Input shaft assembly and etching machine

Abstract

The utility model provides a input shaft subassembly, and the rotating shaft has opposite first end and second end, the shell subassembly is sleeved on the rotating shaft, and the first end and the second end of rotating shaft are exposed in the shell subassembly, and the first end of shell subassembly has first mounting slot, and the first end is adjacent to the first end, the first sealing assembly includes first sealing ring and fixed cover, first sealing ring is installed in the first mounting slot, and the fixed cover is sleeved on the rotating shaft and is fixed in the first end portion, so that first sealing ring seals the first end portion of shell subassembly, the shell subassembly has the air inlet, and the shell subassembly has the gas passage inside, and the air inlet is communicated with the air inlet end of gas passage, and the air outlet end of gas passage is aligned with the rotating shaft and is adjacent to the first end portion of shell subassembly, the input shaft subassembly of the utility model can effectively prevent etching liquid from entering the shell subassembly, and thus, prolongs the service life of input shaft subassembly.

Description

Technical Field

[0001] This utility model relates to the field of etching, and more particularly to an input shaft assembly that can prevent corrosion by etching solution and an etching machine having the same. Background Technology

[0002] With the development of display technology, display devices such as liquid crystal displays, organic light-emitting diode displays, and inorganic micro light-emitting diode displays have become mainstream in various consumer electronics products, including mobile phones, televisions, personal digital assistants, digital cameras, laptops, desktop computers, and automotive displays, due to their advantages such as high image quality, energy saving, thin body, and wide range of applications.

[0003] Taking liquid crystal display panels as an example, in their manufacturing process, multiple patterned film layers need to be formed through processes such as coating, photoresist coating, exposure and development, and etching. In the etching process, etching solution is sprayed in the etching machine to etch the thin film (such as a metal thin film) that is not covered by photoresist to form a patterned film layer. Finally, the photoresist layer on the patterned film layer is removed to leave the patterned film layer on the substrate.

[0004] Existing etching machines typically include a conveying mechanism and a nozzle located above the conveying mechanism. During etching, the conveying mechanism transports the substrate to the area below the nozzle via components such as an input shaft. The nozzle then sprays etching solution onto the substrate for etching. Currently, when the etching solution is sprayed onto the substrate, it inevitably splashes onto components such as the input shaft, causing corrosion and damage to these components, thus affecting their service life. Utility Model Content

[0005] In order to solve the above-mentioned technical problems, the purpose of this utility model is to provide an input shaft assembly and an etching machine that can prevent corrosion by etching solution.

[0006] According to one aspect of the present invention, an input shaft assembly is provided for use in an etching machine for etching a substrate. The input shaft assembly includes:

[0007] A rotating shaft having opposing first and second ends;

[0008] A housing assembly, which is sleeved on the rotating shaft, with the first end and the second end of the rotating shaft exposed outside the housing assembly, the first end of the housing assembly having a first mounting groove adjacent to the first end; and

[0009] A first sealing assembly includes a first sealing ring and a fixing cover; the first sealing ring is installed in the first mounting groove, and the fixing cover is sleeved on the rotating shaft and fixed to the first end, so that the first sealing ring seals the first end of the housing assembly;

[0010] The housing assembly has an air inlet and a gas channel inside the housing assembly. The air inlet end of the gas channel is connected to the air inlet, and the air outlet end of the gas channel is aligned with the rotating shaft and is adjacent to the first end of the housing assembly.

[0011] As an optional technical solution, the housing assembly includes a first housing and a second housing. The first housing and the second housing are respectively sleeved on the rotating shaft and assembled along the axial direction of the rotating shaft to form the housing assembly. The first end is located on the first housing, and the second housing has a second end opposite to the first end. The first end of the rotating shaft is exposed from the first end, and the second end of the rotating shaft is exposed from the second end.

[0012] As an optional technical solution, both the air inlet and the gas passage are located in the first housing.

[0013] As an optional technical solution, it also includes a first bearing and a second bearing. The rotating shaft has a first mounting section, a second mounting section, and a spacer section located between the first mounting section and the second mounting section. In the radial direction of the rotating shaft, the diameter of the spacer section is larger than the diameters of the first mounting section and the second mounting section, so that the opposite sides of the spacer section protrude from the first mounting section and the second mounting section in the radial direction, respectively serving as a first stop surface and a second stop surface. The second end of the second housing has a second mounting groove corresponding to the second bearing. The first bearing is sleeved on the first mounting section and abuts against the first stop surface, and the second bearing is sleeved on the second mounting section and abuts against the second stop surface, and the second bearing is located in the second mounting groove.

[0014] As an optional technical solution, it also includes a collar and a bearing cover. The collar is sleeved on the rotating shaft and disposed between the inner cavity wall of the first housing and the first bearing to fix the first bearing between the first stop surface and the collar. The bearing cover is sleeved on the rotating shaft and locked to the second end to fix the second bearing between the second stop surface and the bearing cover.

[0015] As an optional technical solution, the rotating shaft is an integrally formed SUS rotating shaft, and the collar is an SUS collar.

[0016] As an optional technical solution, the first housing has a first connecting end opposite to the first end, the first connecting end being closer to the second housing than the first end, the second housing having a second connecting end opposite to the second end, the first housing and the second housing being combined through the first connecting end and the second connecting end to form the housing assembly, and the first housing covering the first bearing and part of the spacer segment, the second housing covering the second bearing and another part of the spacer segment.

[0017] As an optional technical solution, the air inlet is located at the first joint end, the gas passage is located inside the first housing, and the gas outlet of the gas passage is located between the first end and the first bearing.

[0018] As an optional technical solution, the first end of the rotating shaft has a first gear, and the second end of the rotating shaft has a second gear.

[0019] According to another aspect of the present invention, the present invention also provides an etching machine for etching a substrate, the etching machine comprising the input shaft assembly described above.

[0020] In summary, the etching machine and input shaft assembly of this utility model embodiment, through the provision of the first sealing component, air inlet and gas channel, can effectively prevent the etching liquid from entering the housing assembly when the input shaft assembly is applied to the etching machine, and can also effectively prevent the etching liquid moisture from entering the interior of the housing assembly to form crystals and wear related components (such as bearings), thus extending the service life of the input shaft assembly.

[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Attached Figure Description

[0022] Figure 1 This is an external view of the input shaft assembly provided by this utility model.

[0023] Figure 2 This is a cross-sectional view of the input shaft assembly provided by this utility model.

[0024] Figure 3 for Figure 1 and Figure 2 A schematic diagram of the rotating shaft in the diagram. Detailed Implementation

[0025] To provide a better understanding of the purpose, structure, features and functions of this utility model, detailed descriptions are provided below with reference to the embodiments.

[0026] Figure 1 This is an external view of the input shaft assembly provided by this utility model. Figure 2This is a cross-sectional view of the input shaft assembly provided by this utility model. Figure 3 for Figure 1 and Figure 2 A schematic diagram of the rotating shaft in the diagram.

[0027] Please refer to Figures 1 to 3 This utility model provides an etching machine and an input shaft assembly 1000. The input shaft assembly 1000 is applied to the etching machine, that is, the etching machine includes the input shaft assembly 1000. The etching machine is used to etch a substrate. In one embodiment, the substrate is a substrate used for a display panel, and the etching machine is a machine used in the display panel manufacturing process (specifically, the etching process). The input shaft assembly 1000 includes a rotating shaft 10, a housing assembly 20, and a first sealing assembly 30. The rotating shaft 10 has a first end 101 and a second end 102 facing each other; the housing assembly 20 is sleeved on the rotating shaft 10, and the first end 101 and the second end 102 of the rotating shaft 10 are exposed in the housing assembly 20. The first end 2011 of the housing assembly 20 has a first mounting groove 2012, and the first end 2011 is adjacent to the first end 101; the first sealing assembly 30 includes a first sealing ring 301 and a fixing cover 302; the first sealing ring 301 is installed in the first mounting groove 2012. The fixing cover 302 is sleeved on the rotating shaft 10 and fixed to the first end 2011 so that the first sealing ring 301 seals the first end 2011 of the housing assembly 20; and the housing assembly 20 has an air inlet 2013, and the housing assembly 20 has a gas channel 2014 inside, the air inlet end of the gas channel 2014 is connected to the air inlet 2013, the air outlet end of the gas channel 2014 is aligned with the rotating shaft 10 and the air outlet end of the gas channel 2014 is adjacent to the first end 2011 of the housing assembly 20.

[0028] In one embodiment, the first sealing ring 301 may be, for example, a perfluoroO-Ring ring, and correspondingly, the fixing cover 302 may be an O-Ring fixing cover. The perfluoroO-Ring ring has excellent chemical resistance and can resist various strong acids, strong alkalis, and organic solvents. Thus, when the input shaft assembly 1000 of this invention is applied to an etching machine (for example, an etching machine used in the manufacturing process of a display panel), when the first end 101 of the rotating shaft 10 and the first end 2011 of the housing assembly 20 extend into the etching machine and come into contact with the etching liquid in the etching machine, the sealing effect of the perfluoroO-Ring ring can effectively prevent the etching liquid from entering the interior of the housing assembly 20.

[0029] Furthermore, to better suit the environment of etching machines, it is preferable that the rotating shaft 10 is entirely made of SUS steel (i.e., the rotating shaft 10 is a one-piece SUS rotating shaft), more specifically, SUS 314 stainless steel can be used. SUS steel has excellent corrosion resistance, resisting the erosion of corrosive substances such as chloride ions, acids, alkalis, and salts at room temperature, making it particularly suitable for applications in etching environments. In addition, SUS 314 has good high-temperature performance, maintaining excellent mechanical properties and corrosion resistance at temperatures up to approximately 550°C, thus preventing the heat generated during the rotation of the rotating shaft 10 from damaging its service life.

[0030] When the input shaft assembly 1000 of this invention is applied to an etching machine, the air inlet 2013 of the housing assembly 20 can be connected to the air supply device 800, which provides CDA gas (Compressed Dry Air / Clean Dry Air). The CDA gas enters the gas channel 2014 through the air inlet 2013 and is sprayed from the outlet of the gas channel 2014 onto the rotating shaft 10 adjacent to the first end 2011 of the housing assembly 20. In this way, it can prevent the etching solution moisture from entering the interior of the housing assembly 20 and forming crystals that could wear other components (such as the first bearing 401 and the second bearing 402, which will be described in detail later). At the same time, when the first sealing ring 301 wears down and the etching solution seeps in through the worn first sealing ring 301, the air pressure generated by the CDA gas spray can delay the etching solution from entering the interior of the housing assembly 20.

[0031] In one embodiment, the housing assembly 20 includes a first housing 201 and a second housing 202. The first housing 201 and the second housing 202 are respectively sleeved on the rotating shaft 10 and assembled along the axial direction of the rotating shaft 10 to form the housing assembly 20. The first end 2011 mentioned above is located on the first housing 201, and the second housing 202 has a second end 2021 opposite to the first end 2011. The first end 101 of the rotating shaft 10 is exposed from the first end 2011, and the second end 102 of the rotating shaft 10 is exposed from the second end 2021. Furthermore, the air inlet 2013 and the gas passage 2014 are both disposed on the first housing 201. Since the housing assembly 20 is assembled from the independent first housing 201 and the second housing 202, the first housing 201 and the second housing 202 can be assembled after the other main components of the entire input shaft assembly 1000 are assembled, which facilitates the convenient completion of the assembly of the entire input shaft assembly 1000.

[0032] In one embodiment, the input shaft assembly 1000 further includes a first bearing 401 and a second bearing 402. The rotating shaft 10 has a first mounting section 104, a second mounting section 105, and a spacer section 103 located between the first mounting section 104 and the second mounting section 105. In the radial direction of the rotating shaft 10, the diameter of the spacer section 103 is larger than the diameter of the first mounting section 104 and the second mounting section 105, so that the opposite sides of the spacer section 103 in the radial direction protrude from the first mounting section 104 and the second mounting section 105, respectively serving as the first stop surface 1031 and the second stop surface 1032. The second end 2021 of the second housing 202 has a second mounting groove 2022 corresponding to the second bearing 402. The first bearing 401 is sleeved on the first mounting section 104 and abuts against the first stop surface 1031. The second bearing 402 is sleeved on the second mounting section 105 and abuts against the second stop surface 1032, and the second bearing 402 is located in the second mounting groove 2022. The first bearing 401 and the second bearing 402 can effectively support the rotating shaft 10 and reduce the frictional resistance of the rotating shaft 10 during rotation.

[0033] It should be noted that, in order to accommodate the arrangement of the first bearing 401 and the second bearing 402, in one embodiment, the input shaft assembly 1000 further includes a collar 501 (e.g., an SUS collar 501) and a bearing cover 502. The collar 501 is sleeved on the rotating shaft 10 and disposed between the inner cavity wall of the first housing 201 (the inner cavity wall is adjacent to the first mounting groove 2012) and the first bearing 401 to fix the first bearing 401 between the first stop surface 1031 and the collar 501. The bearing cover 502 is sleeved on the rotating shaft 10 and locked to the second end 2021 of the second housing 202 to fix the second bearing 502 between the second stop surface 1032 and the bearing cover 502 (in one embodiment, the bearing cover 502 partially extends into the second mounting groove 2022 to fix the second bearing 502). In this embodiment, the first bearing 401 and the second bearing 402 are fixed by different components, mainly based on their different positions. The first bearing 401 is installed near the first end 2011 and the first mounting groove 2012, and the fixing member for fixing the first bearing 401 will enter the etching machine together with the first end 2011 of the first housing 201. In order to prevent the etching liquid in the etching machine from corroding the fixing member for fixing the first bearing 401, the fixing member for fixing the first bearing 401 adopts an SUS collar 501, which can effectively resist the corrosion of the etching liquid. The second bearing 402 is installed near the second end 2021, and the fixing member for fixing the second bearing 402 is located outside the second housing 202 and will not come into contact with the etching liquid inside the etching machine. Therefore, the fixing member for fixing the second bearing 402 can be a common bearing cover 502.

[0034] Additionally, the first housing 201 has a first connecting end 2015 opposite to the first end 2011 (that is, the first housing 201 has a first end 2011 and a first connecting end 2015 opposite to each other). The first connecting end 2015 is closer to the second housing 202 than the first end 2011. The second housing 202 has a second connecting end 2025 opposite to the second end 2021 (that is, the second housing 202 has a second end 2021 and a second connecting end 2025 opposite to each other). The first housing 201 and the second housing 202 are combined through the first connecting end 2015 and the second connecting end 2025 to form a housing assembly 20. The first housing 201 covers the first bearing 401 and a portion of the spacer segment 103, and the second housing 202 covers the second bearing 402 and another portion of the spacer segment 103. Specifically, the first joint end 2015 of the first housing 201 and the second joint end 2025 of the second housing 202 have locking holes (not shown). The assembly of the first housing 201 and the second housing 202 can be completed by passing a screw 900 through the locking holes on the first joint end 2015 and the second joint end 2025.

[0035] In this invention, the first bearing 401 and the second bearing 402 are respectively disposed in the inner cavity of the first housing 201 and the inner cavity of the second housing 202, separated by the spacer section 103 of the rotating shaft 10. When either bearing is damaged, only the corresponding housing needs to be removed and the damaged bearing replaced, while the other undamaged bearing does not need to be removed or replaced. For example, when the first bearing 401 is damaged, only the first housing 201 needs to be removed and the first bearing 401 replaced, while the second housing 202 and the second bearing 402 do not need to be removed or replaced.

[0036] It is worth mentioning that the aforementioned air inlet 2013 can be specifically set at the first joint end 2015, and the gas channel 2014 can be specifically set inside the first housing 201 with the gas outlet end of the gas channel 2014 located between the first end 2011 and the first bearing 401. In this way, the CDA gas ejected from the gas outlet end of the gas channel 2014 can not only prevent the etching solution moisture from entering the interior and forming crystals as mentioned above, but also dissipate heat from the rotating shaft 10 to prevent the rotating shaft 10 from overheating. In particular, the CDA gas ejected near the first bearing 401 can prevent the first bearing 401 from overheating.

[0037] In one embodiment, when the input shaft assembly 1000 of this invention is applied to an etching machine, the first end 101 of the rotating shaft 10, the fixing cover 302, and the first end 2011 of the first housing 201 all enter the interior of the etching machine and are fixedly connected to the etching machine via the periphery of the first connecting end 2015 of the first housing 201. If the connection between the first connecting end 2015 and the etching machine is not sealed, etching liquid will leak from the connection to the outside of the etching machine. Therefore, in this embodiment, a second sealing ring 601 is provided on the periphery of the first connecting end 2015 of the first housing 201. The second sealing ring 601 can also be a perfluorinated O-Ring. By providing the second sealing ring 601, the etching liquid inside the etching machine can be prevented from leaking from the connection between the first connecting end 2015 and the etching machine.

[0038] Furthermore, the first end 101 of the rotating shaft 10 has a first gear 701, and the second end 102 of the rotating shaft 10 has a second gear 702. When the input shaft assembly 1000 of this invention is applied to an etching machine, the first gear 701 can extend into the etching machine and mesh with another gear inside the etching machine, and the second gear 702 meshes with the gear components of the motor. Thus, the driving force of the motor is transmitted to the mechanical components inside the etching machine through the first gear 701 and the second gear 702, thereby realizing the mechanical operation function of the corresponding mechanical components.

[0039] In summary, the etching machine and input shaft assembly of this utility model embodiment, through the provision of the first sealing component, air inlet and gas channel, can effectively prevent the etching liquid from entering the housing assembly when the input shaft assembly is applied to the etching machine, and can also effectively prevent the etching liquid moisture from entering the interior of the housing assembly to form crystals and wear related components (such as bearings), thus extending the service life of the input shaft assembly.

[0040] Although the present invention has been described in conjunction with the accompanying drawings, the embodiments disclosed in the drawings are intended to provide illustrative examples of preferred embodiments of the present invention and should not be construed as limiting the present invention. For the purpose of clearly describing the required components, the scale in the schematic drawings does not represent the actual proportional relationships of the components.

[0041] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. An input shaft assembly, applied to an etching machine for etching a substrate, characterized in that, The input shaft assembly includes: A rotating shaft having opposing first and second ends; A housing assembly, which is sleeved on the rotating shaft, with the first end and the second end of the rotating shaft exposed outside the housing assembly, the first end of the housing assembly having a first mounting groove adjacent to the first end; and A first sealing assembly includes a first sealing ring and a fixing cover; the first sealing ring is installed in the first mounting groove, and the fixing cover is sleeved on the rotating shaft and fixed to the first end, so that the first sealing ring seals the first end of the housing assembly; The housing assembly has an air inlet and a gas channel inside the housing assembly. The air inlet end of the gas channel is connected to the air inlet, and the air outlet end of the gas channel is aligned with the rotating shaft and is adjacent to the first end of the housing assembly.

2. The input shaft assembly according to claim 1, characterized in that, The housing assembly includes a first housing and a second housing. The first housing and the second housing are respectively sleeved on the rotating shaft and assembled along the axial direction of the rotating shaft to form the housing assembly. The first end is located on the first housing, and the second housing has a second end opposite to the first end. The first end of the rotating shaft is exposed from the first end, and the second end of the rotating shaft is exposed from the second end.

3. The input shaft assembly according to claim 2, characterized in that, Both the air inlet and the gas passage are located in the first housing.

4. The input shaft assembly according to claim 2, characterized in that, It also includes a first bearing and a second bearing. The rotating shaft has a first mounting section, a second mounting section, and a spacer section located between the first mounting section and the second mounting section. In the radial direction of the rotating shaft, the diameter of the spacer section is larger than the diameters of the first mounting section and the second mounting section, so that the opposite sides of the spacer section protrude from the first mounting section and the second mounting section in the radial direction, respectively serving as a first stop surface and a second stop surface. The second end of the second housing has a second mounting groove corresponding to the second bearing. The first bearing is sleeved on the first mounting section and abuts against the first stop surface, and the second bearing is sleeved on the second mounting section and abuts against the second stop surface, and the second bearing is located in the second mounting groove.

5. The input shaft assembly according to claim 4, characterized in that, It also includes a collar and a bearing cap. The collar is sleeved on the rotating shaft and disposed between the inner wall of the first housing and the first bearing to fix the first bearing between the first stop surface and the collar. The bearing cap is sleeved on the rotating shaft and locked to the second end to fix the second bearing between the second stop surface and the bearing cap.

6. The input shaft assembly according to claim 5, characterized in that, The rotating shaft is a one-piece SUS rotating shaft, and the collar is an SUS collar.

7. The input shaft assembly according to claim 4, characterized in that, The first housing has a first connecting end opposite to the first end, the first connecting end being closer to the second housing than the first end. The second housing has a second connecting end opposite to the second end. The first housing and the second housing are combined through the first connecting end and the second connecting end to form the housing assembly. The first housing covers the first bearing and part of the spacer segment, and the second housing covers the second bearing and another part of the spacer segment.

8. The input shaft assembly according to claim 7, characterized in that, The air inlet is located at the first joint end, the gas passage is located inside the first housing, and the gas outlet of the gas passage is located between the first end and the first bearing.

9. The input shaft assembly according to claim 4, characterized in that, The first end of the rotating shaft has a first gear, and the second end of the rotating shaft has a second gear.

10. An etching machine for etching a substrate, characterized in that, The etching machine includes the input shaft assembly as described in any one of claims 1 to 9.

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