Detachable spring thimble rod structure

Abstract

The utility model relates to the technical field of silicon wafer processing, especially to detachable spring ejector rod structure. It includes conveying unit, conveying unit transmission along X direction, a plurality of groups of support components, equal interval arrangement on conveying unit along X direction, support component includes main support strip and opposite setting on main support strip and be used for supporting a pair of silicon wafer ejector pin structure of silicon wafer, adjacent at least two support components constitute a group of support unit for supporting silicon wafer, silicon wafer ejector pin structure includes support seat and detachable installation on ceramic sleeve of support seat, ceramic sleeve is in inclined state installation on support seat, and its circumferential surface forms the support point position of supporting silicon wafer. The utility model has the advantages of: the technical scheme of the utility model is provided with the ceramic sleeve mounting assembly of quick detachable on the fixed seat, so that quick replacement or disassembly is realized, thereby improving the efficiency, and the structure is simple, convenient operation.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer processing technology, and in particular to a detachable spring ejector pin structure. Background Technology

[0002] In silicon wafer processing equipment (such as etching, CVD, PVD, drying furnace, sintering furnace and other semiconductor process equipment), the ceramic ring pin structure is a key component, and its main functions include the following aspects: 1. Precise support and positioning of silicon wafers; 2. Reduction of heat conduction and stress; 3. Wear resistance and long life; 4. Special process requirements; 5. High temperature resistance and corrosion resistance.

[0003] The prior art, patent document CN116072594A, describes a pin structure for semiconductor devices. Its structure is complex and requires several sets of pin structures in actual use, resulting in high manufacturing costs and inconvenience for practical use.

[0004] Currently, solar cells with dimensions between 105-230 mm are using... Figure 1 The silicon wafer ejector pin structure shown is installed on the conveying unit 1', and then the ceramic sleeve 43' is directly fitted onto the support base 4' by welding and fixed. The ceramic sleeve 43' is used to support and place the silicon wafer 5'. This structure is low in cost and simple to manufacture. However, if it needs to be replaced, the support base needs to be removed, the ceramic sleeve 43' needs to be taken out, a new ceramic sleeve 43' needs to be installed and welded fixed. Subsequent replacements are complicated, time-consuming and labor-intensive.

[0005] Therefore, a detachable spring ejector pin structure needs to be designed to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a detachable spring ejector pin structure to overcome the aforementioned shortcomings of the existing technology.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A detachable spring ejector pin structure includes a conveying unit that transports along the X direction; several sets of support components are arranged at equal intervals along the X direction on the conveying unit, each support component including a main support bar and a pair of silicon wafer ejector pin structures disposed opposite each other on the main support bar for supporting silicon wafers, at least two adjacent support components forming a support unit for supporting silicon wafers, each silicon wafer ejector pin structure including a support base and a detachable ceramic sleeve mounted on the support base, the ceramic sleeve being mounted on the support base in an inclined state, the circumferential surface of the ceramic sleeve being used to support the silicon wafer.

[0009] Preferably, the main support bar includes a main body and folded portions that fold upward from both sides of the main body, and the folded portions are provided with a plurality of hollow grooves.

[0010] Preferably, mounting holes are provided at both ends of the main support bar.

[0011] Preferably, the support base has inclined shafts, and the ceramic sleeve is sleeved on the shafts; the shaft has a notch, and the shaft is divided into a main support section and a hook section by the notch; the main support section is provided with an elastic element that axially presses one end of the ceramic sleeve onto the hook section.

[0012] Preferably, a clearance is provided between the shaft and the support for the installation of the ceramic sleeve.

[0013] Preferably, a weight-reducing groove is also provided on the support base.

[0014] The beneficial effects of this utility model are: this technical solution improves efficiency by setting a quick-detachable ceramic sleeve installation component on the fixed base, thereby enabling quick replacement or disassembly, and the structure is simple and easy to operate. Attached Figure Description

[0015] Figure 1 A schematic diagram of the ejector pin structure used in the existing structure;

[0016] Figure 2 This is a top view of the conveying state of a detachable spring ejector rod structure according to this utility model;

[0017] Figure 3 This is a schematic diagram of a single support component of a detachable spring ejector pin structure according to this utility model;

[0018] Figure 4 This is a front view of a single support component of a detachable spring ejector pin structure according to this utility model;

[0019] Figure 5 This is a partial enlarged view of a silicon wafer ejector pin structure with a detachable spring ejector pin rod structure according to this utility model;

[0020] In the diagram: 1. Conveying unit; 2. Support assembly; 3. Main support bar; 31. Main body; 32. Folding part; 33. Hollowed-out groove; 34. Mounting hole; 4. Silicon wafer ejector pin structure; 41. Support base; 42. Ceramic sleeve; 411. Shaft; 412. Notch; 413. Main support section; 414. Hook section; 415. Elastic element; 416. Movement gap; 417. Weight reduction groove; 5. Silicon wafer. Detailed Implementation

[0021] Reference Figures 2 to 5A detachable spring ejector pin structure includes a conveying unit 1, which conveys silicon wafers 5 placed on the conveying unit 1 along the X-axis direction and performs drying or other silicon wafer processing during the conveying process.

[0022] Several sets of support components 2 are arranged at equal intervals along the X direction on the conveying unit 1. The support components 2 include a main support bar 3 and a pair of silicon wafer ejector pin structures 4 that are disposed opposite to each other on the main support bar 3 and used to support the silicon wafer 5.

[0023] At least two adjacent support components 2 form a set of support units to support the silicon wafer 5, thereby ensuring that the silicon wafer 5 can be supported at four points, that is, the four sets of silicon wafer pin structures 4 of the two sets of support components 2 provide support. In this embodiment, the silicon wafer is supported by the silicon wafer pin structures around the perimeter. During transmission, the silicon wafer 5 remains balanced and will not tilt, shake, or fall.

[0024] For details, please refer to Figure 2 The diagram shows a specific transmission schematic of the silicon wafer ejector pin structure 4. At least two adjacent support components 2 form a support unit to support the silicon wafer 5. Two, three, four or more support components 2 can be used for support, depending on the size and model of the silicon wafer 5.

[0025] In order to be able to be installed with different conveying units, the main support bar 3 includes a main body 31 and a folded part 32 that folds upward from both sides of the main body 31. The folded part 32 has a hollow groove 33. The main body 31 is used to be installed with the conveying unit and also serves as a bottom support. The folded part 32 is used to install the silicon wafer ejector mechanism 4. The hollow groove 33 can reduce the weight.

[0026] Mounting holes 34 are provided at both ends of the main support bar 3. The support base 3 is installed on the conveying unit 1 by means of fasteners that fit the mounting holes, so as to achieve quick installation.

[0027] The support base is also provided with a weight reduction groove 417 to reduce the weight of the entire structure.

[0028] The silicon wafer ejector pin structure 4 includes a support base 41 and a detachable ceramic sleeve 42 mounted on the support base. The ceramic sleeve 42 is mounted on the support base 41 at an angle, and the circumferential surface of the ceramic sleeve 42 is used to support the silicon wafer 5.

[0029] In this embodiment, the support base 41 has an inclined shaft 411, and the ceramic sleeve 42 is sleeved on the shaft 411; the shaft 411 has a notch 412, and the shaft 411 is divided into a main support section 413 and a hook section 414 by the notch 412; the main support section 413 is provided with an elastic element 415 that axially presses one end of the ceramic sleeve 42 onto the hook section;

[0030] After the ceramic sleeve 42 is installed, the elastic element 415 supports the ceramic sleeve 42. During installation, the ceramic sleeve 42 squeezes and compresses the elastic element 415, fitting the entire ceramic sleeve 42 onto the main support section 413 of the shaft 411. Then, the other end of the ceramic sleeve 42 is aligned with the hook section 414, and the hook section 414 is inserted into the inner ring of the ceramic sleeve 42 to fix it. At the same time, the elastic element 415 loses its artificial force and rebounds to open and press against the ceramic sleeve 42. The ceramic sleeve 42 is constantly subjected to the rebound force, so that the end of the ceramic sleeve 42 fixed with the hook section 414 always remains in the embedded state and will not loosen, thus enabling assembly.

[0031] To facilitate the disassembly of the ceramic sleeve 42, a movable gap 416 is provided between the shaft 411 and the support base 41;

[0032] The space of the notch 412 is used for the installation or removal of the ceramic sleeve 42.

[0033] The shaft 411 has a certain elastic deformation capability and can be manually adjusted to tilt the angle of the shaft 411, thereby facilitating the installation or removal of the ceramic sleeve 42.

[0034] In this embodiment, one end of the main support segment 413 is fixed to the support base 41, while the other end is free and unconnected. The free end of the main support segment 413 has a certain elastic deformation capability. One end of the hook segment is fixed to the support base 41, and the other end is the B end of the free and unconnected segment. The ceramic sleeve 42 has its own inner ring. During assembly, the main support segment 413 is bent outwards, causing the main support segment 413 and the hook segment 414 to be on different horizontal lines, and misaligned with the B end of the hook segment 414. The gap between the main support section 413 and the hook section 414 is enlarged to facilitate the installation of the ceramic sleeve 42. Then, the inner ring of one end of the ceramic sleeve 42 is aligned with the free end of the main support section 413 and slid into place along the main support section 413. Pressure is applied so that one end of the ceramic sleeve 42 presses against the elastic element 415 and continues to move downwards along the main support section 413. This ensures that after the main support section 413 is adjusted and reset, the hook section 414 will not touch the outer edge of the ceramic sleeve 42. Move the free end of the main support section 413 until it is in its original state with the hook section 414. Release the pressure, and the elastic element 415 will spring back, holding the ceramic sleeve 42, with end B of the hook section 414 embedded in the inner ring of the ceramic sleeve 42, thus completing the assembly. Due to the continuous spring force of the elastic element 415, the ceramic sleeve 42 can continuously hold end B of the hook section 414 in place. Similarly, when disassembly is required, manually apply downward pressure, and the ceramic sleeve 42 will... Move the main support section 413 downwards, and move the hook 412 away from the inner ring of the ceramic sleeve 42 until the B end of the hook section 414 does not touch the ceramic sleeve 42 when adjusting the shaft 411. Then adjust the angle of the main support section 413 so that the main support section 413 and the hook section 414 are misaligned, increasing the slot space of the notch 412 between the main support section 413 and the hook section 414, making it easier to remove the ceramic sleeve 42. Then remove the ceramic sleeve 42 to complete the disassembly.

[0035] Another disassembly method involves using a ceramic sleeve 42 with its own inner ring. During assembly, one end of the ceramic sleeve 42 is inserted through the notch 412, and the inner ring of the ceramic sleeve is aligned with the free end of the main support section 413. The sleeve then slides along the main support section 413, fitting over it. Pressure is applied so that one end of the ceramic sleeve 42 presses against the elastic element 415, and the sleeve continues to move downwards along the main support section 413 until it no longer touches end B of the hook section 414. Release the pressure on the ceramic sleeve 42, bring the ceramic sleeve 42 close to end B of the hook section 414, and insert end B of the hook section 414 into the inner ring of the ceramic sleeve 42 to complete the assembly. Similarly, when disassembly is required, apply pressure to the ceramic sleeve 42 along the main support section 413 toward one end of the elastic member 413 and move it, while compressing the elastic member 413. The ceramic sleeve 42 separates from end B of the hook section 414, and the ceramic sleeve 42 is tilted out from the notch 412 to complete the disassembly.

[0036] The advantages of this utility model are that the technical solution provides a quick-release ceramic sleeve mounting assembly on the fixed base, thereby enabling quick replacement or disassembly, which improves efficiency. It also has a simple structure and is easy to operate.

[0037] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A detachable spring ejector pin structure, comprising a conveying unit that transmits along the X direction; and a plurality of support assemblies arranged at equal intervals along the X direction on the conveying unit, characterized in that: The support assembly includes a main support bar and a pair of silicon wafer ejector pin structures disposed opposite each other on the main support bar for supporting the silicon wafer. At least two adjacent support assemblies constitute a set of support units for supporting the silicon wafer. The silicon wafer ejector pin structure includes a support base and a ceramic sleeve detachably mounted on the support base. The ceramic sleeve is mounted on the support base in an inclined state, and its circumferential surface forms support points for supporting the silicon wafer.

2. The detachable spring ejector pin structure according to claim 1, characterized in that: The main support bar includes a main body and folded portions that fold upward from both sides of the main body. The folded portions are provided with several hollow grooves.

3. A detachable spring ejector pin structure according to claim 1 or 2, characterized in that: Mounting holes are provided at both ends of the main support bar.

4. The detachable spring ejector pin structure according to claim 1, characterized in that: The support base has inclined shafts, and the ceramic sleeve is sleeved on the shafts; the shafts have notches, and the shafts are divided into a main support section and a hook section by the notches; the main support section is provided with an elastic element that axially presses one end of the ceramic sleeve onto the hook section.

5. The detachable spring ejector pin structure according to claim 4, characterized in that: A clearance is provided between the shaft and the support for the installation of the ceramic sleeve.

6. The detachable spring ejector pin structure according to claim 1, characterized in that: The support base is also provided with a weight reduction groove.

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