A carrier plate and vacuum coating device
By setting a thermally and electrically conductive mating plate and mating beam structure on the carrier plate, the arc discharge phenomenon is solved, realizing the efficient use of the carrier plate and improving production efficiency, while avoiding damage and efficiency impact of the pre-coating step.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TONGWEI SOLAR ENERGY (CHENGDU) CO LID
- Filing Date
- 2025-07-07
- Publication Date
- 2026-06-19
AI Technical Summary
Existing PVD substrates are prone to arc discharge during vacuum coating, resulting in shortened service life and low production efficiency. Furthermore, the need for a pre-coating step also affects production efficiency.
The mating plate and mating beam structure, which are both thermally and electrically conductive, are made of materials such as copper plates. This allows for timely discharge of electric arcs, reduces arcing phenomena, and improves the service life of the carrier plate and production efficiency.
Eliminating the need for a pre-coating step extends the lifespan of the carrier plate, improves production efficiency, and reduces the generation of defective products.
Smart Images
Figure CN224378189U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum coating technology, and more specifically, to a carrier plate and a vacuum coating device. Background Technology
[0002] Heterojunction (HJT) solar cells deposit amorphous silicon thin films on crystalline silicon, combining the advantages of bulk silicon solar cells and thin-film solar cells. They offer advantages such as high conversion efficiency, low processing temperature, high stability, low degradation rate, and bifacial power generation. In PVD (Polymerization and Deposition) processes, the carrier plate is one of the key components of the PVD equipment. Its structural design and layout are crucial, directly affecting the coating efficiency, as well as the conversion efficiency and yield of the solar cells. Some existing PVD carrier plates are made of stainless steel. Stainless steel is mainly composed of elements such as iron, chromium, and nickel. The addition of these alloying elements causes lattice distortion and electron scattering, leading to a reduction in the mobility of free electrons.
[0003] Arcing (sparking) is prone to occur during vacuum coating. In order to reduce the occurrence of arcing on the carrier board and thus reduce the production of defective products, new carrier boards are usually run around the cavity several times before production to be coated with a film, such as copper film or ITO film. However, running the carrier board around in the cavity not only reduces the service life of the carrier board but also affects production efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a carrier plate and a vacuum coating equipment that can ensure the service life of the carrier plate and improve production efficiency.
[0005] The embodiments of this utility model can be implemented as follows:
[0006] In a first aspect, this utility model provides a carrier plate, comprising:
[0007] The bracket includes a surrounding panel that defines the mounting space for the substrate, and the bracket also includes a first connecting beam that is connected to the surrounding panel at both ends.
[0008] Multiple reinforcing members are spaced apart on the bracket and located in the installation space. The reinforcing members include connected mating beams and mating plates, and both ends of the mating beams are connected to the surrounding plate.
[0009] The mating plate is made of a thermally and electrically conductive material.
[0010] In an optional implementation, the mating plate is a copper plate.
[0011] In an optional embodiment, each reinforcement includes two mating beams, and for each reinforcement, a mating plate is disposed between the two mating beams.
[0012] In an optional implementation, the mating plate and the mating beam are detachably connected.
[0013] In an optional implementation, the mating plate and the mating beam are connected by threaded fasteners, or the mating plate and the mating beam are snapped together.
[0014] In an optional embodiment, the enclosure includes a first side plate, a second side plate, a third side plate, and a fourth side plate connected end to end in sequence, with the two ends of the cooperating beam connected to the first side plate and the third side plate respectively, and the two ends of the first connecting beam connected to the first side plate and the third side plate respectively.
[0015] In an optional embodiment, the first side plate, the second side plate, the third side plate, and the fourth side plate are arranged vertically in sequence;
[0016] The carrier plate also includes a second connecting beam, the two ends of which are connected to the second side plate and the fourth side plate respectively, and the extension direction of the second connecting beam is perpendicular to the extension direction of the first connecting beam.
[0017] In an optional embodiment, the two ends of the mating beam are detachably connected to the first side plate and the third side plate, respectively.
[0018] In an optional embodiment, the enclosure is provided with a grounding contact located outside the installation space.
[0019] Secondly, this utility model provides a vacuum coating apparatus, including a carrier plate according to any of the foregoing embodiments.
[0020] This utility model provides a carrier plate and a vacuum coating apparatus. The vacuum coating apparatus includes a carrier plate, which includes a bracket and multiple reinforcing members. The bracket includes a surrounding plate that defines the mounting space for the substrate. The bracket also includes a first connecting beam, both ends of which are connected to the surrounding plate. Multiple reinforcing members are spaced apart on the bracket and located in the mounting space. Each reinforcing member includes a mating beam and a mating plate connected together. Both ends of the mating beam are connected to the surrounding plate. The mating plate is made of a thermally and electrically conductive material. Because the mating plate has good thermal and electrical conductivity, it can promptly conduct the arc generated when an electric arc occurs on the carrier plate, thereby reducing the arc phenomenon. Therefore, a new carrier plate does not need to be decoated by running it around before production, which improves the service life of the carrier plate. The absence of a pre-coating step also ensures production efficiency. Attached Figure Description
[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the carrier plate from a first-view perspective provided in this embodiment.
[0023] Icons: 1-Carrier plate; 100-Bracket; 120-Enclosure plate; 121-First side plate; 122-Second side plate; 123-Third side plate; 124-Fourth side plate; 130-First connecting beam; 140-Second connecting beam; 200-Reinforcing member; 210-Matching beam; 220-Matching plate. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0027] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0028] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0029] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.
[0030] The following describes in detail, with reference to the accompanying drawings, the specific structure of a carrier plate 1 provided by this utility model and the corresponding technical effects it brings.
[0031] Please refer to Figure 1 The present invention provides a carrier plate 1 including a bracket 100 and a plurality of reinforcing members 200. The bracket 100 includes a surrounding plate 120, which defines the mounting space of the substrate. The bracket 100 also includes a first connecting beam 130, both ends of which are connected to the surrounding plate 120. The plurality of reinforcing members 200 are spaced apart on the bracket 100 and located in the mounting space. Each reinforcing member 200 includes a mating beam 210 and a mating plate 220 connected to each other. Both ends of the mating beam 210 are connected to the surrounding plate 120. The mating plate 220 is made of a thermally and electrically conductive material.
[0032] It should be noted that the substrate in this embodiment can refer to a solar cell or a silicon wafer.
[0033] In some existing carrier boards (1), to reduce arcing and thus decrease defective products, new carrier boards (1) are often subjected to several idle runs in the cavity before production to deposit a film, such as a copper or ITO film. Each idle run requires the deposition of a new film, meaning the carrier board surface is constantly undergoing deposition and removal (if the film type needs to be changed). This process leads to gradual wear on the carrier board surface. Furthermore, removing the old film or cleaning the carrier board may involve chemical reagents or mechanical methods, all of which damage the carrier board surface and further shorten its lifespan. Idle runs also affect production efficiency.
[0034] Understandably, since the mating plate 220 has good thermal conductivity and electrical conductivity, when an electric arc occurs on the carrier plate 1, the mating plate 220 can promptly conduct the generated electric arc, thereby reducing the electric arc phenomenon. Therefore, the new carrier plate 1 does not need to be coated with a coating by running empty laps before being put into production, which improves the service life of the carrier plate 1. The absence of a pre-coating step also ensures production efficiency.
[0035] Furthermore, by setting up the supporting beam 210, both ends of which are connected to the surrounding plate 120, the strength of the bracket 100 can be effectively strengthened, thereby reducing the risk of deformation of the carrier plate 1 and the surrounding plate 120.
[0036] In detail, in this embodiment, the mating plate 220 is a copper plate. It can be understood that copper plates have good electrical and thermal conductivity. By setting the copper plate, the arc phenomenon generated by the installation control can be promptly discharged from the wall by the copper plate, reducing the arc phenomenon and thus reducing the occurrence of sparking.
[0037] Of course, in other embodiments, the mating plate 220 can also be made of other materials, as long as the mating plate 220 has good electrical and thermal conductivity.
[0038] Since the copper plate is placed on the mating beam 210, the copper plate can also strengthen the strength of the mating beam 210 and further prevent the carrier plate 1 from deforming.
[0039] In this embodiment, the enclosure 120 includes a first side plate 121, a second side plate 122, a third side plate 123 and a fourth side plate 124 connected sequentially. The two ends of the cooperating beam 210 are respectively connected to the first side plate 121 and the third side plate 123, and the two ends of the first connecting beam 130 are respectively connected to the first side plate 121 and the third side plate 123.
[0040] Optionally, the first side plate 121, the second side plate 122, the third side plate 123, and the fourth side plate 124 are arranged vertically in sequence. It can be understood that in this embodiment, the enclosure 120 is generally rectangular, and the first connecting beam 130 and the mating beam 210 are arranged parallel and spaced apart.
[0041] It should be noted that the verticality in this embodiment is not limited to being strictly vertical, but only roughly vertical. Similarly, the parallelism in this embodiment is not limited to being strictly parallel, but only roughly parallel.
[0042] In this embodiment, each reinforcing member 200 includes two mating beams 210, and for each reinforcing member 200, a mating plate 220 is disposed between the two mating beams 210. It can be understood that the copper plate in each reinforcing member 200 is installed between the two mating beams 210.
[0043] Understandably, since each reinforcing member 200 has two mating beams 210, it can further enhance the strength of the enclosure plate 120, further ensure the overall strength of the carrier plate 1, and prevent the carrier plate 1 from deforming during vacuum coating. In addition, the copper plate between the two mating beams 210 also ensures the connection strength between the mating beams 210 and the copper plate, preventing the copper plate from easily separating from the mating beams 210, so as to effectively reduce the generation of electric arc.
[0044] Optionally, the mating plate 220 and the mating beam 210 are detachably connected to facilitate the replacement of the mating plate 220 by the operator. Understandably, the detachable connection between the copper plate and the mating beam 210 facilitates the installation and removal of the copper plate by the operator.
[0045] In some embodiments, the mating plate 220 can be connected to the mating beam 210 by threaded fasteners. In other embodiments, the mating plate 220 can also be snapped into the mating beam 210.
[0046] Of course, in some other embodiments, in order to ensure the overall strength of the reinforcing member 200, the mating plate 220 and the mating beam 210 can also be non-detachably connected together, for example, by welding the mating beam 210 to the mating plate 220. Alternatively, in some other embodiments, the mating beam 210 and the mating plate 220 can also be bonded together.
[0047] To further enhance the overall strength of the carrier plate 1 and prevent it from easily deforming during vacuum coating, in some embodiments, the carrier plate 1 further includes a second connecting beam 140. The two ends of the second connecting beam 140 are respectively connected to the second side plate 122 and the fourth side plate 124, and the extension direction of the second connecting beam 140 is perpendicular to the extension direction of the first connecting beam 130.
[0048] Optionally, in some embodiments, the two ends of the mating beam 210 are detachably connected to the first side plate 121 and the third side plate 123, respectively, thereby facilitating the assembly and disassembly of the mating beam 210 by operators. For example, the two ends of the mating beam 210 can be connected to the first side plate 121 and the third side plate 123, respectively, using threaded fasteners. Of course, in other embodiments, the two ends of the mating beam 210 can also be snapped onto the first side plate 121 and the third side plate 123, respectively.
[0049] It should be noted that the snap-fit in this embodiment can be snapped together by means of a snap-fit or a snap-fit hole, or it can be snapped together by means of two snap hooks.
[0050] Of course, in some other embodiments, the two ends of the mating beam 210 can also be welded or bonded to the first side plate 121 and the third side plate 123 respectively.
[0051] Optionally, in some embodiments, the enclosure 120 is provided with a grounding contact located outside the installation space. It is understood that the grounding contact ensures that the current can be evenly distributed and avoids excessive local current that could cause the Arc phenomenon.
[0052] This utility model embodiment also provides a vacuum coating apparatus, including the aforementioned carrier plate 1.
[0053] In summary, this utility model embodiment provides a carrier plate 1 and a vacuum coating apparatus. The vacuum coating apparatus includes a carrier plate 1, which includes a bracket 100 and a plurality of reinforcing members 200. The bracket 100 includes a surrounding plate 120 that defines the mounting space for the substrate. The bracket 100 also includes a first connecting beam 130, both ends of which are connected to the surrounding plate 120. The plurality of reinforcing members 200 are spaced apart on the bracket 100 and located in the mounting space. Each reinforcing member 200 includes a mating beam 210 and a mating plate 220 connected to each other. Both ends of the mating beam 210 are connected to the surrounding plate 120. The mating plate 220 is made of a thermally and electrically conductive material. Because the mating plate 220 has good thermal conductivity and electrical conductivity, when an electric arc occurs on the carrier plate 1, the mating plate 220 can promptly conduct the generated electric arc, thereby reducing the electric arc phenomenon. Therefore, the new carrier plate 1 does not need to be coated with a coating by running empty laps before being put into production, which improves the service life of the carrier plate 1. The absence of a pre-coating step also ensures production efficiency.
[0054] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.
Claims
1. A carrier plate, characterized by include: The bracket (100) includes a surrounding plate (120) that defines the mounting space for the substrate, and the bracket (100) also includes a first connecting beam (130) whose two ends are connected to the surrounding plate (120). Multiple reinforcing members (200) are spaced apart on the bracket (100) and located in the installation space. Each reinforcing member (200) includes a mating beam (210) and a mating plate (220) connected together. Both ends of the mating beam (210) are connected to the surrounding plate (120). The mating plate (220) is made of a thermally and electrically conductive material.
2. The carrier plate according to claim 1, characterized in that: The mating plate (220) is a copper plate.
3. The carrier plate according to claim 1, characterized in that: Each of the reinforcing members (200) includes two mating beams (210), and for each of the reinforcing members (200), the mating plate (220) is disposed between the two mating beams (210).
4. The carrier plate according to claim 1, characterized in that: The mating plate (220) and the mating beam (210) are detachably connected.
5. The carrier plate according to claim 4, characterized in that: The mating plate (220) and the mating beam (210) are connected by threaded fasteners, or the mating plate (220) and the mating beam (210) are snapped together.
6. The carrier plate according to claim 1, characterized in that: The enclosure panel (120) includes a first side panel (121), a second side panel (122), a third side panel (123), and a fourth side panel (124) connected end to end in sequence. The two ends of the cooperating beam (210) are respectively connected to the first side panel (121) and the third side panel (123), and the two ends of the first connecting beam (130) are respectively connected to the first side panel (121) and the third side panel (123).
7. The carrier plate according to claim 6, characterized in that: The first side plate (121), the second side plate (122), the third side plate (123) and the fourth side plate (124) are arranged vertically in sequence; And / or the carrier plate further includes a second connecting beam (140), the two ends of which are connected to the second side plate (122) and the fourth side plate (124) respectively, and the extension direction of the second connecting beam (140) is perpendicular to the extension direction of the first connecting beam (130).
8. The carrier plate according to claim 6, characterized in that: The two ends of the fitting beam (210) are detachably connected to the first side plate (121) and the third side plate (123), respectively.
9. The carrier plate according to claim 1, characterized in that: The enclosure (120) is provided with a grounding contact, which is located outside the installation space.
10. A vacuum coating apparatus, characterized by comprising: Includes the carrier plate as described in any one of claims 1-9.