A vapor deposition apparatus

Abstract

The utility model relates to a gas phase deposition equipment device technical field especially gas phase deposition equipment device, including collection seat, the back side of collection seat base surface is provided with adjusting assembly, the adjusting assembly includes first support base, the right side of first support base is provided with second support base, rotationally arranged screw rod between first support base and second support base, through setting adjusting assembly on gas phase deposition equipment device, running drive motor can drive screw rod to rotate, through moving seat can adjust the left and right positions of shower head, running adjusting motor can drive screw rod to rotate, through adjusting block rotatable rod can adjust the angle of shower head, through electric telescopic link can adjust the front and back positions of shower head, thereby when carrying out showering, can adjust shower head to the appropriate position according to need, make it more accurate to carry out showering, more convenient when using, whole device simple structure, convenient operation and practicality are higher.

Description

Technical Field

[0001] This utility model relates to the technical field of vapor deposition equipment, specifically a vapor deposition equipment. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is a specialized device for depositing thin film materials on heated substrate surfaces. Its working principle is primarily based on chemical reactions in the gas phase to deposit solid films. This equipment offers advantages such as high purity, good uniformity, and low cost, thus finding wide application in various fields, including composite material preparation, microelectronics processes, semiconductor optoelectronics, solar energy utilization, fiber optic communication, superconductivity, and protective coating preparation. In CVD equipment, a spray system is used to uniformly distribute the reactive gases within the reaction zone to promote uniform film deposition. This system is crucial in semiconductor manufacturing and other materials science fields.

[0003] The spray devices in existing vapor deposition equipment have a relatively simple structure, making it inconvenient to adjust the position of the spray heads during use, thus preventing accurate spraying. Utility Model Content

[0004] The purpose of this invention is to provide a vapor deposition apparatus to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A vapor deposition apparatus includes a collection base, wherein an adjustment component is disposed on the rear side of the base surface of the collection base;

[0007] The adjustment assembly includes a first support base, a second support base on the right side of the first support base, a threaded rod rotatably disposed between the first and second support bases, limit rods symmetrically disposed between the first and second support bases and on the front and rear sides of the threaded rod, a movable seat disposed between the limit rods and the threaded rod, a drive motor disposed on the left side of the first support base, a support rod disposed on the base surface of the movable seat, a connecting plate disposed at the upper end of the support rod, an adjustment motor disposed on the front side of the bottom of the connecting plate, a lead screw disposed at the drive end of the adjustment motor, an adjustment block disposed threaded on the outer wall of the lead screw, a rotating seat rotatably disposed on the front side of the support rod, an electric telescopic rod disposed on the front side of the rotating seat, a rotating rod rotatably disposed between the rear side of the base surface of the electric telescopic rod and the adjustment block, a spray pipe disposed at the drive end of the electric telescopic rod, and a spray head disposed at the bottom of the spray pipe.

[0008] As a preferred embodiment of this utility model, a collection groove is provided on the front side of the base surface of the collection seat, a receiving platform is provided in the middle of the collection groove, and collection through holes are symmetrically provided inside the collection groove and on the left and right sides of the receiving platform. A switch valve is provided on the left side of the collection seat.

[0009] With the above technical solution, when the spray head needs to be cleaned, the wastewater after cleaning flows into the inside of the mobile phone holder through the collection through hole in the collection tank, thus facilitating the collection of wastewater.

[0010] As a preferred embodiment of this utility model, the first support base is located on the left rear side of the base surface of the collecting seat, the second support base is located on the right rear side of the base surface of the collecting seat, and the drive end of the drive motor is connected to the left end of the threaded rod through a coupling.

[0011] As a preferred embodiment of this utility model, limit blocks are symmetrically arranged on the front and rear sides of the bottom of the movable seat, and a threaded block is arranged in the middle of the bottom of the movable seat. The threaded block is threadedly connected to the threaded rod, and the threaded block has a threaded groove corresponding to the threaded rod inside. The limit block is slidably connected to the limit rod, and the limit block has a sliding groove corresponding to the limit rod inside.

[0012] Through the above technical solution, under the limitation of the limiting block and the limiting rod, and through the threaded block, the threaded rod can move with the moving seat when rotating.

[0013] As a preferred embodiment of this utility model, a connecting pipe is provided at the right end of the spray pipe, the rotating seat is arranged in a "U" shape, and the rotating seat is rotatably connected to the support rod through a rotating shaft.

[0014] As a preferred embodiment of this utility model, a limit ring is provided at the lower end of the lead screw, and both the upper and lower ends of the rotating rod are rotatably connected to the adjusting block and the electric telescopic rod respectively through rotating blocks.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] In this invention, by setting an adjustment component on the vapor deposition equipment, the drive motor can drive the threaded rod to rotate, the movable seat can adjust the left and right position of the spray head, the adjustment motor can drive the lead screw to rotate, the adjustment block can rotate the rod to adjust the angle of the spray head, and the electric telescopic rod can adjust the front and rear position of the spray head. Thus, during spraying, the spray head can be adjusted to a suitable position as needed, making spraying more precise and convenient to use. The overall device has a simple structure, is easy to operate, and has higher practicality. Attached Figure Description

[0017] Figure 1This is the overall front view of the present utility model;

[0018] Figure 2 This is a structural diagram of the upper part of the adjustment component of this utility model;

[0019] Figure 3 This is an enlarged view of structure A of this utility model;

[0020] Figure 4 This is a structural diagram of the lower part of the adjustment component of this utility model.

[0021] In the diagram: 1. Collection seat; 2. Adjustment assembly; 201. First support seat; 202. Second support seat; 203. Threaded rod; 204. Limiting rod; 205. Moving seat; 206. Drive motor; 207. Support rod; 208. Connecting plate; 209. Adjustment motor; 210. Lead screw; 211. Adjusting block; 212. Rotating seat; 213. Electric telescopic rod; 214. Rotating rod; 215. Spray pipe; 216. Spray head; 101. Collection trough; 102. Receiving platform; 103. Collection through hole; 104. Switch valve; 217. Limiting block; 218. Threaded block. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0023] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, and several embodiments of the utility model will be provided. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and complete.

[0024] For examples, please refer to Figure 1-4 This utility model provides a technical solution:

[0025] A vapor deposition apparatus includes a collection base 1, and an adjustment component 2 is provided on the rear side of the base surface of the collection base 1.

[0026] In this embodiment, the adjusting component 2 includes a first support base 201, a second support base 202 is disposed on the right side of the first support base 201, a threaded rod 203 is rotatably disposed between the first support base 201 and the second support base 202, limit rods 204 are symmetrically disposed between the first support base 201 and the second support base 202 and on the front and rear sides of the threaded rod 203, a movable seat 205 is disposed between the limit rods 204 and the threaded rod 203, a drive motor 206 is disposed on the left side of the first support base 201, and a support rod 207 is disposed on the base surface of the movable seat 205. A connecting plate 208 is provided at the upper end of the support rod 207. An adjusting motor 209 is provided at the front side of the bottom of the connecting plate 208. A lead screw 210 is provided at the driving end of the adjusting motor 209. An adjusting block 211 is provided on the outer thread of the lead screw 210. A rotating seat 212 is rotatably provided on the front of the support rod 207. An electric telescopic rod 213 is provided on the front of the rotating seat 212. A rotating rod 214 is rotatably provided between the rear side of the base surface of the electric telescopic rod 213 and the adjusting block 211. A spray pipe 215 is provided at the driving end of the electric telescopic rod 213. A spray head 216 is provided at the bottom of the spray pipe 215.

[0027] The collection base 1 has a collection groove 101 on its front side, a receiving platform 102 in the middle, and collection through holes 103 symmetrically arranged inside the collection groove 101 and on the left and right sides of the receiving platform 102. A switch valve 104 is located on the left side of the collection base 1. When the spray head 216 needs cleaning, the wastewater flows into the inside of the mobile phone holder 1 through the collection through holes 103 in the collection groove 101, facilitating wastewater collection. A first support 201 is located on the left rear side of the collection base 1, and a second support 202 is located on the right rear side of the collection base 1. The drive end of the drive motor 206 is connected to the left end of the threaded rod 203 via a coupling. Limit blocks 217 are symmetrically arranged on the front and rear sides of the bottom of the movable base 205. A threaded block 218 is provided in the middle, which is threadedly connected to the threaded rod 203. The threaded block 218 has a threaded groove corresponding to the threaded rod 203. A limiting block 217 is slidably connected to the limiting rod 204. The limiting block 217 has a sliding groove corresponding to the limiting rod 204. Under the limiting of the limiting block 217 and the limiting rod 204, and through the threaded block 218, the threaded rod 203 can move the movable seat 205 when rotating. A connecting pipe is provided at the right end of the spray pipe 215. The rotating seat 212 is U-shaped and is rotatably connected to the support rod 207 through a rotating shaft. A limiting ring is provided at the lower end of the lead screw 210. The upper and lower ends of the rotating rod 214 are rotatably connected to the adjusting block 211 and the electric telescopic rod 213 respectively through rotating blocks.

[0028] The working process of this utility model is as follows: When the position of the spray head 216 needs to be adjusted using the vapor deposition equipment designed in this scheme, the drive motor 206 is activated. During operation, the drive motor 206 drives the threaded rod 203 to rotate. Since the movable seat 205 is threadedly connected to the threaded rod 203 via the threaded block 218, and under the limitation of the limiting block 217 and the limiting rod 204, the threaded rod 203 rotates, causing the threaded block 218 to move, thereby driving the movable seat 205 to move left and right. The left and right positions of the spray head 216 can be adjusted via the movable seat 205. Then, the adjustment motor 209 is activated. During operation, the adjustment motor 209 drives the lead screw 210 to rotate. Since the adjustment block 211 is threadedly connected to the lead screw 210, the lead screw... When 210 rotates, it drives the adjusting block 211 to move. Since the rotating rod 214 is rotatably connected to the adjusting block 211 of the electric telescopic rod 213, and the rear end of the electric telescopic rod 213 is rotatably connected to the rotating seat 212, the adjusting block 211 drives the rotating rod 214 to rotate when it moves. The rotating rod 214 drives the electric telescopic rod 213 to rotate, thereby adjusting the angle of the spray head 216. Running the electric telescopic rod 213 can adjust the front and rear position of the spray head 216. When in use, the spray head 216 can be adjusted to a suitable position as needed. After the spray head 216 has been used for a period of time, it needs to be cleaned. During cleaning, the wastewater after cleaning is collected into the collection seat 1 through the collection hole 103 for easy wastewater recycling.

[0029] The drive motor 206, adjusting motor 209, and electric telescopic rod 213 used in this utility model are all existing known electrical devices, and all can be purchased and used directly on the market. Their structure, circuit, and control principle are all existing known technologies. Therefore, the structure, circuit, and control principle of the drive motor 206, adjusting motor 209, and electric telescopic rod 213 will not be described in detail here.

[0030] All standard parts used in this application can be purchased from the market. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art and are also general components, which are common knowledge in this field.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vapor deposition apparatus, comprising a collection base (1), characterized in that: An adjustment component (2) is provided on the rear side of the base surface of the collection seat (1); The adjusting assembly (2) includes a first support base (201), a second support base (202) is provided on the right side of the first support base (201), a threaded rod (203) is rotatably provided between the first support base (201) and the second support base (202), limit rods (204) are symmetrically provided between the first support base (201) and the second support base (202) and on the front and rear sides of the threaded rod (203), a movable seat (205) is provided between the limit rod (204) and the threaded rod (203), a drive motor (206) is provided on the left side of the first support base (201), and a support rod (207) is provided on the base surface of the movable seat (205). A connecting plate (208) is provided at the upper end. An adjusting motor (209) is provided on the front side of the bottom of the connecting plate (208). A lead screw (210) is provided at the driving end of the adjusting motor (209). An adjusting block (211) is provided on the outer wall thread of the lead screw (210). A rotating seat (212) is rotatably provided on the front side of the support rod (207). An electric telescopic rod (213) is provided on the front side of the rotating seat (212). A rotating rod (214) is rotatably provided between the rear side of the base surface of the electric telescopic rod (213) and the adjusting block (211). A spray pipe (215) is provided at the driving end of the electric telescopic rod (213). A spray head (216) is provided at the bottom of the spray pipe (215).

2. The vapor deposition apparatus according to claim 1, characterized in that: A collection groove (101) is provided on the front side of the base surface of the collection seat (1). A receiving platform (102) is provided in the middle of the collection groove (101). Collection through holes (103) are symmetrically provided inside the collection groove (101) and on the left and right sides of the receiving platform (102). A switch valve (104) is provided on the left side of the collection seat (1).

3. The vapor deposition apparatus according to claim 1, characterized in that: The first support (201) is located on the left rear side of the base surface of the collecting seat (1), and the second support (202) is located on the right rear side of the base surface of the collecting seat (1). The drive end of the drive motor (206) is connected to the left end of the threaded rod (203) through a coupling.

4. The vapor deposition apparatus according to claim 1, characterized in that: Limiting blocks (217) are symmetrically arranged on the front and rear sides of the bottom of the movable seat (205). A threaded block (218) is provided in the middle of the bottom of the movable seat (205). The threaded block (218) is threadedly connected to the threaded rod (203), and the inside of the threaded block (218) is provided with a threaded groove corresponding to the threaded rod (203). The limiting block (217) is slidably connected to the limiting rod (204), and the inside of the limiting block (217) is provided with a sliding groove corresponding to the limiting rod (204).

5. The vapor deposition apparatus according to claim 1, characterized in that: The right end of the spray pipe (215) is provided with a connecting pipe, the rotating seat (212) is arranged in a "U" shape, and the rotating seat (212) is rotatably connected to the support rod (207) through a rotating shaft.

6. The vapor deposition apparatus according to claim 1, characterized in that: The lower end of the lead screw (210) is provided with a limit ring, and the upper and lower ends of the rotating rod (214) are rotatably connected to the adjusting block (211) and the electric telescopic rod (213) respectively through rotating blocks.

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