A vacuum drying apparatus

Abstract

The utility model discloses a vacuum drying equipment, including vacuum drying subassembly and feeding assembly, vacuum drying subassembly includes sealed chamber, the first gyro wheel group in sealed chamber, the feed port of intercommunication sealed chamber with outside and be used for the first sealing door of plugging feed port, first sealing door can open or close to dredge or block feed port, feeding assembly is located sealed chamber sets up feed port one side, feeding assembly includes second gyro wheel group, second gyro wheel group with first gyro wheel group is located the opposite sides of feed port, second gyro wheel group with first gyro wheel group cooperation to with drying parts from feeding assembly is transported to sealed chamber inside. The utility model discloses a vacuum drying equipment is used to reduce the volume of sealed chamber to improve the vacuum speed in sealed chamber and improve drying efficiency.

Description

Technical Field

[0001] This utility model relates to the field of film drying equipment technology, and in particular to a vacuum drying equipment. Background Technology

[0002] A substrate processing apparatus is used to dry the surface of a substrate. The substrate surface is pre-processed to form a liquid film. This liquid film has a certain degree of fluidity after initial formation on the substrate, therefore, the substrate needs to be dried to solidify the liquid film, thereby forming a solid film layer on the substrate surface. In the substrate processing apparatus, the solidification method for the film on the substrate surface is generally vacuum drying using vacuum equipment. By reducing the pressure, the solvent in the film on the substrate surface evaporates and is removed, thus achieving the drying process of the film on the substrate surface.

[0003] To automate operations and improve production efficiency, substrates coated with a liquid film need to be transferred to vacuum equipment for vacuum drying. Existing equipment for substrate transfer typically uses robotic arms. The vacuum equipment requires a support plate with lifting mechanisms to hold the substrate. When the substrate is transferred to the vacuum equipment by the robotic arm, or when a dried substrate needs to be removed from the vacuum equipment, the support plate rises to allow space for the robotic arm; when vacuum drying is required, the support plate lowers to position the substrate for drying. Therefore, existing vacuum equipment requires sufficient space for the lifting of the support plate, resulting in a large internal space that affects the vacuuming speed and leads to low drying efficiency of the liquid film. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum drying device that reduces the volume of the sealed chamber in order to increase the vacuuming speed and drying efficiency within the sealed chamber.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A vacuum drying apparatus, comprising:

[0007] A vacuum drying assembly includes a sealed chamber, a first roller assembly located within the sealed chamber, a feed inlet connecting the sealed chamber to the outside, and a first sealing door for sealing the feed inlet, wherein the first sealing door can be opened or closed to unclog or seal the feed inlet.

[0008] The feeding assembly is located on one side of the vacuum drying assembly where the feed inlet is located. The feeding assembly includes a second roller group, which is located on opposite sides of the feed inlet. The second roller group and the first roller group cooperate to transport the part to be dried from the feeding assembly into the sealed chamber.

[0009] Preferably, the feeding assembly further includes a lifting member and a lifting drive member for driving the lifting member to move up and down. The projections of the lifting member and the second roller group in the vertical direction on a horizontal plane are completely misaligned. The lifting member is driven by the lifting drive member to protrude out of the second roller group or retract into the second roller group.

[0010] Preferably, the upper end of the first roller group is flush with the upper end of the second roller group, and the upper end of the first roller group is lower than the upper end of the feed inlet and higher than the lower end of the feed inlet.

[0011] Preferably, the first roller group and the second roller group each include a plurality of rotating rods spaced apart along the moving direction of the component to be dried. The axial direction of the rotating rod is perpendicular to the moving direction of the component to be dried. Each rotating rod is fitted with a plurality of rollers, and the axis of the rollers coincides with the axis of the corresponding rotating rod.

[0012] Preferably, the vacuum drying assembly further includes a position detection element located within the sealed chamber, the position detection element being used to detect the position of the component to be dried within the sealed chamber.

[0013] Preferably, two position detection elements are provided, and the two position detection elements are spaced apart along the moving direction of the component to be dried; the distance between the two position detection elements along the moving direction of the component to be dried is greater than the length of the component to be dried.

[0014] Preferably, the vacuum drying assembly is provided with an air extraction port communicating with the sealed chamber, and the air extraction port is connected to a vacuum generator, which is used to evacuate the sealed chamber.

[0015] The sealed chamber is also equipped with a flow equalization component, which is located between the air extraction port and the placement position of the component to be dried. The flow equalization component is provided with multiple evenly distributed flow equalization ports to balance the airflow during extraction.

[0016] Preferably, the flow equalization assembly includes a first flow equalization plate and a second flow equalization plate arranged sequentially along the gas flow direction. The first flow equalization plate is provided with a plurality of uniformly distributed first flow equalization ports, and the second flow equalization plate is provided with a plurality of uniformly distributed second flow equalization ports.

[0017] The first flow equalization plate is located upstream of the second flow equalization plate along the gas flow direction, and the orifice diameter of the first flow equalization port is smaller than that of the second flow equalization port.

[0018] Preferably, the sealed chamber is further provided with an air distribution strip, which has multiple evenly distributed air distribution ports for supplying target gas into the sealed chamber.

[0019] Preferably, two air distribution strips are provided, and the two air distribution strips are distributed on opposite sides of the component to be dried;

[0020] The vacuum drying equipment is also equipped with a control module, which is used to control the air supply flow rate from the air distribution strip to the sealed chamber.

[0021] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0022] By employing a first roller group and a second roller group to transport the component to be dried, the component is driven by the rotation of the rollers in the first and second roller groups, moving it from the outside of the vacuum drying assembly into the sealed chamber inside the vacuum drying assembly without requiring lifting or lowering. Therefore, the vacuum drying assembly of this application does not require a lifting device that works with a robotic arm, nor does it require reserved lifting space. This allows for an effective reduction in the volume of the sealed chamber within the vacuum drying assembly. A smaller sealed chamber allows for increased vacuuming speed, thereby improving drying efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the vacuum drying equipment according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the structure of the feeding assembly according to an embodiment of the present utility model;

[0025] Figure 3 This is an exploded view of the feeding component according to an embodiment of the present utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the vacuum drying assembly according to an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the vacuum drying assembly from another perspective according to an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the vacuum drying assembly according to another perspective of an embodiment of the present invention;

[0029] Figure 7 This is a partial structural schematic diagram of the vacuum drying assembly according to an embodiment of the present invention;

[0030] Figure 8 This is a schematic diagram of the flow equalization component according to an embodiment of the present invention;

[0031] Figure 9 This is a structural schematic diagram of the flow equalization component from another perspective of an embodiment of this utility model.

[0032] In the diagram: 100, Vacuum drying assembly; 1, Sealed chamber; 11, Feed inlet; 111, First sealing door; 12, Exhaust port; 2, First roller assembly; 21, Rotating rod; 22, Roller; 3, Position detection component; 4, Flow equalization assembly; 41, First flow equalization plate; 411, First flow equalization port; 42, Second flow equalization plate; 421, Second flow equalization port; 5, Air equalization strip; 7, Discharge port; 71, Second sealing door; 200, Feeding assembly; 201, Second roller assembly; 202, Lifting component; 203, Lifting drive component. Detailed Implementation

[0033] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0034] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0035] like Figures 1 to 9 As shown, this utility model provides a vacuum drying device, including a vacuum drying assembly 100 for vacuum drying a component to be dried, and a feeding assembly 200 for supplying the component to be dried into the vacuum drying assembly 100. The component to be dried is a substrate coated with a film to be dried. This substrate can be used in various fields such as batteries, panel displays, and advanced packaging. For example, the substrate can be used in perovskite batteries. The liquid film on the surface of the substrate can be a perovskite liquid film. The vacuum drying device is used to dry the perovskite liquid film to obtain a solid perovskite film.

[0036] Reference Figure 4 and Figure 7 The vacuum drying assembly 100 includes a sealed chamber 1, a first roller assembly 2 located within the sealed chamber 1, a feed inlet 11 and an exhaust port 12 communicating with the sealed chamber 1, and a first sealing door 111 for sealing the feed inlet 11. The exhaust port 12 is connected to a vacuum generator, which evacuates the sealed chamber 1 through the exhaust port 12, thereby reducing the air pressure within the sealed chamber 1 and creating a vacuum. Specifically, the vacuum generator can be a vacuum pump.

[0037] Both the first sealing door 111 and the feed inlet 11 are located on one side of the vacuum drying assembly 100, and the first sealing door 111 can be opened or closed to clear or block the feed inlet 11. Specifically, when the part to be dried needs to be sent into the sealed chamber 1 for vacuum drying, the first sealing door 111 is opened to clear the feed inlet 11. The feed inlet 11 connects the sealed chamber 1 and the external space of the vacuum drying assembly 100. The part to be dried located outside the vacuum drying assembly 100 can be moved from the feed inlet 11 into the sealed chamber 1. After the part to be dried is located in the sealed chamber 1, the first sealing door 111 is closed to block the feed inlet 11. At this time, the feed inlet 11 is sealed by the first sealing door 111 to isolate the feed inlet 11 from the outside. At this time, the sealed chamber 1 can form a sealed space, and a vacuum generator can be used to evacuate the sealed chamber 1.

[0038] The first sealing door 111 is connected to a drive assembly, which drives the first sealing door 111 to move up and down, thereby blocking or unblocking the feed inlet 11. The drive assembly may be connected to a control module, which controls the movement of the drive assembly to seal or unblock the feed inlet 11. Specifically, the drive assembly may be a pneumatically driven component, such as a cylinder, and the control module controls the flow of gas supplied to the drive assembly.

[0039] Reference Figure 1 and Figure 2 The feeding assembly 200 is located on one side of the vacuum drying assembly 100 where the inlet 11 is located. The feeding assembly 200 includes a second roller group 201, which and the first roller group 2 are located on opposite sides of the inlet 11, and are used to transport the parts to be dried. Specifically, the parts to be dried can be placed on the second roller group 201 of the feeding assembly 200. Then, the first sealing door 111 is opened, and the second roller group 201 transports the parts to be dried from the inlet 11 to the first roller group 2 inside the sealed chamber 1. The first roller group 2 receives and supports the parts to be dried, and further drives the parts to be dried so that they completely detach from the second roller group 201 and completely enter the sealed chamber 1. At this time, the first sealing door 111 is closed to form a sealed state in the sealed chamber 1. A vacuum generator is used to evacuate the sealed chamber 1 to achieve vacuum drying of the parts to be dried.

[0040] By employing the first roller group 2 and the second roller group 201 to transport the component to be dried, the component is driven by the rotation of the rollers 22 in the first roller group 2 and the second roller group 201, so that the component to be dried moves from the outside of the vacuum drying assembly 100 to the sealed chamber 1 inside the vacuum drying assembly 100, without the need for lifting or lowering. Therefore, the vacuum drying assembly 100 of this application does not require a lifting device that works with a robotic arm, and there is no need to reserve lifting space, which allows the volume of the sealed chamber 1 inside the vacuum drying assembly 100 of this application to be effectively reduced. The smaller sealed chamber 1 allows for a higher vacuuming speed, thereby improving the drying efficiency.

[0041] To ensure smooth transport of the component to be dried on the first roller group 2 and the second roller group 201, the upper end of the first roller group 2 is flush with the upper end of the second roller group 201, and the upper end of the first roller group 2 is lower than the upper end of the feed inlet 11 but higher than the lower end of the feed inlet 11. During transport, the component moves from the second roller group 201 to the first roller group 2, and is positioned above both the second roller group 201 and the first roller group 2 so that it can be supported by either the second roller group 201 or the first roller group 2. By making the upper ends of the first roller group 2 and the second roller group 201 flush, the component will not tilt or shake due to the height difference between the second roller group 201 and the first roller group 2 when it moves from the second roller group 201 to the first roller group 2. The component can move along a two-dimensional path on a horizontal plane into the sealed chamber 1, making the transport process of the component to be dried smoother. By positioning the upper end of the first roller group 2 below the upper end of the feed inlet 11 and above the lower end of the feed inlet 11, the component to be dried will not experience frictional interference with the wall forming the feed inlet 11 when passing through it, further ensuring the smooth transport of the component to be dried. The distance between the upper ends of the first roller group 2 and the upper ends of the feed inlet 11 is greater than the thickness of the component to be dried.

[0042] Reference Figure 2 and Figure 7The first roller group 2 may specifically include multiple rotating rods 21 spaced apart along the moving direction of the component to be dried, and multiple rollers 22 sleeved on the rotating rods 21. The rotating rods 21 may be connected to a driving component such as a motor, so that the rotating rods 21 can be driven by the driving component to rotate. Multiple rollers 22 may be sleeved on each rotating rod 21, and the rotating rods 21 and rollers 22 may be connected by interference fit, snap-fit, or other means, so that when the rotating rod 21 rotates, it can drive the rollers 22 located on the rotating rod 21 to rotate synchronously. The axes of the rotating rods 21 and the rollers 22 sleeved on the rotating rods 21 coincide, and the multiple rollers 22 located on the same rotating rod 21 are evenly spaced along the axis of the rotating rod 21; the rollers 22 are used to abut against and support the component to be dried. When it is necessary to transport the parts to be dried, the multiple rotating rods 21 of the first roller group 2 are simultaneously driven by the driving component to rotate in the same direction. The rollers 22 on the rotating rods 21 rotate to drive the parts to be dried located on the rollers 22 to move through friction. The driving component can be connected to the multiple rotating rods 21 through transmission components such as gears and belts, so that one driving component can be used to drive the rotation of multiple rotating rods 21 at the same time.

[0043] The second roller group 201 has the same structure as the first roller group 2. The driving components in the second roller group 201 and the first roller group 2 can be the same driving element. Multiple rotating rods 21 in the second roller group 201 and the first roller group 2 rotate synchronously under the drive of this driving element. Alternatively, the second roller group 201 and the first roller group 2 can each be provided with a driving element, and the multiple rotating rods 21 in the second roller group 201 and the first roller group 2 are driven by their respective driving elements to rotate. The rotation directions of the rotating rods 21 in the second roller group 201 and the first roller group 2 are the same to ensure that the second roller group 201 and the first roller group 2 drive the part to be dried to move in the same direction.

[0044] The feeding assembly 200 can be used to receive parts to be dried transferred from the previous conveying device or to receive parts to be dried placed manually. The transmission device for supplying parts to be dried to the feeding assembly 200 can be other roller sets, belts, or a robotic arm. When the transmission device for supplying parts to be dried to the feeding assembly 200 is other roller sets, belts, or other devices, these roller sets, belts, or other devices are flush with the second roller set 201 of the feeding assembly 200 to smoothly transfer the parts to be dried onto the second roller set 201.

[0045] Reference Figure 2 and Figure 3When the transmission device used to supply the parts to be dried to the loading assembly 200 is a robotic arm, in order for the loading assembly 200 to cooperate with the robotic arm, the loading assembly 200 may include a lifting member 202 and a lifting drive member 203 for driving the lifting member 202 to rise and fall. The projections of the lifting member 202 and the second roller group 201 in the vertical direction on a horizontal plane are completely misaligned, so that the lifting member 202 will not interfere with the second roller group 201 when it moves up and down. When the robotic arm supplies the part to be dried to the feeding assembly 200, the lifting member 202 can be raised under the drive of the lifting drive member 203 to protrude from the second roller assembly 201. The part to be dried is placed on the lifting member 202 and supported by it. Then, the lifting member 202 moves down and retracts into the second roller assembly 201. When the lifting member 202 moves down, it causes the part to be dried to gradually move towards the second roller assembly 201. When the part to be dried contacts the second roller assembly 201, it is supported by the second roller assembly 201. At this time, the second roller assembly 201 rotates to transfer the part to be dried into the vacuum drying assembly. The lifting member 202 can be a push rod. Multiple lifting members 202 are provided, and the tops of the multiple lifting members 202 are flush. The multiple lifting members 202 are used together to support the part to be dried. Multiple lifting components 202 are synchronously driven by lifting drive component 202 to perform lifting and lowering movements. For example, multiple lifting components 202 are installed on the same plate, and the lifting drive component 202 drives the plate to move so as to synchronously drive multiple lifting components 202 to perform lifting and lowering movements.

[0046] Reference Figure 7 To facilitate the detection of whether the part to be dried has moved to the predetermined position in the vacuum drying assembly 100, a position detection element 3 can also be provided in the sealed chamber 1 of the vacuum drying assembly 100. The position detection element 3 is used to detect the position of the part to be dried in the sealed chamber 1. When the part to be dried moves to the predetermined position, the first sealing door 111 closes so that the sealed chamber 1 is in a sealed state, and the vacuum generator evacuates the sealed chamber 1 to perform vacuum drying on the part to be dried.

[0047] Specifically, two position detection elements 3 can be provided. The two position detection elements 3 are spaced apart along the moving direction of the part to be dried, and the distance between the two position detection elements 3 is greater than the length of the part to be dried. When the part to be dried moves toward the sealed chamber 1, the part to be dried will first couple with the position detection element 3 of the adjacent feed inlet 11. Then, the part to be dried will move further to pass the position detection element 3 of the adjacent feed inlet 11 and couple with the position detection element 3 away from the feed inlet 11. At this time, the part to be dried is located at the predetermined position. By setting two position detection elements 3, the position detection element 3 near the feed inlet 11 can be used to detect whether the part to be dried has completely moved into the sealed chamber 1. When the end of the part to be dried passes the position detection element 3 near the feed inlet 11 along the moving direction, the detection information of the position detection element 3 can be used to determine that the part to be dried has completely moved into the sealed chamber 1. When the front end of the part to be dried moves to the position detection element 3 away from the feed inlet 11 along the moving direction, the detection information of the position detection element 3 away from the feed inlet 11 can be used to determine that the part to be dried has moved to the predetermined position.

[0048] The position detection element 3 can specifically be a photoelectric sensor. The position detection element 3 determines the position of the component to be dried by detecting whether its light beam is blocked. Specifically, as the component to be dried moves to the predetermined position, it first blocks the detection light beam of the position detection element 3 near the feed inlet 11. After the end of the component passes the position detection element 3 near the feed inlet 11, the detection light beam of the position detection element 3 is no longer blocked, indicating that the component to be dried has completely moved into the sealed chamber 1. When the component to be dried moves to the point where it blocks the detection light beam of the position detection element 3 away from the feed inlet 11, the first roller group 2 stops moving, and the component to be dried is now in the predetermined position.

[0049] Reference Figures 7 to 9 When a vacuum generator is used to evacuate the sealed chamber 1, if the gas flow towards the extraction port 12 is turbulent, it can cause differences in gas partial pressure in different areas of the component to be dried, resulting in reduced drying uniformity. To balance the airflow during evacuation, a flow equalization component 4 can be installed in the sealed chamber 1 between the extraction port 12 and the placement position of the component to be dried. For example, the flow equalization component 4 can be located between the first roller group 2 and the extraction port 12. The flow equalization component 4 has multiple evenly distributed flow equalization ports. The airflow during evacuation passes through the flow equalization ports of the flow equalization component 4. The multiple evenly distributed flow equalization ports will equalize the gas flowing through the flow equalization component 4, thereby improving the uniformity of the airflow during evacuation, reducing the differences in gas partial pressure in different areas of the component to be dried, and improving the drying uniformity of the component.

[0050] To improve flow equalization, the flow equalization component 4 can have a double-layer structure. Specifically, the flow equalization component 4 includes a first flow equalization plate 41 and a second flow equalization plate 42 arranged sequentially along the gas flow direction, with the first flow equalization plate 41 and the second flow equalization plate 42 spaced apart. The first flow equalization plate 41 has multiple uniformly distributed first flow equalization orifices 411, and the second flow equalization plate 42 has multiple uniformly distributed second flow equalization orifices 421. The first flow equalization plate 41 is located upstream of the second flow equalization plate 42 along the gas flow direction, and the aperture of the first flow equalization orifices 411 is smaller than the aperture of the second flow equalization orifices 421. When gas passes through the flow equalization component 4, the gas first passes through the first flow equalization plate 41, so that the gas undergoes the first flow equalization through the smaller aperture first flow equalization orifice 411; then the gas passes through the second flow equalization plate 42, undergoing the second flow equalization through the larger aperture second flow equalization orifice 421. By using the first flow equalization plate 41 and the second flow equalization plate 42 to perform secondary flow equalization of the airflow during extraction, the stability of gas flow can be improved, the difference in gas partial pressure in different areas of the component to be dried can be further reduced, and the drying uniformity of the component to be dried can be improved.

[0051] When vacuum drying some parts, if the vacuum level in the sealed chamber 1 is too high, it will cause non-uniform crystallization to occur in the parts during drying. Therefore, it is necessary to inject a small amount of gas into the sealed chamber 1 to ensure that the vacuum level of the sealed chamber 1 meets the drying requirements of the parts. When vacuum drying some parts, nitrogen or other gases can be blown onto the parts to change the gas atmosphere around the parts, thereby promoting the evaporation of the solution in the parts and improving the drying efficiency.

[0052] Reference Figure 7To meet the requirements of the aforementioned components to be dried, a uniform air distribution strip 5 can be provided inside the sealed chamber 1. The uniform air distribution strip 5 has multiple air distribution ports communicating with the sealed chamber 1, which can be used to supply the target gas into the sealed chamber 1. When it is necessary to prevent the vacuum inside the sealed chamber 1 from becoming too high, the target gas can be nitrogen or CDA (Clean Dry Air); when it is necessary to promote the evaporation of the solution in the component to be dried, the target gas can be nitrogen or other gases that can promote the evaporation of the component to be dried. For example, when the component to be dried is a substrate coated with a perovskite liquid film, the solution in the perovskite liquid film will evaporate more rapidly in a low vacuum environment under a nitrogen atmosphere, thereby improving the vacuum drying efficiency of the perovskite liquid film. To improve the uniformity of air supply from the air distribution strip 5 to the product to be dried, multiple air distribution nozzles on the air distribution strip 5 are evenly distributed, for example, at equal intervals, so that the air distribution strip 5 blows out a uniform airflow. Furthermore, two air distribution strips 5 can be provided, distributed on opposite sides of the component to be dried, and both air distribution strips 5 can be used together to supply air to the component to be dried. By providing air to opposite ends of the component to be dried using two air distribution strips 5, the content of the target gas at various points on the component to be dried can be further increased. The air distribution strip 5 can be connected to different air supply devices to supply different target gases into the sealed chamber 1.

[0053] When the uniform air distribution strip 5 supplies the target gas into the sealed chamber 1, the uniform air distribution strip 5 can be connected to a control module. The control module is used to control the gas supply flow rate of the uniform air distribution strip 5, so that the environment inside the sealed chamber 1 is conducive to the vacuum drying of the component to be dried. The control module used to control the uniform air distribution strip 5 can also be used to control the movement of the lifting drive 203 and the drive component for driving the roller group 22; alternatively, the lifting drive 203, the drive component for driving the roller group 22, and the uniform air distribution strip 5 can each be connected to a control module, so that the lifting drive 203, the drive component for driving the roller group 22, and the uniform air distribution strip 5 are each driven by their respective control modules. The control module used to control the uniform air distribution strip 5 can be an MFC (Mass Flow Controller) module or a gas flow meter module; the control module used to control the drive component can be a programmable logic controller (PLC), a microcontroller, a host computer, etc.

[0054] After the components to be dried in the sealed chamber 1 are dried and formed into finished components, the finished components can be moved out of the vacuum drying assembly 100 through the feed port 11. That is, the first roller group 2 and the second roller group 201 change their rotation direction so that the finished components located in the sealed chamber 1 can be moved to the feeding assembly 200. Alternatively, refer to Figure 5 and Figure 6The vacuum drying assembly 100 is also provided with a discharge port 7 and a second sealing door 71 for sealing the discharge port 7. When it is necessary to transfer the finished product, the second sealing door 71 is opened to clear the discharge port 7. At this time, the finished product located in the sealed chamber 1 can be moved out from the discharge port 7. After that, the second sealing door 71 is closed to seal the discharge port 7.

[0055] When drying is complete and it is necessary to open the first sealing door 111 or the second sealing door 71, if the air pressure in the sealing chamber 1 is low and the difference between the internal and external air pressure makes it difficult to open the first sealing door 111 or the second sealing door 71, gas can be supplied into the sealing chamber 1 through the air distribution strip 5 to increase the air pressure in the sealing chamber 1 and thus break the vacuum, so as to facilitate the opening of the first sealing door 111 or the second sealing door 71.

[0056] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A vacuum drying device, characterized in that, include: Vacuum drying assembly (100) includes a sealed chamber (1), a first roller assembly (2) located in the sealed chamber (1), a feed inlet (11) connecting the sealed chamber (1) to the outside, and a first sealing door (111) for sealing the feed inlet (11), the first sealing door (111) being able to open or close to clear or block the feed inlet (11); The feeding assembly (200) is located on one side of the vacuum drying assembly (100) where the feed inlet (11) is provided. The feeding assembly (200) includes a second roller group (201). The second roller group (201) and the first roller group (2) are located on opposite sides of the feed inlet (11). The second roller group (201) and the first roller group (2) cooperate to transport the part to be dried from the feeding assembly (200) to the sealed chamber (1).

2. The vacuum drying equipment according to claim 1, characterized in that, The feeding assembly (200) further includes a lifting member (202) and a lifting drive member (203) for driving the lifting member (202) to rise and fall. The projections of the lifting member (202) and the second roller group (201) in the vertical direction on a horizontal plane are completely misaligned. The lifting member (202) is driven by the lifting drive member (203) to protrude out of the second roller group (201) or retract into the second roller group (201).

3. The vacuum drying equipment according to claim 1, characterized in that, The upper end of the first roller group (2) is flush with the upper end of the second roller group (201), and the upper end of the first roller group (2) is lower than the upper end of the feed inlet (11) and higher than the lower end of the feed inlet (11).

4. The vacuum drying equipment according to claim 1, characterized in that, The first roller group (2) and the second roller group (201) each include a plurality of rotating rods (21) spaced apart along the moving direction of the component to be dried. The axial direction of the rotating rod (21) is perpendicular to the moving direction of the component to be dried. Each rotating rod (21) is fitted with a plurality of rollers (22), and the axis of the roller (22) coincides with the axis of the corresponding rotating rod (21).

5. The vacuum drying equipment according to claim 1, characterized in that, The vacuum drying assembly (100) further includes a position detection element (3) located in the sealed chamber (1), the position detection element (3) being used to detect the position of the component to be dried in the sealed chamber (1).

6. The vacuum drying equipment according to claim 5, characterized in that, Two position detection elements (3) are provided, and the two position detection elements (3) are spaced apart along the moving direction of the component to be dried; the distance between the two position detection elements (3) along the moving direction of the component to be dried is greater than the length of the component to be dried.

7. The vacuum drying equipment according to claim 1, characterized in that, The vacuum drying assembly (100) is provided with an air extraction port (12) communicating with the sealed chamber (1). The air extraction port (12) is connected to a vacuum generator, which is used to evacuate the sealed chamber (1). The sealed chamber (1) is also equipped with a flow equalization component (4). The flow equalization component (4) is located between the air extraction port (12) and the placement position of the component to be dried. The flow equalization component (4) is provided with multiple evenly distributed flow equalization ports to balance the airflow during air extraction.

8. The vacuum drying equipment according to claim 7, characterized in that, The flow equalization component (4) includes a first flow equalization plate (41) and a second flow equalization plate (42) arranged sequentially along the gas flow direction. The first flow equalization plate (41) is provided with a plurality of uniformly distributed first flow equalization ports (411), and the second flow equalization plate (42) is provided with a plurality of uniformly distributed second flow equalization ports (421). The first flow equalization plate (41) is located upstream of the second flow equalization plate (42) along the gas flow direction, and the aperture of the first flow equalization port (411) is smaller than the aperture of the second flow equalization port (421).

9. The vacuum drying equipment according to claim 1, characterized in that, The sealed chamber (1) is also provided with an air distribution strip (5), which is provided with a plurality of evenly distributed air distribution ports, which are used to supply target gas into the sealed chamber (1).

10. The vacuum drying equipment according to claim 9, characterized in that, Two air distribution strips (5) are provided, and the two air distribution strips (5) are distributed on opposite sides of the component to be dried; The vacuum drying equipment is also equipped with a control module, which is used to control the air supply flow rate from the air distribution strip (5) to the sealed chamber (1).

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