Wafer test probe card quick replacement interface

Abstract

This utility model relates to the field of wafer test probe card technology, and discloses a quick-change interface for wafer test probe cards, including a mounting mechanism, a connecting mechanism, and a body mechanism. The mounting mechanism has a connecting mechanism at its bottom, and the connecting mechanism has a body mechanism at its bottom. The mounting mechanism includes a mounting interface, with mounting plates fixedly connected to its front and rear ends, and a mounting bracket inserted into its bottom. This utility model achieves rapid positioning and fixing of the probe card through the rotational connection of the rotating support column and the sliding connection of the limiting block. The use of a spring provides elastic support, ensuring that the probe card can be quickly and stably installed during replacement. The mounting groove and the mounting groove inside the limiting sleeve provide a precise sliding path for the rotating support column and the limiting block, ensuring the accuracy and consistency of the installation process.

Description

Technical Field

[0001] This utility model relates to the field of wafer test probe card technology, and in particular to a quick-change interface for wafer test probe cards. Background Technology

[0002] A quick-change interface for wafer test probe cards refers to an interface system designed for convenient and rapid replacement of probe cards. The main purpose of this interface system is to reduce probe card replacement time, improve production efficiency, and reduce the risk of errors and damage during operation. Interface Connector: Specially designed connectors enable quick and stable connection between the probe card and the testing equipment. These connectors typically feature high precision and wear resistance to ensure that testing accuracy is not affected during frequent replacements. Locking Mechanism: A quick locking and releasing mechanism for the probe card, using mechanical or electromagnetic methods, ensures that the probe card will not accidentally fall off during testing.

[0003] An existing quick-change interface for wafer test probe cards is inconvenient for operators to easily install and connect the interface to the equipment when connecting and fixing different types of interfaces in the overall equipment, thus affecting the ease of operation when installing and removing the interface. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a quick-change interface for wafer test probe cards.

[0005] This utility model is achieved using the following technical solution: a quick-change interface for a wafer test probe card, comprising an installation mechanism, a connection mechanism, and a body mechanism, wherein the bottom of the installation mechanism is provided with a connection mechanism, and the bottom of the connection mechanism is provided with a body mechanism;

[0006] The installation mechanism includes an installation interface, with installation support plates fixedly connected to both ends of the installation interface. An installation bracket is inserted into the bottom of the installation interface, and a rotating support column is fixedly connected to the bottom of the installation bracket. A limit stop is fixedly connected to the surface of the rotating support column, and a fixed support plate is rotatably connected to the surface of the rotating support column. A spring is fixedly connected to the bottom of the fixed support plate, and a limit plate is fixedly connected to the top of the installation bracket.

[0007] The above technical solution, with its limit block and spring design, prevents the probe from accidentally falling off during replacement, while the cooperation between the fixed support plate and the mounting bracket provides additional stability.

[0008] As a further improvement to the above solution, the number of the mounting support plate and the limiting plate is set to several, and each pair is a group. The several mounting support plates and the limiting plate are symmetrically distributed front and back around the mounting interface, and the mounting bracket is located on top of the fixed support plate.

[0009] Through the above technical solution, the quick-change interface of the probe card can adapt to wafer probe bodies of different sizes and types. By adjusting the number and position of the mounting brackets and limiting plates, different testing needs can be met.

[0010] As a further improvement to the above solution, the connecting mechanism includes a connecting horizontal plate, a limiting sleeve is fixedly connected to the top of the connecting horizontal plate, an installation groove is provided inside the limiting sleeve, a connecting support plate is fixedly connected to the top of the connecting horizontal plate, a reinforcing plate is fixedly connected to the top of the connecting support plate, and an installation frame is fixedly connected to the surface of the reinforcing plate.

[0011] As a further improvement to the above solution, the limiting sleeve is internally slidably connected with a rotating support and a limiting block. The limiting block is slidably connected inside the mounting groove. The spring is fixedly connected to the top of the connecting horizontal plate, and the mounting frame is fixedly connected to the top of the connecting horizontal plate.

[0012] Through the above technical solution, the compact installation of the rotating support and the limiting block is achieved by the design of the limiting sleeve and the mounting groove, and the design of the mounting frame and the reinforcing plate further optimizes the space utilization.

[0013] As a further improvement to the above solution, the number of reinforcing plates is set to several, with each pair forming a group. The several reinforcing plates are symmetrically distributed around the connecting horizontal plate as the center. The connecting horizontal plate is located at the bottom of the rotating support column, and the fixed support plate is located at the top of the connecting horizontal plate.

[0014] As a further improvement to the above solution, the main body mechanism includes a wafer probe body, a circuit board is fixedly connected to the top of the wafer probe body, a groove is formed on the top of the wafer probe body, a first mounting plate is fixedly connected to the top of the wafer probe body, and a second mounting plate is fixedly connected to the top of the wafer probe body.

[0015] As a further improvement to the above solution, a connecting horizontal plate is fixedly connected to the top of the first mounting plate, a connecting horizontal plate is fixedly connected to the top of the second mounting plate, and the wafer probe body is located at the bottom of the connecting horizontal plate.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] This invention achieves rapid positioning and fixing of the probe card through the rotational connection of the rotating support and the sliding connection of the limiting block. The spring provides elastic support to ensure that the probe card can be installed quickly and stably during replacement. The mounting groove and the mounting groove inside the limiting sleeve provide a precise sliding path for the rotating support and the limiting block, ensuring the accuracy and consistency of the installation process.

[0018] This utility model achieves rapid installation and fixation of the probe card by setting up an installation mechanism with components such as an installation interface, an installation support plate, and an installation bracket. The design of the connecting mechanism with components such as a horizontal plate, a limiting sleeve, and an installation groove ensures a stable connection between the installation mechanism and the main body mechanism. The core part of the probe card is formed by setting up the wafer probe body and its top circuit board, groove, first mounting plate, and second mounting plate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the frontal anatomical structure of the present invention;

[0021] Figure 3 This is an enlarged schematic diagram of the structure at point A of this utility model;

[0022] Figure 4 This is a schematic diagram of the side anatomical structure of this utility model;

[0023] Figure 5 This is a schematic diagram of the right-side structure of this utility model.

[0024] Explanation of key symbols:

[0025] 1. Mounting mechanism; 11. Mounting interface; 12. Mounting support plate; 13. Mounting bracket; 14. Rotating support column; 15. Limiting block; 16. Fixed support plate; 17. Spring; 18. Limiting vertical plate; 2. Connecting mechanism; 21. Connecting horizontal plate; 22. Limiting sleeve; 23. Mounting groove; 24. Connecting support plate; 25. Reinforcing plate; 26. Mounting frame; 3. Main body mechanism; 31. Wafer probe body; 32. Circuit board; 33. Groove; 34. First mounting plate; 35. Second mounting plate. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0027] Example:

[0028] Please combine Figures 1-5 The wafer test probe card quick-change interface of this embodiment includes a mounting mechanism 1, a connecting mechanism 2 and a body mechanism 3. The mounting mechanism 1 is provided with the connecting mechanism 2 at its bottom, and the connecting mechanism 2 is provided with the body mechanism 3 at its bottom.

[0029] The mounting mechanism 1 includes a mounting interface 11, with mounting support plates 12 fixedly connected to both ends of the mounting interface 11. A mounting bracket 13 is inserted into the bottom of the mounting interface 11, and a rotating support column 14 is fixedly connected to the bottom of the mounting bracket 13. A limit stop 15 is fixedly connected to the surface of the rotating support column 14, and a fixed support plate 16 is rotatably connected to the surface of the rotating support column 14. A spring 17 is fixedly connected to the bottom of the fixed support plate 16, and a limit plate 18 is fixedly connected to the top of the mounting bracket 13. Through the rotational connection of the rotating support column 14 and the sliding connection of the limit stop 15, the probe card is quickly positioned and fixed. The spring 17 provides elastic support to ensure that the probe card can be quickly and stably installed in place during replacement. The mounting groove 23 and the limit sleeve 22 provide a precise sliding path for the rotating support column 14 and the limit stop 15, ensuring the accuracy and consistency of the installation process.

[0030] The design of the limit stop 15 and the spring 17 prevents the probe from accidentally falling off during replacement, and the cooperation of the fixed support plate 16 and the mounting bracket 13 provides additional stability.

[0031] The number of mounting support plates 12 and limiting upright plates 18 is set to several, and each pair is a group. The several mounting support plates 12 and limiting upright plates 18 are symmetrically distributed front and back with the mounting interface 11 as the center. The mounting bracket 13 is located on the top of the fixed support plate 16.

[0032] The quick-change interface of the probe card can adapt to wafer probe bodies 31 of different sizes and types. By adjusting the number and position of the mounting brackets 12 and the limiting plates 18, different testing requirements can be met.

[0033] The connecting mechanism 2 includes a connecting horizontal plate 21, a limiting sleeve 22 is fixedly connected to the top of the connecting horizontal plate 21, an installation groove 23 is provided inside the limiting sleeve 22, a connecting support plate 24 is fixedly connected to the top of the connecting horizontal plate 21, a reinforcing plate 25 is fixedly connected to the top of the connecting support plate 24, and an installation frame 26 is fixedly connected to the surface of the reinforcing plate 25.

[0034] The limiting sleeve 22 has a rotating support column 14 and a limiting block 15 that are slidably connected inside. The limiting block 15 is slidably connected inside the mounting groove 23. The spring 17 is fixedly connected to the top of the connecting horizontal plate 21. The mounting frame 26 is fixedly connected to the top of the connecting horizontal plate 21.

[0035] The design of the limiting sleeve 22 and the mounting groove 23 enables the compact installation of the rotating support column 14 and the limiting block 15, while the design of the mounting frame 26 and the reinforcing plate 25 further optimizes the use of space.

[0036] The number of reinforcing plates 25 is set to several, and each pair is a group. The several reinforcing plates 25 are symmetrically distributed on the left and right with the connecting horizontal plate 21 as the center. The connecting horizontal plate 21 is located at the bottom of the rotating support column 14, and the fixed support plate 16 is located at the top of the connecting horizontal plate 21.

[0037] The main body mechanism 3 includes a wafer probe body 31, a circuit board 32 fixedly connected to the top of the wafer probe body 31, a groove 33 formed on the top of the wafer probe body 31, a first mounting plate 34 fixedly connected to the top of the wafer probe body 31, and a second mounting plate 35 fixedly connected to the top of the wafer probe body 31. By setting the mounting mechanism 1 with components such as the mounting interface 11, the mounting support plate 12, and the mounting bracket 13, the probe card can be quickly installed and fixed. By setting the connecting mechanism 2 with components such as the connecting plate 21, the limiting sleeve 22, and the mounting groove 23, a stable connection between the mounting mechanism 1 and the main body mechanism 3 is ensured. The wafer probe body 31 of the main body mechanism 3 and its top circuit board 32, groove 33, first mounting plate 34, and second mounting plate 35 constitute the core part of the probe card.

[0038] A connecting horizontal plate 21 is fixedly connected to the top of the first mounting plate 34, and a connecting horizontal plate 21 is fixedly connected to the top of the second mounting plate 35. The wafer probe body 31 is located at the bottom of the connecting horizontal plate 21.

[0039] The implementation principle of a quick-change interface for a wafer test probe card in this embodiment is as follows: The probe card is quickly positioned and fixed by the rotational connection of the rotating support column 14 and the sliding connection of the limiting block 15. The spring 17 provides elastic support, ensuring the probe card can be quickly and stably installed during replacement. The mounting groove 23 and the limiting sleeve 22 provide a precise sliding path for the rotating support column 14 and the limiting block 15, ensuring the accuracy and consistency of the installation process. The mounting mechanism 1, through components such as the mounting interface 11, mounting support plate 12, and mounting bracket 13, enables quick installation and fixation of the probe card. The connecting mechanism 2, connecting components such as the horizontal plate 21, limiting sleeve 22, and mounting groove 23, ensures a stable connection between the mounting mechanism 1 and the main body mechanism 3. The main body mechanism 3, consisting of the wafer probe body 31 and its top circuit board 32, groove 33, first mounting plate 34, and second mounting plate 35, constitutes the core of the probe card.

[0040] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A quick-change interface for a wafer test probe card, characterized in that, It includes an installation mechanism (1), a connecting mechanism (2) and a body mechanism (3). The bottom of the installation mechanism (1) is provided with the connecting mechanism (2), and the bottom of the connecting mechanism (2) is provided with the body mechanism (3). The installation mechanism (1) includes an installation interface (11), with installation support plates (12) fixedly connected to the front and rear ends of the installation interface (11), an installation bracket (13) inserted into the bottom of the installation interface (11), a rotating support column (14) fixedly connected to the bottom of the installation bracket (13), a limit stop (15) fixedly connected to the surface of the rotating support column (14), a fixed support plate (16) rotatably connected to the surface of the rotating support column (14), a spring (17) fixedly connected to the bottom of the fixed support plate (16), and a limit plate (18) fixedly connected to the top of the installation bracket (13).

2. The wafer test probe card quick-change interface as described in claim 1, characterized in that: The number of the mounting support plate (12) and the limiting plate (18) is set to several, and each pair is a group. The several mounting support plates (12) and the limiting plate (18) are symmetrically distributed front and back with the mounting interface (11) as the center. The mounting bracket (13) is located on the top of the fixed support plate (16).

3. The wafer test probe card quick-change interface as described in claim 1, characterized in that: The connecting mechanism (2) includes a connecting horizontal plate (21), a limiting sleeve (22) is fixedly connected to the top of the connecting horizontal plate (21), an installation groove (23) is provided inside the limiting sleeve (22), a connecting support plate (24) is fixedly connected to the top of the connecting horizontal plate (21), a reinforcing plate (25) is fixedly connected to the top of the connecting support plate (24), and an installation frame (26) is fixedly connected to the surface of the reinforcing plate (25).

4. The wafer test probe card quick-change interface as described in claim 3, characterized in that: The limiting sleeve (22) has a rotating support (14) and a limiting block (15) slidably connected inside. The limiting block (15) is slidably connected inside the mounting groove (23). The spring (17) is fixedly connected to the top of the connecting horizontal plate (21). The mounting frame (26) is fixedly connected to the top of the connecting horizontal plate (21).

5. The wafer test probe card quick-change interface as described in claim 4, characterized in that: The number of the reinforcing plates (25) is set to several, and each pair is a group. The several reinforcing plates (25) are symmetrically distributed on the left and right with the connecting horizontal plate (21) as the center. The connecting horizontal plate (21) is located at the bottom of the rotating support column (14), and the fixed support plate (16) is located at the top of the connecting horizontal plate (21).

6. The wafer test probe card quick-change interface as described in claim 1, characterized in that: The main body (3) includes a wafer probe body (31), a circuit board (32) is fixedly connected to the top of the wafer probe body (31), a groove (33) is provided on the top of the wafer probe body (31), a first mounting plate (34) is fixedly connected to the top of the wafer probe body (31), and a second mounting plate (35) is fixedly connected to the top of the wafer probe body (31).

7. A quick-change interface for a wafer test probe card as described in claim 6, characterized in that: A connecting horizontal plate (21) is fixedly connected to the top of the first mounting plate (34), and a connecting horizontal plate (21) is fixedly connected to the top of the second mounting plate (35). The wafer probe body (31) is located at the bottom of the connecting horizontal plate (21).

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