Mpcvd apparatus for diamond growth

Abstract

The utility model discloses a kind of diamond growth with MPCVD device, belong to microwave plasma chemical vapor deposition technical field, including mode converter, the bottom of the mode converter is provided with support mechanism, the top of mode converter is provided with coaxial waveguide, the top of coaxial waveguide is provided with bottom plate, the outside of bottom plate is provided with dust cover mechanism, the top of bottom plate is fixedly connected with support ring, the top of support ring is provided with upper cover, the utility model is provided with support mechanism, triangular support block can be fixed in the L-shaped plate below mode converter by slot, and triangular support block has two, can be well supported to entire device, the perforated plate and plugboard of multiple devices are inserted, multiple mode converters can be connected into a row, when plugboard is inserted into perforated plate, will push plug rod to move up, while spring pulls plug rod, let plug rod insert into round hole, fix plugboard and perforated plate, by triangular support block, multiple devices can be supported and connected, can prevent device to dump.

Description

Technical Field

[0001] This invention belongs to the field of microwave plasma chemical vapor deposition technology, specifically relating to an MPCVD device for diamond growth. Background Technology

[0002] MPCVD equipment, or microwave plasma chemical vapor deposition equipment, is suitable for diamond production. It forms a diamond film by depositing plasma-ionized reactive gases on the surface of a seed crystal in a tray. Due to its advantages such as pollution-free microwave energy and pure gas raw materials, microwave plasma chemical vapor deposition (MPCVD) single crystal diamond growth technology has stood out among many single crystal diamond preparation methods and has become one of the most promising technologies for preparing large-size, high-quality single crystal diamonds.

[0003] The existing MPCVD apparatus for diamond growth uses a top cover, a microwave quartz shroud, and a water-cooled stage to form a reaction chamber, which provides a favorable guarantee for the preparation of high-quality diamonds. However, the apparatus cannot be placed stably on a table or the ground and is prone to tipping over, which can lead to damage. In addition, during use, the through holes can send external dust into the apparatus, affecting diamond production. Utility Model Content

[0004] To address the problems mentioned in the background section, this invention provides an MPCVD apparatus for diamond growth, featuring features that prevent the apparatus from tipping over and protect against dust.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an MPCVD device for diamond growth, comprising a mode converter, a support mechanism at the bottom of the mode converter, a coaxial waveguide at the top of the mode converter, a base plate at the top of the coaxial waveguide, a dust-proof mechanism on the outside of the base plate, a support ring fixedly connected to the top of the base plate, a top cover at the top of the support ring, and a viewing window at the top of the top cover.

[0006] The support mechanism includes a triangular support block, with a slot at the upper side of the triangular support block. An L-shaped plate is fixedly connected to the bottom of the mode converter near the slot, and a connecting mechanism is provided on the outer side of the triangular support block.

[0007] Preferably, the connecting mechanism includes a perforated plate, and a connecting column is fixedly connected to the side of the triangular support block away from the perforated plate, and an insert plate is fixedly connected to one end of the connecting column.

[0008] Preferably, the top of the perforated plate is slidably connected to a plug rod, a spring is provided on the outside of the plug rod, the bottom end of the spring is fixedly connected to the perforated plate, and a round hole is provided on the top of the plug plate.

[0009] Preferably, a recessed hole is provided on one side of the triangular support block, and a mounting bolt is provided on the inner side of the recessed hole.

[0010] Preferably, the dust-proofing mechanism includes a dust cover, the top of which has a sliding hole, and a support plate is fixedly connected to the side of the bottom plate located below the dust cover, the top of which has an arc-shaped groove.

[0011] Preferably, a brush is provided on the inner side of the sliding hole, and a handle is fixedly connected to the top of the brush.

[0012] Preferably, a rubber column is fixedly connected to one side of the top of the support plate.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model is equipped with a support mechanism. The triangular support block can be fixed in the L-shaped plate below the mode converter through the slot. There are two triangular support blocks, which can provide good support for the entire device. By inserting the perforated plates and plug plates of multiple devices, multiple mode converters can be connected end to end in a row. When the plug plate is inserted into the perforated plate, it will push the plug rod to move upward. At the same time, the spring pulls the plug rod to insert it into the round hole, fixing the plug plate and the perforated plate. Inserting the mounting bolt into the recessed hole can fix the triangular support block on the plane. By supporting and connecting multiple devices through the triangular support block, the device can be prevented from tipping over.

[0015] 2. This utility model is equipped with a dust-proof mechanism. The dust cover is circular and slightly larger in diameter than the support ring. The dust cover is inserted into the arc-shaped groove on the support plate from above, which blocks the through hole. By holding the handle and sliding the brush around the sliding hole, the outer walls of the dust cover and the support ring can be cleaned. When the dust cover is inserted into the arc-shaped groove, the rubber column will abut against the dust cover, increasing friction and preventing slippage. By covering the outside of the support ring with the dust cover, dust can be reduced from entering the device through the through hole. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a front view structural diagram of the present invention;

[0018] Figure 3 This is a schematic diagram of the support mechanism of this utility model;

[0019] Figure 4 This is a schematic diagram of the connection mechanism of this utility model;

[0020] Figure 5 This is a schematic diagram of the dust-proof mechanism of this utility model;

[0021] Figure 6 This utility model Figure 5 Enlarged structural diagram at point A;

[0022] In the diagram: 1. Mode converter; 2. Support mechanism; 21. Triangular support block; 22. Slot; 23. L-shaped plate; 24. Connecting mechanism; 241. Perforated plate; 242. Connecting column; 243. Insert plate; 244. Insert rod; 245. Spring; 246. Round hole; 25. Countersunk hole; 26. Mounting bolt; 3. Coaxial waveguide; 4. Base plate; 5. Dust shielding mechanism; 51. Dust shield; 52. Sliding hole; 53. Support plate; 54. Arc groove; 55. Handle; 56. Brush; 57. Rubber column; 6. Support ring; 7. Top cover; 8. Viewing window. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0024] Please see Figure 1-6 The present invention provides the following technical solution: an MPCVD device for diamond growth, including a mode converter 1, a support mechanism 2 at the bottom of the mode converter 1, a coaxial waveguide 3 at the top of the mode converter 1, a base plate 4 at the top of the coaxial waveguide 3, a dust-proof mechanism 5 on the outside of the base plate 4, a support ring 6 fixedly connected to the top of the base plate 4, a top cover 7 at the top of the support ring 6, and a viewing window 8 at the top of the top cover 7;

[0025] The support mechanism 2 includes a triangular support block 21. A slot 22 is provided on the upper side of the side of the triangular support block 21. An L-shaped plate 23 is fixedly connected to the bottom of the mode converter 1 near the slot 22. A connecting mechanism 24 is provided on the outer side of the triangular support block 21.

[0026] Specifically, the connecting mechanism 24 includes a perforated plate 241, a connecting post 242 fixedly connected to the side of the triangular support block 21 away from the perforated plate 241, and an insert plate 243 fixedly connected to one end of the connecting post 242.

[0027] By adopting the above technical solution, the triangular support block 21 can be fixed in the L-shaped plate 23 below the mode converter 1 through the slot 22. There are two triangular support blocks 21, which can provide good support for the entire device. By inserting the perforated plate 241 and the plug plate 243 of multiple devices, multiple mode converters 1 can be connected end to end in a row.

[0028] Specifically, a rod 244 is slidably connected to the top of the perforated plate 241, a spring 245 is provided on the outside of the rod 244, the bottom end of the spring 245 is fixedly connected to the perforated plate 241, and a round hole 246 is opened on the top of the insert plate 243.

[0029] By adopting the above technical solution, when the insert plate 243 is inserted into the perforated plate 241, it will push the insert rod 244 upward, and at the same time the spring 245 pulls the insert rod 244, so that the insert rod 244 is inserted into the round hole 246, thus fixing the insert plate 243 and the perforated plate 241.

[0030] Specifically, a recessed hole 25 is provided on one side of the triangular support block 21, and an installation bolt 26 is provided on the inner side of the recessed hole 25.

[0031] By adopting the above technical solution, the triangular support block 21 can be fixed on the plane by inserting the mounting bolt 26 into the recessed hole 25.

[0032] In this embodiment, a through hole is provided on the outer side of the support ring 6, the mode converter 1 is connected to the microwave system, the diamond is placed on the molybdenum platform inside the support ring 6, and the triangular support block 21 can be fixed in the L-shaped plate 23 below the mode converter 1 through the slot 22. There are two triangular support blocks 21, which can provide good support for the entire device. The perforated plate 241 and the insert plate 243 of multiple devices can be inserted to connect multiple mode converters 1 end to end in a row. When the insert plate 243 is inserted into the perforated plate 241, it will push the insert rod 244 to move upward. At the same time, the spring 245 pulls the insert rod 244 to insert the insert rod 244 into the round hole 246 to fix the insert plate 243 and the perforated plate 241. The mounting bolt 26 is inserted into the recessed hole 25 to fix the triangular support block 21 on the plane. The triangular support block 21 supports and connects multiple devices, which can prevent the device from tipping over. Example 2

[0033] The difference between this embodiment and embodiment 1 is that the dust-proof mechanism 5 includes a dust cover 51, the top of the dust cover 51 is provided with a sliding hole 52, and a support plate 53 is fixedly connected to the side of the bottom plate 4 located below the dust cover 51. The top of the support plate 53 is provided with an arc-shaped groove 54.

[0034] By adopting the above technical solution, the dust cover 51 is circular and its diameter is slightly larger than that of the support ring 6. By inserting the dust cover 51 into the arc groove 54 on the support plate 53 from above, the dust cover 51 can block the through hole.

[0035] Specifically, a brush 56 is provided on the inner side of the sliding hole 52, and a handle 55 is fixedly connected to the top of the brush 56.

[0036] By adopting the above technical solution, by holding the handle 55 and sliding the brush 56 around the sliding hole 52, the outer wall of the dust cover 51 and the support ring 6 can be cleaned.

[0037] Specifically, a rubber column 57 is fixedly connected to one side of the top of the support plate 53.

[0038] By adopting the above technical solution, when the dust cover 51 is inserted into the arc-shaped groove 54, the rubber column 57 will abut against the dust cover 51, increasing friction and preventing slippage.

[0039] In this embodiment, the dust cover 51 is annular, with a diameter slightly larger than that of the support ring 6. The dust cover 51 is inserted into the arc-shaped groove 54 on the support plate 53 from above, so that the dust cover 51 blocks the through hole. By holding the handle 55 and sliding the brush 56 around the sliding hole 52, the outer walls of the dust cover 51 and the support ring 6 can be cleaned. When the dust cover 51 is inserted into the arc-shaped groove 54, the rubber column 57 will abut against the dust cover 51, increasing friction and preventing slippage. By covering the outside of the support ring 6 with the dust cover 51, dust can be reduced from entering the device through the through hole.

[0040] The structure and operating principle of the mode converter 1, coaxial waveguide 3, base plate 4, support ring 6, top cover 7 and viewing window 8 in this utility model have been disclosed in Chinese patent application number CN202420757945.7, "An MPCVD device for diamond growth".

[0041] The working principle and usage process of this utility model are as follows: When in use, a through hole is provided on the outer side of the support ring 6, connecting the mode converter 1 to the microwave system. A diamond is placed on the molybdenum platform inside the support ring 6. A triangular support block 21 is fixed to the L-shaped plate 23 below the mode converter 1 via a slot 22. There are two triangular support blocks 21, providing excellent support for the entire device. Multiple perforated plates 241 and insert plates 243 are connected to form a row of mode converters 1. When the insert plate 243 is inserted into the perforated plate 241, it pushes the insert rod 244 upwards. Simultaneously, a spring 245 pulls the insert rod 244, causing it to insert into the round hole 246, thus connecting the insert plate 243 and the perforated plate 241. With plate 241 fixed, the mounting bolts 26 are inserted into the recessed hole 25 to fix the triangular support block 21 on the plane. The triangular support block 21 supports and connects multiple devices, preventing the device from tipping over. The dust cover 51 is annular, with a diameter slightly larger than the support ring 6. The dust cover 51 is inserted from above into the arc groove 54 on the support plate 53, which blocks the through hole. By holding the handle 55 and sliding the brush 56 around the sliding hole 52, the outer walls of the dust cover 51 and the support ring 6 can be cleaned. When the dust cover 51 is inserted into the arc groove 54, the rubber column 57 will abut against the dust cover 51, increasing friction and preventing slippage. By covering the outside of the support ring 6 with the dust cover 51, dust can be reduced from entering the device through the through hole.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An MPCVD apparatus for diamond growth, comprising a mode converter (1), characterized in that: The mode converter (1) is provided with a support mechanism (2) at the bottom, a coaxial waveguide (3) at the top of the mode converter (1), a base plate (4) at the top of the coaxial waveguide (3), a dustproof mechanism (5) at the outside of the base plate (4), a support ring (6) fixedly connected to the top of the base plate (4), a top cover (7) at the top of the support ring (6), and a viewing window (8) at the top of the top cover (7). The support mechanism (2) includes a triangular support block (21), and a slot (22) is provided on the upper side of the side of the triangular support block (21). An L-shaped plate (23) is fixedly connected to the bottom of the mode converter (1) near the slot (22), and a connecting mechanism (24) is provided on the outside of the triangular support block (21).

2. The MPCVD apparatus for diamond growth according to claim 1, characterized in that: The connecting mechanism (24) includes a perforated plate (241), and a connecting column (242) is fixedly connected to the side of the triangular support block (21) away from the perforated plate (241). A plug plate (243) is fixedly connected to one end of the connecting column (242).

3. The MPCVD apparatus for diamond growth according to claim 2, characterized in that: The top of the perforated plate (241) is slidably connected to a plug rod (244), and a spring (245) is provided on the outside of the plug rod (244). The bottom end of the spring (245) is fixedly connected to the perforated plate (241), and a round hole (246) is opened on the top of the plug plate (243).

4. The MPCVD apparatus for diamond growth according to claim 1, characterized in that: A recessed hole (25) is provided on one side of the triangular support block (21), and an installation bolt (26) is provided on the inner side of the recessed hole (25).

5. The MPCVD apparatus for diamond growth according to claim 1, characterized in that: The dust-proof mechanism (5) includes a dust cover (51), the top of which has a sliding hole (52), and a support plate (53) is fixedly connected to the side of the bottom plate (4) located below the dust cover (51). The top of the support plate (53) has an arc groove (54).

6. The MPCVD apparatus for diamond growth according to claim 5, characterized in that: A brush (56) is provided on the inner side of the sliding hole (52), and a handle (55) is fixedly connected to the top of the brush (56).

7. The MPCVD apparatus for diamond growth according to claim 5, characterized in that: A rubber column (57) is fixedly connected to one side of the top of the support plate (53).

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