of the tertiary gear can be finely adjusted according to different speed requirements, and different sizes of tertiary gears can be replaced according to the position of the tertiary gear to keep the tertiary gear meshing with the secondary gear, thereby achieving the effect of finely adjusting the workpiece speed and spacing;

[0018] 2. By setting the inner edge of the support, the height space occupied by the connecting plate and the plate body can be reduced, and the movement of the connecting plate in the placement slot can be restricted. Attached Figure Description

[0019] Figure 1 This is a top view of the structure of Example 1;

[0020] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure at point AA.

[0021] Reference numerals: 1. Disc body; 2. Main gear; 3. Secondary gear; 4. Tertiary gear; 5. Connecting disc; 501. Sleeve part; 502. Connecting part; 6. Adjusting groove; 7. Adjusting hole; 8. Third rotating shaft; 9. Placement groove; 10. Support inner edge; 11. Bearing; 12. First rotating shaft; 13. Second rotating shaft; 14. Workpiece fixing disc. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the implementation of the present invention is not limited thereto.

[0023] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "have," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Example 1

[0026] A uniformly coated workpiece disk, such as Figure 1 As shown, the device includes a disc body 1, with a main gear 2 in the center. Four secondary gears 3, each meshing with the main gear 2, are arranged around the main gear 2 on the disc body 1. Each secondary gear 3 meshes with a tertiary gear 4 for connecting to a workpiece. A connecting disc 5 is coaxially mounted on the tertiary gears 4. The disc body 1 has an adjustment groove 6 radially parallel to the main gear 2, and the connecting disc 5 has an adjustment hole 7 corresponding to the adjustment groove 6. A locking bolt is also included, passing through both the adjustment groove 6 and the adjustment hole 7. Its function is to allow the main gear 2, secondary gears 3, and tertiary gears 4 to rotate, enabling the main gear 2 to drive each tertiary gear 4 to rotate, thus achieving the effect of rotating the workpiece around each tertiary gear 4, thereby improving the uniformity of the coating. The adjustment grooves 6 and adjustment holes 7 allow for fine-tuning of the position of the tertiary gears 4 according to different speed requirements, and the replacement of tertiary gears 4 of different sizes to maintain meshing with the secondary gears 3, thereby achieving the effect of fine-tuning the workpiece speed and spacing.

[0027] Specifically, such as Figure 2 As shown, it also includes a third rotating shaft 8, which is fixedly connected to the third-stage gear 4, and a connecting disk 5 is sleeved on the third rotating shaft 8. Its function is to achieve coaxial arrangement of the third-stage gear 4 and the connecting disk 5 through the setting of the third rotating shaft 8.

[0028] Specifically, such as Figure 2 As shown, the connecting plate 5 includes a sleeve portion 501 and a connecting portion 502. The outer diameter of the connecting portion 502 is larger than the outer diameter of the sleeve portion 501, and the length of the sleeve portion 501 is greater than the length of the connecting portion 502. Its function is to reduce the overall weight and space occupied by the connecting plate 5 through the sleeve portion 501.

[0029] Specifically, such as Figure 2As shown, the sleeve portion 501 is located in the middle of the connecting portion 502, and the disc body 1 has a placement groove 9 extending radially along the main gear 2, with the sleeve portion 501 located within the placement groove 9. Its function is that, by setting the placement groove 9, a portion of the sleeve portion 501 can be installed, reducing the space occupied by the overall structure of the connecting disc 5 and the disc body 1.

[0030] Specifically, such as Figure 2 As shown, the connecting part 502 is located in the placement groove 9, and the inner edge of the placement groove 9 is provided with a supporting inner edge 10 for supporting the connecting plate. The adjustment groove 6 is provided within the supporting inner edge 10. Its function is that by setting the supporting inner edge 10, the height space occupied by the connecting plate 5 and the plate body 1 can be reduced, and the movement of the connecting plate 5 in the placement groove 9 can be restricted.

[0031] Specifically, such as Figure 1 As shown, both the placement groove 9 and the inner support edge 10 are U-shaped. The opening width of the placement groove 9 is greater than the outer diameter of the connecting part 502, and the opening width of the inner support edge 10 is smaller than the outer diameter of the connecting part 502. This design, through the dimensional relationship between the placement groove 9, the connecting part 502, and the inner support edge 10, allows the connecting part 502 to be placed on the inner support edge 10 while still within the placement groove 9.

[0032] Specifically, such as Figure 2 As shown, a bearing 11 is provided between the sleeve portion 501 and the third rotating shaft 8. Its function is to effectively reduce the resistance to rotation between the third rotating shaft 8 and the sleeve portion 501 by providing the bearing 11.

[0033] Specifically, such as Figure 2 As shown, it also includes a first rotating shaft 12, on which the main gear 2 is fixedly connected. The first rotating shaft 12 is fixedly connected to the disk body 1. The first rotating shaft 12 is used to connect to the output shaft of the motor. Its function is that, through the setting of the first rotating shaft 12, while driving the main gear 2 to rotate and causing the third-stage gear 4 to rotate, the first rotating shaft 12 can also drive the disk body 1 to rotate, so that the third-stage gear 4 revolves around the first rotating shaft 12.

[0034] Specifically, such as Figure 2 As shown, the disc body 1 is provided with a second rotating shaft 13, and the secondary gear 3 is disposed on the second rotating shaft 13. The second rotating shaft 13 is fixedly connected to the disc body 1, and the secondary gear 3 is sleeved on the second rotating shaft 13, or the disc body 1 is sleeved on the second rotating shaft 13, and the secondary gear 3 is fixedly connected to the second rotating shaft 13. Its function is to enable the secondary gear 3 to rotate around the axis of the second rotating shaft 13 through the arrangement of the second rotating shaft 13.

[0035] Specifically, such as Figure 2As shown, a workpiece fixing disk 14 is fixedly connected to the end of the third rotating shaft 8 away from the third-stage gear 4. The workpiece fixing disk 14 itself adopts existing technology and will not be described in detail. Its function is to enable the workpiece to rotate and move synchronously with the third-stage gear 4 through the setting of the workpiece fixing disk 14.

[0036] The working principle of this embodiment is explained as follows: After the workpiece is installed on the workpiece fixing plate 14, the motor drives the first rotating shaft 12 to rotate. The first rotating shaft 12 drives the main gear 2 to rotate, the main gear 2 drives the second gear 3 to rotate, the second gear 3 drives the third gear 4 to rotate, and the first rotating shaft 12 drives the plate body 1 to rotate, causing the third gear 4 to revolve. Thus, the workpiece in the workpiece fixing plate 14 revolves around the first rotating shaft 12 while rotating around the third rotating shaft 8, which can effectively improve the uniformity of the coating.

[0037] When it is necessary to adjust the rotation speed or spacing of the workpiece, loosen the nut on the locking bolt that passes through the adjustment groove 6 and the adjustment hole 7, move the position of the connecting part 502 on the inner edge 10 of the support, and tighten the nut on the locking bolt that passes through the adjustment groove 6 and the adjustment hole 7 after reaching the target position.

[0038] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments based on the technical essence of the present utility model and within the spirit and principles of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A uniformly coated workpiece disk, characterized in that: The device includes a disc body (1), a main gear (2) in the middle of the disc body (1), at least two secondary gears (3) that mesh with the main gear (2) around the main gear (2) on the disc body (1), each secondary gear (3) meshing with a tertiary gear (4) for connecting with the workpiece, a connecting disc (5) coaxially provided with the tertiary gear (4), an adjustment groove (6) that is radially parallel to the main gear (2) on the disc body (1), and an adjustment hole (7) that corresponds to the adjustment groove (6) on the connecting disc (5).

2. The uniformly coated workpiece disk according to claim 1, characterized in that: It also includes a third rotating shaft (8), which is fixedly connected to the third gear (4), and the connecting disc (5) is sleeved on the third rotating shaft (8).

3. The uniformly coated workpiece disk according to claim 2, characterized in that: The connecting plate (5) includes a sleeve portion (501) and a connecting portion (502). The outer diameter of the connecting portion (502) is larger than the outer diameter of the sleeve portion (501), and the length of the sleeve portion (501) is greater than the length of the connecting portion (502).

4. The uniformly coated workpiece disk according to claim 3, characterized in that: The sleeve part (501) is located in the middle of the connecting part (502), and the disc body (1) is provided with a placement groove (9) extending radially along the main gear (2), and the sleeve part (501) is located in the placement groove (9).

5. The uniformly coated workpiece disk according to claim 4, characterized in that: The connecting part (502) is located in the placement groove (9), and the inner edge of the placement groove (9) is provided with a supporting inner edge (10) for supporting the connecting plate. The adjusting groove (6) is provided with a supporting inner edge (10).

6. A uniformly coated workpiece disk according to claim 5, characterized in that: Both the placement groove (9) and the inner edge of the support (10) are U-shaped. The opening width of the placement groove (9) is greater than the outer diameter of the connecting part (502), and the opening width of the inner edge of the support (10) is less than the outer diameter of the connecting part (502).

7. A uniformly coated workpiece disk according to claim 3, characterized in that: A bearing (11) is provided between the sleeve part (501) and the third rotating shaft (8).

8. The uniformly coated workpiece disk according to claim 1, characterized in that: It also includes a first rotating shaft (12), the main gear (2) is fixedly connected to the first rotating shaft (12), and the first rotating shaft (12) is fixedly connected to the disc body (1).

9. A uniformly coated workpiece disk according to claim 1, characterized in that: The disc body (1) is provided with a second rotating shaft (13), and the secondary gear (3) is provided on the second rotating shaft (13).

10. A uniformly coated workpiece disk according to claim 2, characterized in that: The third rotating shaft (8) is fixedly connected to a workpiece fixing plate (14) at the end away from the third gear (4).

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