Automatic exhaust pressure regulating device

Abstract

The application relates to the technical field of automatic exhaust pressure regulation of semiconductor equipment, in particular to an automatic exhaust pressure regulation device which is provided with a driving execution module and a pressure regulating valve module, the pressure regulating valve module comprises a base bottom plate, a blade fixing plate, an iris blade and a blade guide plate, the iris blade is connected with the blade fixing plate and the blade guide plate through a rotating sliding groove structure, both ends of all the sliding grooves in the rotating sliding groove structure are provided with openings, foreign matters can be discharged from the openings along the iris blade, the accumulation of foreign matters in the sliding grooves is avoided, the blade is prevented from being blocked, and the operation reliability of the device in an impurity-containing gas environment is improved; through the setting of a blade guide plate and blade fixing plate composite constraint structure, the rotating movement of the driving execution module is converted into the accurate radial displacement of the iris blade, the diameter of an exhaust passage is continuously adjustable, the blade opening degree has small synchronous error, there is no airflow step mutation in the opening and closing process, and the exhaust flow control precision is ensured.

Description

Technical Field

[0001] This application relates to the field of automatic exhaust pressure regulation technology for semiconductor equipment, and in particular to an automatic exhaust pressure regulation device. Background Technology

[0002] Automatic exhaust pressure regulating devices are widely used in semiconductor manufacturing, chemical production, precision experimental equipment and other fields. Their main function is to achieve stable control of the internal air pressure of the equipment by adjusting the area of ​​the exhaust channel. The precise control of air pressure directly affects product quality and production safety.

[0003] Existing pressure regulating devices mostly adopt traditional structures such as butterfly valves and ball valves, which change the gas flow area by rotating or sliding the valve disc. However, as industrial production increasingly demands higher precision in air pressure control, equipment stability, and environmental adaptability, the limitations of traditional devices under complex operating conditions are becoming more and more apparent.

[0004] Currently, common automatic exhaust pressure regulating devices on the market have several shortcomings: First, traditional butterfly valves and ball valves, during regulation, must overcome significant gas resistance and frictional torque, resulting in high energy consumption and large size of the drive motor. Furthermore, key components such as the rotating shaft are prone to wear and breakage due to prolonged stress, leading to a high equipment failure rate. Second, when the exhaust contains impurities such as dust and crystalline particles, these foreign objects easily accumulate, causing valve jamming and severely affecting the timeliness and accuracy of regulation. This is particularly problematic in environments containing impurities, such as semiconductor exhaust gas treatment and chemical catalytic reactions, where equipment maintenance costs are high. Third, continuous and precise control of the exhaust channel diameter is impossible, and step-like fluctuations often occur during pressure regulation. These issues severely restrict the application effectiveness and development prospects of existing pressure regulating devices. Summary of the Invention

[0005] To address the above problems, this application provides an automatic exhaust pressure regulating device, which includes a drive execution module and a pressure regulating valve module. The pressure regulating valve module includes: a base plate, a blade fixing plate disposed on the base plate, a plurality of iris blades arranged in a ring, and a rotatable blade guide plate. The iris blades are connected to the blade fixing plate and the blade guide plate simultaneously through a rotating sliding groove structure. The drive execution module drives the blade guide plate to rotate to control the opening and closing of the iris blades. All grooves in the rotating sliding groove structure have open ends.

[0006] In one embodiment, the rotary sliding groove structure includes: a fixing plate groove disposed on the surface of the blade fixing plate, the number of which matches the number of iris blades; a guide plate groove disposed on the blade guide plate, the number of which matches the number of iris blades; a slider disposed on each of the iris blades, the slider being slidably fitted into the fixing plate groove; and a guide post disposed on each of the iris blades, the guide post being slidably fitted into the guide plate groove.

[0007] In one embodiment, the fixing plate groove is a straight groove, the outer end of each fixing plate groove extends to the outer edge of the blade fixing plate to form an outer edge opening, and the inner end of each fixing plate groove is connected to the adjacent fixing plate groove.

[0008] In one embodiment, the guide plate groove includes two radial straight grooves, the inner ends of the two straight grooves are connected by an arc-shaped groove, and the two ends of the guide plate groove extend to the outer edge of the blade guide plate to form an outer edge opening.

[0009] In one embodiment, each of the iris blades is triangular, and adjacent iris blades are interlocked by a sealing groove mechanism. The sealing groove mechanism includes a guide rib on one side of the iris blade and a dovetail groove on the other side. The guide rib can be embedded in the dovetail groove of the adjacent blade to form a continuous sliding sealing interface.

[0010] In one embodiment, a differential pressure sensor is also provided, which is connected to the inside of the device through a detection pipeline to detect the internal pressure of the device; the end of the detection pipeline is provided with a horn-shaped sensing port, which is located inside the device and the opening faces the same direction as the airflow; the differential pressure sensor is electrically connected to the controller; and a filter is provided on the detection pipeline.

[0011] In one embodiment, the controller receives a real-time pressure signal from a differential pressure sensor; when the actual pressure is lower than a set threshold, the drive execution module is started to rotate forward; when the actual pressure is higher than the set threshold, the drive execution module is started to rotate in reverse.

[0012] In one embodiment, the blade fixing plate is fixedly mounted on the base plate by a bolt assembly. The included angle between the fixing plate groove and the guide plate groove can be adjusted by rotating the blade fixing plate. The included angle α between the fixing plate groove and the guide plate groove is greater than 15°.

[0013] In one embodiment, the drive execution module includes a drive motor connected to a drive gear, which meshes with a gear disk disposed on the blade guide plate. The drive gear is made of a high-strength corrosion-resistant alloy. The outer circumferential surface of the drive gear is covered with a corrosion-resistant self-lubricating layer. A sealing structure is provided at the connection between the drive gear and the pressure regulating valve module. The sealing structure includes a fluororubber sealing ring and an isolation ring.

[0014] In one embodiment, a position sensor is also provided, which is fixed to the mounting surface of the cover plate facing the gear disk, and its sensing end is perpendicular to the rotation plane of the gear disk, for detecting the initial origin position of the gear disk.

[0015] The beneficial effects of this application are as follows:

[0016] This application discloses an automatic exhaust pressure regulating device. By setting a chute structure with openings at both ends, foreign objects (such as crystalline particles and dust) can be discharged from the openings as the iris blades move, avoiding the accumulation of foreign objects in the chute that could cause blade jamming and improving the operational reliability of the device in environments containing impurities. By setting a composite constraint structure of blade guide plate and blade fixing plate, the rotational motion of the drive execution module is converted into precise radial displacement of the iris blades. Combined with the design of a uniformly arranged ring-shaped blade group, the diameter of the exhaust channel can be continuously adjusted, the blade opening synchronization error is small, and there is no abrupt change in airflow during the opening and closing process, ensuring the accuracy of exhaust flow control. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this application;

[0018] Figure 2 For the explosion of this application Figure 1 ;

[0019] Figure 3 For the explosion of this application Figure 2 ;

[0020] Figure 4 This is a schematic diagram of differential pressure detection;

[0021] Figure 5 A cross-sectional view of the driver execution module;

[0022] Figure 6 A schematic diagram showing the included angle between the fixed plate groove and the guide plate groove;

[0023] Figure 7 This is a schematic diagram of the driver execution module;

[0024] Explanation of symbols in the diagram:

[0025] 1. Drive execution module; 11. Drive motor; 12. Drive gear; 13. Sealing ring; 14. Isolation ring; 15. Gear disk;

[0026] 2. Pressure regulating valve module; 21. Base plate; 22. Cover plate;

[0027] 23. Blade fixing plate; 231. Fixing plate groove;

[0028] 24. Iris blade; 241. Slider; 242. Guide post; 243. Dovetail groove;

[0029] 25. Blade guide plate; 251. Guide plate groove;

[0030] 3. Differential pressure sensor; 31. Detection pipeline; 32. Sensing port; 33. Filter;

[0031] 4. Pipelines;

[0032] 5. Position sensor. Detailed Implementation

[0033] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0034] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0035] like Figure 1-3 As shown, an automatic exhaust pressure regulating device is provided with a drive execution module 1 and a pressure regulating valve module 2. The pressure regulating valve module 2 includes: a base plate 21, a blade fixing plate 23 disposed on the base plate 21, a plurality of iris blades 24 arranged in a ring, and a rotatable blade guide plate 25. The iris blades 24 are connected to the blade fixing plate 23 and the blade guide plate 25 through a rotating sliding groove structure. The drive execution module 1 drives the blade guide plate 25 to rotate to control the opening and closing of the iris blades 24. All grooves in the rotating sliding groove structure are open at both ends.

[0036] Specifically, the automatic exhaust pressure regulating device is installed on pipe 4 and consists of drive execution module 1 and pressure regulating valve module 2. In pressure regulating valve module 2, base plate 21 serves as a supporting component, and blade fixing plate 23 is fixedly installed on the upper surface of base plate 21; multiple iris blades 24 are evenly arranged in a ring around the center of base plate 21, and their two sides are connected to blade fixing plate 23 and blade guide plate 25 respectively through a rotating sliding groove structure. Both blade fixing plate 23 and blade guide plate 25 are provided with grooves, and the sliding columns at both ends of iris blades 24 are respectively embedded in the corresponding grooves to form a slidable connection; blade guide plate 25 is rotatably disposed above iris blades 24, and its edge is engaged with the output end of drive execution module 1. When the equipment is running, the drive execution module 1 is activated, driving the blade guide plate 25 to rotate through gear meshing or worm gear transmission. When the blade guide plate 25 rotates, its slide groove will drive the sliding column of the iris blade 24 to move along the slide groove trajectory. The iris blade 24 can make radial opening and closing movements along the slide groove during rotation and sliding. That is, when the blade guide plate 25 rotates clockwise, the iris blade 24 retracts towards the center, the valve opening narrows, and the exhaust volume is reduced. When the blade guide plate 25 rotates counterclockwise, the iris blade 24 expands outward, the valve opening widens, and the exhaust volume is increased. By continuously adjusting the opening area in real time through radial movement, the dynamic balance of the air pressure inside the equipment is achieved. In this application, by setting a chute structure with openings at both ends, foreign objects (such as crystalline particles and dust) can be discharged from the openings as the iris blade 24 moves, avoiding the accumulation of foreign objects in the chute that could cause blade jamming, thus improving the operational reliability of the device in a gas environment containing impurities. By setting a composite constraint structure of blade guide plate 25 and blade fixing plate 23, the rotational motion of the drive execution module 1 is converted into the precise radial displacement of the iris blade 24. Combined with the design of a uniformly arranged ring-shaped blade group, the diameter of the exhaust channel can be continuously adjusted, the blade opening synchronization error is small, and there is no abrupt change in airflow during the opening and closing process, ensuring the accuracy of exhaust flow control.

[0037] like Figure 2 , 3 As shown, the rotary sliding groove structure includes: a fixed plate groove 231 disposed on the surface of the blade fixed plate 23, the number of which matches the number of iris blades 24; a guide plate groove 251 disposed on the blade guide plate 25, the number of which matches the number of iris blades 24; a slider 241 disposed on each iris blade 24, the slider 241 being slidably fitted into the fixed plate groove 231; and a guide post 242 disposed on each iris blade 24, the guide post 242 being slidably fitted into the guide plate groove 251.

[0038] Specifically, by setting a number of matching fixed plate grooves 231 and guide plate grooves 251, and correspondingly fitted sliders 241 and guide posts 242 on the iris blades 24, a composite constraint structure of "double grooves-double sliding posts" is formed, so that the force on each iris blade 24 is evenly distributed during the opening and closing process, avoiding the jamming phenomenon caused by single-point force. The synchronous action error of multiple blades can be controlled within 0.1mm, ensuring the accuracy of the exhaust channel cross-sectional area adjustment, and efficiently converting the rotational motion of the drive execution module 1 into the radial opening and closing of the iris blades 24, realizing continuous and precise adjustment of exhaust flow.

[0039] like Figure 2 As shown, each iris blade 24 is triangular, and adjacent iris blades 24 are interlocked and connected by a sealing groove mechanism. The sealing groove mechanism includes a guide rib (not shown in the figure) on one side of the iris blade 24 and a dovetail groove 243 on the other side. The guide rib can be embedded in the dovetail groove 243 of the adjacent blade to form a continuous sliding sealing interface.

[0040] Specifically, the sliding sealing interface formed by the guide rib embedded in the dovetail groove 243 enhances the overall rigidity of the blade group through the interlocking structure, avoiding blade vibration caused by air pressure fluctuations and ensuring the accuracy of exhaust channel cross-sectional area adjustment. The cooperation between the dovetail groove 243 and the guide rib provides additional guiding constraints for the opening and closing of the blades, reducing the lateral force between the slider 241 and the groove. When the blades are closed to the minimum opening, the tight fit between the guide rib and the dovetail groove 243 forms a seal, which is especially suitable for scenarios with strict airtightness requirements, such as chemical reactions.

[0041] like Figure 2 As shown, the fixed plate groove 231 is a straight groove. The outer end of each fixed plate groove 231 extends to the outer edge of the blade fixed plate 23 to form an outer edge opening. The inner end of each fixed plate groove 231 is connected to the adjacent fixed plate groove 231.

[0042] Specifically, the straight groove provides precise radial movement guidance for the slider 241 of the iris blade 24, avoiding swaying deviations during blade movement, enabling multiple blades to open and close synchronously, and ensuring the accuracy of exhaust channel cross-sectional area adjustment; the unobstructed through-opening structure at both ends allows foreign objects such as dust and crystals to be discharged from the outer edge opening or inner end connection as the blade moves, preventing foreign objects from accumulating in the groove and causing blade jamming; the inner ends of adjacent fixed plate grooves 231 are connected to form a through channel, which can reduce airflow resistance during slider 241 movement, further improving the smoothness of blade movement, and ensuring that the exhaust flow adjustment process is free of abrupt changes.

[0043] like Figure 3As shown, the guide plate groove 251 includes two radial straight grooves, the inner ends of the two straight grooves are connected by an arc-shaped groove, and the two ends of the guide plate groove 251 extend to the outer edge of the blade guide plate 25 to form an outer edge opening.

[0044] Specifically, the combination of radial linear slides and arc-shaped slides precisely converts the rotational motion of the drive execution module into the radial opening and closing motion of the iris blades. The arc-shaped slides connect to the inner end to avoid jamming when the slider moves to the limit position, making the blade opening and closing stroke more uniform. The opening design extending to the outer edge at both ends prevents the blade from jamming due to the accumulation of foreign objects in the slides.

[0045] like Figure 4 As shown, a differential pressure sensor 3 is also provided. The differential pressure sensor 3 is connected to the inside of the equipment through a detection pipeline 31 to detect the internal pressure of the equipment. The end of the detection pipeline 31 is provided with a horn-shaped sensing port 32. The sensing port 32 is located inside the equipment and the opening faces the same direction as the airflow. The differential pressure sensor 3 is electrically connected to the controller. A filter 33 is provided on the detection pipeline 31.

[0046] Specifically, by setting up a differential pressure sensor 3 and its matching detection pipeline 31, horn-shaped sensing port 32, and filter 33, accurate detection and reliable protection of the internal pressure of the equipment are achieved: the opening of the horn-shaped sensing port 32 faces the same direction as the airflow, which can reduce the detection deviation caused by airflow impact and ensure the real-time and accurate acquisition of pressure signals; the filter 33 on the detection pipeline 31 can effectively filter out impurities such as dust and crystals in corrosive gases, preventing the differential pressure sensor 3 from failing due to foreign matter adhesion or corrosion, and extending the service life of the sensor; the electrical connection between the differential pressure sensor 3 and the controller forms a closed-loop control link, which can quickly feed back real-time pressure data to the controller, thereby driving the execution module 1 to accurately adjust the opening of the pressure regulating valve module 2, and achieve dynamic balance of the internal air pressure of the equipment.

[0047] like Figure 1 As shown, the controller receives the real-time pressure signal from the differential pressure sensor 3; when the actual pressure is lower than the set threshold, the drive execution module 1 is started to rotate forward; when the actual pressure is higher than the set threshold, the drive execution module 1 is started to rotate in reverse.

[0048] Specifically, by configuring the controller to receive the real-time pressure signal from the differential pressure sensor 3 and driving the execution module 1 to rotate forward or backward based on the comparison result between the actual pressure and the set threshold, dynamic and precise control of the internal air pressure of the equipment is achieved. The closed-loop control logic can respond to pressure fluctuations in real time, avoiding the lag of traditional open-loop control.

[0049] like Figure 6As shown, the blade fixing plate 23 is fixedly installed on the base plate 21 by bolt assembly. By rotating the blade fixing plate 23, the included angle between the fixing plate groove 231 and the guide plate groove 251 can be adjusted. The included angle α between the fixing plate groove 231 and the guide plate groove 251 is greater than 15°.

[0050] Specifically, the blade fixing plate 23 is fixed to the base plate 21 by bolt assembly and is designed as a rotatable structure, so that the included angle between the fixing plate groove and the guide plate groove can be adjusted as needed and kept greater than 15°. The included angle between the two grooves can be flexibly adjusted according to the actual working conditions of the equipment (such as gas flow rate and pressure fluctuation range). By changing the radial movement trajectory of the iris blade 24, the exhaust flow control requirements under different scenarios can be accurately matched. The design of the included angle greater than 15° ensures that the sliding block 241 and the guide column 242 have sufficient movement stroke in the groove, avoiding blade movement jamming or force concentration caused by too small an included angle. At the same time, it makes the force on multiple iris blades 24 more uniform during opening and closing, further improving the accuracy of exhaust channel cross-sectional area adjustment.

[0051] like Figure 5 , 7 As shown, the drive execution module 1 includes a drive motor 11, which is connected to a drive gear 12. The drive gear 12 meshes with a gear disk 15 disposed on the blade guide plate 25. The drive gear 12 is made of a high-strength corrosion-resistant alloy. The outer circumferential surface of the drive gear 12 is covered with a corrosion-resistant self-lubricating layer. A sealing structure is provided at the connection between the drive gear 12 and the pressure regulating valve module 2. The sealing structure includes a fluororubber sealing ring 13 and an isolation ring 14.

[0052] Specifically, the drive gear 12 of the drive execution module 1 is made of a high-strength corrosion-resistant alloy and coated with a corrosion-resistant self-lubricating layer, such as RULON (a modified polytetrafluoroethylene material), on its outer circumference. At the same time, a sealing structure composed of a fluororubber sealing ring 13 and an isolation ring 14 is set at the connection between the drive gear 12 and the pressure regulating valve module 2. The high-strength corrosion-resistant alloy material can resist the erosion of strong corrosive gases in semiconductor, chemical and other scenarios, and avoid the failure of the drive gear 12 due to corrosion-induced tooth surface wear, breakage and other failures. The corrosion-resistant self-lubricating layer can reduce the frictional resistance during gear meshing. The sealing structure composed of the fluororubber sealing ring 13 and the isolation ring 14 can prevent the leakage of corrosive gases through the high chemical stability of fluororubber, and ensure the airtightness of the connection between the drive module and the valve module.

[0053] like Figure 2 As shown, a position sensor 5 is also provided. The position sensor 5 is fixed on the mounting surface of the cover plate 22 facing the gear disk 15. Its sensing end is perpendicular to the rotation plane of the gear disk 15 and is used to detect the initial origin position of the gear disk 15.

[0054] Specifically, the vertically aligned installation method ensures that the position sensor 5 can accurately capture the origin mark on the gear disk 15. Before the equipment is turned on, the controller obtains the origin position of the gear disk 15 through the position sensor 5, and uses this as the starting reference point to calculate the number of steps for the subsequent drive execution module 1. This can digitize and refine the movement path of the iris leaf 24. By setting a preset number of steps, a safety boundary is defined for the movement range of the iris leaf 24, which can effectively prevent the leaf from exceeding the travel range of the slide groove due to excessive opening and closing, thereby avoiding the risk of mechanical failures such as slide groove wear and component jamming, and ensuring the stable operation of the pressure regulating valve module 2.

[0055] This application discloses an automatic exhaust pressure regulating device, installed on pipeline 4, consisting of a drive execution module 1 and a pressure regulating valve module 2. When the device is running, the drive execution module 1 is activated, driving the blade guide plate 25 to rotate through gear meshing or worm gear transmission. When the blade guide plate 25 rotates, its slide groove drives the sliding column of the iris blade 24 to move along the slide groove trajectory. The iris blade 24 can make radial opening and closing movements along the slide groove during the rotation and sliding process. That is, when the blade guide plate 25 rotates clockwise, the iris blade 24 contracts towards the center, the valve opening narrows, and the exhaust volume is reduced; when the blade guide plate 25 rotates counterclockwise, the iris blade 24 expands outward, the valve opening widens, and the exhaust volume is increased. By continuously adjusting the opening area in real time through radial movement, the dynamic balance of the internal air pressure of the device is achieved. By setting a chute structure with openings at both ends, foreign objects (such as crystalline particles and dust) can be discharged from the openings as the iris blade 24 moves, avoiding the accumulation of foreign objects in the chute that could cause blade jamming and improving the operational reliability of the device in environments containing impurities. By setting a composite constraint structure of blade guide plate 25 and blade fixing plate 23, the rotational motion of the drive execution module 1 is converted into precise radial displacement of the iris blade 24. Combined with the design of a uniformly arranged ring-shaped blade group, the diameter of the exhaust channel can be continuously adjusted, the blade opening synchronization error is small, and there is no abrupt change in airflow during the opening and closing process, ensuring the accuracy of exhaust flow control.

[0056] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

[0057] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

Claims

1. An automatic exhaust pressure regulating device, comprising a drive execution module (1) and a pressure regulating valve module (2), wherein the pressure regulating valve module (2) includes: The base plate (21), the blade fixing plate (23) provided on the base plate (21), the multiple iris blades (24) arranged in a ring, and the blade guide plate (25) rotatably set, wherein the iris blades (24) are connected to the blade fixing plate (23) and the blade guide plate (25) through a rotating sliding groove structure, and the drive execution module (1) drives the blade guide plate (25) to rotate to control the opening and closing of the iris blades (24). The characteristic is that all the grooves in the rotating sliding groove structure are open at both ends.

2. The automatic exhaust pressure regulating device according to claim 1, characterized in that, The rotating sliding groove structure includes: a fixing plate groove (231) disposed on the surface of the blade fixing plate (23), the number of which matches the number of the iris blades (24); a guide plate groove (251) disposed on the blade guide plate (25), the number of which matches the number of the iris blades (24); a slider (241) disposed on each of the iris blades (24), the slider (241) being slidably fitted into the fixing plate groove (231); and a guide post (242) disposed on each of the iris blades (24), the guide post (242) being slidably fitted into the guide plate groove (251).

3. The automatic exhaust pressure regulating device according to claim 2, characterized in that, The fixed plate groove (231) is a straight groove. The outer end of each fixed plate groove (231) extends to the outer edge of the blade fixing plate (23) to form an outer edge opening. The inner end of each fixed plate groove (231) is connected to the adjacent fixed plate groove (231).

4. The automatic exhaust pressure regulating device according to claim 2, characterized in that, The guide plate groove (251) includes two radial straight grooves, the inner ends of the two straight grooves are connected by an arc groove, and the two ends of the guide plate groove (251) extend to the outer edge of the blade guide plate (25) to form an outer edge opening.

5. The automatic exhaust pressure regulating device according to claim 1, characterized in that, Each of the iris blades (24) is triangular, and adjacent iris blades (24) are interlocked by a sealing groove mechanism. The sealing groove mechanism includes a guide rib on one side of the iris blade (24) and a dovetail groove (243) on the other side. The guide rib can be embedded in the dovetail groove (243) of the adjacent blade to form a continuous sliding sealing interface.

6. The automatic exhaust pressure regulating device according to claim 1, characterized in that, A differential pressure sensor (3) is also provided. The differential pressure sensor (3) is connected to the inside of the equipment through a detection pipeline (31) to detect the internal pressure of the equipment. The end of the detection pipeline (31) is provided with a horn-shaped sensing port (32). The sensing port (32) is located inside the equipment and its opening faces the same direction as the airflow. The differential pressure sensor (3) is electrically connected to the controller. A filter (33) is provided on the detection pipeline (31).

7. An automatic exhaust pressure regulating device according to claim 6, characterized in that, The controller receives the real-time pressure signal from the differential pressure sensor (3); when the actual pressure is lower than the set threshold, the drive execution module (1) is started to rotate forward; when the actual pressure is higher than the set threshold, the drive execution module (1) is started to rotate in reverse.

8. An automatic exhaust pressure regulating device according to claim 2, characterized in that, The blade fixing plate (23) is fixedly installed on the base plate (21) by bolt assembly. The included angle between the fixing plate groove (231) and the guide plate groove (251) can be adjusted by rotating the blade fixing plate (23). The included angle α between the fixing plate groove (231) and the guide plate groove (251) is greater than 15°.

9. An automatic exhaust pressure regulating device according to claim 1, characterized in that, The drive execution module (1) includes a drive motor (11), which is connected to a drive gear (12). The drive gear (12) meshes with a gear disk (15) on the blade guide plate (25). The drive gear (12) is made of a high-strength corrosion-resistant alloy. The outer circumferential surface of the drive gear (12) is covered with a corrosion-resistant self-lubricating layer. A sealing structure is provided at the connection between the drive gear (12) and the pressure regulating valve module (2). The sealing structure includes a fluororubber sealing ring (13) and an isolation ring (14).

10. An automatic exhaust pressure regulating device according to claim 9, characterized in that, A position sensor (5) is also provided. The position sensor (5) is fixed on the mounting surface of the cover plate (22) facing the gear disk (15). Its sensing end is perpendicular to the rotation plane of the gear disk (15) and is used to detect the initial origin position of the gear disk (15).

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