Silicon wafer positioning device

Abstract

This utility model belongs to the technical field of silicon wafer processing equipment, specifically relating to a silicon wafer positioning device. The silicon wafer positioning device of this utility model includes: a fixed plate; a rotary driver mounted on the fixed plate; a turntable mounted on the output shaft of the rotary driver; the turntable having a plurality of first limiting grooves; a plurality of movable seats movably mounted on the turntable, each having a first limiting wheel at one end that mates with a corresponding first limiting groove; fixed blocks disposed on both sides of the corresponding movable seats; the fixed blocks having second limiting grooves; a lifting block movably mounted on the corresponding movable seats, with a positioning component for pushing the edge of the silicon wafer at its upper end; and a fixed rod disposed on the lifting block, the end of which has a second limiting wheel mates with the second limiting groove. The transmission is achieved through the interaction of the first limiting grooves and the first limiting wheels on the turntable, which is more stable than the linkage transmission method used in the prior art, and also has a simpler structure and stronger component versatility.

Description

Technical Field

[0001] This utility model belongs to the technical field of silicon wafer processing equipment, and specifically relates to a silicon wafer positioning device. Background Technology

[0002] Before processing silicon wafers with lasers, the wafers need to be positioned. Patent CN221774296U discloses a wafer positioning device that only requires driving a motor to rotate a rotating component once. Within one cycle, the motor does not need to rotate forward or backward, resulting in high centering efficiency.

[0003] However, the existing technology uses a linkage drive to move the slider, which has several drawbacks: When the distal end of the linkage is connected to the center of the rotating component, the closer the proximal end of the linkage is to this line during operation, the greater the torque required from the motor. Therefore, the transmission is not smooth enough during operation, and some jamming may occur. Furthermore, to prevent interference between the linkages, one pair of linkages needs to be installed on the upper end of the rotating component, and another pair on the lower end, making installation cumbersome. Also, the different connection positions of the slider and linkages result in poor parts versatility. Utility Model Content

[0004] The purpose of this invention is to provide a silicon wafer positioning device to solve the technical problems of poor component versatility and cumbersome installation in existing technologies that use linkage transmission.

[0005] This application provides a silicon wafer positioning device, comprising:

[0006] Fixing plate;

[0007] Rotary driver, mounted on a fixed plate;

[0008] A turntable is mounted on the output shaft of a rotary driver; the turntable is provided with a plurality of first limiting grooves, one end of which is close to the center of the turntable and the other end is far from the center of the turntable.

[0009] Several movable seats are movably mounted on the turntable, and one end of each seat is provided with a first limiting wheel that mates with a corresponding first limiting groove;

[0010] A fixed block is provided on both sides of the corresponding movable seat; the fixed block is provided with a second limiting groove, the height of the end of the second limiting groove closer to the center of the turntable is higher than the height of the end farther from the center of the turntable;

[0011] The lifting block is movably mounted on a corresponding moving seat, and its upper end is provided with a positioning component for pushing the edge of the silicon wafer; the lifting block is provided with a fixing rod, and the end of the fixing rod is provided with a second limiting wheel that cooperates with the second limiting groove.

[0012] In one embodiment of this application, the first limiting groove is an inwardly curved arc.

[0013] In one embodiment of this application, the movable seat includes a horizontal block and a vertical block;

[0014] The horizontal block is movably mounted on the turntable, and the first limiting wheel is mounted on the inner end of the horizontal block;

[0015] The lifting block is movably mounted on the vertical block.

[0016] In one embodiment of this application, a first slider is fixed on the turntable;

[0017] The bottom surface of the horizontal block is provided with a first slide rail that cooperates with the first slider, and the first slide rail extends radially along the turntable.

[0018] In one embodiment of this application, a second slide rail is provided on one side of the vertical block;

[0019] A second slider that cooperates with the second slide rail is provided on one side of the lifting block.

[0020] In one embodiment of this application, the second slider is mounted on the outer side of the lifting block;

[0021] The fixing rod is installed on the inner side of the lifting block.

[0022] In one embodiment of this application, the second limiting groove includes a horizontal groove near the center of the turntable and a downward inclined groove away from the center of the turntable.

[0023] In one embodiment of this application, the positioning component includes:

[0024] A crossbar is installed at the upper end of the lifting block; and

[0025] Several drive wheels are mounted on the crossbar.

[0026] In one embodiment of this application, the fixing plate is provided with a plurality of columns;

[0027] A silicon wafer fixture is installed at the upper end of the column.

[0028] In one embodiment of this application, a mounting base is provided on the bottom surface of the fixing plate.

[0029] The beneficial effects of this utility model are:

[0030] Unlike existing technologies, this application provides a silicon wafer positioning device, comprising: a fixed plate; a rotary driver mounted on the fixed plate; a turntable mounted on the output shaft of the rotary driver; the turntable having a plurality of first limiting grooves; a plurality of movable seats movably mounted on the turntable, each having a first limiting wheel at one end that mates with a corresponding first limiting groove; fixed blocks disposed on both sides of the corresponding movable seats; the fixed blocks having second limiting grooves; a lifting block movably mounted on the corresponding movable seats, with a positioning component for pushing the edge of the silicon wafer at its upper end; and a fixed rod disposed on the lifting block, the end of which has a second limiting wheel that mates with the second limiting groove. The transmission is achieved through the engagement of the first limiting grooves and the first limiting wheels on the turntable, which is more stable than the linkage transmission method used in existing technologies, and also has a simpler structure and greater component versatility.

[0031] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0032] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0033] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 This is a perspective view of a silicon wafer positioning device according to a preferred embodiment of the present invention;

[0035] Figure 2 This is a top view of a preferred embodiment of the silicon wafer positioning device of this utility model;

[0036] Figure 3 This is a top view of a turntable according to a preferred embodiment of the present invention;

[0037] Figure 4 This is a schematic diagram of a preferred embodiment of the movable base of this utility model;

[0038] Figure 5 This is a side view of a fixing block according to a preferred embodiment of the present invention.

[0039] In the picture:

[0040] Fixed plate 1, column 11, silicon wafer fixture 12, mounting base 13, rotary driver 2, turntable 3, first limiting groove 31, first slider 32, moving base 4, first limiting wheel 41, horizontal block 42, first slide rail 421, vertical block 43, second slide rail 431, fixed block 5, second limiting groove 51, horizontal groove 511, downward inclined groove 512, lifting block 6, positioning assembly 61, horizontal bar 611, push wheel 612, fixed rod 62, second limiting wheel 621, second slider 63, silicon wafer 100. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0042] This application provides a silicon wafer positioning device, which will be described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, the descriptions of each embodiment have their own emphasis; parts not described in detail in a certain embodiment can be referred to in the relevant descriptions of other embodiments.

[0043] See Figures 1 to 5 In one embodiment, the silicon wafer positioning device includes: a fixed plate 1; a rotary driver 2 mounted on the fixed plate 1; a turntable 3 mounted on the output shaft of the rotary driver 2; the turntable 3 is provided with a plurality of first limiting grooves 31, one end of the first limiting groove 31 being close to the center of the turntable 3 and the other end being away from the center of the turntable 3; a plurality of movable seats 4 movably mounted on the turntable 3, one end of which is provided with a first limiting wheel 41 that cooperates with the corresponding first limiting groove 31; fixed blocks 5 disposed on both sides of the corresponding movable seats 4; the fixed blocks 5 are provided with second limiting grooves 51, the height of the end of the second limiting groove 51 close to the center of the turntable 3 being higher than the height of the end away from the center of the turntable 3; a lifting block 6 movably mounted on the corresponding movable seats 4, the upper end of which is provided with a positioning component 61 for pushing the edge of the silicon wafer; the lifting block 6 is provided with a fixed rod 62, and the end of the fixed rod 62 is provided with a second limiting wheel 621 that cooperates with the second limiting groove 51.

[0044] In this embodiment, optionally, the rotary driver 2 may include a motor and a reducer, which may be fixedly connected as one unit; the main body of the rotary driver 2 may be installed below the fixed plate 1, and its output end may extend above the fixed plate 1 and connect to the turntable 3.

[0045] In this embodiment, when the turntable 3 rotates, the movable seat 4 can be moved by the cooperation of the first limiting groove 31 and the first limiting wheel 41, and the movable seat 4 can be moved by the cooperation of the second limiting groove 51 and the second limiting wheel 621.

[0046] Specifically, with Figure 2 Taking the perspective as an example, when the rotary driver 2 drives the turntable 3 to rotate clockwise, the first limiting wheel 41 moves inward along the first limiting groove 31, thereby driving the moving seat 4 to move inward and the positioning component 61 to move inward. At the same time, the second limiting wheel 621 rises along the second limiting groove 51, causing the lifting block 6 to rise. The positioning component 61 can rise from a plane lower than the silicon wafer 100 to a plane that can contact the silicon wafer 100. When the rotary driver 2 drives the turntable 3 to continue rotating clockwise, the first limiting wheel 41 continues to move inward along the first limiting groove 31 until it reaches the preset position. Then, the positioning component 61 pushes the corresponding edge of the silicon wafer 100 to the corresponding position to complete the positioning. When the rotary driver 2 drives the turntable 3 to rotate counterclockwise, the first limiting wheel 41 moves outward along the first limiting groove 31, the positioning component 61 moves outward, and at the same time the second limiting wheel 621 descends along the second limiting groove 51, causing the lifting block 6 to descend and the positioning component 61 to descend to a plane lower than the silicon wafer 100, thereby avoiding the silicon wafer suction component.

[0047] In this embodiment, the transmission adopts the cooperation method of the first limiting groove 31 and the first limiting wheel 41, and the second limiting groove 51 and the second limiting wheel 621. The structure is simple, the operation is stable, the parts are highly interchangeable, and the installation is convenient.

[0048] In this embodiment, optionally, the number of movable seats 4 can be determined according to the positioning requirements of the silicon wafer 100. In this embodiment, optionally, the number of movable seats 4 can be four, corresponding to the four sides of the square silicon wafer 100 respectively.

[0049] See Figure 3 Preferably, the first limiting groove 31 is an inwardly curved arc, which can make the transmission more stable.

[0050] See Figure 4 Optionally, the movable seat 4 includes a horizontal block 42 and a vertical block 43; the horizontal block 42 is movably mounted on the turntable 3, and the first limiting wheel 41 is mounted on the inner end of the horizontal block 42; the lifting block 6 is movably mounted on the vertical block 43.

[0051] Furthermore, a first slider 32 is fixed on the turntable 3; the bottom surface of the horizontal block 42 is provided with a first slide rail 421 that cooperates with the first slider 32, and the first slide rail 421 extends radially along the turntable 3.

[0052] In this embodiment, the horizontal block 42 needs to connect multiple blocks and bears relatively complex forces. Therefore, the first slide rail 421 is installed on the horizontal block 42, which can serve as a reinforcing rib of the horizontal block 42 and improve its strength.

[0053] Furthermore, a second slide rail 431 is provided on one side of the vertical block 43; a second slider 63 that cooperates with the second slide rail 431 is provided on one side of the lifting block 6.

[0054] Optionally, the second slider 63 is mounted on the outer side of the lifting block 6; the fixing rod 62 is mounted on the inner side of the lifting block 6. The upper surface of the fixing plate 1 can be effectively utilized for the installation layout.

[0055] See Figure 5 The second limiting groove 51 includes a horizontal groove 511 near the center of the turntable 3 and a downward inclined groove 512 away from the center of the turntable 3.

[0056] In this embodiment, the lower inclined groove 512 can guide the second limiting wheel 621 to rise and fall; the horizontal groove 511 can guide the second limiting wheel 621 to move horizontally, so that the positioning component 61 moves horizontally when it contacts the silicon wafer 100, making the contact more stable.

[0057] Furthermore, the positioning component 61 includes: a crossbar 611 disposed at the upper end of the lifting block 6; and a plurality of push wheels 612 disposed on the crossbar 611.

[0058] Optional, see Figure 1 The fixing plate 1 is provided with a plurality of columns 11; a silicon wafer fixture 12 is installed on the upper end of the column 11.

[0059] In this embodiment, fixing the jig 12 directly onto the fixing plate 1 can improve the compactness and positioning accuracy of the overall device.

[0060] Optional, see Figure 1 The bottom surface of the fixing plate 1 is provided with a mounting base 13. The mounting base 13 can be used to fix it on the machine base of the laser processing equipment, which facilitates the overall modular installation of the positioning device.

[0061] It should be noted that all the devices (parts whose specific structures are not specified) selected in this application are general standard parts or parts known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0062] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection" and "linking" should be interpreted broadly, for example, they can be fixed connections, detachable connections, or integral connections.

[0063] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0064] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification.

Claims

1. A silicon wafer positioning device, characterized in that, include: Fixing plate (1); A rotary driver (2) is mounted on a fixed plate (1); A turntable (3) is mounted on the output shaft of a rotary driver (2); the turntable (3) is provided with a plurality of first limiting grooves (31), and one end of the first limiting groove (31) is close to the center of the turntable (3) and the other end is far away from the center of the turntable (3); Several movable seats (4) are movably mounted on the turntable (3), and one end of each seat is provided with a first limiting wheel (41) that cooperates with the corresponding first limiting groove (31). A fixing block (5) is provided on both sides of the corresponding movable seat (4); a second limiting groove (51) is provided on the fixing block (5), and the height of the end of the second limiting groove (51) near the center of the turntable (3) is higher than the height of the end away from the center of the turntable (3); The lifting block (6) is movably mounted on the corresponding moving seat (4), and its upper end is provided with a positioning component (61) for pushing the edge of the silicon wafer; the lifting block (6) is provided with a fixing rod (62), and the end of the fixing rod (62) is provided with a second limiting wheel (621) that cooperates with the second limiting groove (51).

2. The silicon wafer positioning device according to claim 1, characterized in that, The first limiting groove (31) is an inwardly curved arc.

3. The silicon wafer positioning device according to claim 1, characterized in that, The movable seat (4) includes a horizontal block (42) and a vertical block (43); The horizontal block (42) is movably mounted on the turntable (3), and the first limiting wheel (41) is mounted on the inner end of the horizontal block (42); The lifting block (6) is movably mounted on the vertical block (43).

4. The silicon wafer positioning device according to claim 3, characterized in that, The turntable (3) is fixed with a first slider (32); The bottom surface of the horizontal block (42) is provided with a first slide rail (421) that cooperates with the first slider (32), and the first slide rail (421) extends radially along the turntable (3).

5. The silicon wafer positioning device according to claim 3, characterized in that, A second slide rail (431) is provided on one side of the vertical block (43). The lifting block (6) has a second slider (63) on one side that cooperates with the second slide rail (431).

6. The silicon wafer positioning device according to claim 5, characterized in that, The second slider (63) is mounted on the outer side of the lifting block (6); The fixing rod (62) is installed on the inner side of the lifting block (6).

7. The silicon wafer positioning device according to claim 1, characterized in that, The second limiting groove (51) includes a horizontal groove (511) near the center of the turntable (3) and a downward inclined groove (512) away from the center of the turntable (3).

8. The silicon wafer positioning device according to claim 3, characterized in that, The positioning component (61) includes: A crossbar (611) is provided at the upper end of the lifting block (6); and Several drive wheels (612) are mounted on a crossbar (611).

9. The silicon wafer positioning device according to claim 1, characterized in that, The fixing plate (1) is provided with multiple columns (11); A silicon wafer fixture (12) is installed at the upper end of the column (11).

10. The silicon wafer positioning device according to claim 1, characterized in that, The bottom surface of the fixing plate (1) is provided with a mounting base (13).

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