Exhaust adapter box, exhaust device and electroplating equipment

Abstract

The utility model discloses an exhaust switching box, exhaust device and electroplating equipment relates to the field of semiconductor manufacturing technology. The exhaust switching box has the intercommunication cavity, two above branch port and at least one confluence port, each branch port and the exhaust outlet sealed butt joint of the electroplating unit adjacent to it, and the confluence port is arranged in any cavity wall of intercommunication cavity, is used for leading out the waste gas that converges, and different confluence ports are located in the same cavity wall or different cavity walls of intercommunication cavity. Realize each branch port can respectively with the exhaust outlet butt joint of at least two electroplating units, and utilize intercommunication cavity to make the waste gas of multiple exhausts confluence to the confluence port concentrated discharge, effectively realized the centralized collection and discharge of multiple electroplating unit waste gas, significantly reduced the number of independent exhaust pipeline in electroplating equipment, greatly optimized the pipeline layout in compact space, saved the internal space of electroplating equipment, and improved the overall space utilization.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to an exhaust adapter box, an exhaust device, and an electroplating equipment. Background Technology

[0002] In semiconductor wafer electroplating processes, electroplating equipment uses electroplating tanks and electroplating chambers to deposit thin metal films. During the electroplating process, corrosive and harmful waste gases are continuously emitted from the electroplating tanks and electroplating chambers, and toxic gases may also be generated. If such waste gases are released directly into the cleanroom without treatment, they will not only pollute the environment and affect human health, but also corrode the precision equipment in the workshop.

[0003] Electroplating equipment is usually configured with multiple electroplating tanks and electroplating chambers working simultaneously. Correspondingly, in terms of waste gas collection, if the waste gas exhaust pipes are complicated, the layout of a large number of exhaust pipes will face significant layout difficulties and spatial conflicts under the constraint of the highly compact internal space of the electroplating equipment. Utility Model Content

[0004] The purpose of this utility model is to provide an exhaust adapter box, an exhaust device, and an electroplating equipment, so as to save the layout space of the exhaust device and improve the space utilization of the electroplating equipment.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] An exhaust junction box is used to connect at least two adjacent electroplating units. The exhaust junction box has a connecting cavity, two or more branch ports and at least one confluence port. Each branch port is sealed to the exhaust gas outlet of the adjacent electroplating unit. The confluence port is located on any cavity wall of the connecting cavity to discharge the collected exhaust gas. Different confluence ports are located on the same cavity wall or different cavity walls of the connecting cavity.

[0007] As an alternative to the exhaust adapter box, the cross-section of the connecting cavity is a flat polygonal structure, and the extending direction of the connecting cavity is the same as the arrangement direction of the electroplating unit.

[0008] As an optional embodiment of the exhaust adapter box, the manifold is located on the top wall of the communicating cavity;

[0009] Alternatively, the confluence port may be located on the opposite cavity wall of the cavity where the diversion port is located.

[0010] As an optional embodiment of the exhaust adapter box, the flow cross-section of the connecting cavity gradually decreases from the end where the branch port is located to the end where the confluence port is located.

[0011] As an optional feature of the exhaust adapter box, a drain port is provided at the bottom of the connecting cavity.

[0012] As an alternative to the exhaust adapter box, the drain port is located at the lowest point of the communicating cavity.

[0013] As an optional solution for the exhaust adapter box, the cavity wall where the diversion port is located is provided with a first protrusion protruding outward, the diversion port passes through the first protrusion, and the end face of the first protrusion is provided with a first sealing groove, which is used to set a first sealing gasket.

[0014] And / or, the cavity wall where the manifold is located is provided with a second protrusion protruding outward, the manifold passes through the second protrusion, and the end face of the second protrusion is provided with a second sealing groove, the second sealing groove being used to provide a second sealing gasket.

[0015] As an optional solution for the exhaust adapter box, the exhaust adapter box is integrally formed from a corrosion-resistant plastic sheet or a metal sheet.

[0016] As an optional embodiment of the exhaust adapter box, the exhaust adapter box includes a support plate and an adapter plate disposed at the bottom of the support plate. The support plate is used to support at least two of the electroplating units, and the adapter plate and the bottom wall of the support plate form the communicating cavity.

[0017] An exhaust device includes an exhaust plate having an exhaust chamber and an exhaust adapter box as described in any of the above embodiments, wherein the manifold is connected to the air inlet of the exhaust plate.

[0018] An electroplating apparatus includes a frame, multiple electroplating units, and an exhaust device as described above. The multiple electroplating units are arranged sequentially along a first direction and / or a second direction of the frame. The exhaust device is disposed on the frame and located on one side of the electroplating units or sandwiched between the electroplating units.

[0019] The beneficial effects of this utility model are:

[0020] The exhaust adapter box provided by this utility model is used to connect at least two adjacent electroplating units. The exhaust adapter box has a connecting cavity, two or more branch ports, and at least one confluence port. Each branch port is sealed to the exhaust outlet of the adjacent electroplating unit, so that each branch port can be connected to the exhaust outlet of at least two electroplating units respectively. The connecting cavity is used to converge multiple exhaust gases to the confluence port for centralized discharge, which effectively realizes the centralized collection and discharge of exhaust gases from multiple electroplating units, significantly reduces the number of independent exhaust pipes in the electroplating equipment, greatly optimizes the pipe layout in a compact space, saves internal space of the electroplating equipment, and improves the overall space utilization rate.

[0021] The exhaust device provided by this utility model includes an exhaust plate with an exhaust chamber and the aforementioned exhaust transfer box. Exhaust gases from multiple electroplating units collected in the exhaust transfer box enter the exhaust plate through a manifold. This exhaust device integrates the exhaust gases from all the exhaust transfer boxes into the exhaust plate for subsequent treatment or discharge, achieving multi-stage exhaust gas convergence and centralized discharge. This not only significantly reduces the number of independent exhaust pipes within the electroplating equipment, greatly optimizing the exhaust layout in a compact space and saving internal space, but also simplifies the overall architecture of the exhaust device, reduces the complexity of pipe connections, and improves the overall reliability and maintainability of the exhaust device.

[0022] The electroplating equipment provided by this utility model, by applying the above-mentioned exhaust device, solves the layout problem of independent exhaust pipes for multiple electroplating units in a compact space, significantly saves internal space of the equipment, and greatly improves space utilization. At the same time, the high integration of the exhaust device and the simplification of the number of pipes effectively ensure the operational reliability of the electroplating equipment and greatly improve its maintainability. Attached Figure Description

[0023] Figure 1 This is a first structural schematic diagram of the exhaust adapter box provided in this embodiment of the utility model;

[0024] Figure 2 This is a schematic diagram of the second structure of the exhaust adapter box provided in this embodiment of the utility model;

[0025] Figure 3 This is a top view of the exhaust adapter box provided in this embodiment of the utility model;

[0026] Figure 4 yes Figure 3 Sectional view along line AA;

[0027] Figure 5 This is a schematic diagram of the electroplating equipment provided in an embodiment of the present invention.

[0028] In the picture:

[0029] 100. Rack;

[0030] 200. Electroplating unit; 201. Electroplating chamber; 202. Electroplating tank;

[0031] 300. Exhaust plate; 301. Exhaust port; 302. Air intake port;

[0032] 1. Support plate; 2. Transfer plate; 3. Connecting cavity; 4. Diverter port; 5. Manifold port; 6. Drain port; 7. First protrusion; 71. First sealing groove; 8. Second protrusion; 81. Second sealing groove. Detailed Implementation

[0033] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0034] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0035] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0036] Unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0037] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0038] like Figures 1-5As shown, this embodiment provides an exhaust transfer box for connecting at least two adjacent electroplating units 200, so that the exhaust gas of at least two adjacent electroplating units 200 can be centrally collected and discharged through an exhaust transfer box, which significantly reduces the number of independent exhaust pipes in the electroplating equipment, optimizes the pipe layout in a compact space, and improves space utilization.

[0039] For example, the electroplating unit 200 includes an electroplating chamber 201. Multiple electroplating chambers 201 are typically provided within the electroplating equipment. These chambers are arranged in a preset configuration. For adjacent electroplating chambers 201 located in the same row or column, exhaust gases are collected and discharged centrally through an exhaust transfer box, significantly reducing the space occupied by exhaust pipes.

[0040] like Figure 5 The electroplating equipment shown depicts a two-layer installation space with electroplating chambers 201. Each layer can accommodate at least two parallel electroplating chambers 201, with the two upper chambers 201 and the two lower chambers 201 perfectly aligned vertically. An exhaust adapter box connects the two parallel electroplating chambers 201 within the same installation space, allowing exhaust gases to be discharged through the same box, thus simplifying the exhaust structure and reducing installation space. Alternatively, the electroplating equipment can also have a single-layer installation space with the electroplating chambers 201.

[0041] The exhaust transfer box has a connecting cavity 3, two or more branch ports 4, and at least one manifold 5. Each branch port 4 is sealed to the exhaust outlet of the adjacent electroplating unit 200. The manifold 5 is located on any wall of the connecting cavity 3 to discharge the collected exhaust gas. Different manifolds 5 are located on the same wall or different walls of the connecting cavity 3. The two or more branch ports 4 are respectively set to correspond to the exhaust outlets of adjacent electroplating chambers 201, so that each branch port 4 can be sealed to the exhaust outlet of its corresponding electroplating chamber 201, ensuring the sealing of the connection between the branch port 4 and the exhaust outlet. The number of manifolds 5 can be set according to the exhaust gas discharge of the electroplating chambers 201 connected to the exhaust transfer box. If the total exhaust gas discharge of the two or more connected electroplating chambers 201 is large, two or three manifolds 5 can be set to ensure that the exhaust gas can be discharged quickly; if the total exhaust gas discharge of the two or more connected electroplating chambers 201 is small, only one manifold 5 needs to be set. The location of the manifold 5 needs to be determined based on the location of the exhaust plate 300 connected to the exhaust adapter box.

[0042] For example, the exhaust transfer box includes two branch ports 4 and one confluence port 5. The two branch ports 4 are spaced apart at one end of the exhaust transfer box, and the confluence port 5 is located at the other end. The two branch ports 4 are respectively connected to two electroplating chambers 201 located in the same row. The exhaust gas in the two electroplating chambers 201 located in the same row enters the connecting chamber 3 through the branch ports 4 connected to them. After the exhaust gas enters the connecting chamber 3, it flows from one end of the connecting chamber 3 to the confluence port 5 at the other end, and then is discharged through the confluence port 5.

[0043] In one embodiment, the cavity wall of the diversion port 4 has a first protrusion 7 protruding outward, through which the diversion port 4 passes. The end face of the first protrusion 7 has a first sealing groove 71 for mounting a first sealing gasket. The cavity wall of the confluence port 5 has a second protrusion 8 protruding outward, through which the confluence port 5 passes. The end face of the second protrusion 8 has a second sealing groove 81 for mounting a second sealing gasket. By mounting a first sealing gasket between the diversion port 4 and the exhaust outlet of the electroplating chamber 201, the sealing performance of the connection between the diversion port 4 and the electroplating chamber 201 is ensured. Similarly, by mounting a second sealing gasket between the confluence port 5 and the air inlet 302 of the exhaust plate 300 connected thereto, the sealing performance between the confluence port 5 and the exhaust plate 300 is ensured, preventing exhaust gas from overflowing and causing environmental pollution.

[0044] In one embodiment, the exhaust transfer box includes a support plate 1 and a transfer plate 2 disposed at the bottom of the support plate 1. The support plate 1 is used to support at least two electroplating units 200, and a communicating cavity 3 is formed between the transfer plate 2 and the bottom wall of the support plate 1. By concentrating and discharging the exhaust gas from at least two electroplating units 201 within the same support plate 1 through a transfer plate 2, the exhaust transfer box not only has the function of concentrating exhaust gas but also has the function of supporting the unit; no additional support component is required, further saving space within the electroplating equipment.

[0045] For example, such as Figure 3 and Figure 5 As shown, the support plate 1 is provided with two electroplating chambers 201. Two first protrusions 7 and one second protrusion 8 are all located inside the support plate 1. A through-body extending from the bottom to the top of the electroplating chamber 201 is provided on the outside of the electroplating chamber 201. A through cavity is provided inside the through cavity. The bottom of the through cavity is the exhaust gas outlet, which is connected to the first protrusion 7. The top of the through cavity extends to the opening of the electroplating chamber 201, so as to guide the exhaust gas at the opening of the electroplating chamber 201 through the through cavity to the diversion port 4 and into the connecting cavity 3. The second protrusion 8 is connected to the adapter. The adapter is connected to the exhaust plate 300 through the exhaust pipe. The exhaust plate 300 is provided with an exhaust cavity.

[0046] Of course, in other embodiments, the carrier plate 1 may also carry three or four or other numbers of electroplating chambers 201, which are reasonably set according to the arrangement of the number of electroplating chambers 201 and the exhaust volume in the electroplating equipment.

[0047] In one embodiment, the exhaust junction box is made of corrosion-resistant (e.g., acid-resistant) plastic sheet.

[0048] In another embodiment, the exhaust adapter box is integrally formed from a corrosion-resistant metal sheet. Since the gas volatilized within the electroplating chamber 201 is corrosive, the exhaust adapter box is made of a corrosion-resistant metal sheet to extend its service life. The integral forming process is easier to manufacture and reduces production costs.

[0049] The inner wall of the connecting cavity 3 is coated with an anti-corrosion layer. Since the connecting cavity 3 is in direct contact with the exhaust gas, the exhaust transfer box is made of corrosion-resistant metal plate, and an anti-corrosion layer is coated on the inner wall of the connecting cavity 3 to reduce the probability of exhaust gas leakage caused by corrosion of the connecting cavity 3.

[0050] For example, the anti-corrosion layer can be a high-performance polymer coating, such as a polytetrafluoroethylene coating.

[0051] Of course, in other embodiments, the anti-corrosion layer may be applied only to the inner wall of the connecting cavity 3.

[0052] In one embodiment, such as Figure 4 As shown, the cross-section of the connecting cavity 3 is a flat polygonal structure, and the extension direction of the connecting cavity 3 is the same as the arrangement direction of the electroplating unit 200. The flat structure design reduces the space occupied by the exhaust adapter box in the electroplating equipment, while the polygonal structure allows for the connection of multiple electroplating cavities 201 with the same and / or different arrangement directions. This reduces the volume occupied by a single exhaust adapter box while maximizing the number of electroplating cavities 201 connected by a single exhaust adapter box, thereby reducing the number of exhaust adapter boxes required in the electroplating equipment and saving internal space.

[0053] For example, the cross-section of the connecting cavity 3 is set as a quadrilateral structure. Of course, in other embodiments, the cross-section of the connecting cavity 3 may also be a hexagonal structure.

[0054] In one embodiment, the manifold 5 is located on the top wall of the connecting cavity 3. Since the exhaust gas flows upward at one end, placing the manifold 5 on the top wall of the connecting cavity 3 results in a faster exhaust gas discharge rate.

[0055] For example, two diversion ports 4 and one confluence port 5 are all located on the top cavity wall of the connecting cavity 3. The exhaust gas entering the connecting cavity 3 through the diversion ports 4 flows to the confluence port 5 under the action of suction pressure, and then is discharged from the confluence port 5.

[0056] In one embodiment, the flow cross-section of the connecting cavity 3 gradually decreases from the end where the branch port 4 is located to the end where the confluence port 5 is located. By gradually reducing the flow cross-section along the flow direction, a continuous accelerating flow field is formed on the path from the branch port 4 to the confluence port 5, which significantly improves the fluid kinetic energy and reduces the static pressure, while enhancing the wall shear force; its smooth transition characteristics can suppress flow separation and eddy generation, reduce energy loss, and maintain flow stability; finally, a high-speed converging flow is achieved at the confluence port 5, allowing the exhaust gas to quickly enter the exhaust plate 300.

[0057] Of course, in other embodiments, the confluence port 5 is located on the opposite cavity wall of the cavity wall where the branch port 4 is located. Placing the confluence port 5 on the cavity wall directly opposite the branch port 4 can cause the exhaust gas to flow out of the branch port 4 and directly impact the opposite cavity wall, forming a main channel that runs through the center of the connecting cavity 3. This induces a symmetrical and stable vortex structure on both sides of the cavity, effectively reducing the flow dead zone.

[0058] In one embodiment, a drain port 6 is provided at the bottom of the connecting cavity 3. Because the temperature inside the electroplating cavity 201 is very high, after the waste gas inside the electroplating cavity 201 enters the connecting cavity 3 through the diversion port 4, the temperature inside the connecting cavity 3 is lower, and some of the waste gas will condense into water. The water is quickly discharged through the drain port 6 to avoid affecting the discharge of waste gas inside the electroplating cavity 201.

[0059] In one embodiment, the drain outlet 6 is located at the lowest point of the connecting cavity 3. By placing the drain outlet 6 at the lowest point of the connecting cavity 3, water that has condensed at various locations within the connecting cavity 3 will accumulate at the lowest point, which is more conducive to the drainage of water.

[0060] like Figure 4 and Figure 5 As shown, this embodiment also provides an exhaust device, including an exhaust plate 300 with an exhaust chamber and an exhaust adapter box as described above. The manifold 5 is connected to the air inlet 302 of the exhaust plate 300. The exhaust gas in at least two electroplating chambers 201 is collected through the connecting cavity 3 in the exhaust adapter box, enters the exhaust chamber in the exhaust plate 300 through the manifold 5, and is then discharged to the plant through the exhaust port 301 of the exhaust plate 300. After being treated by the plant, it is discharged.

[0061] This exhaust system integrates the exhaust gases from all exhaust junction boxes into the exhaust plate 300 for further treatment or discharge, achieving multi-stage exhaust gas convergence and centralized discharge. This not only significantly reduces the number of independent exhaust pipes in the electroplating equipment, greatly optimizes the exhaust layout in a compact space and saves internal space, but also simplifies the architecture of the entire exhaust system, reduces the complexity of pipe connections, and improves the overall reliability and maintainability of the exhaust system.

[0062] This embodiment also provides an electroplating apparatus, including a frame 100, multiple electroplating units 200, and the aforementioned exhaust device. Exemplarily, the multiple electroplating units 200 are arranged sequentially along a first direction and / or a second direction of the frame 100. The exhaust device is located on one side of each electroplating unit 200 or sandwiched between the electroplating units 200, and an exhaust plate 300 is mounted on the frame 100. Along the first direction, electroplating units 200 at the same height exhaust through an exhaust adapter box. The exhaust plate 300 is provided with multiple air inlets 302 corresponding to different exhaust adapter boxes, so that the exhaust gases collected from the confluence ports 5 of the multiple exhaust adapter boxes can enter the exhaust chamber and then be discharged through the exhaust ports 301 of the exhaust plate 300.

[0063] It should be noted that the first direction is perpendicular to the second direction. In this embodiment, the first direction is the height direction of the rack 100, and the second direction is the width direction of the rack 100.

[0064] The electroplating unit 200 also includes an electroplating tank 202 that provides electrolyte to the electroplating chamber 201. Along the first direction, the electroplating tank 202 is located below the electroplating chamber 201. One electroplating tank 202 simultaneously provides electrolyte to two electroplating chambers 201 located within the same support plate 1, forming one electroplating unit 200. Exemplarily, two electroplating units 200 are arranged along the first direction, with two electroplating tanks 202 arranged side-by-side at the bottom of the frame 100. The air outlets of the two electroplating tanks 202 are connected to the air inlet 302 at the bottom of the exhaust plate 300 to discharge the electrolyte evaporating from the electroplating tanks 202 through the exhaust plate 300. The two electroplating units 200 share a single exhaust plate 300. The exhaust plate 300 is flat and mounted on the frame 100, simultaneously providing a component mounting section and / or serving as a space divider for the frame 100; this saves space and further improves space utilization.

[0065] This electroplating equipment solves the layout problem of multiple electroplating units with 200 independent exhaust pipes in a compact space, significantly saving internal space and greatly improving space utilization. At the same time, thanks to the highly integrated exhaust system architecture and the simplification of the number of pipes, the equipment's operational reliability is effectively guaranteed and the system's maintainability is greatly improved.

[0066] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. An exhaust adapter box characterized by, For connecting at least two adjacent electroplating units (200), the exhaust adapter box has a connecting cavity (3), two or more branch ports (4) and at least one confluence port (5); each branch port (4) is sealed to the exhaust outlet of the adjacent electroplating unit (200); the confluence port (5) is located on any cavity wall of the connecting cavity (3) for discharging the collected exhaust gas, and different confluence ports (5) are located on the same cavity wall or different cavity walls of the connecting cavity (3).

2. The exhaust adapter box of claim 1, wherein, The cross-section of the connecting cavity (3) is a flat polygonal structure, and the extension direction of the connecting cavity (3) is the same as the arrangement direction of the electroplating unit (200).

3. The exhaust adapter box of claim 1, wherein, The manifold (5) is located on the top cavity wall of the connecting cavity (3); Alternatively, the confluence port (5) is located on the opposite cavity wall of the cavity wall where the diversion port (4) is located.

4. The exhaust adapter box of claim 1, wherein, The flow cross section of the connecting cavity (3) gradually decreases from the end where the branch port (4) is located to the end where the confluence port (5) is located.

5. The exhaust adapter box of claim 4, wherein, The bottom of the connecting cavity (3) is provided with a drain port (6).

6. The exhaust adapter box of claim 5, wherein, The drain port (6) is located at the lowest point of the connecting cavity (3).

7. The vent adapter box of any one of claims 1-6, wherein, The cavity wall where the diversion port (4) is located is provided with a first protrusion (7) protruding outward. The diversion port (4) passes through the first protrusion (7). The end face of the first protrusion (7) is provided with a first sealing groove (71). The first sealing groove (71) is used to set a first sealing gasket. And / or, the cavity wall where the manifold (5) is located is provided with a second protrusion (8) protruding outward, the manifold (5) passes through the second protrusion (8), the end face of the second protrusion (8) is provided with a second sealing groove (81), and the second sealing groove (81) is used to set a second sealing gasket.

8. The vent adapter box of any one of claims 1-6, wherein, The exhaust adapter box is integrally formed from corrosion-resistant plastic sheet or metal sheet.

9. The vent adapter box of any one of claims 1-6, wherein, The exhaust transfer box includes a support plate (1) and a transfer plate (2) disposed at the bottom of the support plate (1). The support plate (1) is used to support at least two of the electroplating units (200). The transfer plate (2) and the bottom wall of the support plate (1) form the communicating cavity (3).

10. Exhaust device, characterized in that It includes an exhaust plate (300) with an exhaust chamber and an exhaust adapter box as described in any one of claims 1-9, wherein the manifold (5) is connected to the air inlet (302) of the exhaust plate (300).

11. A plating apparatus characterized by comprising: The device includes a frame (100), a plurality of electroplating units (200), and an exhaust device as described in claim 10. The plurality of electroplating units (200) are arranged sequentially along a first direction and / or a second direction of the frame (100), and the exhaust device is disposed on the frame (100) and located on one side of the electroplating units (200) or sandwiched between the electroplating units (200).

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