An exhaust gas treatment device

By combining a water washing tower, an alkali washing tower, and an adsorption box into a treatment system, the problems of equipment blockage and safety hazards caused by incineration in the treatment of waste gas from organosilicon production have been solved, achieving efficient waste gas treatment without incineration and ensuring equipment safety and environmental protection.

CN224404817UActive Publication Date: 2026-06-26ZHEJIANG YOURUIXIN CHEM CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG YOURUIXIN CHEM CO LTD
Filing Date
2025-07-30
Publication Date
2026-06-26

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Abstract

The application relates to the field of chemical equipment, and particularly discloses a waste gas treatment device, which comprises a washing tower, an adsorption box connected with the washing tower and an exhaust tower connected with the adsorption box, characterized in that the washing tower comprises a water washing tower and an alkali washing tower; waste gas passes through the water washing tower and the alkali washing tower in sequence along a pipeline; a gas inlet pipeline for the waste gas to enter is connected to the side wall of the water washing tower; the gas inlet pipeline is provided with a gas inlet valve; a nitrogen charging protection device is arranged on one side of the water washing tower; the water washing tower and the alkali washing tower are both connected with a water tank; a gas washing pipeline in communication with the water tank is arranged in the water washing tower and the alkali washing tower; the water tank of the alkali washing tower is connected with a dosing device; the water washing tower and the alkali washing tower are both provided with a gas outlet hole at the top for waste gas to flow out; and the exhaust tower is connected with a waste gas fan. The waste gas treatment device has the effects of reducing environmental pollution and improving safety during operation.
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Description

Technical Field

[0001] This application relates to the field of chemical equipment, and in particular to a waste gas treatment device. Background Technology

[0002] Organosilicon is widely used in electronics, information technology, energy, and materials due to its many unique properties, and is an indispensable material for many emerging industries. However, the production process of organosilicon generates a large amount of waste gas containing volatile organic compounds and silicon oxides. If this waste gas is discharged directly without effective treatment, it will cause serious environmental pollution and threaten human health.

[0003] In existing technologies, since the waste gas generated during the production of organosilicon contains a variety of chemical substances, it is generally disposed of by incineration to reduce production costs.

[0004] However, the particulate matter produced after incineration is prone to agglomeration and accumulation inside flues and pipes, leading to increased fan load, higher power consumption, reduced equipment lifespan, and increased operating costs. The exhaust gas produced after incineration also contains a large amount of soot, failing to meet increasingly stringent environmental protection requirements. Furthermore, if improper operation is not followed after shutdown and restart, residual exhaust gas in the pipes mixed with air can easily cause an explosion upon contact with a spark, posing a significant safety hazard. Utility Model Content

[0005] In order to reduce environmental pollution, this application provides a waste gas treatment device.

[0006] The waste gas treatment device provided in this application adopts the following technical solution:

[0007] A waste gas treatment device includes a scrubbing tower, an adsorption box connected to the scrubbing tower, and an exhaust tower connected to the adsorption box. The scrubbing tower includes a water scrubbing tower and an alkaline scrubbing tower. The waste gas passes through the water scrubbing tower and the alkaline scrubbing tower sequentially along a pipeline. The side wall of the water scrubbing tower is connected to an inlet pipe for the waste gas to enter. The inlet pipe is equipped with an inlet valve. A nitrogen purging protection device is installed on one side of the water scrubbing tower. A water tank is connected to one side of both the water scrubbing tower and the alkaline scrubbing tower. A scrubbing gas pipeline communicating with the water tank is installed inside both the water scrubbing tower and the alkaline scrubbing tower. A dosing device is connected to the water tank of the alkaline scrubbing tower. An exhaust gas fan is connected inside the exhaust tower.

[0008] By adopting the above technical solution, the waste gas passes through a water washing tower, an alkaline washing tower, and an adsorption box in sequence, thereby achieving the effect of removing impurities. Since the waste gas contains some chlorosilanes, and chlorosilanes will form sodium silicate gel when they encounter alkali, causing blockage inside the pipes, the waste gas first passes through the water washing tower to hydrolyze the chlorosilanes, thereby avoiding the sodium silicate gel from clogging the pipes and packing. Then, it passes through the alkaline washing tower to efficiently remove various acidic gases. Finally, it passes through the adsorption box to adsorb the remaining organic components, making the reaction more thorough.

[0009] Optionally, the air intake pipe bends towards the side closer to the bottom wall of the water washing tower.

[0010] By adopting the above technical solution, it is possible to ensure that the waste gas moves upward from the bottom of the water scrubbing tower, thereby fully contacting the water and ensuring the scrubbing effect. Furthermore, it allows the outlet of the inlet pipe to face downwards, preventing water mist from flowing directly into the inlet pipe and thus preventing liquid backflow into the reaction vessel, ensuring operational stability.

[0011] Optionally, at least two air scrubbing pipes are provided, and each air scrubbing pipe is connected to a spray head at its bottom.

[0012] By adopting the above technical solution, the spray head enables the washing liquid and alkaline washing liquid to be distributed in a mist form inside the tower, effectively increasing the contact area with the exhaust gas and improving the washing effect. Two or more washing pipes can achieve multi-layer spraying, realizing three-dimensional cross-coverage, improving the liquid phase coverage of the tower cross section, and enabling graded flow distribution, which can be adjusted according to the concentration of pollutants in the exhaust gas at the inlet, thereby effectively saving water resources and improving resource utilization efficiency.

[0013] Optionally, both the water washing tower and the alkali washing tower are provided with a demister layer at the top, and the demister layer includes multiple layers of wire mesh.

[0014] By adopting the above technical solution, the demister layer is built into the top of the tower, which can eliminate the need for connecting pipes, support frames and other equipment for external demisters, effectively saving plant space. Furthermore, since there are no external pipe connections, the risk of leakage of toxic waste gas is effectively reduced.

[0015] Optionally, a nitrogen pipeline is connected between the nitrogen charging protection device and the air inlet pipeline, and the nitrogen pipeline is equipped with an electric valve.

[0016] By adopting the above technical solution, the electric valve is normally closed, and only opens when the monitoring system alarms, allowing nitrogen gas to be distributed within the equipment space, effectively preventing accidents. The nitrogen pipeline is directly connected to the inlet pipeline, ensuring that nitrogen gas fills all pipelines and equipment, thereby effectively improving safety.

[0017] Optionally, a gas supply pipeline is connected between the alkaline washing tower and the adsorption box. The gas supply pipeline includes a main pipeline and at least two branch pipelines connected to the adsorption box. At least two adsorption channels connected to the branch pipelines are correspondingly provided inside the adsorption box, and activated carbon is provided in the adsorption channels.

[0018] By adopting the above technical solution, multiple adsorption channels enable uninterrupted operation of the adsorption chamber. Alternating switching between adsorption channels effectively reduces downtime and increases adsorption time, thus ensuring adsorption efficiency. Since activated carbon adsorption is exothermic, the multiple adsorption channels reduce the cross-sectional area of ​​each channel, decreasing the rate of heat accumulation and thus lowering the risk of fire in the adsorption chamber.

[0019] Optionally, air valves are provided on both sides of the adsorption channel.

[0020] By adopting the above technical solution, in the event of an accident, the closure of the side air valves completely isolates individual adsorption channels, preventing fire from spreading into the main pipe, thus preventing the accident from spreading and improving safety. The side air valves also allow for precise airflow distribution, reducing uneven adsorption.

[0021] Optionally, a fire damper is installed at the end of the main pipeline near the adsorption box, and the activation temperature of the fire damper is set to 65℃-75℃.

[0022] By adopting the above technical solution, in the event of a fire, the fire damper of the main pipeline can effectively prevent the fire from spreading along the main pipeline to the washing tower at the front end, further curbing the spread of the fire and reducing the risk of accident spread.

[0023] Optionally, the adsorption box is equipped with a differential pressure gauge.

[0024] By adopting the above technical solution, the differential pressure gauge can intuitively reflect the adsorption situation inside the adsorption box, enabling staff to understand the working status of the adsorption box in real time and achieve effective safety warnings.

[0025] Optionally, an exhaust gas monitoring device is connected to the top of the adsorption box, and the exhaust gas monitoring device is electrically connected to the nitrogen filling protection device and the exhaust gas fan respectively.

[0026] By adopting the above technical solution, when the concentration of exhaust gas in the adsorption box is detected to be too high, it means that the adsorption box has failed. At this time, the electric valve of the nitrogen filling protection device opens and the exhaust gas fan stops, so that nitrogen fills the equipment and prevents accidents from happening.

[0027] In summary, this application has the following beneficial effects:

[0028] 1. By setting up water washing towers, alkali washing towers and adsorption boxes, waste gas can be treated without incineration. The emitted waste gas does not contain particulate matter such as smoke and dust, ensuring environmental protection.

[0029] 2. By installing fire dampers, nitrogen protection devices, adsorption channels, and air valves, emergency pipeline shut-off can be achieved to ensure the safe operation of the equipment. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of the waste gas treatment device according to an embodiment of this application;

[0031] Figure 2 This is a schematic diagram of the structure of the water washing tower according to an embodiment of this application;

[0032] Figure 3 This is a schematic diagram of the structure of the alkali washing tower according to an embodiment of this application;

[0033] Figure 4 This is a schematic diagram of the adsorption box according to an embodiment of this application.

[0034] Explanation of reference numerals in the attached drawings: 1. Scrubbing tower; 11. Water scrubbing tower; 12. Alkali scrubbing tower; 13. Water tank; 14. Scrubbing gas pipeline; 141. Spray head; 15. Dosing device; 16. Gas outlet; 17. Demisting layer; 171. Wire mesh; 2. Adsorption box; 21. Adsorption channel; 22. Air valve; 23. Differential pressure gauge; 24. Waste gas monitoring device; 3. Exhaust tower; 31. Waste gas fan; 4. Inlet pipeline; 41. Inlet valve; 5. Nitrogen charging protection device; 51. Nitrogen pipeline; 52. Electric valve; 6. Gas transmission pipeline; 61. Main pipeline; 611. Fire damper; 62. Branch pipeline. Detailed Implementation

[0035] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0036] This application discloses an exhaust gas treatment device. (Refer to...) Figure 1 The waste gas treatment device includes a scrubbing tower 1 for washing the gas, an adsorption box 2 connected to the scrubbing tower 1, and an exhaust tower 3 connected to the adsorption box 2. An exhaust gas fan 31 is installed inside the exhaust tower 3. The waste gas first enters the scrubbing tower 1 to wash away acidic gases and some easily hydrolyzable gases. The spraying also reduces the temperature of the waste gas to the appropriate operating temperature required by subsequent treatment equipment. Then, it enters the adsorption box 2 to remove non-water-soluble and low-polarity organic components. Finally, the purified waste gas is discharged from the exhaust tower 3 through the exhaust gas fan 31.

[0037] Reference Figure 1 , Figure 2 and Figure 3The scrubbing tower 1 includes a water scrubbing tower 11 and an alkaline scrubbing tower 12. Both the water scrubbing tower 11 and the alkaline scrubbing tower 12 have exhaust vents 16 at their tops. An intake pipe 4 for exhaust gas is connected to the side wall of the water scrubbing tower 11. The intake pipe 4 bends towards the bottom wall of the water scrubbing tower 11, with its opening directly facing the bottom wall, ensuring a long upward movement path for the exhaust gas during scrubbing. The intake pipe 4 is equipped with an intake valve 41 and is also connected to a nitrogen purging protection device 5. Water tanks 13 are connected to the side walls of both the water scrubbing tower 11 and the alkaline scrubbing tower 12. Scrubbing gas pipes 14, connected to the water tanks 13, are also connected to the inside of both the water scrubbing tower 11 and the alkaline scrubbing tower 12. A dosing device 15 is connected to the water tank 13 of the alkaline scrubbing tower 12. The dosing device 15 contains a 5% sodium hydroxide aqueous solution. The exhaust gas passes sequentially through the water scrubbing tower 11 and the alkaline scrubbing tower 12 along the pipes.

[0038] The waste gas generated by organosilicon generally contains chlorosilanes. Chlorosilanes react with alkalis to form sodium silicate gel, causing blockage inside the pipes. Furthermore, chlorosilanes undergo irreversible hydrolysis with water to produce silanols and hydrochloric acid. Therefore, the waste gas first passes through a water scrubbing tower 11 to hydrolyze the chlorosilanes, thus preventing sodium silicate gel from clogging the pipes and packing. Then, it passes through an alkaline scrubbing tower 12 to efficiently remove various acidic gases. To ensure complete hydrolysis of the chlorosilanes in the waste gas, two water scrubbing towers 11 are provided in this embodiment; in other embodiments, the number of water scrubbing towers 11 can be increased or decreased according to the actual amount of waste gas produced.

[0039] Reference Figure 2 A nitrogen pipeline 51 connects the nitrogen filling protection device 5 to the air inlet pipeline 4. An electric valve 52 is connected inside the nitrogen pipeline 51. The electric valve 52 is normally closed; it only opens when the monitoring system inside the equipment alarms, allowing nitrogen to be distributed throughout the equipment space, effectively preventing accidents. The direct connection of the nitrogen pipeline 51 to the air inlet pipeline 4 ensures that nitrogen can fill all pipelines and equipment, thereby effectively improving safety.

[0040] Reference Figure 2 , Figure 3 Both the water washing tower 11 and the alkali washing tower 12 have at least two horizontally arranged gas washing pipes 14 inside. The bottom of the gas washing pipe 14 is connected to a spray head 141, and the spray heads 141 of adjacent gas washing pipes 14 are arranged in a staggered manner. The staggered arrangement of the spray heads 141, together with the multi-layer gas washing pipes 14, can achieve three-dimensional cross-coverage, improve the liquid phase coverage of the tower cross section, and thus effectively ensure the gas washing effect.

[0041] Reference Figure 2 , Figure 3Both the water washing tower 11 and the alkaline washing tower 12 are equipped with a demister layer 17 at their top, which comprises multiple layers of wire mesh 171. When gas carrying mist rises at a certain speed through the wire mesh 171, the mist collides with the fine filaments of the wire mesh 171 due to the inertia of the rising mist and adheres to the surface of the filaments. The diffusion of the mist on the surface of the filaments and the gravitational settling of the mist cause the mist to form larger droplets that flow along the filaments to the junction of two filaments. The wettability of the filaments, the surface tension of the liquid, and the capillary action of the filaments cause the droplets to grow larger and larger until the accumulated droplets are large enough that their own weight exceeds the resultant force of the rising force of the gas and the surface tension of the liquid, at which point the droplets separate from the filaments and fall. The demister layer 17 is directly installed inside the water washing tower 11 and the alkaline washing tower 12, eliminating the need for additional supports, pipes, etc., effectively saving space.

[0042] Reference Figure 4 A gas supply pipe 6 is connected between the top of the alkaline washing tower 12 and the adsorption box 2. The gas supply pipe 6 includes a main pipe 61 and two branch pipes 62. The adsorption box 2 is equipped with two adsorption channels 21 connected to the branch pipes 62. Activated carbon is installed in the adsorption channels 21. Air valves 22 are connected to both sides of the adsorption channels 21.

[0043] Multiple adsorption channels 21, in conjunction with the air valves 22 on both sides, can independently achieve the adsorption effect. After the waste gas enters the adsorption box 2, the opening and closing of the air valves 22 allows the waste gas to enter the corresponding adsorption channel 21. When any adsorption channel 21 is saturated or malfunctions, the adsorption box 2 can be continuously operated by closing the air valve 22 and opening the air valve 22 of another channel. At this time, the activated carbon can be replaced, thereby reducing downtime and ensuring the adsorption effect. Since activated carbon adsorption is exothermic, the multiple adsorption channels 21 reduce the cross-sectional area of ​​each channel, decreasing the rate of heat accumulation and thus reducing the risk of fire in the adsorption box 2.

[0044] Reference Figure 4 A fire damper 611 is installed at the end of the main pipeline 61 near the adsorption tank 2. The activation temperature range of the fire damper 611 is 65℃-75℃, and it is set to 70℃ in this embodiment. In the event of a fire in the adsorption tank 2, the fire damper 611 can effectively prevent the fire from spreading along the main pipeline 61 to the washing tower 1 at the front end, effectively curbing the spread of the fire and reducing the risk of the accident spreading.

[0045] Reference Figure 4The adsorption chamber 2 is equipped with a differential pressure gauge 23. The differential pressure gauge 23 monitors the pressure difference between the inlet and outlet of the adsorption chamber 2, directly reflecting the real-time changes in the internal state of the adsorption chamber 2, thus achieving effective state monitoring. An exhaust gas monitoring device 24 is connected to the top of the adsorption chamber 2. The exhaust gas monitoring device 24 is electrically connected to the nitrogen charging protection device 5 and the exhaust gas fan 31. The exhaust gas monitoring device 24 can monitor the concentration of exhaust gas in the adsorption chamber 2 in real time. When the concentration is detected to be too high, the exhaust gas monitoring device 24 sends an electrical signal. At this time, the electric valve 52 of the nitrogen charging protection device 5 opens, and the exhaust gas fan 31 stops, allowing nitrogen to fill the equipment and preventing accidents.

[0046] The implementation principle of the waste gas treatment device in this embodiment is as follows: the waste gas travels along the inlet pipe 4 and first enters the water washing tower 11. At this time, the spray head 141 starts spraying water downwards, and the waste gas moves from bottom to top to wash away easily hydrolyzable components such as chlorosilanes. Then it enters the alkaline washing tower 12, where the spray head 141 sprays alkaline solution downwards to remove acidic gases. Finally, it enters the adsorption box 2 to remove the remaining organic components, and the purified waste gas is discharged through the exhaust tower 3. This process does not require incineration or other operations, effectively reducing environmental pollution.

[0047] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A waste gas treatment device, comprising a scrubbing tower (1), an adsorption box (2) connected to the scrubbing tower (1), and an exhaust tower (3) connected to the adsorption box (2), characterized in that: The scrubbing tower (1) includes a water scrubbing tower (11) and an alkaline scrubbing tower (12). The waste gas passes through the water scrubbing tower (11) and the alkaline scrubbing tower (12) in sequence along the pipeline. The side wall of the water scrubbing tower (11) is connected to an air inlet pipe (4) for the waste gas to enter. The air inlet pipe (4) is equipped with an air inlet valve (41). A nitrogen filling protection device (5) is provided on one side of the water scrubbing tower (11). Both the water scrubbing tower (11) and the alkaline scrubbing tower (12) are connected to a water tank (13). Both the water scrubbing tower (11) and the alkaline scrubbing tower (12) are equipped with a scrubbing gas pipeline (14) that communicates with the water tank (13). The water tank (13) of the alkaline scrubbing tower (12) is connected to a dosing device (15). Both the water scrubbing tower (11) and the alkaline scrubbing tower (12) are provided with an exhaust port (16) for the waste gas to be discharged. An exhaust gas fan (31) is connected inside the exhaust tower (3).

2. The waste gas treatment device according to claim 1, characterized in that: The air intake pipe (4) bends toward the bottom wall of the water washing tower (11).

3. The waste gas treatment device according to claim 1, characterized in that: At least two air scrubbing pipes (14) are provided, and each air scrubbing pipe (14) is connected to a spray head (141) at its bottom.

4. The waste gas treatment device according to claim 1, characterized in that: The top of both the water washing tower (11) and the alkali washing tower (12) is provided with a demisting layer (17), which includes multiple layers of wire mesh (171).

5. The waste gas treatment device according to claim 1, characterized in that: A nitrogen pipeline (51) is connected between the nitrogen protection device (5) and the air inlet pipeline (4), and the nitrogen pipeline (51) is equipped with an electric valve (52).

6. The waste gas treatment device according to claim 1, characterized in that: A gas transmission pipeline (6) is connected between the alkaline washing tower (12) and the adsorption box (2). The gas transmission pipeline (6) includes a main pipeline (61) and at least two branch pipelines (62) connected to the adsorption box (2). At least two adsorption channels (21) connected to the branch pipelines (62) are provided inside the adsorption box (2). Activated carbon is provided in the adsorption channels (21).

7. The waste gas treatment device according to claim 6, characterized in that: Air valves (22) are provided on both sides of the adsorption channel (21).

8. The waste gas treatment device according to claim 6, characterized in that: A fire damper (611) is provided at one end of the main pipeline (61) near the adsorption box (2), and the starting temperature of the fire damper (611) is set to 65℃-75℃.

9. The waste gas treatment device according to claim 1, characterized in that: The adsorption box (2) is equipped with a differential pressure gauge (23).

10. The waste gas treatment device according to claim 1, characterized in that: The top of the adsorption box (2) is connected to an exhaust gas monitoring device (24), which is electrically connected to the nitrogen charging protection device (5) and the exhaust gas fan (31).