Circulatory system with temperature control function

Abstract

The utility model provides a kind of circulating system with temperature control function, including circulating pipeline system, liquid medicine driving device and temperature control structure, circulating pipeline system constitutes closed loop, including liquid storage tank and the circulating pipeline for liquid medicine circulation flow, the circulating pipeline is provided with liquid supply port, temperature control structure includes heating unit, cooling unit, temperature sensor and controller, heating unit and cooling unit are all set on circulating pipeline, controller is signal connected with temperature sensor, heating unit and cooling unit, for adjusting the power of the heating unit or the cooling unit according to the temperature detected by temperature sensor, the circulating system with temperature control function fuses temperature control structure with circulating pipeline, greatly shortens heat conduction path, can realize the quick temperature switching of fluid in circulating pipeline, can also keep temperature uniformity under extreme working condition, and optimize system energy efficiency ratio.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and more specifically, it relates to a circulation system with temperature control function. Background Technology

[0002] In semiconductor manufacturing, fluid media are supplied to multiple processing units through a circulation system, and their temperature stability is one of the core parameters determining process quality. Taking advanced wet etching processes as an example, their process precision has reached the atomic level, and any tiny temperature fluctuation can cause significant process deviations. Specifically, in wafer wet etching processes, temperature changes in the hydrofluoric acid and nitric acid mixture directly affect the activation energy of the etching reaction: when the temperature fluctuates by ±1℃, the etching rate of silicon material can change by 2.5-3.8%, which will directly lead to feature linewidth deviations exceeding 50% of the design tolerance.

[0003] Traditional temperature-controlled circulation systems typically employ a combination of external heat exchangers and circulation pumps. In this design, the heating structure and circulation piping are separate, which has significant drawbacks: First, the spatial isolation between the heat exchange unit and the circulation piping results in a delay in thermal response, with a lag of 5-8 seconds from temperature detection to control execution, making it difficult to cope with sudden changes in process load. Second, this type of external heat exchange piping causes approximately 12-18% heat loss, requiring an additional 25% or more of heating power to maintain the set temperature, resulting in energy waste. Utility Model Content

[0004] This invention provides a circulating system with temperature control function, which can shorten the heat conduction path, realize rapid heating and cooling switching, and optimize the system energy efficiency ratio.

[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: This utility model provides a circulation system with temperature control function, including:

[0006] The circulation pipeline system forms a closed loop, including a storage tank and a circulation pipeline for circulating the drug solution, wherein a supply port is provided on the circulation pipeline;

[0007] A liquid medicine driving device is installed on the circulation pipeline to drive the liquid medicine to flow in the circulation pipeline;

[0008] The temperature control structure includes a heating unit, a cooling unit, a temperature sensor, and a controller. The heating unit and the cooling unit are both located on the circulation pipeline. The temperature sensor is used to detect the temperature of the medicine liquid in the circulation pipeline. The controller is signal-connected to the temperature sensor, the heating unit, and the cooling unit, and is used to adjust the power of the heating unit or the cooling unit according to the temperature detected by the temperature sensor.

[0009] In one embodiment, the circulation pipeline system further includes a pressure stabilizing device, which is disposed at the outlet end of the liquid driving device.

[0010] In one embodiment, the circulation pipeline system further includes a filter device disposed upstream of the liquid supply port.

[0011] In one embodiment, the circulation pipeline includes a return pipeline connected to the inlet of the storage tank and a supply pipeline connected to the outlet of the storage tank. The supply pipeline includes a main pipeline and a plurality of parallel first branch pipelines connected to the main pipeline. The drug driving device and the supply port are disposed on the branch pipelines. The return pipeline is used to return the used drug to the storage tank to achieve closed-loop circulation.

[0012] In one embodiment, the temperature control structure is disposed on the main pipeline.

[0013] In one embodiment, the main pipeline includes a plurality of second branch pipelines arranged in parallel, and each second branch pipeline is provided with the temperature control structure.

[0014] In one embodiment, the circulation pipeline system further includes a concentration monitoring module, which is located on the first branch pipeline.

[0015] In one embodiment, the temperature control structure includes a Peltier device, which includes a Peltier and a closed circuit. The Peltier has a first surface and a second surface. The first surface is used to heat or cool the circulation pipeline, and the second surface is provided with a liquid cooling channel for cooling the second surface when the first surface cools the circulation pipeline.

[0016] The controller is a PID controller.

[0017] In one embodiment, a flow regulating valve is provided on the liquid cooling channel.

[0018] In one embodiment, the cooling medium of the liquid cooling channel is deionized water or ethylene glycol solution.

[0019] The circulating system with temperature control function provided by this utility model includes a circulating pipeline system, a liquid driving device, and a temperature control structure. The circulating pipeline system forms a closed loop, including a liquid storage tank and a circulating pipeline for the circulation of liquid medicine. A liquid supply port is provided on the circulating pipeline. The liquid driving device is located on the circulating pipeline and is used to drive the liquid medicine to flow in the circulating pipeline. The temperature control structure includes a heating unit, a cooling unit, a temperature sensor, and a controller. The heating unit and the cooling unit are both located on the circulating pipeline. The temperature sensor is used to detect the temperature of the liquid medicine in the circulating pipeline. The controller is connected to the temperature sensor, the heating unit, and the cooling unit. Based on the temperature feedback, the power of the heating unit or the cooling unit is dynamically adjusted. This circulating system with temperature control function integrates the temperature control structure with the circulating pipeline, which greatly shortens the heat conduction path, enables rapid heating and cooling of the fluid in the circulating pipeline, and optimizes the system's energy efficiency ratio. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A schematic diagram of the pipeline structure of a circulation system with temperature control function provided in an embodiment of this utility model;

[0022] Figure 2 A schematic diagram of the temperature control structure of the circulating system with temperature control function provided in this embodiment of the utility model;

[0023] Figure 3 A partial structural diagram of the liquid driving device of the circulating system with temperature control function provided in this embodiment of the utility model;

[0024] Figure 4 A schematic diagram of the structure of a filter device for a circulating system with temperature control function provided in an embodiment of this utility model.

[0025] The following are the labeling elements in the figure:

[0026] 1-Circulation pipeline system; 2-Drug liquid driving device; 3-Temperature control structure; 4-Pressure stabilizing device; 5-Filtration device; 6-Concentration monitoring module; 11-Storage tank; 12-Circulation pipeline; 13-Supply port; 31-Temperature sensor; 32-Controller; 33-Liquid cooling channel; 34-Constant temperature bath; 35-Flow regulating valve; 36-Flow meter; 121-Return pipeline; 122-Supply pipeline; 1221-Main pipeline; 1222-First branch pipeline; 1223-Second branch pipeline. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0029] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that the term "and / or" as used herein is merely a description of the relationship between related objects, indicating that three relationships may exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. In the description of this utility model, unless otherwise stated, "multiple" means two or more.

[0031] Traditional temperature-controlled circulation systems typically employ a combination of external heat exchangers and circulating pumps. This design separates the heating element from the circulation piping, which presents significant drawbacks: First, the spatial isolation between the heat exchange unit and the process piping leads to a delayed thermal response, with a lag of 5-8 seconds between temperature detection and control execution, making it difficult to handle sudden changes in process load. Second, this external heat exchange piping results in approximately 12-18% heat loss, requiring an additional 25% or more of heating power to maintain the set temperature, resulting in energy waste. This application addresses these issues by providing a circulation system with temperature control functionality.

[0032] The circulating system with temperature control function provided by this utility model will be described in detail below with reference to specific embodiments.

[0033] Figure 1 This is a schematic diagram of the pipeline structure of a circulation system with temperature control function provided in an embodiment of this utility model. Figure 2 This is a schematic diagram of the temperature control structure of a circulating system with temperature control function provided in an embodiment of the present invention. Figure 3 Please refer to the partial structural diagram of the liquid driving device of the circulating system with temperature control function provided in this embodiment of the utility model. Figures 1-3 This utility model provides a circulation system with temperature control function, including a circulation pipeline system 1, a medicine driving device 2, and a temperature control structure 3. The circulation pipeline system 1 forms a closed loop, including a storage tank 11 and a circulation pipeline 12 for circulating medicine. A liquid supply port 13 is provided on the circulation pipeline 12. The medicine driving device 2 is provided on the circulation pipeline 12 and is used to drive the medicine to flow in the circulation pipeline 12. The temperature control structure 3 includes a heating unit, a cooling unit, a temperature sensor 31, and a controller 32. The heating unit and the cooling unit are both provided on the circulation pipeline 12. The temperature sensor 31 is used to detect the temperature of the medicine in the circulation pipeline 12. The controller 32 is signal-connected to the temperature sensor 31, the heating unit, and the cooling unit and is used to adjust the power of the heating unit or the cooling unit according to the temperature detected by the temperature sensor 31.

[0034] The circulation system in this embodiment is a specialized device for temperature control in semiconductor manufacturing processes. It mainly achieves rapid heating and cooling of the chemical solution through a closed-loop circulation system, ensuring temperature stability in the production process. For example, the closed-loop circulation system can achieve continuous temperature control from -200℃ to 250℃, with the temperature difference controlled within ±0.1℃, making it suitable for precision processes such as photolithography and etching.

[0035] Specifically, the circulation pipeline system 1 of this embodiment includes a liquid storage tank 11 and a circulation pipeline 12 for circulating the liquid. The circulation pipeline 12 is provided with a liquid supply port 13. The circulation pipeline 12 includes a return pipeline 121 connected to the liquid inlet of the liquid storage tank 11 and a supply pipeline 122 connected to the liquid outlet of the liquid storage tank 11. The liquid storage tank 1 is mainly used to store the circulating solution and plays a key role in the cleaning, photolithography, etching and other processes in semiconductor manufacturing. The liquid storage tank 11 is usually made of corrosion-resistant materials such as stainless steel or polytetrafluoroethylene to ensure that it is not corroded by chemical solutions during long-term use. In this embodiment, the liquid storage tank 1 is integrated into the circulation loop system, and liquid storage and recycling are realized through the supply pipeline 122, the liquid driving device 2, and the return pipeline 121. In this embodiment, the specific size of the liquid storage tank 11 is not particularly limited.

[0036] In this embodiment, the liquid driving device 2 is installed in the circulation pipeline system to drive the liquid to flow in the circulation pipeline 12. This device drives the circulating liquid to circulate between the storage tank 1, the supply pipeline 2, and the return pipeline, promptly transferring the circulating liquid required by the semiconductor manufacturing equipment to the liquid-using end, ensuring the liquid-using end's liquid demand. For example, the liquid driving device 2 in this embodiment is a pneumatic pump. The pneumatic pump uses an airbag to compress the fluid, completely isolating the driving medium (such as compressed air) from the conveying medium, making it suitable for conveying highly hazardous chemicals or toxic liquids.

[0037] The temperature control structure 3 of this embodiment is installed in the circulation pipeline system 1. The temperature control structure 3 includes a heating unit, a cooling unit, a temperature sensor 31, and a controller 32, and is used to adjust the temperature of the liquid medicine in real time. The heating unit of this embodiment is used to heat the liquid medicine in the circulation pipeline 12 to ensure the temperature requirements of the production process. This embodiment does not impose any special restrictions on the type of heating structure of the heating unit. For example, the heating unit can use a PTC heater, an electric heating wire heater, or a Peltier device for heating. The cooling unit of this embodiment is used to cool the liquid medicine in the circulation pipeline 12. Exemplarily, the cooling unit of this embodiment uses compressor refrigeration, fan refrigeration, or Peltier device refrigeration.

[0038] In this embodiment, the controller 32 is signal-connected to the temperature sensor 31, the heating unit, and the cooling unit, and dynamically adjusts the power of the heating unit or the cooling unit based on temperature feedback. For example, the temperature sensor 31 continuously detects the temperature in the circulation pipe 12 and converts the temperature signal into a digital quantity, which is then transmitted to the controller 32. The controller 32 controls the heating unit or the cooling unit to turn on and off according to the deviation between the preset temperature setpoint and the actual detected value. Alternatively, the controller 32 can use a PID controller to linearly adjust the heating or cooling power based on the current temperature deviation, thereby improving temperature control accuracy. In this embodiment, the heating process is achieved by the controller 32 controlling the heating unit, and the cooling process is achieved by the controller 32 controlling the cooling unit.

[0039] In semiconductor manufacturing, fluid media are supplied to multiple processing units through a circulation system, and their temperature stability is one of the core parameters determining process quality. Taking advanced wet etching processes as an example, their process precision has reached the atomic level, and any tiny temperature fluctuation can cause significant process deviations. For instance, in wafer wet etching, the temperature change of the hydrofluoric acid and nitric acid mixture directly affects the activation energy of the etching reaction. When the temperature fluctuates by ±1°C, the etching rate of silicon material can change by 2.5-3.8%, which will directly lead to feature linewidth deviations exceeding 50% of the design tolerance. The circulation system in this embodiment can achieve rapid heating and cooling of the fluid, maintaining temperature uniformity under extreme operating conditions. While improving temperature control accuracy, it provides a reliable temperature control infrastructure for the field of precision semiconductor manufacturing.

[0040] The circulating system with temperature control function provided by this utility model includes a circulating pipeline system 1, a liquid driving device 2, and a temperature control structure 3. The circulating pipeline system 1 forms a closed loop, including a liquid storage tank 11 and a circulating pipeline 12 for the circulation of liquid medicine. A liquid supply port 13 is provided on the circulating pipeline 12. The liquid driving device 2 is provided on the circulating pipeline system 1 and is used to drive the liquid medicine to flow in the circulating pipeline 12. The temperature control structure 3 includes a heating unit, a cooling unit, a temperature sensor 31, and a controller 32. The heating unit and the cooling unit are both provided on the circulating pipeline 12. The temperature sensor 31 is used to obtain the temperature of the liquid medicine in the circulating pipeline 12. The controller 32 is signal-connected to the temperature sensor 31, the heating unit, and the cooling unit, and dynamically adjusts the power of the heating unit or the cooling unit based on temperature feedback. This circulating system with temperature control function integrates the temperature control structure 3 with the circulating pipeline 12, which greatly shortens the heat conduction path, enables rapid heating and cooling switching of the fluid in the circulating pipeline 12, maintains temperature uniformity under extreme working conditions, and optimizes the system energy efficiency ratio.

[0041] In one specific embodiment, the circulating pipeline system 1 further includes a pressure stabilizing device 4, which is disposed at the outlet end of the liquid driving device 2. The pressure stabilizing device 4, by real-time monitoring and control of pressure parameters, can prevent pipeline vibration or component damage caused by pressure fluctuations. For example, when the pressure rises abnormally, the pressure stabilizing device 4 can promptly adjust the output of the booster pump to prevent overpressure-induced equipment failure. Through high-precision pressure regulation, the pressure stabilizing device 4 ensures that the pressure of the circulating liquid during transportation always meets semiconductor process requirements (such as ±1% precision control). This is crucial for processes in semiconductor manufacturing that require precise control of temperature and reaction conditions (such as diffusion and oxidation). By stabilizing the pressure output, frequent equipment start-ups and shutdowns or overload operation caused by pressure fluctuations can be reduced, thus reducing wear and tear on mechanical components. The pressure stabilizing device 4 can cope with the changing process requirements in semiconductor production (such as dynamic adjustments to pressure and flow parameters for different processes), ensuring stable operation of the circulating system under various operating conditions. Exemplarily, the pressure stabilizing device 4 in this embodiment is a liquid damper.

[0042] Figure 4 A schematic diagram of the structure of the filter device of the circulation system with temperature control function provided in the embodiment of this utility model is shown below. Further, please refer to... Figure 1 and Figure 4 The circulation pipeline system 1 further includes a filter device 5, which is located upstream of the liquid supply port 13. In this embodiment, the filter device 5 filters impurities and particulate matter from the liquid, ensuring the cleanliness of the process environment. For example, in precision processes such as photolithography and etching, filtered water can reduce temperature fluctuations and prevent temperature changes from affecting process accuracy. Exemplarily, the filter device 5 in this embodiment includes a filter screen with progressively decreasing pore size, capable of intercepting nanoscale particles.

[0043] Specifically, the circulation pipeline 12 includes a return pipeline 121 connected to the inlet of the storage tank 11 and a supply pipeline 122 connected to the outlet of the storage tank 11. The supply pipeline 122 includes a main pipeline 1221 and multiple parallel first branch pipelines 1222 connected to the main pipeline 1221. The medicine driving device 2 and the supply port 13 are disposed on the first branch pipelines 1222. The return pipeline is used to return the used medicine to the storage tank 11 to achieve closed-loop circulation. This embodiment includes multiple parallel first branch pipelines 1222, which can meet the liquid demand of multiple liquid users with large flow rates. The return pipeline 121 in this embodiment is used to return the used medicine to the storage tank 11 to achieve closed-loop circulation. A pneumatic valve 13 is provided on the return pipeline 121 in this embodiment. The return pipeline in this embodiment recovers the medicine and retains residual heat, allowing the medicine to be reused and reducing heating time.

[0044] For example, in this embodiment, the material of the circulation pipe 12 is a corrosion-resistant material, including polytetrafluoroethylene or 316L stainless steel, and the roughness Ra of the inner wall of the circulation pipe 12 is ≤0.2μm.

[0045] In one specific embodiment, please refer to Figure 1 The temperature control structure 3 is disposed on the main pipeline 1221. In this embodiment, the temperature control structure 3 is disposed on the main pipeline 1221, and the liquid medicine is heated or cooled on the main pipeline 1221, which avoids the need to set the temperature control structure 3 on each first branch pipeline 1222, thus saving costs to a certain extent.

[0046] Furthermore, the main pipeline 1221 includes multiple parallel-connected second branch pipelines 1223, each of which is equipped with the temperature control structure 3. In this embodiment, the main pipeline 1221 includes multiple parallel-connected second branch pipelines 1223, which ensures that the high flow rate requirement on the main pipeline 1221 meets the high flow rate temperature control effect.

[0047] In one specific embodiment, please refer to Figure 1 and Figure 3 The circulation pipeline system 1 further includes a concentration monitoring module 6, which is installed on the first branch pipeline 122. In this embodiment, each first branch pipeline 122 is equipped with a concentration monitoring module 6. The concentration monitoring module 6 mainly monitors the fluid concentration parameters in real time in the circulation pipeline system 1 to ensure stable system operation and optimize control strategies.

[0048] After the circulation system in this embodiment is started, the liquid medicine begins to circulate throughout the closed loop under the drive of the liquid medicine driving device 2. Driven by the liquid medicine driving device 2, the liquid medicine flows from the storage tank 11 to the temperature control structure 3, so that the liquid medicine reaches the required temperature. The liquid medicine after temperature control then enters the pressure stabilizing device 4, which effectively eliminates flow fluctuations and stabilizes the system pressure. The buffered liquid medicine flows through the filtration device 5 in a laminar flow state, which completes the interception of particles and ensures cleanliness. Finally, the liquid medicine that meets the process requirements is output to the process end at a constant flow rate at the supply port 13. This circulation system ensures that the liquid medicine maintains stable physicochemical properties throughout the transmission process through a four-level control mechanism (power drive → precise temperature control → pressure stabilization → clean filtration), meeting the stringent requirements of the process for fluid quality.

[0049] In one specific embodiment, please refer to Figure 1 and Figure 2The temperature control structure 3 in this embodiment includes a Peltier device, which comprises a Peltier and a closed circuit. The Peltier has a first surface and a second surface. The first surface is used to heat or cool the circulation pipe 12, and the second surface is provided with a liquid cooling channel 33, which is used to cool the second surface when the first surface cools the circulation pipe 12. Exemplarily, when the closed circuit of the Peltier device in this embodiment carries a current in the first direction, the Peltier functions as a heating unit, and the first surface of the Peltier is used to heat the medicinal liquid in the circulation pipe 12. When the closed circuit of the Peltier device carries a current in the second direction, the Peltier functions as a cooling unit, and the first surface of the Peltier is used to cool the medicinal liquid in the circulation pipe 12. The structure and specific working principle of the Peltier device in this embodiment are existing technologies and will not be described in detail here. In this embodiment, the first surface of the Peltier is provided with a constant temperature bath 34, and part of the circulation pipe 12 is disposed in the constant temperature bath 34, where the circulation pipe 12 is heated or cooled. In this embodiment, the second side of the Peltier is provided with a liquid cooling channel 33, which is used to cool the second side while the first side is cooling the circulation pipe 12. The controller 32 is a PID controller. In this embodiment, the circulation pipe 12 is placed in a constant temperature bath 34, and the medicinal liquid in the circulation pipe 12 is heated or cooled by heating or cooling the medium in the constant temperature bath 34. The PID controller in this embodiment dynamically adjusts the heating or cooling power according to the real-time data of the temperature sensor 31. The PID controller in this embodiment is existing technology. The PID controller in this embodiment adopts a classic closed-loop control algorithm. By measuring the temperature deviation (the difference between the set value and the actual value) in real time, and combining the three parameters of proportional (P), integral (I), and derivative (D), it dynamically adjusts the output power (such as the heating or cooling power) to achieve precise temperature control. In this embodiment, the heating process is achieved by controlling the heating power through the controller 32, and the cooling process is achieved by controlling the cooling power through the controller 32. The temperature regulation accuracy of this embodiment can reach ±0.1~1℃.

[0050] Furthermore, a flow regulating valve 35 and a flow meter 36 are provided on the liquid cooling channel 33. In this embodiment, the liquid cooling channel 33 is used to cool the second side when the first side is cooling the circulating pipeline 12. If the flow rate of the cooling medium is low, the cooling effect will not be achieved; if the flow rate is too high, there will be no significant effect, and energy will be wasted. In this embodiment, the flow meter 36 can accurately obtain the flow rate of the cooling medium. In this embodiment, the flow regulating valve 35 can be set to a closed state to prevent the cooling medium from entering the liquid cooling channel 33 when cooling is not required. For example, the flow regulating valve 35 in this embodiment is a pneumatic valve, which is driven by compressed air to achieve rapid opening and closing operation. The compressed air of the pneumatic valve enables the valve to complete the opening or closing action in a short time. Moreover, the pneumatic valve has a simple structure and is easy to maintain, which can reduce the risk of system downtime due to mechanical failure.

[0051] Preferably, the cooling medium of the liquid cooling channel 33 is deionized water or ethylene glycol solution. Please refer to [link to relevant documentation]. Figure 2 The controller 32 is also used to monitor the temperature of the inlet A and outlet B of the liquid cooling channel 33 in real time. In this embodiment, deionized water or ethylene glycol solution is selected as the cooling medium. Deionized water has high thermal conductivity, enabling rapid heat transfer, and it is free of impurities, avoiding the risk of electrical conductivity. Ethylene glycol solution has better thermal conductivity than mineral oil and maintains good thermal conductivity even after mixing (e.g., at a 25% concentration). Furthermore, ethylene glycol solution has excellent antifreeze properties at low temperatures and is non-flammable and highly inert. The controller 32 monitors the temperature of the inlet A and outlet B of the liquid cooling channel 33 in real time. By measuring the temperature difference between inlet A and outlet B, the heat absorption capacity of the cooling medium can be dynamically assessed. If the temperature difference is too small, it may indicate that the cooling medium flow rate is too high or the heat load is low; if the temperature difference is too large, it may indicate that the cooling medium flow rate is insufficient.

[0052] The circulating system with temperature control function provided in this embodiment of the utility model includes a circulating pipeline system, a liquid driving device, and a temperature control structure. The circulating pipeline system forms a closed loop, including a liquid storage tank and a circulating pipeline for the circulation of liquid medicine. A liquid supply port is provided on the circulating pipeline. The liquid driving device is located on the circulating pipeline and is used to drive the liquid medicine to flow in the circulating pipeline. The temperature control structure includes a heating unit, a cooling unit, a temperature sensor, and a controller. The heating unit and the cooling unit are both located on the circulating pipeline. The temperature sensor is used to obtain the temperature of the liquid medicine in the circulating pipeline. The controller is signal-connected to the temperature sensor, the heating unit, and the cooling unit. Based on the temperature feedback, the power of the heating unit or the cooling unit is dynamically adjusted. This circulating system with temperature control function integrates the temperature control structure with the circulating pipeline, which greatly shortens the heat conduction path, enables rapid heating and cooling switching of the fluid in the circulating pipeline, maintains temperature uniformity under extreme working conditions, and optimizes the system energy efficiency ratio.

[0053] In the above description, the terms "an embodiment," "some embodiments," "example," "specific example," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0054] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A circulation system having a temperature control function, characterized by comprising: a circulation pump; a temperature sensor; a temperature control unit; and a control unit. include: The circulation pipeline system forms a closed loop, including a storage tank and a circulation pipeline for circulating the drug solution, wherein a supply port is provided on the circulation pipeline; A liquid medicine driving device is installed on the circulation pipeline to drive the liquid medicine to flow in the circulation pipeline; The temperature control structure includes a heating unit, a cooling unit, a temperature sensor, and a controller. The heating unit and the cooling unit are both located on the circulation pipeline. The temperature sensor is used to detect the temperature of the medicine liquid in the circulation pipeline. The controller is signal-connected to the temperature sensor, the heating unit, and the cooling unit, and is used to adjust the power of the heating unit or the cooling unit according to the temperature detected by the temperature sensor.

2. The circulation system with temperature control function according to claim 1, wherein, The circulation pipeline system also includes a pressure stabilizing device, which is located at the outlet end of the liquid driving device.

3. The circulation system with temperature control function according to claim 1, wherein, The circulation pipeline system also includes a filter device, which is located upstream of the liquid supply port.

4. The circulation system with temperature control function according to claim 1, wherein, The circulation pipeline includes a return pipeline connected to the inlet of the storage tank and a supply pipeline connected to the outlet of the storage tank. The supply pipeline includes a main pipeline and a plurality of parallel first branch pipelines connected to the main pipeline. The medicine driving device and the supply port are located on the branch pipelines. The return pipeline is used to return the used medicine to the storage tank to achieve closed-loop circulation.

5. The circulation system with temperature control function according to claim 4, wherein, The temperature control structure is located on the main pipeline.

6. The circulation system with temperature control function according to claim 4, wherein, The main pipeline includes multiple second branch pipelines arranged in parallel, and each second branch pipeline is equipped with the temperature control structure.

7. The circulation system with temperature control function according to claim 4, wherein, The circulation pipeline system also includes a concentration monitoring module, which is located on the first branch pipeline.

8. The circulating system with temperature control function according to any one of claims 1-7, characterized in that, The temperature control structure includes a Peltier device, which includes a Peltier and a closed circuit. The Peltier has a first side and a second side. The first side is used to heat or cool the circulation pipeline, and the second side is provided with a liquid cooling channel, which is used to cool the second side when the first side cools the circulation pipeline. The controller is a PID controller.

9. The circulation system with temperature control function according to claim 8, wherein, A flow regulating valve is installed on the liquid cooling channel.

10. The circulation system with temperature control function according to claim 9, wherein, The cooling medium of the liquid cooling channel is deionized water or ethylene glycol solution.

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