Infrared heating tube and vacuum furnace

By employing multiple independent infrared emitters of different diameters and a reflective coating design in the vacuum furnace, the problem of uneven heating plate temperature was solved, achieving uniform heating of the heating plate, extending the life of the heating tube, and reducing infrared waste.

CN224343390UActive Publication Date: 2026-06-09ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
Filing Date
2025-07-08
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

The uneven temperature of the heating plate in existing vacuum furnaces leads to uneven heating, affecting product quality and potentially shortening the lifespan of the heating tubes, while also resulting in significant waste of infrared radiation.

Method used

The design employs multiple independent infrared emitters of different diameters and a reflective coating. The temperature uniformity of the heating plate is optimized by controlling the heating power and reflectivity, and the heater is protected by a quartz sleeve.

Benefits of technology

It improves the temperature uniformity of the heating plate, reduces the risk of local overheating, extends the service life of the heating tube, optimizes the thermal radiation effect, and reduces infrared waste.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to vacuum furnace technical field provides an infrared heating pipe including vacuum cavity, first diameter infrared luminophor, second diameter infrared luminophor, power, electrode and multiple reflection plating, the reflection plating is arranged in the vacuum cavity, first diameter infrared luminophor with second diameter infrared luminophor set up in the vacuum cavity, the reflection plating is set up below first diameter infrared luminophor with second diameter infrared luminophor, second diameter infrared luminophor sets up in the middle part of vacuum cavity, first diameter infrared luminophor is symmetrically arranged, the diameter of second diameter infrared luminophor is greater than the diameter of first diameter infrared luminophor. Reduce the risk of local overheating in the middle section, the temperature difference of the edge of the heating plate can be balanced by compensatory heat production at both ends, and the temperature uniformity of the heating plate of the vacuum furnace is improved.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum furnace technology, and in particular to an infrared heating tube and a vacuum furnace. Background Technology

[0002] Existing vacuum welding equipment is a specialized device for welding workpieces. Its structure mainly includes a controller, a sealable cavity, a vacuum pump, a heating device, a heating plate, and a cooling device. The heating plate is located within the sealable cavity and is used to place the workpiece. The heating and cooling devices are located below the heating plate and are connected to the controller, which regulates the heating and cooling of the heating plate. The vacuum pump is located outside the sealable cavity and performs vacuuming to ensure the welding process is conducted in an oxygen-free environment, ensuring welding quality and reducing internal voids, thus improving the reliability of the weldment. Currently, commercially available infrared heaters consist of an outer sleeve and an internal heating element. The outer sleeve is often made of transparent quartz, while the internal heating element is often a halogen or carbon fiber heating element. These commonly used materials are all continuous heating elements, which can cause uneven heating, resulting in a higher temperature concentration in the middle of the heater and lower temperatures at both ends. This uneven heating affects the quality of the heated product and may also shorten the lifespan of the heating element, potentially causing safety issues. Furthermore, when using infrared heaters with transparent quartz sleeves, the infrared radiation generated by the heating element is emitted in all directions (360 degrees). However, during the heating process, we only need infrared radiation emitted towards the stage, resulting in wasted infrared radiation emitted in the opposite direction. This also causes heating of unnecessary components. Additionally, the heating plate of the vacuum furnace exhibits poor temperature uniformity. Summary of the Invention

[0003] This invention provides an infrared heating tube to solve the problem of poor temperature uniformity of the heating plate in the vacuum furnace in the prior art.

[0004] An infrared heating tube includes a vacuum chamber, a first-diameter infrared emitter, a second-diameter infrared emitter, a power supply, electrodes, and multiple reflective coatings. The reflective coatings are disposed within the vacuum chamber. The first-diameter and second-diameter infrared emitters are disposed within the vacuum chamber. The reflective coatings are disposed below the first-diameter and second-diameter infrared emitters. The second-diameter infrared emitters are disposed in the middle of the vacuum chamber. The first-diameter infrared emitters are symmetrically arranged, and the diameter of the second-diameter infrared emitters is larger than the diameter of the first-diameter infrared emitters.

[0005] The infrared heating tube according to this utility model further includes a third diameter infrared emitter, which is disposed between the first diameter infrared emitter and the second diameter infrared emitter.

[0006] According to the infrared heating tube of this utility model, the first diameter infrared emitter, the second diameter infrared emitter, and the third diameter infrared emitter are independent infrared emitters or electrically connected infrared heating elements.

[0007] According to the infrared heating tube of this utility model, the first diameter infrared emitter and the second diameter infrared emitter are independent infrared emitters, and the heating power of each independent infrared emitter is controlled by a controller.

[0008] According to the infrared heating tube of this utility model, the resistivity of the first diameter infrared emitter is greater than the resistivity of the second diameter infrared emitter, and the resistivity of the second diameter infrared emitter is greater than the resistivity of the third diameter infrared emitter.

[0009] According to the infrared heating tube of this utility model, the reflective coating includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and disposed on the inside of the vacuum cavity.

[0010] According to the infrared heating tube of this utility model, the reflective coating is a high-temperature resistant reflective material.

[0011] According to the infrared heating tube of this utility model, the electrode is made of an electrode material with good electrical conductivity and low heating rate.

[0012] The infrared heating tube according to this utility model also includes a quartz sleeve, which is sleeved on the vacuum cavity.

[0013] A vacuum furnace includes an infrared heating tube as described in any of the above claims, wherein a plurality of the infrared heating tubes are disposed inside the vacuum furnace and are evenly and parallelly distributed below a heating plate.

[0014] The diameter of the third-diameter infrared emitter in this invention is larger than that of the second-diameter infrared emitter, which in turn is larger than that of the first-diameter infrared emitter. This reduces the risk of localized overheating in the middle section. The thinner ends, through compensatory heat generation, balance the temperature difference at the edge of the heating plate, improving the temperature uniformity of the heating plate in the vacuum furnace. The thicker middle section provides higher structural strength, allowing it to withstand higher current loads and mechanical stresses, reducing the risk of breakage at high temperatures. The reflectivity of the first reflective coating is greater than that of the second reflective coating, which in turn is greater than that of the third coating, optimizing the thermal radiation interference effect and resulting in a more uniform surface temperature of the heating plate. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the front view structure of the infrared heating tube in the first embodiment;

[0017] Figure 2 This is a schematic diagram of the front view structure of the infrared heating tube in the second embodiment;

[0018] Figure 3 This is a schematic diagram of the structure of a vacuum furnace;

[0019] Figure 4 This is a magnified view of the structure of part A;

[0020] Reference numerals: 1. Power supply; 2. Electrode; 41. First reflective coating; 42. Second reflective coating; 43. Third reflective coating; 5. Quartz sleeve; 6. Vacuum cavity; 31. Direct irradiation line of infrared emitter; 32. Reflected line of reflective coating; 7. First diameter infrared emitter; 8. Second diameter infrared emitter; 9. Third diameter infrared emitter. Detailed Implementation

[0021] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0022] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0024] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0025] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0026] The following is combined Figures 1-4 The embodiment of this utility model includes a vacuum cavity 6, a first-diameter infrared emitter 7, a second-diameter infrared emitter 8, a power supply 1, electrodes 2, and multiple reflective coatings. The reflective coatings are disposed within the vacuum cavity 6. The first-diameter infrared emitter 7 and the second-diameter infrared emitter 8 are disposed within the vacuum cavity 6. The reflective coatings are disposed below the first-diameter infrared emitter 7 and the second-diameter infrared emitter 8. The second-diameter infrared emitter 8 is disposed in the middle of the vacuum cavity 6. The first-diameter infrared emitters 7 are symmetrically arranged, and the diameter of the second-diameter infrared emitter 8 is larger than the diameter of the first-diameter infrared emitter 7. The infrared heating element generates direct infrared radiation 31, which is reflected by the reflective coatings to produce reflective radiation 32.

[0027] In some embodiments, a third-diameter infrared emitter 9 is also included, with the third-diameter infrared emitter 9 positioned between the first-diameter infrared emitter 7 and the second-diameter infrared emitter 8. The diameter of the third-diameter infrared emitter 9 is larger than the diameter of the second-diameter infrared emitter 8, and the diameter of the second-diameter infrared emitter 8 is larger than the diameter of the first-diameter infrared emitter 7. This reduces the risk of local overheating in the middle section, and the thinner ends can balance the temperature difference at the edge of the heating plate through compensatory heat generation, thereby improving the temperature uniformity of the heating plate in the vacuum furnace.

[0028] In some embodiments, the first diameter infrared emitter 7, the second diameter infrared emitter 8, and the third diameter infrared emitter 9 are independent infrared emitters or electrically connected infrared heaters.

[0029] In some embodiments, the first diameter infrared emitter 7 and the second diameter infrared emitter 8 are independent infrared emitters, and the heating power of the independent infrared emitters is controlled by the controller alone.

[0030] In some embodiments, the resistivity of the first diameter infrared emitter 7 is greater than the resistivity of the second diameter infrared emitter 8, and the resistivity of the second diameter infrared emitter 8 is greater than the resistivity of the third diameter infrared emitter 9.

[0031] In some embodiments, the reflective coating includes a half-gold plating layer and a half-white plating layer, that is, the half-gold plating layer is the first reflective coating 41, and the half-white plating layer 43 is the third reflective coating 43. The half-gold plating layer 41 is symmetrically arranged, with the half-gold plating layer 41 disposed on the outside of the vacuum cavity 6, and the half-white plating layer 43 disposed on the inside of the vacuum cavity 6, i.e., in the middle. A second reflective coating 42 is disposed between the first reflective coating layer 41 and the third reflective coating layer 43. The first reflective coating layer 41 is symmetrically arranged, and the second reflective coating layer 42 is also symmetrically arranged.

[0032] In some embodiments, the reflective coating is a high-temperature resistant reflective material.

[0033] In some embodiments, electrode 2 is made of an electrode material with good electrical conductivity and low heat generation rate.

[0034] In some embodiments, a quartz sleeve 5 is also included, which is sleeved on the vacuum chamber 6.

[0035] A vacuum furnace includes the aforementioned infrared heating tubes. Multiple infrared heating tubes are arranged inside the vacuum furnace, uniformly and parallelly distributed below a heating plate. Vacuum furnace equipment typically uses multiple sets of parallel infrared heaters as a heating mechanism to heat the workpiece. The temperature of these multiple sets of infrared heaters often concentrates from the periphery inwards, resulting in a higher temperature at the center.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. An infrared heating tube, characterized in that, It includes a vacuum chamber, a first-diameter infrared emitter, a second-diameter infrared emitter, a power supply, electrodes, and multiple reflective coatings; the reflective coatings are disposed inside the vacuum chamber, the first-diameter infrared emitter and the second-diameter infrared emitter are disposed inside the vacuum chamber, the reflective coatings are disposed below the first-diameter infrared emitter and the second-diameter infrared emitter, the second-diameter infrared emitter is disposed in the middle of the vacuum chamber, the first-diameter infrared emitters are symmetrically arranged, and the diameter of the second-diameter infrared emitter is larger than the diameter of the first-diameter infrared emitter.

2. The infrared heating tube according to claim 1, characterized in that, It also includes a third diameter infrared emitter, which is disposed between the first diameter infrared emitter and the second diameter infrared emitter.

3. The infrared heating tube according to claim 2, characterized in that, The first diameter infrared emitter, the second diameter infrared emitter, and the third diameter infrared emitter are independent infrared emitters or electrically connected infrared heaters.

4. The infrared heating tube according to claim 3, characterized in that, If the first diameter infrared emitter and the second diameter infrared emitter are independent infrared emitters, then the heating power of each independent infrared emitter is controlled by a controller.

5. The infrared heating tube according to claim 2, characterized in that, The resistivity of the first diameter infrared emitter is greater than that of the second diameter infrared emitter, and the resistivity of the second diameter infrared emitter is greater than that of the third diameter infrared emitter.

6. The infrared heating tube according to claim 1, characterized in that, The reflective coating includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and are disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and are disposed on the inside of the vacuum cavity.

7. The infrared heating tube according to claim 1, characterized in that, The reflective coating is made of a high-temperature resistant reflective material.

8. The infrared heating tube according to claim 1, characterized in that, The electrode is made of an electrode material with good electrical conductivity and low heat generation rate.

9. The infrared heating tube according to claim 1, characterized in that, It also includes a quartz sleeve, which is fitted onto the vacuum chamber.

10. A vacuum furnace, characterized in that, The vacuum furnace includes an infrared heating tube as described in any one of claims 1 to 9, wherein a plurality of the infrared heating tubes are provided inside the vacuum furnace, and the infrared heating tubes are evenly and parallelly distributed below the heating plate.