Plug structure of a plasma device

Abstract

The utility model discloses a plug structure of plasma equipment, it includes the male head on electrode holder and is located in vacuum process equipment and is inserted with female head of male head, and electrode holder can be installed in the movable vacuum process equipment: male head is equipped with the sheet mechanism, and female head has a plug cavity, and male head is inserted with female head, and the outer wall of sheet mechanism and the inner wall elastic stable connection of plug cavity. Through the sheet mechanism along the axial direction provides elastic contact pressure, ensures that male head and the female head of different specifications can keep stable contact when plugging, and, because the sheet mechanism lets male head and female head always keep the maximum effective contact area, significantly reduces the contact resistance, avoids the problem such as local overheating, arc ablation caused by current concentration.

Description

Technical Field

[0001] This utility model relates to the field of vacuum plasma equipment, and in particular to a plug structure for a plasma equipment. Background Technology

[0002] A plasma cleaner (also known as a plasma surface treatment machine or plasma cleaning machine) is an advanced device that uses plasma technology to clean and modify the surface of materials.

[0003] Depending on their size and application, plasma cleaners can be broadly categorized into large and small types. Small plasma cleaners are primarily used for cleaning precision electronic components and micro-parts, such as printed circuit boards (PCBs) and micro-mechanical parts; while large plasma cleaners mainly serve the automotive industry, processing larger automotive parts. Due to the larger reaction chamber size of large equipment, a moving electrode mechanism is typically required to achieve uniform plasma treatment. The current mainstream design uses a movable metal carrier (electrode device) as the large electrode. When the power is turned on, the electrode plates on the carrier ionize the introduced process gas to form plasma.

[0004] However, existing metal carrier power connection systems have significant technical drawbacks. Traditional power connection methods use a male connector and electrode holder plug-in structure. Due to limitations in structural design, the contact area between the two is insufficient, which can easily lead to problems such as excessive power deviation and localized overheating, and consequently, electrode ablation failure. Utility Model Content

[0005] In view of this, the present invention addresses the deficiencies of the existing technology, and its main objective is to provide a plug structure for a plasma device that solves the aforementioned problems.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a plug structure for a plasma device, comprising a male connector on an electrode holder and a female connector disposed within a vacuum process device and inserted into the male connector, wherein the electrode holder is movably installed within the vacuum process device.

[0007] The male head is equipped with a spring mechanism, and the female head has a insertion cavity. When the male head and the female head are inserted together, the outer wall of the spring mechanism and the inner wall of the insertion cavity are elastically and stably connected.

[0008] Furthermore, the electrode holder is composed of multiple strip connecting plates spliced ​​together, and electrode plates are installed on the strip connecting plates, with the male end installed on at least one strip connecting plate.

[0009] Furthermore, the male connector is connected to a conductive copper plate, and the strip connecting plate covers the conductive copper plate.

[0010] Furthermore, the male end is sleeve-shaped, and the front end of the sleeve is open. The spring mechanism includes multiple radial cuts axially opened on the side wall of the male end, so that multiple petal-shaped elastic contact parts are formed on the male end.

[0011] Furthermore, the spring mechanism also includes multiple sets of annular grooves axially opened on the inner wall of the male end, with retaining rings slidably connected within the annular grooves.

[0012] Furthermore, the front ends of the multiple flap-shaped elastic contact parts move closer to the male head axis.

[0013] Furthermore, the surface of the male insertion part has an indentation and forms an overlapping platform; when the female plug is fitted onto the male plug, the end face of the female plug abuts against the end face of the overlapping platform.

[0014] Furthermore, the strip connecting plate is equipped with an insulating sleeve for the male connector.

[0015] Furthermore, the strip connecting plate that houses the conductive copper plate includes a concave plate and a cover plate covering the top of the concave plate. The conductive copper plate is placed inside the concave plate, and the male connector passes through the cover plate and connects to the conductive copper plate.

[0016] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution, the spring mechanism provides elastic contact pressure along the axial direction, ensuring that the male connector can maintain stable contact when plugged into female connectors of different specifications. At the same time, because the spring mechanism allows the male connector and female connector to always maintain the maximum effective contact area, the contact resistance is significantly reduced, avoiding problems such as local overheating and arc erosion caused by current concentration.

[0017] To more clearly illustrate the structural features and effects of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 This is a first-view perspective perspective view of Embodiment 1 of this utility model.

[0019] Figure 2 This is a second-view perspective perspective view of Embodiment 1 of this utility model.

[0020] Figure 3 This is a diagram illustrating the spring mechanism of Embodiment 1 of this utility model.

[0021] Figure 4 This is the insulating sleeve of Embodiment 1 of this utility model.

[0022] Explanation of reference numerals in the attached diagram:

[0023] Electrode holder 10, strip connecting plate 11, concave plate 111, cover plate 112, electrode plate 12;

[0024] Male head 20, inner notch 201, overlapping platform 202;

[0025] Female head 30, insertion cavity 31;

[0026] 40 spring mechanism, 41 radial cut, 42 flap elastic contact part, 43 annular groove, 44 retaining ring;

[0027] 50mm conductive copper plate;

[0028] Insulating sleeve 60. Detailed Implementation

[0029] Please refer to Figure 1-4 As shown, it illustrates the specific structure of a preferred first embodiment of the present invention, which is a plug structure for a plasma device, including a male connector 20 on an electrode holder 10 and a female connector 30 disposed within a vacuum process device and inserted into the male connector. The electrode holder 10 is movably installed within the vacuum process device.

[0030] The male connector 20 is equipped with a spring contact mechanism 40, and the female connector 30 has a insertion cavity 31. When the male connector 20 and the female connector 30 are inserted, the outer wall of the spring contact mechanism 40 is elastically and firmly connected to the inner wall of the insertion cavity 31. The spring contact mechanism 40 provides elastic contact pressure along the axial direction, ensuring that the male connector 20 can maintain stable contact with female connectors 30 of different specifications when inserted. At the same time, because the spring contact mechanism 40 keeps the male connector 20 and the female connector 30 at the maximum effective contact area, it significantly reduces contact resistance and avoids problems such as local overheating and arc erosion caused by current concentration.

[0031] It should be noted that because the spring mechanism 40 is elastic, it can absorb the mechanical vibration during equipment operation, reduce the risk of loosening of the plug-in parts, and improve the reliability of long-term use.

[0032] In addition, the female electrode head is installed inside the cavity and connected to the vacuum plasma power supply. After the male electrode head is inserted into the female electrode head, a stable connection is formed, and the electrode plate can discharge stably, creating a stable plasma environment inside the cavity.

[0033] The electrode holder 10 is assembled from multiple strip connecting plates 11, and electrode plates 12 are mounted on the strip connecting plates 11. The male head 20 is mounted on at least one strip connecting plate 11.

[0034] For example, the male connector 20 is connected to a conductive copper plate 50, and the strip connecting plate 11 covers the conductive copper plate 50. Using the conductive copper plate 50 to replace the wire harness avoids the problem of wire harness failure due to high temperature. At the same time, the conductive copper plate 50, as a current transmission medium, not only improves the current carrying capacity, but also effectively reduces resistance heat loss, avoiding electrical failures caused by high temperature.

[0035] It should be noted that the copper plate 40 is directly embedded inside the strip connecting plate 11 and is connected to the male connector 20 by mechanical fixing or welding to ensure maximum contact area and reduce contact resistance; and the copper plate 40 is long and strip-shaped, with a large heat dissipation area that can effectively reduce the operating temperature and extend the service life of the male connector 20.

[0036] For example, the male connector 20 is sleeve-shaped, and the front end of the sleeve is open. The spring mechanism 40 includes a plurality of radial cuts 41 axially opened on the sidewall of the male connector 20, so that a plurality of petal-shaped elastic contact portions 42 are formed on the male connector 20. The plurality of radial cuts 41 axially opened on the sidewall of the male connector 20 divide the male connector 20 into a plurality of independent petal-shaped elastic contact portions 42. At the same time, due to the separation of the radial cuts 41, each petal-shaped elastic contact portion 42 has an independent elastic deformation capability, and can adaptively adjust the contact pressure during insertion.

[0037] For example, the spring mechanism 40 also includes multiple sets of annular grooves 43 axially formed on the inner wall of the male connector 20, and a retaining ring 44 is slidably connected in the annular grooves 43. When the male connector 20 is inserted into the female connector 30, under the pressure, the retaining ring 44 can automatically adjust its position according to the change of contact pressure, and form a multi-level pressure adjustment with the flap-type elastic contact part 42 to improve the stability of the male connector 20 and the female connector 30 after insertion.

[0038] For example, the front ends of the plurality of flap-shaped elastic contacts 42 are brought closer to the axis of the male connector 20. Because the flap-shaped elastic contacts 42 are brought closer to the axis of the male connector 20, the front ends of the flap-shaped elastic contacts 42 are more easily inserted into the female connector 30.

[0039] For example, the surface of the insertion portion of the male connector 20 has an indentation 201, forming an overlap platform 202; when the female connector 30 is fitted onto the male connector 20, the end face of the female connector 30 abuts against the end face of the overlap platform 202. The presence of the overlap platform 202 increases the tightness between the two after the female connector 30 is fitted onto the male connector 20.

[0040] For example, the strip connecting plate 11 is provided with an insulating sleeve 60 for attaching the male connector 20. The insulating sleeve 60 can increase the safety performance of the male connector 20 to avoid accidents.

[0041] For example, the strip connecting plate 11 that houses the conductive copper plate 50 includes a concave plate 111 and a cover plate 112 covering the top of the concave plate 111. The conductive copper plate 50 is placed inside the concave plate 111, and the male connector 20 passes through the cover plate 112 and connects to the conductive copper plate 50. The detachable design of the cover plate 112 allows operators to maintain and replace the conductive copper plate 50 as needed.

[0042] The above description is merely a preferred embodiment of the present utility model and does not constitute any limitation on the technical scope of the present utility model. Therefore, any minor modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A plug structure for a plasma device, comprising a male connector (20) on an electrode holder (10) and a female connector (30) disposed within a vacuum process device and interlocked with the male connector, wherein the electrode holder (10) is movably installed within the vacuum process device, characterized in that: The male head (20) is provided with a spring mechanism (40), and the female head (30) has a insertion cavity (31). When the male head (20) and the female head (30) are inserted into each other, the outer wall of the spring mechanism (40) is elastically and stably connected to the inner wall of the insertion cavity (31).

2. The plug structure of a plasma device according to claim 1, characterized in that: The electrode holder (10) is assembled from multiple strip connecting plates (11), and an electrode plate (12) is installed on the strip connecting plate (11). The male head (20) is installed on at least one strip connecting plate (11).

3. The plug structure of a plasma device according to claim 1 or 2, characterized in that: The male connector (20) is connected to a conductive copper plate (50), and the strip connecting plate (11) covers the conductive copper plate (50).

4. The plug structure of a plasma device according to claim 1, characterized in that: The male head (20) is sleeve-shaped, and the front end of the sleeve is open. The spring mechanism (40) includes multiple radial cuts (41) axially opened on the side wall of the male head (20), so that multiple petal-shaped elastic contact parts (42) are formed on the male head (20).

5. The plug structure of a plasma device according to claim 4, characterized in that: The spring mechanism (40) further includes multiple sets of annular grooves (43) axially opened on the inner wall of the male head (20), and a retaining ring (44) is slidably connected in the annular grooves (43).

6. The plug structure of a plasma device according to claim 4, characterized in that: The front ends of the plurality of said petal-shaped elastic contact portions (42) approach the axis of the male head (20).

7. The plug structure of a plasma device according to claim 4, characterized in that: The surface of the male head (20) insertion part is provided with an indentation (201) and forms an overlap platform (202); when the female head (30) is fitted onto the male head (20), the end face of the female head (30) abuts against the end face of the overlap platform (202).

8. The plug structure of a plasma device according to claim 2, characterized in that: The strip connecting plate (11) is provided with an insulating sleeve (60) for a male connector (20).

9. The plug structure of a plasma device according to claim 3, characterized in that: The strip connecting plate (11) that houses the conductive copper plate (50) includes a concave plate (111) and a cover plate (112) covering the top of the concave plate (111). The conductive copper plate (50) is placed inside the concave plate (111), and the male connector (20) passes through the cover plate (112) and is connected to the conductive copper plate (50).

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