Phosphorane filling tank with cooling structure

Abstract

The utility model discloses a phosphorus alkane filling jar with cooling structure belongs to phosphorus alkane filling jar technical field, it includes support platform, the water tank is connected on the both sides outer wall of support platform, two water storage tanks and chutes are seted up on the support platform, the water storage tank and chute position correspond, install water pipe no.

Description

Technical Field

[0001] This utility model belongs to the field of phosphine filling tank technology, specifically a phosphine filling tank with a cooling structure. Background Technology

[0002] Phosphine filling tanks are specialized containers used for storing and filling phosphine. They are typically made of corrosion-resistant materials and feature robust sealing and safety designs to prevent gas leakage. They are primarily used in fields such as semiconductor manufacturing to provide a phosphine gas source for related processes.

[0003] To ensure the safety of the working environment, the phosphine filling tank usually needs to be cooled after the phosphine gas is injected. Currently, the existing cooling method is to use a fan for air cooling, which is not expensive but the cooling effect is not ideal. Utility Model Content

[0004] To overcome the above-mentioned defects, this utility model provides a phosphine filling tank with a cooling structure, which solves the problem that in order to ensure the safety of the working environment, it is usually necessary to cool the phosphine filling tank after injecting phosphine gas. Currently, the existing cooling method is to use a fan for air cooling, which is not expensive but the cooling effect is not ideal.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a phosphine filling tank with a cooling structure, comprising a support platform, water tanks connected to the outer walls on both sides of the support platform, two water storage tanks and an inclined groove provided on the support platform, the water storage tanks and the inclined grooves being positioned correspondingly, a water pipe II installed in the water storage tank, two water pumps III installed on the outer wall of the support platform, one end of the water pipe II penetrating the support platform and connected to the water pumps III, a return pipe connected to the water pumps III, one end of the return pipe being connected to the water tank, several water pipes I installed on both sides inside the support platform, several nozzles installed on the water pipes I, and a tank body installed on the support platform.

[0006] As a further embodiment of this utility model: a refrigeration device is installed on the water tank, and a water pump is installed on the water tank.

[0007] As a further embodiment of this utility model: a connecting pipe is installed on the water pump, the connecting pipe is connected to the refrigeration device, and a plurality of water pumps are installed on the refrigeration device.

[0008] As a further embodiment of this utility model: the second water pump is connected to the second connecting pipe, the end of the second connecting pipe passes through the outer wall of the support platform and is connected to the first water pipe, and the water tank is provided with a water inlet.

[0009] As a further aspect of this utility model: a valve is installed on the tank body, and a filling pipe is connected to the valve.

[0010] As a further embodiment of this utility model: a handle is connected to the valve, and a pressure gauge is installed on the tank.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] 1. This phosphine filling tank with a cooling structure is equipped with a valve, a connecting pipe, a water pump, and a refrigeration device. During operation, the operator seals the external gas pipe to the filling pipe and opens the valve by turning the handle to inject phosphine into the tank. The pressure change inside the tank can be monitored by a pressure gauge. After filling is completed, the valve is closed, and then the refrigeration device and water pump are turned on. Water pump one draws water into the refrigeration device through the connecting pipe. After being cooled by the refrigeration device, several water pumps two installed on it are turned on. Water pumps two draw cold water from the refrigeration device into the connecting pipe two, and then delivers it to water pipe one through the connecting pipe two. Then, the nozzle is turned on, and cold water is sprayed onto the surface of the tank to cool it down. The use of water cooling improves the cooling effect.

[0013] 2. This phosphine filling tank with a cooling structure is equipped with a tank body, a return pipe, a second water pipe, and a third water pump. During operation, the tank body is cooled by water. Under the action of gravity, the cold water falls from the outer wall of the tank into the inclined channel and enters the water storage tank through the inclined channel. When the water storage tank is full, the third water pump is turned on. The third water pump works to draw water through the second water pipe into the return pipe, and then into the water tank through the return pipe. This avoids water waste and saves operating costs. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the structure of the support platform and the water pipe connected together in this utility model;

[0016] Figure 3 This is a schematic diagram of the connection between the water tank and the water pump of this utility model;

[0017] Figure 4 This is a schematic diagram of the connection between the tank body and the pressure gauge of this utility model;

[0018] In the diagram: 1. Support platform; 2. Tank body; 3. Water tank; 4. Refrigeration unit; 5. Injection pipe; 6. Rotary handle; 7. Inclined chute; 8. Water storage tank; 9. Water pipe one; 10. Water inlet; 11. Water pump one; 12. Connecting pipe one; 13. Water pump two; 14. Connecting pipe two; 15. Nozzle; 16. Water pump three; 17. Return pipe; 18. Water pipe two; 19. Valve; 20. Pressure gauge. Detailed Implementation

[0019] The technical solution of this patent will be further described in detail below with reference to specific embodiments.

[0020] like Figure 1-4 As shown, this utility model provides a technical solution: a phosphine filling tank with a cooling structure, including a support platform 1, water tanks 3 connected to the outer walls on both sides of the support platform 1, a refrigeration device 4 installed on the water tank 3, and a water pump 11 installed on the water tank 3. Because the refrigeration device 4 is installed, it can cool the incoming water. Then, several water pumps 13 installed on it are turned on, and the water pumps 13 work to draw the cold water in the refrigeration device 4 into the connecting pipe 14, and then transport it to the water pipe 9 through the connecting pipe 14. Then, the nozzle 15 is turned on, and the cold water is sprayed onto the surface of the tank body 2 to cool it down. The cooling effect is improved by using water cooling.

[0021] A connecting pipe 12 is installed on water pump 11, and the connecting pipe 12 is connected to the refrigeration device 4. Several water pumps 2 13 are installed on the refrigeration device 4.

[0022] The second water pump 13 is connected to the second connecting pipe 14. The end of the second connecting pipe 14 passes through the outer wall of the support platform 1 and is connected to the first water pipe 9. The water tank 3 is provided with a water inlet 10.

[0023] The support platform 1 has two water storage tanks 8 and an inclined trough 7. Because of the inclined trough 7, during the water cooling process of the tank 2, the cold water falls from the outer wall of the tank 2 into the inclined trough 7 under the action of gravity, and then enters the water storage tank 8 through the inclined trough 7, which facilitates the subsequent work.

[0024] The water storage tank 8 and the inclined trough 7 are positioned correspondingly. Water pipe 2 18 is installed inside the water storage tank 8. Two water pumps 3 16 are installed on the outer wall of the support platform 1. Because water pumps 3 16 are installed, when the water storage tank 8 is full of water, water pumps 3 16 are turned on. Water pumps 3 16 work to draw water through water pipe 2 18 into the return pipe 17, and then into the water tank 3 through the return pipe 17, thus avoiding water waste and saving operating costs.

[0025] One end of water pipe 2 18 passes through support platform 1 and is connected to water pump 3 16. Water pump 3 16 is connected to return pipe 17. One end of return pipe 17 is connected to water tank 3. Several water pipes 1 9 are installed on both sides inside support platform 1. Several nozzles 15 are installed on water pipes 1 9. Because several nozzles 15 are installed, the cooling area on the surface of tank 2 can be increased through multiple nozzles 15, thus improving work efficiency.

[0026] A tank 2 is installed on the support platform 1. A valve 19 is installed on the tank 2. A filling pipe 5 is connected to the valve 19. A handle 6 is connected to the valve 19. A pressure gauge 20 is installed on the tank 2.

[0027] The working principle of this utility model is as follows: When working, the operator seals the external air pipe and the injection pipe 5 and opens the valve 19 through the handle 6 to inject phosphine into the tank 2. The pressure gauge 20 can be used to monitor the pressure change inside the tank 2. After the injection is completed, the valve 19 is closed, and then the refrigeration device 4 and water pump 11 are turned on. Water pump 11 works to draw water into the refrigeration device 4 through the connecting pipe 12. After the refrigeration device 4 cools down, several water pumps 2 13 installed on it are turned on. Water pumps 2 13 work to draw the cold water in the refrigeration device 4 into the connecting pipe 2 14, and then transport it to the water pipe 9 through the connecting pipe 2 14. Then the nozzle 15 is turned on, and the cold water is sprayed onto the surface of the tank 2 to cool it down.

[0028] During operation, when the tank 2 is cooled by water, the cold water falls from the outer wall of the tank 2 into the inclined groove 7 under the action of gravity, and enters the water storage tank 8 through the inclined groove 7. When the water storage tank 8 is full of water, the water pump 3 16 is turned on. The water pump 3 16 works to draw the water through the water pipe 2 18 into the return pipe 17, and then enters the water tank 3 through the return pipe 17.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] The preferred embodiments of this patent have been described in detail above. However, this patent is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this patent.

Claims

1. A phosphine filling tank with a cooling structure, comprising a support platform (1), characterized in that: Water tanks (3) are connected to the outer walls on both sides of the support platform (1). Two water storage tanks (8) and inclined grooves (7) are opened on the support platform (1). The water storage tanks (8) and inclined grooves (7) are in corresponding positions. Water pipes (18) are installed in the water storage tanks (8). Two water pumps (16) are installed on the outer wall of the support platform (1). One end of the water pipes (18) passes through the support platform (1) and is connected to the water pumps (16). A return pipe (17) is connected to the water pumps (16). One end of the return pipe (17) is connected to the water tank (3). Several water pipes (9) are installed on both sides of the inside of the support platform (1). Several nozzles (15) are installed on the water pipes (9). A tank (2) is installed on the support platform (1).

2. A phosphine filling tank with a cooling structure according to claim 1, characterized in that: A refrigeration device (4) is installed on the water tank (3), and a water pump (11) is installed on the water tank (3).

3. A phosphine filling tank with a cooling structure according to claim 2, characterized in that: A connecting pipe (12) is installed on the first water pump (11), and the first connecting pipe (12) is connected to the refrigeration device (4). Several second water pumps (13) are installed on the refrigeration device (4).

4. A phosphine filling tank with a cooling structure according to claim 3, characterized in that: The second water pump (13) is connected to the second connecting pipe (14), and the end of the second connecting pipe (14) passes through the outer wall of the support platform (1) and is connected to the first water pipe (9). The water tank (3) is provided with a water inlet (10).

5. A phosphine filling tank with a cooling structure according to claim 1, characterized in that: A valve (19) is installed on the tank (2), and a filling pipe (5) is connected to the valve (19).

6. A phosphine filling tank with a cooling structure according to claim 5, characterized in that: A throttle (6) is connected to the valve (19), and a pressure gauge (20) is installed on the tank (2).

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