A guide roller for vacuum coating

By setting multiple elastomers on the outer peripheral wall of the vacuum coating guide roller, the problems of wrinkling and friction damage of the substrate during the transfer process are solved, and the flat conveying and flattening effect of the substrate is improved.

CN224411892UActive Publication Date: 2026-06-26江苏先导微电子科技有限公司

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
江苏先导微电子科技有限公司
Filing Date
2025-05-16
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

During vacuum coating, the substrate is prone to wrinkling during transfer. The smoothness and wrap angle design of the existing curved rollers cause uneven stress on the substrate, affecting the flattening effect and increasing friction damage.

Method used

Design a guide roller for vacuum coating, which adopts a base layer with the outer peripheral wall of the roller divided into two regions, and multiple elastomers are arranged around it. One end of the elastomer extends at one end of the roller body, and the other end extends at the other end, generating opposite elastic forces to flatten the substrate conveying and disperse stress through the deformation of the elastomer.

Benefits of technology

It enables the flat conveying of substrates, avoids substrate damage, improves flattening effect and speed, and reduces friction damage.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to vacuum plating technology field discloses a kind of for vacuum plating's guide roller, comprising: roller body, with first end and second end;Base layer, covering the outer circumferential wall of the roller body, the outer circumferential wall of the base layer is divided into first area and second area along the axial direction of the roller body;And multiple elastomers, it is around being located in the base layer, one end of the elastomer is mounted to the outer circumferential wall of the base layer, the other end of the elastomer located in the first area extends towards the direction close to the first end of the roller body, the other end of the elastomer located in the second area extends towards the direction close to the second end of the roller body.The utility model's for vacuum plating's guide roller, can make base material flat conveying, while can avoid the damage of base material.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a guide roller for vacuum coating. Background Technology

[0002] During vacuum coating, wrinkling can occur on the substrate during transport, affecting product quality. Currently, curved rollers are used to prevent this wrinkling. When the curved surface of the roller contacts the substrate, the substrate is compressed by the curved surface, resulting in stretching from the center outwards, thus achieving wrinkle removal. However, in practical applications, the surface smoothness of the curved roller significantly impacts the flattening effect. Insufficient smoothness can cause uneven stress, affecting the flattening result. Furthermore, the flattening effect of the curved roller depends on the lateral force generated by the substrate driving along the curved surface. Increasing the wrap angle of the substrate transport can enhance the flattening effect; however, a larger wrap angle can cause excessive stretching of the substrate, increasing frictional damage between the substrate and the roller surface. Utility Model Content

[0003] The purpose of this invention is to provide a guide roller for vacuum coating that enables the substrate to be transported flat while avoiding damage to the substrate.

[0004] To achieve the above objectives, this utility model provides a guide roller for vacuum coating, comprising:

[0005] The roller body has a first end and a second end;

[0006] A base layer, covering the outer peripheral wall of the roller body, the outer peripheral wall of the base layer being divided into a first region and a second region along the axial direction of the roller body; and

[0007] Multiple elastomers are arranged around the base layer. One end of each elastomer is mounted on the outer peripheral wall of the base layer. The other end of the elastomer located in the first region extends toward the first end of the roller. The other end of the elastomer located in the second region extends toward the second end of the roller.

[0008] In some embodiments, the plurality of elastomers are arranged in a straight line along the axial direction of the roller.

[0009] In some embodiments, the elastomers are equidistantly distributed along the axial direction of the roller and equidistantly distributed along the circumferential direction of the roller.

[0010] In some embodiments, the elastomer includes a connecting portion, an arcuate portion, and an extension portion connected in sequence, wherein the connecting portion is fixedly connected to the outer peripheral wall of the base layer.

[0011] In some embodiments, the connecting portion is perpendicular to the outer peripheral wall of the base layer, and the extension portion is parallel to the outer peripheral wall of the base layer.

[0012] In some embodiments, the extension of the elastomer located in the first region extends toward a first end of the roller; the extension of the elastomer located in the second region extends toward a second end of the roller.

[0013] In some embodiments, the surface of the connecting portion near the base layer has a texture, and the connecting portion is glued and fixedly connected to the base layer.

[0014] In some embodiments, the surface of the elastomer is coated with an antistatic layer.

[0015] In some embodiments, the elastomer is an elastic rubber body.

[0016] In some embodiments, the roller body is a hollow roller body.

[0017] This invention provides a guide roller for vacuum coating, which has the following advantages compared with the prior art:

[0018] Multiple elastic bodies are arranged around the base layer. One end of each elastic body is mounted on the outer peripheral wall of the base layer. The other end of the elastic body located in the first region extends toward the first end of the roller, and the other end of the elastic body located in the second region extends toward the second end of the roller. In this way, when the roller drives the elastic bodies to rotate, the elastic bodies in the first and second regions can generate opposite elastic forces on the substrate, thereby achieving flat conveying of the substrate. Furthermore, the arrangement of multiple elastic bodies disperses the stress on the substrate, preventing damage to the substrate. Attached Figure Description

[0019] Figure 1 A three-dimensional structural diagram of a guide roller for vacuum coating provided for an embodiment of this utility model.

[0020] Figure 2 This is a front view schematic diagram of a guide roller for vacuum coating provided in an embodiment of the present invention.

[0021] Figure 3 for Figure 2 A magnified schematic diagram of the structure at point B in the middle.

[0022] Figure 4 for Figure 2 Enlarged cross-sectional view of the structure along the AA direction.

[0023] Figure 5 for Figure 4 A magnified schematic diagram of the structure at point C.

[0024] In the figure: 1. Roller body; 2. Base layer; 3. Elastomer; 31. Connecting part; 32. Arc-shaped part; 33. Extension part. Detailed Implementation

[0025] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0026] It should be understood that in the description of this application, the terms "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. That is, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Furthermore, unless otherwise stated, "a plurality of" means two or more.

[0027] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0028] like Figures 1-5 As shown, the guide roller for vacuum coating in this embodiment of the present invention includes: roller body 1, base layer 2 and multiple elastomers 3.

[0029] Roller 1 has a first end and a second end. Specifically, roller 1 is made of metal.

[0030] The base layer 2 covers the outer peripheral wall of the roller body 1, and the outer peripheral wall of the base layer 2 is divided into a first region and a second region along the axial direction of the roller body. Specifically, the base layer 2 is made of a rigid material, such as engineering plastics.

[0031] Multiple elastomers 3 are arranged around the base layer 2. One end of each elastomer 3 is attached to the outer peripheral wall of the base layer 2. The other end of the elastomer 3 located in the first region extends toward the first end of the roller 1, and the other end of the elastomer 3 located in the second region extends toward the second end of the roller 1. In this way, the elastomers 3 in different regions exert elastic forces on the substrate in opposite directions, which is beneficial to the flattening of the substrate.

[0032] Based on the above structural arrangement, multiple elastic bodies 3 are arranged around the base layer 2. One end of the elastic body 3 is installed on the outer peripheral wall of the base layer 2. The other end of the elastic body 3 located in the first region extends towards the first end of the roller 1, and the other end of the elastic body 3 located in the second region extends towards the second end of the roller 1. In this way, when the roller 1 drives the elastic body 3 to rotate, the elastic body 3 in the first region and the elastic body 3 in the second region can generate opposite elastic forces on the substrate, thereby realizing the flat conveying of the substrate. Furthermore, the arrangement of multiple elastic bodies 3 disperses the stress of the substrate and avoids damage to the substrate.

[0033] like Figure 1 As shown, in some embodiments, multiple elastomers 3 are arranged in a straight line along the axial direction of the roller body 1. This ensures that the multiple elastomers 3 are arranged uniformly.

[0034] like Figure 5 As shown, in some embodiments, the elastic bodies 3 are equidistantly distributed along the axial direction of the roller body 1 and equidistantly distributed along the circumferential direction of the roller body 1. In this way, the multiple elastic bodies 3 are arranged uniformly.

[0035] like Figure 5 As shown, in some embodiments, the elastomer 3 includes a connecting portion 31, an arcuate portion 32, and an extension portion 33 connected in sequence, with the connecting portion 31 fixedly connected to the outer peripheral wall of the base layer 2. The connecting portion 31 is used for connection and installation, the extension portion 33 contacts the substrate, and the arcuate portion 32 can generate elastic force.

[0036] like Figure 5 As shown, in some embodiments, the connecting portion 31 is perpendicular to the outer peripheral wall of the base layer 2, and the extension portion 33 is parallel to the outer peripheral wall of the base layer 2. In this way, the extension portion 33 can generate a horizontal elastic force, which is beneficial for flattening the substrate.

[0037] like Figure 5 As shown, in some embodiments, the extension 33 of the elastomer 3 located in the first region extends toward the first end of the roller 1; the extension 33 of the elastomer 3 located in the second region extends toward the second end of the roller 1. Thus, the elastomers 3 in different regions exert elastic forces in opposite directions on the substrate, which is beneficial for flattening the substrate.

[0038] In some embodiments, the surface of the connecting portion 31 near the base layer 2 has a texture, and the connecting portion 31 is glued and fixedly connected to the base layer 2. In this way, the stability of installation is improved by increasing the contact area of ​​the connecting portion 31.

[0039] In some embodiments, the surface of the elastomer 3 is coated with an antistatic eliminator layer. Exemplarily, the antistatic eliminator layer is made of a material such as antimony-doped tin oxide, zinc-aluminum oxide-doped epoxy-modified silicone resin, indium-doped tin oxide, polycarbonate / acrylonitrile-styrene-acrylic acid copolymer, and a rubber composite containing conductive carbon powder. The conductive carbon powder can be carbon black, graphene, or carbon nanotubes. Thus, the antistatic eliminator layer can eliminate static electricity in the elastomer 3, preventing the substrate from adsorbing onto the elastomer 3 and further improving the flattening effect.

[0040] In some embodiments, the elastomer 3 is an elastic rubber body. Thus, the elastomer 3 has good elasticity.

[0041] In some embodiments, the roller body 1 is a hollow roller body. This reduces the weight of the roller body 1.

[0042] In the above embodiments, the guide roller does not require sensors or external drives. Pressure feedback and transmission are achieved solely through the elastic deformation of the elastomer 3. Static friction exists between the substrate and the elastomer 3, which avoids substrate wear. Multiple elastomers 3 can offset surface finish errors and absorb microscopic surface unevenness. The contact pressure is dynamically adjusted through local compression or stretching to avoid stress concentration in rigid contact. Pressure is transmitted at substrate wrinkles through the offset of adjacent elastomers 3, rather than relying on surface finish to maintain the normal force distribution. The flattening force is generated by the coordinated deformation of the elastomers 3, resulting in a faster flattening rate than traditional flattening rollers. Dynamic pressure feedback is achieved through the passive deformation of the elastomer 3. Tension is dispersed through local compression and stretching of the substrate. Due to the influence of the deformation of the elastomer 3 on the flattening movement distance, a smaller conveying wrap angle is sufficient to achieve the flattening effect.

[0043] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A guide roller for vacuum coating, characterized in that include: The roller body has a first end and a second end; A base layer covers the outer peripheral wall of the roller body, and the outer peripheral wall of the base layer is divided into a first region and a second region along the axial direction of the roller body; as well as Multiple elastomers are arranged around the base layer. One end of each elastomer is mounted on the outer peripheral wall of the base layer. The other end of the elastomer located in the first region extends toward the first end of the roller. The other end of the elastomer located in the second region extends toward the second end of the roller.

2. The guide roller for vacuum coating according to claim 1, characterized in that The plurality of the elastomers are arranged in a straight line along the axial direction of the roller.

3. The guide roller for vacuum coating according to claim 1, characterized in that The elastic bodies are equidistantly distributed along the axial direction of the roller body and equidistantly distributed along the circumferential direction of the roller body.

4. The guide roll for vacuum coating according to claim 1, characterized in that The elastomer includes a connecting portion, an arc-shaped portion, and an extension portion connected in sequence, wherein the connecting portion is fixedly connected to the outer peripheral wall of the base layer.

5. The guide roller for vacuum coating according to claim 4, characterized in that The connecting portion is perpendicular to the outer peripheral wall of the base layer, and the extension portion is parallel to the outer peripheral wall of the base layer.

6. The guide roller for vacuum coating according to claim 4, characterized in that The extension of the elastomer located in the first region extends toward a first end of the roller; the extension of the elastomer located in the second region extends toward a second end of the roller.

7. The guide roller for vacuum coating according to claim 4, characterized in that The surface of the connecting part near the base layer has a texture, and the connecting part is glued and fixedly connected to the base layer.

8. The guide roller for vacuum coating according to claim 1, characterized in that, The surface of the elastomer is coated with an antistatic layer.

9. The guide roller for vacuum coating according to claim 1, characterized in that, The elastomer is an elastic rubber.

10. The guide roll for vacuum coating according to claim 1, characterized in that The roller body is a hollow roller body.