A filtering device for electronic-grade sulfuric acid production

Abstract

The utility model relates to a kind of filtering device for electronic grade sulfuric acid production applied to filtering device field, including filtering device assembly, the inner end of filtering device assembly is provided with liquid spray cleaning assembly, rotating assembly is provided in filtering device assembly, rotating assembly is provided with auxiliary assembly in, filtering device assembly includes processing tank body, the upper end of processing tank body is fixedly connected with sealing tank cover, the inner end of processing tank body is fixedly connected with first filter plate above, the lower inner wall of processing tank body is fixedly connected with multiple hollow filter columns, liquid spray cleaning assembly includes multiple arc vertical rods, in above-mentioned filtering device for electronic grade sulfuric acid production, the present scheme realizes accurate purification by multistage filtration structure, cleaning system is rotated by spiral injection component and filter column, realizes overall flushing, simultaneously, with the help of elastic reset mechanism, filter column is driven reverse high-speed rotation, forms bidirectional cleaning effect.

Description

Technical Field

[0001] This utility model relates to a filtration device for sulfuric acid production, and more particularly to an electronic-grade sulfuric acid production filtration device applied in the field of filtration devices. Background Technology

[0002] In the production of electronic-grade sulfuric acid, its purity directly affects the performance and yield of high-end electronic devices such as semiconductors and integrated circuits. Therefore, extremely high requirements are placed on filtration accuracy, contaminant control, and equipment stability during the production process. Traditional filtration devices mostly adopt a single-stage filtration structure, treating sulfuric acid with only a single filter element. This makes it difficult to effectively intercept impurities of different particle sizes, especially the removal effect on tiny particles (such as nano-sized metal oxides and colloids), which can easily lead to insufficient purity of the filtered sulfuric acid, failing to meet the requirements of advanced processes.

[0003] Chinese patent CN216259437U discloses a filtration device for producing electronic-grade sulfuric acid. This filtration device includes a housing and a top cover fixedly connected to the housing. This invention features a single acid inlet. The acid entering the housing is filtered by several parallel filter elements to remove particles ranging from 50 micrometers to 15 nanometers. The filtered acid solution is collected at a single outlet. Compared to existing single filters connected in series, this device is smaller in size and occupies less space. Furthermore, because several parallel filter elements work together to filter the sulfuric acid, the filtration efficiency is high, extending the lifespan of the filter elements.

[0004] Chinese patent CN220860814U discloses a high-precision filtration device for electronic-grade sulfuric acid production, relating to the field of sulfuric acid filtration technology. The device includes: a main body containing a filter box; the top of the filter box has multiple pre-reserved slots, allowing it to be disassembled for cleaning filtered impurities, thereby improving the quality of the impurities; and a storage tank, lid, funnel, and connecting pipe work together to seal the sulfuric acid, guiding it into the filter assembly, thus improving the sealing performance of the impurities.

[0005] In traditional cleaning mechanisms, the cleaning components are mostly fixed in layout, and the spray range is limited, making it difficult to cover the entire surface of the filter element. As a result, stubborn contaminants remaining on the surface and in the pores of the filter element cannot be completely removed. After long-term use, this can easily cause blockage, which not only reduces filtration efficiency but also requires frequent shutdowns to replace the filter element, increasing the risk of production interruption and maintenance costs. Utility Model Content

[0006] In view of the above-mentioned prior art, the technical problem to be solved by this utility model is that the cleaning components in the cleaning mechanism of traditional devices are mostly fixed in layout, with a limited spray range, making it difficult to cover the entire surface of the filter element. As a result, stubborn pollutants remaining on the surface and in the pores of the filter element cannot be completely removed, which can easily cause blockage after long-term use. This not only reduces the filtration efficiency, but also requires frequent shutdowns to replace the filter element, increasing the risk of production interruption and maintenance costs.

[0007] To address the aforementioned problems, this utility model provides a filtration device for electronic-grade sulfuric acid production, comprising a filtration device assembly, an inner end of which is provided with a liquid spraying and cleaning assembly, a rotating assembly within the filtration device assembly, and an auxiliary assembly within the rotating assembly.

[0008] The filtration device assembly includes a processing tank, a sealed tank cover is fixedly connected to the upper end of the processing tank, a first filter plate is fixedly connected to the upper inner end of the processing tank, and multiple hollow filter columns are fixedly connected to the lower inner wall of the processing tank.

[0009] The liquid spraying cleaning assembly includes multiple arc-shaped vertical rods, which are fixedly connected in a ring at equal intervals to the outside of the lower inner wall of the processing tank. One end of each arc-shaped vertical rod near the hollow filter column is fixedly connected to a liquid spraying nozzle, which is arranged in a ring-like spiral. The rotating assembly includes an electric turntable, which is located on the lower inner wall of the processing tank.

[0010] The upper end of the electric rotary table is provided with multiple annularly spaced built-in torsion spring positioning grooves. A second auxiliary gear rotating component is installed at the upper end of the built-in torsion spring positioning grooves, and multiple first auxiliary gear rotating components are installed on the lower inner wall of the processing tank.

[0011] In the aforementioned filtration device for electronic-grade sulfuric acid production, this solution achieves precise purification through a multi-stage filtration structure. The cleaning system achieves comprehensive rinsing through the rotational cooperation between the spiral spray component and the filter column. At the same time, the elastic reset mechanism drives the filter column to rotate in the opposite direction at high speed, forming a two-way cleaning effect.

[0012] As a further improvement of this application, the second auxiliary gear rotating component is fixedly connected to the hollow filter column directly above it, and the multiple first auxiliary gear rotating components are meshed with the corresponding second auxiliary gear rotating components.

[0013] As a further improvement of this application, multiple hollow filter columns are arranged in a ring at equal intervals, with the hollow filter columns located directly below the first filter plate.

[0014] As a further improvement of this application, an inlet is fixedly connected to the upper left side of the processing tank, a drain chamber is fixedly connected to the lower end of the sealed tank cover, and an outlet is fixedly connected to the end of the drain chamber away from the inlet.

[0015] As another improvement of this application, multiple columns are fixedly connected to the outside of the drainage chamber, and the multiple columns are arranged in a ring at equal intervals.

[0016] As a further improvement to this application, multiple spray nozzles and the outer wall of the hollow filter column cooperate with each other, and the auxiliary components include internal vertical rods.

[0017] As a further improvement to this application, the internal vertical rod is fixedly connected to the lower inner wall of the hollow filter column, and the outer side of the internal vertical rod is provided with a threaded external groove.

[0018] In summary, this solution achieves precise purification through a multi-stage filtration structure. The sulfuric acid to be filtered first undergoes preliminary filtration before entering multiple evenly distributed fine filter columns for deep filtration. Finally, it is discharged through a sealed drainage structure. The entire process is carried out in a closed environment, effectively avoiding external contamination. The cleaning system achieves comprehensive rinsing through the rotation of the filter columns using a spiral spray component. At the same time, the elastic reset mechanism drives the filter columns to rotate in the opposite direction at high speed, forming a two-way cleaning effect to thoroughly remove residual impurities. The overall structure adopts a stable support design, and all components work together to ensure filtration efficiency and purity while improving cleaning convenience and equipment operational stability. Attached Figure Description

[0019] Figure 1 This is an isometric view of the filter device assembly according to the first embodiment of this application;

[0020] Figure 2 This is an internal view of the filter device assembly according to the first embodiment of this application;

[0021] Figure 3 This is the first embodiment of the present application. Figure 2 Enlarged view of a partial section of the hollow filter column;

[0022] Figure 4 This is a diagram of the built-in torsion spring retaining groove according to the first embodiment of this application;

[0023] Figure 5 This is a diagram of the liquid spraying cleaning assembly according to the first embodiment of this application;

[0024] Figure 6 These are auxiliary component diagrams for the first and second embodiments of this application;

[0025] Figure 7 This is the second embodiment of the present application. Figure 6 Enlarged view of a partial truncation of the auxiliary component.

[0026] Explanation of the labels in the diagram:

[0027] 1. Filter device assembly; 100. Processing tank; 101. Sealed tank cover; 102. Liquid inlet; 103. Liquid outlet; 104. Drainage chamber; 105. Column; 106. Hollow filter column; 107. First filter plate; 2. Spray cleaning assembly; 200. Arc-shaped vertical rod; 201. Spray nozzle; 3. Rotating assembly; 300. Electro-electric turntable; 301. First auxiliary gear rotating component; 302. Second auxiliary gear rotating component; 303. Built-in torsion spring locking groove; 4. Auxiliary assembly; 400. Internal vertical rod; 401. Threaded external groove. Detailed Implementation

[0028] The two embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0029] First implementation method:

[0030] Figures 1-6 A filtration device for electronic-grade sulfuric acid production is shown, including a filtration device assembly 1, a spray cleaning assembly 2 disposed at the inner end of the filtration device assembly 1, a rotating assembly 3 disposed in the filtration device assembly 1, and an auxiliary assembly 4 disposed inside the rotating assembly 3.

[0031] The filtration device assembly 1 includes a processing tank 100, a sealing tank cover 101 fixedly connected to the upper end of the processing tank 100, a first filter plate 107 fixedly connected to the upper inner end of the processing tank 100, and a plurality of hollow filter columns 106 fixedly connected to the lower inner wall of the processing tank 100.

[0032] The liquid spraying cleaning assembly 2 includes multiple arc-shaped vertical rods 200, which are fixedly connected in a ring at equal intervals to the outside of the lower inner wall of the processing tank 100. One end of each arc-shaped vertical rod 200 near the hollow filter column 106 is fixedly connected to a liquid spraying nozzle 201, which is arranged in a ring-like spiral. The rotating assembly 3 includes an electric turntable 300, which is disposed on the lower inner wall of the processing tank 100.

[0033] The upper end of the electric turntable 300 is provided with a plurality of annularly spaced built-in torsion spring positioning grooves 303, and a second auxiliary gear rotating component 302 is installed at the upper end of the built-in torsion spring positioning grooves 303. A plurality of first auxiliary gear rotating components 301 are installed on the lower inner wall of the processing tank 100.

[0034] The second auxiliary gear rotating component 302 is fixedly connected to the hollow filter column 106 directly above it. Multiple first auxiliary gear rotating components 301 and corresponding second auxiliary gear rotating components 302 are meshed together. Multiple hollow filter columns 106 are arranged in a ring at equal intervals. The hollow filter columns 106 are located directly below the first filter plate 107. An inlet 102 is fixedly connected to the upper left side of the processing tank 100. A drain chamber 104 is fixedly connected to the lower end of the sealed tank cover 101. An outlet 103 is fixedly connected to the end of the drain chamber 104 away from the inlet 102. Multiple columns 105 are fixedly connected to the outer side of the drain chamber 104. Multiple columns 105 are arranged in a ring at equal intervals. Multiple spray nozzles 201 and the outer wall of the hollow filter column 106 cooperate with each other.

[0035] Figures 1-5 The electronic-grade sulfuric acid to be filtered enters the filtration device assembly 1 from the inlet 102 on the upper left side of the processing tank 100. It first flows through the first filter plate 107 above the inner end of the processing tank 100, completing the preliminary filtration. The sulfuric acid after preliminary filtration flows downward and enters multiple hollow filter columns 106 fixed on the lower inner wall of the processing tank 100 to evenly receive the sulfuric acid. It undergoes further fine filtration through the filtration structure of the hollow filter columns 106. The electronic-grade sulfuric acid filtered by the hollow filter columns 106 flows into the drain chamber 104 fixed at the lower end of the sealed tank cover 101. Multiple column 105s arranged in a ring at equal intervals are fixed on the outside of the drain chamber 104 to provide support. Finally, it is discharged from the outlet 103 at the end of the drain chamber 104 away from the inlet 102, completing the entire filtration process. The sealed tank cover 101 ensures the airtightness of the processing tank 100 and avoids external contamination.

[0036] During the filtration process, if the hollow filter column 106 needs to be cleaned, the spray cleaning component 2 is activated. Multiple arc-shaped vertical rods 200, which are fixed in a ring at equal intervals on the outer side of the inner wall of the processing tank 100, are fixed with spray nozzles 201 at one end near the hollow filter column 106. The multiple spray nozzles 201 are arranged in a ring-like spiral shape to spray cleaning liquid onto the outer wall of the hollow filter column 106, which works in conjunction with the outer wall of the hollow filter column 106 to achieve targeted flushing.

[0037] When the electric turntable 300 on the lower inner wall of the processing tank 100 in the rotating assembly 3 is started, the built-in torsion spring locking groove 303 at its upper end will drive the second auxiliary gear rotating component 302 to rotate synchronously with the electric turntable 300. At this time, the built-in torsion spring deforms due to the rotation of the locking groove and stores elastic potential energy. Since the second auxiliary gear rotating component 302 is fixedly connected to the hollow filter column 106 directly above and meshes with the first auxiliary gear rotating component 301 on the lower inner wall of the processing tank 100, the hollow filter column 106 will rotate together with the second auxiliary gear rotating component 302, realizing uniform cleaning or auxiliary filtration of the hollow filter column 106. When the gap between the first auxiliary gear rotating component 301 and the second auxiliary gear rotating component 302 is separated, the torsion spring storing elastic potential energy in the built-in torsion spring locking groove 303 will release energy, driving the second auxiliary gear rotating component 302 to rotate in the opposite direction at high speed. Then, through the gear meshing relationship, the hollow filter column will synchronously reverse, forming a reverse auxiliary effect on the cleaning process and further shaking off residual impurities.

[0038] Second implementation method:

[0039] Figures 6-7 A filtration device for electronic-grade sulfuric acid production is shown. The auxiliary component 4 includes an internal vertical rod 400, which is fixedly connected to the lower inner wall of a hollow filter column 106. The outer side of the internal vertical rod 400 is provided with a threaded external groove 401. The auxiliary component 4 plays a role in filtration or cleaning. The internal vertical rod 400 fixed to the lower inner wall of the hollow filter column 106 has a threaded external groove 401 on its outer side. When the hollow filter column 106 rotates, the threaded external groove 401 guides the sulfuric acid or cleaning liquid inside to form a spiral flow, which enhances the impurity separation effect during filtration or the scouring force during cleaning. It can be used as an optional accessory for processing high-viscosity materials.

[0040] In light of current practical needs, the above-described embodiments adopted in this application are not limited to these. Any changes made within the scope of knowledge possessed by those skilled in the art without departing from the concept of this application still fall within the protection scope of this utility model.

Claims

1. A filtration device for electronic-grade sulfuric acid production, characterized in that: The filter assembly includes a filter device assembly (1), the inner end of which is provided with a liquid spraying cleaning assembly (2), the filter device assembly (1) is provided with a rotating assembly (3), and the rotating assembly (3) is provided with an auxiliary assembly (4). The filter assembly (1) includes a processing tank (100), a sealing tank cover (101) is fixedly connected to the upper end of the processing tank (100), a first filter plate (107) is fixedly connected to the upper part of the inner end of the processing tank (100), and a plurality of hollow filter columns (106) are fixedly connected to the lower inner wall of the processing tank (100). The spray cleaning assembly (2) includes multiple arc-shaped vertical rods (200), which are fixedly connected in a ring at equal intervals to the outside of the lower inner wall of the processing tank (100). One end of each arc-shaped vertical rod (200) near the hollow filter column (106) is fixedly connected to a spray nozzle (201), which is arranged in a ring-like spiral. The rotating assembly (3) includes an electric turntable (300), which is disposed on the lower inner wall of the processing tank (100). The upper end of the electric turntable (300) is provided with a plurality of annularly spaced built-in torsion spring positioning grooves (303), and the upper end of the built-in torsion spring positioning grooves (303) is equipped with a second auxiliary gear rotating component (302). The lower inner wall of the processing tank (100) is equipped with a plurality of first auxiliary gear rotating components (301).

2. The filtration device for electronic-grade sulfuric acid production according to claim 1, characterized in that: The second auxiliary gear rotating component (302) is fixedly connected to the hollow filter column (106) directly above, and multiple first auxiliary gear rotating components (301) are meshed with the corresponding second auxiliary gear rotating components (302).

3. The filtration device for electronic-grade sulfuric acid production according to claim 1, characterized in that: The hollow filter columns (106) are arranged in a ring at equal intervals, and the hollow filter columns (106) are located directly below the first filter plate (107).

4. A filtration device for electronic-grade sulfuric acid production according to claim 1, characterized in that: The upper left side of the processing tank (100) is fixedly connected to a liquid inlet (102), the lower end of the sealing tank cover (101) is fixedly connected to a liquid drain chamber (104), and the end of the liquid drain chamber (104) away from the liquid inlet (102) is fixedly connected to a liquid outlet (103).

5. A filtration device for electronic-grade sulfuric acid production according to claim 4, characterized in that: The outer side of the drainage chamber (104) is fixedly connected to multiple columns (105), which are arranged in a ring at equal intervals.

6. A filtration device for electronic-grade sulfuric acid production according to claim 1, characterized in that: The outer walls of the multiple spray nozzles (201) and the hollow filter column (106) cooperate with each other, and the auxiliary component (4) includes an internal vertical rod (400).

7. A filtration device for electronic-grade sulfuric acid production according to claim 6, characterized in that: The internal vertical rod (400) is fixedly connected to the lower inner wall of the hollow filter column (106), and the outer side of the internal vertical rod (400) is provided with a threaded external groove (401).

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