A tailing pipe of a topcon cell diffusion process and a diffusion furnace

Abstract

The utility model discloses a tail exhaust pipe of Topcon battery diffusion process, the tail exhaust pipe is silicon carbide ceramic pipe, the tail exhaust pipe has at least one group of main exhaust hole and at least one group of auxiliary hole, and one group of main exhaust hole is formed by a plurality of main exhaust holes along the axial interval distribution of tail exhaust pipe, and one group of auxiliary hole is formed by a plurality of auxiliary holes along the axial spiral arrangement of tail exhaust pipe, and the aperture of main exhaust hole is greater than the aperture of auxiliary hole. The utility model discloses a diffusion furnace. The tail exhaust pipe of the utility model is silicon carbide ceramic pipe, and compared with quartz tail exhaust pipe, the tail exhaust pipe of silicon carbide ceramic is stronger in temperature resistance, and better in thermal shock resistance, and is continuously operated for 720 hours under 1200 DEG C. environment, and the scale amount is 1 / 15 of quartz tail exhaust pipe. Meanwhile, the tail exhaust pipe of the utility model has at least one group of main exhaust hole and at least one group of auxiliary hole, forms the surrounding airflow through auxiliary hole, discharges airflow through main exhaust hole, and reduces the possibility of forming airflow vortex in the furnace due to excessive local negative pressure.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic module manufacturing equipment technology, specifically to a tailpipe for Topcon cell diffusion process. Background Technology

[0002] TOPCon, short for Tunnel Oxide Passivated Contact, is a high-efficiency N-type silicon solar cell technology based on the selective carrier principle. Its principle involves fabricating an ultrathin layer of silicon oxide and a thin layer of doped silicon on the back of the cell to form a passivated contact structure. This effectively reduces surface recombination and metal-to-metal recombination, increasing the cell's open-circuit voltage and short-circuit current, thereby improving the cell's conversion efficiency. Topcon features high efficiency, low degradation rate, low temperature coefficient, and high bifaciality.

[0003] A crucial step in the Topcon cell manufacturing process is the diffusion technique used to dope the silicon wafer surface, controlling the moving diffusion depth to form the cell's PN junction. The diffusion furnace is a vital device for forming the PN junction in Topcon cells. During the PN junction formation process within the diffusion furnace, reactive gases are generated, which are then discharged through a tailpipe.

[0004] Currently, Topcon batteries face the following problems during the high-temperature diffusion process: 1. Poor airflow stability: The single-hole straight-outlet tailpipe causes excessive local negative pressure, creating airflow vortices within the furnace and resulting in poor temperature field uniformity, thus affecting battery efficiency; 2. Severe scaling and clogging: Quartz tailpipes are prone to crystallization at high temperatures (>1100℃), and clogging of the pores reduces the pumping efficiency by ≥30%. Frequent shutdowns for cleaning are required, with each maintenance session taking ≥1 hour. Utility Model Content

[0005] The purpose of this invention is to provide a tailpipe for the diffusion process of Topcon batteries, so as to solve the problems in the prior art where poor airflow stability and severe scaling and blockage of the tailpipe are easily caused by excessive local negative pressure in the tailpipe during the high-temperature diffusion process of Topcon batteries in the diffusion furnace.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a tailpipe for Topcon battery diffusion process, wherein the tailpipe is a silicon carbide ceramic tube, the tailpipe has at least one set of main holes and at least one set of auxiliary holes, the set of main holes consists of multiple main holes spaced apart along the axial direction of the tailpipe, and the set of auxiliary holes consists of multiple auxiliary holes spirally arranged along the axial direction of the tailpipe, wherein the diameter of the main holes is larger than the diameter of the auxiliary holes.

[0007] In some embodiments, the tailpipe includes a base and an exhaust pipe connected as one piece, and the exhaust pipe is provided with a main exhaust hole and the auxiliary hole.

[0008] In some embodiments, the outer diameter of the exhaust pipe is 150 mm, and the wall thickness of the exhaust pipe is 8 mm ± 0.5 mm.

[0009] In some embodiments, the diameter of the main row of holes is 8mm ± 0.2mm.

[0010] In some embodiments, the spacing between two adjacent main holes in a set of main holes is 50mm to 80mm.

[0011] In some embodiments, the maximum diameter of the auxiliary hole is 3 mm ± 0.1 mm.

[0012] In some embodiments, the auxiliary hole is a tapered hole, and the minimum diameter of the auxiliary hole is 2mm ± 0.1mm.

[0013] In some implementations, the pitch of a set of auxiliary holes is 30 mm to 50 mm.

[0014] In some embodiments, the outer surface of the tailpipe has a nano-alumina coating with a thickness of 45 μm to 55 μm.

[0015] A diffusion furnace having a tailpipe for the aforementioned Topcon battery diffusion process.

[0016] Due to the application of the above technical solution, the beneficial effects of this utility model compared with the prior art are as follows:

[0017] The tailpipe of this invention is a silicon carbide ceramic tube. Compared with the quartz tailpipe, the silicon carbide ceramic tailpipe has stronger temperature resistance and better thermal shock resistance. After continuous operation at 1200℃ for 720 hours, the amount of scale is only 1 / 15 of that of the quartz tailpipe. At the same time, the tailpipe of this invention has at least one set of main discharge holes and at least one set of auxiliary holes. The auxiliary holes form a surrounding airflow, and the main discharge holes discharge the airflow, reducing the possibility of airflow vortexes forming in the furnace due to excessive local negative pressure. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the tailpipe structure of the Topcon battery diffusion process in one embodiment of the present invention. Detailed Implementation

[0020] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of the utility model described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0023] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0024] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0025] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] Please see Figure 1 This utility model provides a tailpipe for Topcon battery diffusion process. The tailpipe is a silicon carbide ceramic tube. The tailpipe has at least one set of main holes and at least one set of auxiliary holes. One set of main holes consists of multiple main holes 3 distributed at intervals along the axial direction of the tailpipe. One set of auxiliary holes consists of multiple auxiliary holes 4 spirally arranged along the axial direction of the tailpipe. The diameter of the main holes 3 is larger than the diameter of the auxiliary holes 4.

[0027] The tailpipe of this utility model is a silicon carbide ceramic pipe. Compared with the quartz tailpipe, the silicon carbide ceramic tailpipe has stronger temperature resistance and better thermal shock resistance. When running continuously for 720 hours at 1200℃, the amount of scale is 1 / 15 of that of the quartz tailpipe.

[0028] Meanwhile, the tailpipe of this utility model has at least one set of main outlet holes and at least one set of auxiliary holes. The auxiliary holes 4 form a surrounding airflow, and the main outlet holes discharge the airflow, thereby reducing the possibility of airflow vortexes forming in the furnace due to excessive local negative pressure.

[0029] In some embodiments, the tailpipe includes a base 1 and an exhaust pipe 2 connected as one piece. The exhaust pipe 2 is provided with a main exhaust hole 3 and an auxiliary hole 4, and the main exhaust hole 3 and the auxiliary hole 4 are located at the position of the exhaust pipe 2 away from the base 1.

[0030] In some embodiments, the outer diameter of the exhaust pipe 2 is 150 mm, and the wall thickness of the exhaust pipe 2 is 8 mm ± 0.5 mm. Preferably, the wall thickness of the exhaust pipe 2 is 8 mm.

[0031] In some embodiments, the diameter of the main hole 3 is 8mm ± 0.2mm.

[0032] In some embodiments, the distance between two adjacent main holes 3 in a set of main holes is 50mm to 80mm. Preferably, the distance between two adjacent main holes 3 in a set of main holes is 60mm.

[0033] In some embodiments, the maximum diameter of the auxiliary hole 4 is 3 mm ± 0.1 mm.

[0034] In a preferred embodiment, the auxiliary hole 4 is a tapered hole, which can further improve the pumping efficiency and form a surrounding airflow. The minimum diameter of the auxiliary hole 4 is 2mm ± 0.1mm.

[0035] In some embodiments, the pitch of a set of auxiliary holes is 30 mm to 50 mm. Preferably, the pitch of a set of auxiliary holes is 40 mm.

[0036] In some embodiments, the outer surface of the tailpipe has a nano-alumina coating.

[0037] In some embodiments, the thickness of the nano-alumina coating is 45 μm to 55 μm.

[0038] In some embodiments, the surface of the tailpipe undergoes micro-arc oxidation treatment, with a current density of 3 A / dm² during the micro-arc oxidation treatment. 2 The oxidation time is 20 min, and the electrolyte formulation is phosphate silicate.

[0039] This invention also provides a diffusion furnace for high-temperature diffusion of Topcon batteries, the diffusion furnace including the tailpipe of the above-mentioned Topcon battery diffusion process.

[0040] Finally, it should be noted that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A tailpipe for Topcon battery diffusion process, characterized in that, The tailpipe is a silicon carbide ceramic tube. The tailpipe has at least one set of main holes and at least one set of auxiliary holes. One set of main holes consists of multiple main holes (3) spaced apart along the axial direction of the tailpipe. One set of auxiliary holes consists of multiple auxiliary holes (4) spirally arranged along the axial direction of the tailpipe. The diameter of the main holes (3) is larger than the diameter of the auxiliary holes (4).

2. The tailpipe of the Topcon battery diffusion process as described in claim 1, characterized in that, The tailpipe includes a base (1) and an exhaust pipe (2) connected as one piece, and the exhaust pipe (2) is provided with a main exhaust hole (3) and an auxiliary hole (4).

3. The tailpipe of the Topcon battery diffusion process as described in claim 2, characterized in that, The outer diameter of the exhaust pipe (2) is 150 mm, and the wall thickness of the exhaust pipe (2) is 8 mm ± 0.5 mm.

4. The tailpipe of the Topcon battery diffusion process as described in claim 1, characterized in that, The diameter of the main hole (3) is 8mm ± 0.2mm.

5. The tailpipe of the Topcon battery diffusion process as described in claim 1, characterized in that, The spacing between two adjacent main holes (3) in a set of main holes is 50mm~80mm.

6. The tailpipe of the Topcon battery diffusion process as described in claim 1, characterized in that, The maximum diameter of the auxiliary hole (4) is 3mm ± 0.1mm.

7. The tailpipe of the Topcon battery diffusion process as described in claim 6, characterized in that, The auxiliary hole (4) is a tapered hole, and the minimum diameter of the auxiliary hole (4) is 2mm ± 0.1mm.

8. The tailpipe of the Topcon battery diffusion process as described in claim 1, characterized in that, The pitch of a set of auxiliary holes is 30mm~50mm.

9. The tailpipe of the Topcon battery diffusion process as described in any one of claims 1 to 7, characterized in that, The outer surface of the tailpipe has a nano-alumina coating with a thickness of 45μm~55μm.

10. A diffusion furnace, characterized in that, Tail drain pipe having the Topcon battery diffusion process as described in any one of claims 1 to 9.

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