An accordion shield for semiconductor processing debris protection

Abstract

The utility model relates to the technical field of semiconductor processing scrap chip guide protection, especially points to a kind of for the organ cover of semiconductor processing scrap chip protection, including machine tool chassis, front and rear movement module, left and right movement module, workstation;Front and rear transmission screw rod group and front and rear guide rail transmission group are equipped with the front and rear inner organ cover unit connected with corresponding first connecting assembly, left and right movement module lower end is equipped with the front and rear outer organ cover unit located in the periphery of front and rear guide rail transmission group;Left and right transmission screw rod group and left and right guide rail transmission group are equipped with the left and right inner organ cover unit connected with corresponding second connecting assembly, workstation lower end is equipped with the left and right outer organ cover unit located in the periphery of left and right guide rail transmission group;This technology is in the basis of machining center machine, in the position of screw rod in three-axis system, guide rail position and outer surface layer position, all load organ structure formula cover, realize fully-enclosed protection;And adopt inner and outer double-layer protection to further improve the protection effect.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing debris guiding and protection technology, and in particular to a bellows cover for semiconductor processing debris protection. Background Technology

[0002] Machining centers (also known as CNC machine tools) are essential equipment in modern manufacturing, widely used in metal processing, plastics processing, and the manufacture of precision parts. They also play a crucial role in the semiconductor industry, particularly in the processing of semiconductor materials. Due to the stringent processing requirements of semiconductor materials, grinding is typically employed, but this process generates a large amount of powdery debris. In particular, if this debris comes into contact with cutting fluid, it will flow into the machine tool's interior. Given the high hardness of semiconductor materials, this can severely damage critical components such as lead screws and linear guides, affecting the machine tool's stability and accuracy.

[0003] Given the high demands on machine tool protection in semiconductor processing, protective design has become a crucial aspect of machining centers. A fully sealed protective design is particularly important because it effectively prevents debris and cutting fluid generated during processing from entering the machine tool and damaging its precision components.

[0004] However, the existing protective designs of machining centers still have certain shortcomings. Taking a Chinese utility model patent with patent number CN206732151 U, entitled "A Machining Center with a Spindle with Buffer Function," as an example, most existing machining methods use armor-type exposed covers, which means that there is still room for improvement in terms of protective effect. Utility Model Content

[0005] To overcome the shortcomings mentioned above, this utility model aims to provide a technical solution that can solve the above problems.

[0006] A bellows cover for protecting semiconductor processing debris includes a machine tool chassis, a front-to-back moving module, a left-to-right moving module, and a worktable. The front-to-back moving module is fixed to the upper end of the machine tool chassis, the left-to-right moving module is mounted on the upper end of the front-to-back moving module, and the worktable is mounted on the upper end of the left-to-right moving module. The transmission system of the front-to-back moving module includes a front-to-back drive screw assembly located in the center, and front-to-back guide rail drive assemblies located on both sides of the front-to-back drive screw assembly. Both the front-to-back drive screw assembly and the front-to-back guide rail drive assemblies are connected to the bottom of the upper left-to-right moving module through corresponding first connecting components. Simultaneously, the front-to-back drive screw assembly and the front-to-back guide rail drive assemblies are equipped with corresponding first connecting components. The front and rear inner accordion cover units are connected to the connecting components. The lower outer side of the left and right moving module is provided with front and rear outer accordion cover units located around the front and rear guide rail transmission group. The transmission system of the left and right moving module includes a left and right transmission screw group located in the center, and left and right guide rail transmission groups located on both sides of the left and right transmission screw group. The left and right transmission screw group and the left and right guide rail transmission group are connected to the bottom of the upper worktable through corresponding second connecting components. At the same time, the left and right transmission screw group and the left and right guide rail transmission group are provided with left and right inner accordion cover units connected to the corresponding second connecting components. The lower outer side of the worktable is provided with left and right outer accordion cover units located around the left and right guide rail transmission group.

[0007] Furthermore, the front and rear inner bellows cover unit includes a Y-axis screw cover bracket mounted on the front and rear drive screw assembly and corresponding to the front and rear ends of the first connecting component. The front and rear screw bellows cover assembly is fixed on the outer side of the Y-axis screw cover bracket in the Y-axis direction. The front and rear inner bellows cover unit also includes a Y-axis guide rail cover bracket mounted on the front and rear guide rail drive assembly and corresponding to the front and rear ends of the first connecting component. The front and rear guide rail bellows cover assembly is fixed on the outer side of the Y-axis guide rail cover bracket in the Y-axis direction.

[0008] Furthermore, the front and rear outer bellows cover unit includes a Y-axis outer cover mounting bracket located at the front and rear ends of the left and right moving module and extending downward. The outer side of the Y-axis outer cover mounting bracket is fixed with the front and rear outer bellows cover assembly in the Y-axis direction. At the same time, the left and right outer sides of the front and rear outer bellows cover assembly located at the front and rear ends of the left and right moving module are connected with Y-axis rail guard plates.

[0009] Furthermore, the left and right inner accordion cover units include X-axis lead screw cover brackets mounted on the left and right drive lead screw assemblies and corresponding to the left and right ends of the second connecting components. The left and right lead screw accordion cover assemblies are fixed to the outside of the X-axis cover brackets in the X-axis direction. The left and right inner accordion cover units also include X-axis guide rail cover brackets mounted on the left and right guide rail drive assemblies and corresponding to the left and right ends of the second connecting components. The left and right guide rail accordion cover assemblies are fixed to the outside of the X-axis guide rail cover brackets in the X-axis direction.

[0010] Furthermore, the left and right outer accordion cover units include X-axis outer cover mounting brackets located at the left and right ends of the worktable and extending downwards. The left and right outer accordion cover assemblies are fixed on the outer side of the X-axis outer cover mounting brackets facing the X-axis direction. At the same time, X-axis axial rail guard plates are connected to the front and rear outer sides of the left and right outer accordion cover assemblies located at the left and right ends of the worktable.

[0011] Furthermore, it also includes a vertical mounting platform assembled on the machine tool chassis. The outer wall of the vertical mounting platform is provided with a vertical moving module, and the outer side of the vertical moving module is provided with a machining component that works in conjunction with the worktable. The transmission system of the vertical moving module includes a vertical transmission screw assembly located in the center, and vertical guide rail transmission assemblies located on both sides of the vertical transmission screw assembly. Both the vertical transmission screw assembly and the vertical guide rail transmission assemblies are connected to the back of the machining component on the outer side through corresponding third connecting components.

[0012] Furthermore, the upper and lower transmission screw assembly and the upper and lower guide rail transmission assembly are equipped with upper and lower inner accordion cover units connected to the corresponding third connecting assembly, and the lower end of the processing assembly is equipped with upper and lower outer accordion cover units located around the upper and lower guide rail transmission assembly.

[0013] Furthermore, the upper and lower inner accordion cover unit includes a Z-axis lead screw cover bracket located on the upper and lower transmission lead screw assembly and at the lower end of the corresponding third connecting component. The upper and lower lead screw accordion cover assembly is fixed to the outside of the Z-axis bracket in the Z-axis direction. The upper and lower inner accordion cover unit also includes a Z-axis guide rail cover bracket located on the upper and lower guide rail transmission assembly and at the lower end of the corresponding third connecting component. The upper and lower guide rail accordion cover assembly is fixed to the outside of the Z-axis guide rail cover bracket in the Z-axis direction.

[0014] Furthermore, the upper and lower outer accordion cover unit includes a Z-axis outer cover mounting bracket located at the lower end of the machining component and extending towards the back, with the upper and lower outer accordion cover assembly fixed on the outer side of the Z-axis outer cover mounting bracket in the Z-axis direction.

[0015] The beneficial effects of this utility model are:

[0016] Based on the existing machining center, accordion-style protective covers are installed at the lead screw position, guide rail position, and outer surface position in the three-axis system. The protective effect against powdery machining debris is better than that of traditional armor-style protective covers, and it can achieve fully enclosed protection. Furthermore, the use of double-layer protection technology further enhances the protective effect. It can effectively solve the problem of cutting fluid entering the interior of the protective cover through the gaps in the traditional structure.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the first angle structure of this utility model.

[0019] Figure 2 This is a schematic diagram of the second angle structure of this utility model.

[0020] Figure 3 This is a schematic diagram of the first exploded structure of the present invention.

[0021] Figure 4 This is a schematic diagram of the first exploded structure of the present invention.

[0022] Figure 5 Based on Figure 3 A schematic diagram of a local part of the structure.

[0023] Figure 6 Based on Figure 4 A schematic diagram of a local part of the structure.

[0024] The labels in the attached figures are as follows:

[0025]

[0026] Detailed Implementation

[0027] The technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] Please see Figures 1-6This utility model includes a machine tool chassis 1, a front-to-back moving module 2, a left-to-right moving module 3, and a worktable 4. The front-to-back moving module 2 is fixed to the upper end of the machine tool chassis 1, the left-to-right moving module 3 is installed on the upper end of the front-to-back moving module 2, and the worktable 4 is installed on the upper end of the left-to-right moving module 3. The transmission system of the front-to-back moving module 2 includes a front-to-back transmission screw assembly 201 located in the center, and front-to-back guide rail transmission assemblies 202 located on both sides of the front-to-back transmission screw assembly 201. The front-to-back transmission screw assembly 201 and the front-to-back guide rail transmission assemblies 202 are both connected to the bottom of the upper left-to-right moving module 3 through corresponding first connecting components 203. At the same time, the front-to-back transmission screw assembly 201 and the front-to-back guide rail transmission assemblies 202 are provided with front and rear inner bellows connected to the corresponding first connecting components 203. The protective cover unit 204 and the left and right moving module 3 are provided with front and rear outer accordion protective cover units 205 located around the front and rear guide rail transmission group 202 on the lower outer side; the transmission system of the left and right moving module 3 includes a left and right transmission screw group 301 located in the center, and left and right guide rail transmission groups 302 located on both sides of the left and right transmission screw group 301; the left and right transmission screw group 301 and the left and right guide rail transmission groups 302 are connected to the bottom of the upper worktable 4 through corresponding second connecting components 303; at the same time, the left and right transmission screw group 301 and the left and right guide rail transmission groups 302 are provided with left and right inner accordion protective cover units 304 connected to the corresponding second connecting components 303, and the left and right outer accordion protective cover units 305 located around the left and right guide rail transmission group 302 are provided on the lower outer side of the worktable 4.

[0029] This technology primarily addresses the protective design of the two-axis system in machining centers. Firstly, it addresses the existing motion system structure of two-axis machining centers: the machine tool chassis 1 serves as the foundation platform for the entire system, providing support. Other components, such as the forward / backward moving module 2 and the left / right moving module 3, are all fixed to this mounting platform.

[0030] Secondly, for the forward and backward moving module 2, the ultimate goal is to move the worktable 4 in the forward and backward direction. This movement is achieved through a transmission system (forward and backward drive screw assembly 201 and forward and backward guide rail transmission assembly 202). The forward and backward drive screw assembly 201 moves the module by rotating the screw. The forward and backward guide rail transmission assembly 202 supports and guides the forward and backward movement of the module through sliding guide rails.

[0031] The ultimate purpose of the left-right moving module 3 is to enable the worktable 4 to move in the left-right direction. It is fixed above the front-back moving module 2. The left-right drive screw assembly 301 drives the module to move in the left-right direction by rotating the screw. The left-right guide rail drive assembly 302 cooperates with the screw assembly, supporting and guiding the left-right movement of the module through the guide rails.

[0032] Workbench 4 is the final component that is moved, used to hold items that need to be processed or operated.

[0033] The main technological improvement lies in the inclusion of accordion covers in both the two-axis motion system. Besides offering better protection than traditional armor-style covers, the accordion covers further enhance protection through a double-layer protection system consisting of an inner and outer accordion cover unit. The inner accordion cover unit protects the lead screw assembly and guide rails from dust, dirt, or other external factors, extending the equipment's lifespan and ensuring smooth operation. The outer accordion cover unit, installed on the outside of the module, protects the internal mechanical components from the influence of the external environment.

[0034] Regarding the specific structural design of the front and rear inner accordion cover unit and the front and rear outer accordion cover unit 205: The front and rear inner accordion cover unit includes a Y-axis lead screw cover bracket 2041 mounted on the front and rear drive lead screw assembly 201 and connected to the front and rear ends of the corresponding first connecting component 203. The front and rear lead screw accordion cover assembly 2042 is fixed to the outer side of the Y-axis lead screw cover bracket 2041 facing the Y-axis direction. The front and rear inner accordion cover unit 204 also includes a Y-axis guide rail cover mounted on the front and rear guide rail drive assembly 202 and connected to the front and rear ends of the corresponding first connecting component 203. The bracket 2043 has a front and rear guide rail bellows cover assembly 2044 fixed on its outer side facing the Y-axis direction; the front and rear outer bellows cover unit 205 includes a Y-axis outer cover mounting bracket 2051 located at the front and rear ends of the left and right moving module 3 and extending downward, and a front and rear outer bellows cover assembly 2052 fixed on its outer side facing the Y-axis direction; at the same time, the left and right outer sides of the front and rear outer bellows cover assemblies 2052 located at the front and rear ends of the left and right moving module 3 are connected to Y-axis rail guard plates 2053.

[0035] The Y-axis lead screw guard bracket 2041 is fixed to the front and rear drive lead screw assembly 201, and its function is to support and protect the lead screw components. The lead screw generates back-and-forth movement through rotation, and the lead screw guard bracket protects the lead screw from external contamination or damage. The front and rear lead screw accordion guard assemblies 2042 are installed on the outside of the Y-axis lead screw guard bracket 2041 and extend towards the Y-axis. The accordion guard is usually made of flexible material (such as PVC or rubber). By covering the outside of the lead screw, it prevents dust and dirt from entering the lead screw area, thereby protecting the lead screw from wear and damage and ensuring its long-term motion accuracy and stability. Y-axis guide rail guard bracket 2043: Similarly, the guide rail is also equipped with a guard bracket, which is fixed to the front and rear guide rail drive assembly 202, protecting the guide rail from external influences. The front and rear guide rail accordion guard assemblies 2044 are installed on the outside of the Y-axis guide rail guard bracket 2043, and also serve a protective function. The design of the guide rail bellows cover is to reduce the damage of contaminants to the guide rail, prevent friction and wear caused by the accumulation of dirt or debris on the guide rail surface, and ensure smooth operation of the guide rail. The Y-axis outer cover mounting bracket 2051 is installed at the front and rear ends of the left and right moving modules 3, extending downwards. The bracket's function is to provide support and fix the structure of the front and rear outer bellows cover assemblies 2052. This design allows the outer cover to be fixed and effectively cover the outside of the front and rear moving modules 2, preventing external factors from affecting the internal components. The front and rear outer bellows cover assemblies 2052 are installed on the outside of the Y-axis outer cover mounting bracket 2051, further protecting the transmission components of the front and rear moving modules 2 and preventing external environmental factors such as dust, foreign objects, or moisture from affecting the operation of the equipment, ensuring its stability. The Y-axis linear rail guard plate 2053 is located at both ends of the left and right moving modules 3, connecting the left and right outer sides of the front and rear outer bellows cover assemblies 2052. The linear rail guard plate further protects the guide rail system and also reinforces the bellows cover and bracket structure.

[0036] Similarly, regarding the specific structural design of the left and right inner accordion cover unit 304 and the left and right outer accordion cover unit 305: the left and right inner accordion cover unit 304 includes an X-axis lead screw cover bracket 3041 mounted on the left and right drive lead screw assembly 301 and connected to the left and right ends of the corresponding second connecting component 303. The left and right lead screw accordion cover assembly 3042 is fixed to the outside of the X-axis cover bracket 3041 facing the X-axis direction. The left and right inner accordion cover unit 304 also includes an X-axis guide rail cover bracket 3043 mounted on the left and right guide rail drive assembly 302 and connected to the left and right ends of the corresponding second connecting component 303. The left and right guide rail accordion cover assembly 3044 is fixed to the outside of the X-axis guide rail cover bracket 3043 facing the X-axis direction. The left and right outer accordion cover unit 305 includes an X-axis outer cover mounting bracket 3051 located at the left and right ends of the worktable 4 and extending downwards. The left and right outer accordion cover assemblies 3052 are fixed on the outer side of the X-axis outer cover mounting bracket 3051 facing the X-axis direction. At the same time, X-axis axis rail guard plates 3053 are connected to the front and rear outer sides of the left and right outer accordion cover assemblies 3052 located at the left and right ends of the worktable 4.

[0037] The X-axis lead screw cover bracket 3041 is fixed to the left and right transmission lead screw assembly 301. The bracket's function is to support and protect the lead screw. The lead screw is responsible for driving the worktable 4 to move along the X-axis (left and right direction), so protecting the lead screw is crucial. Left and right lead screw accordion cover assemblies 3042 are fixed to the outer side of the cover bracket facing the X-axis. The left and right lead screw accordion cover assemblies 3042 are fixed to the outer side of the lead screw cover bracket and can extend and retract with the movement of the lead screw, protecting it from dust, dirt, or other external substances, extending its service life, and ensuring the smoothness and accuracy of its movement. The X-axis guide rail cover bracket 3043 is connected to the left and right guide rail transmission assembly 302. The guide rail bracket serves to fix and protect the guide rail. The guide rail is a key component supporting the left and right moving module 3, and protecting the guide rail from external contamination is an important aspect of ensuring stable equipment operation. Left and right guide rail accordion cover assembly 3044: Installed on the outside of the guide rail cover bracket, its main function is to prevent external contaminants (such as dust and liquids) from entering the guide rail area, thereby avoiding friction or damage to the guide rails due to the intrusion of contaminants and ensuring the smooth operation of the guide rails. X-axis outer cover mounting bracket 3051 is installed on the left and right ends of the worktable 4 and extends downwards. Its main function is to provide support for the outer accordion cover, ensuring that the outer accordion cover can be fixed on both sides of the worktable 4 and preventing external substances from interfering with the transmission system. Left and right outer accordion cover assembly 3052: Installed on the outside of the X-axis outer cover mounting bracket 3051, its main function is to prevent external substances (such as dust and stains) from entering the worktable 4 and the interior of the left and right moving modules 3, ensuring that the transmission system of the equipment operates in a clean environment and preventing wear or errors caused by external contamination. X-axis axis rail guard plate 3053 is installed on the left and right ends of the worktable 4, located on the front and rear outer sides of the left and right outer accordion cover assembly 3052, connecting and protecting the guide rail system. It can enhance the sealing effect of the outer accordion cover, reduce the entry of external substances into the guide rail area, and at the same time, it can fix the accordion cover.

[0038] The machining center also includes a vertical mounting table 5 assembled on the machine tool chassis 1. The outer wall of the vertical mounting table 5 is provided with a vertical moving module 6. The outer side of the vertical moving module 6 is provided with a machining component 7 that works in conjunction with the worktable 4. The transmission system of the vertical moving module 6 includes a vertical transmission screw assembly 601 located in the center, and vertical guide rail transmission assemblies 602 located on both sides of the vertical transmission screw assembly 601. The vertical transmission screw assembly 601 and the vertical guide rail transmission assemblies 602 are both connected to the back of the machining component 7 on the outer side through corresponding third connecting components 603.

[0039] The system comprises a three-axis motion system consisting of a forward / backward moving module 2, a left / right moving module 3, and a vertical moving module 6. The machine tool chassis 1 forms the basic structure, and the vertical mounting table 5, mounted on the chassis 1, supports the vertical moving module 6. The vertical moving module 6 is mounted on the outer wall of the vertical mounting table 5, allowing the main worktable 4 or tool of the machining center to move vertically. This module controls the vertical movement of the worktable 4 or machining tool to complete different machining tasks. Outside the vertical moving module 6, there is a machining assembly 7 that works in conjunction with the worktable 4. This machining assembly 7 works with the worktable 4 to perform machining operations through vertical movement. The vertical drive screw assembly 601 is located in the center of the vertical moving module 6. The screw assembly drives the vertical movement by rotating the screw, controlling the spindle's vertical movement. The screw provides a precise linear motion suitable for high-precision machining. The vertical guide rail transmission assembly 602 is located on both sides of the vertical drive screw assembly 601. The guide rails provide stable support and guidance for the vertically moving module 6, ensuring the spindle can move stably and accurately in the vertical direction. The guide rail system helps reduce friction during movement and improves the system's stability and reliability. The upper and lower drive screw assembly 601 and the upper and lower guide rail drive assembly 602 are connected to the back of the outer machining assembly 7 via a third connecting assembly 603. The third connecting assembly 603 connects the transmission system to the machining assembly 7 and ensures that the movement of the transmission system can be accurately transmitted to the workpiece by the machining assembly 7. The connecting assembly guarantees the overall stability of the system and avoids unnecessary vibrations or errors during machining.

[0040] Regarding the specific structural design of the upper and lower inner accordion cover unit and the upper and lower outer accordion cover unit 605: The upper and lower inner accordion cover unit 604 includes a Z-axis lead screw cover bracket 6041 located on the upper and lower transmission lead screw assembly 601 and at the lower end of the corresponding third connecting component 603. Upper and lower lead screw accordion cover assemblies 6042 are fixed to the outer side of the Z-axis cover bracket 6041 facing the Z-axis direction. The upper and lower inner accordion cover unit 604 also includes a Z-axis guide rail cover bracket 6043 located on the upper and lower guide rail transmission assembly 602 and at the lower end of the corresponding third connecting component 603. Upper and lower guide rail accordion cover assemblies 6044 are fixed to the outer side of the Z-axis guide rail cover bracket 6043 facing the Z-axis direction. The upper and lower outer accordion cover unit 605 includes a Z-axis outer cover mounting bracket 6051 located at the lower end of the machining component 7 and extending towards the back. Upper and lower outer accordion cover assemblies 6052 are fixed to the outer side of the Z-axis outer cover mounting bracket 6051 facing the Z-axis direction. The upper and lower inner bellows cover unit first includes a Z-axis lead screw cover bracket 6041 mounted on the upper and lower transmission lead screw assembly 601. The Z-axis lead screw cover bracket 6041 is primarily responsible for supporting and protecting the transmission lead screw in the Z-axis direction. The lead screw is a key component used to drive the equipment to move along the Z-axis (vertical direction). Protecting it from external contaminants can extend its service life and ensure its accuracy. Upper and lower lead screw bellows cover assemblies 6042 are fixed to the outer side of the Z-axis lead screw cover bracket 6041 facing the Z-axis direction. These bellows covers are flexible and can extend and retract with the movement of the lead screw, providing dust and water protection, protecting the lead screw from dust, dirt, or other contaminants, and ensuring smooth operation of the lead screw. In addition to lead screw protection, the system also needs to protect the guide rail system. The upper and lower inner bellows cover unit 604 also includes a Z-axis guide rail cover bracket 6043 mounted on the upper and lower guide rail transmission assembly 602. The guide rail bracket provides support for the cover, ensuring the precise movement and stability of the guide rail. The outer side of the Z-axis guide rail cover bracket 6043, facing the Z-axis direction, is fixed with upper and lower guide rail bellows cover assemblies 6044. These bellows covers work in conjunction with the guide rail bracket to prevent dust, dirt, and other contaminants from entering the guide rail area, ensuring smooth sliding and precise positioning of the guide rail during long-term use. The upper and lower outer bellows cover unit 605 includes a Z-axis outer cover mounting bracket 6051 located at the lower end of the machining assembly 7 and extending towards the back. The main function of the outer cover mounting bracket is to provide support for the outer bellows cover, ensuring its protection against external contamination. The outer side of the Z-axis outer cover mounting bracket 6051, facing the Z-axis direction, is fixed with upper and lower outer bellows cover assemblies 6052. These outer bellows covers primarily serve to prevent dust and water damage, protecting critical components from external environmental influences and preventing contamination that could lead to equipment malfunction or decreased machining accuracy.

[0041] The structural principle of the protective covers for the aforementioned three-axis system is as follows: Front and rear inner accordion covers: Through the structural design of the lead screw cover bracket and guide rail cover bracket, these accordion covers can protect the transmission lead screw and guide rail system without affecting transmission accuracy, reducing wear and improving the long-term stability of the system. Front and rear outer accordion covers: These cover the outside of the system, forming a protective barrier to prevent external substances from contaminating the internal transmission components, especially the lead screw and guide rail. Simultaneously, the outer accordion covers, in conjunction with the linear guide guard plate, enhance the overall protective capability of the system.

[0042] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A bellows cover for protecting semiconductor processing debris, comprising a machine tool chassis (1), a front-to-back moving module (2), a left-to-right moving module (3), and a worktable (4); the front-to-back moving module (2) is fixed to the upper end of the machine tool chassis (1), the left-to-right moving module (3) is mounted on the upper end of the front-to-back moving module (2), and the worktable (4) is mounted on the upper end of the left-to-right moving module (3); characterized in that: The transmission system of the front and rear moving module (2) includes a front and rear drive screw assembly (201) located in the center, and front and rear guide rail drive assemblies (202) located on both sides of the front and rear drive screw assembly (201); the front and rear drive screw assembly (201) and the front and rear guide rail drive assemblies (202) are both connected to the bottom of the upper left and right moving module (3) through corresponding first connecting components (203); Meanwhile, the front and rear drive screw assembly (201) and the front and rear guide rail drive assembly (202) are provided with front and rear inner bellows cover units (204) connected to the corresponding first connecting component (203), and the lower outer side of the left and right moving module (3) is provided with front and rear outer bellows cover units (205) located around the front and rear guide rail drive assembly (202). The transmission system of the left and right moving module (3) includes a left and right transmission screw assembly (301) located in the center, and left and right guide rail transmission assemblies (302) located on both sides of the left and right transmission screw assembly (301); the left and right transmission screw assembly (301) and the left and right guide rail transmission assemblies (302) are connected to the bottom of the upper worktable (4) through corresponding second connecting components (303); Meanwhile, the left and right transmission screw assembly (301) and the left and right guide rail transmission assembly (302) are provided with left and right inner accordion cover units (304) connected to the corresponding second connecting assembly (303), and the lower outer side of the worktable (4) is provided with left and right outer accordion cover units (305) located around the left and right guide rail transmission assembly (302).

2. The bellows cover for protecting semiconductor processing debris according to claim 1, characterized in that: The front and rear inner bellows cover unit includes a Y-axis screw cover bracket (2041) mounted on the front and rear drive screw assembly (201) and connected to the front and rear ends of the corresponding first connecting component (203). The front and rear screw bellows cover assembly (2042) is fixed on the outside of the Y-axis screw cover bracket (2041) in the Y-axis direction. The front and rear inner bellows cover unit (204) also includes a Y-axis guide rail cover bracket (2043) disposed on the front and rear guide rail transmission assembly (202) and corresponding to the front and rear ends of the first connecting assembly (203). The front and rear guide rail bellows cover assembly (2044) is fixed on the outer side of the Y-axis guide rail cover bracket (2043) in the Y-axis direction.

3. A bellows cover for protecting semiconductor processing debris according to claim 2, characterized in that: The front and rear outer bellows cover unit (205) includes a Y-axis outer cover mounting bracket (2051) located at the front and rear ends of the left and right moving module (3) and extending downward. The front and rear outer bellows cover assembly (2052) is fixed on the outside of the Y-axis outer cover mounting bracket (2051) in the Y-axis direction. Meanwhile, the left and right outer sides of the front and rear outer bellows cover groups (2052) located at the front and rear ends of the left and right moving module (3) are connected to Y-axis rail guard plates (2053).

4. A bellows cover for protecting semiconductor processing debris according to claim 1, characterized in that: The left and right inner bellows cover unit (304) includes an X-axis screw cover bracket (3041) disposed on the left and right transmission screw assembly (301) and connected to the left and right ends of the corresponding second connecting component (303). The left and right screw bellows cover assemblies (3042) are fixed on the outside of the X-axis screw cover bracket (3041) in the X-axis direction. The left and right inner accordion cover unit (304) also includes an X-axis guide rail cover bracket (3043) disposed on the left and right guide rail transmission assembly (302) and corresponding to the left and right ends of the second connecting assembly (303). The left and right guide rail accordion cover assembly (3044) is fixed on the outside of the X-axis guide rail cover bracket (3043) in the X-axis direction.

5. A bellows cover for protecting semiconductor processing debris according to claim 4, characterized in that: The left and right outer bellows cover unit (305) includes an X-axis outer cover mounting bracket (3051) located at the left and right ends of the workbench (4) and extending downwards. The left and right outer bellows cover assemblies (3052) are fixed on the outer side of the X-axis outer cover mounting bracket (3051) facing the X-axis direction. Meanwhile, the left and right outer bellows cover assemblies (3052) located at the left and right ends of the workbench (4) are connected to X-axis rail guard plates (3053) on the front and back outer sides.

6. A bellows cover for protecting semiconductor processing debris according to claim 1, characterized in that: It also includes a vertical mounting table (5) assembled on the machine tool chassis (1), the outer wall of the vertical mounting table (5) is provided with a vertical moving module (6), and the outer side of the vertical moving module (6) is provided with a processing component (7) that works in conjunction with the worktable (4); The transmission system of the up-down moving module (6) includes an up-down transmission screw assembly (601) located in the center, and up-down guide rail transmission assemblies (602) located on both sides of the up-down transmission screw assembly (601); the up-down transmission screw assembly (601) and the up-down guide rail transmission assemblies (602) are both connected to the back of the processing assembly (7) on the outer side through corresponding third connecting components (603).

7. A bellows cover for protecting semiconductor processing debris according to claim 6, characterized in that: The upper and lower transmission screw assembly (601) and the upper and lower guide rail transmission assembly (602) are provided with upper and lower inner bellows cover units (604) connected to the corresponding third connecting assembly (603), and the lower end of the processing assembly (7) is provided with upper and lower outer bellows cover units (605) located around the upper and lower guide rail transmission assembly (602).

8. A bellows cover for protecting semiconductor processing debris according to claim 7, characterized in that: The upper and lower inner bellows cover unit (604) includes a Z-axis screw cover bracket (6041) located on the upper and lower transmission screw assembly (601) and at the lower end of the corresponding third connecting component (603). The upper and lower screw bellows cover assembly (6042) is fixed on the outer side of the Z-axis screw cover bracket (6041) in the Z-axis direction. The upper and lower inner bellows cover unit (604) also includes a Z-axis guide rail cover bracket (6043) located on the upper and lower guide rail transmission assembly (602) and at the lower end of the corresponding third connecting component (603). The upper and lower guide rail bellows cover assembly (6044) is fixed on the outer side of the Z-axis guide rail cover bracket (6043) in the Z-axis direction.

9. A bellows cover for protecting semiconductor processing debris according to claim 8, characterized in that: The upper and lower outer accordion cover unit (605) includes a Z-axis outer cover mounting bracket (6051) located at the lower end of the machining component (7) and extending to the back. The upper and lower outer accordion cover assembly (6052) is fixed on the outer side of the Z-axis outer cover mounting bracket (6051) in the Z-axis direction.

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