Multi-stage purification device for electronic-grade sulfuric acid

Abstract

This utility model discloses a multi-stage purification device for electronic-grade sulfuric acid, specifically relating to the field of electronic-grade chemical production process technology. It includes a housing, with a filter mechanism slidably connected to the upper part of the housing's inner cavity, a conveying mechanism fixedly connected to the upper part of the housing's inner cavity, a heating mechanism fixedly connected to the middle of the housing's inner cavity, a storage assembly fixedly connected to the bottom wall of the housing's inner cavity, a purification mechanism slidably connected to the right side inside the storage assembly, and a discharge mechanism fixedly connected to the lower right side of the storage assembly. The multi-stage purification device for electronic-grade sulfuric acid of this utility model, through the filter mechanism, can intercept and filter particulate impurities contained in the added electronic-grade sulfuric acid; the heating mechanism facilitates heating of the inside of the conveying mechanism; and the purification mechanism facilitates adsorption of organic impurities contained in the purified sulfuric acid, improving the practicality and versatility of the device.

Description

Technical Field

[0001] This utility model relates to the field of electronic-grade chemical production process technology, and in particular to a multi-stage purification device for electronic-grade sulfuric acid. Background Technology

[0002] Electronic-grade sulfuric acid, also known as high-purity sulfuric acid, is a colorless, transparent, oily liquid with strong hygroscopic and oxidizing properties. It can dehydrate and carbonize carbohydrates such as cotton, paper, and wood, and can cause severe burns upon contact with the human body. Sulfuric acid can react with almost all metals and their oxides and hydroxides to form sulfates.

[0003] Electronic-grade sulfuric acid multi-stage purification equipment is an indispensable core device in high-end electronic manufacturing industries such as semiconductors and integrated circuits. Through multi-stage physical and chemical processing technology, it purifies industrial-grade sulfuric acid to an ultra-clean high-purity level that meets SEMI standards (such as G4 level), ensuring that the content of metal ions, particulate matter and organic impurities in the product is lower than ppb or even ppt level.

[0004] However, existing multi-stage purification devices for electronic-grade sulfuric acid cannot easily clean up particulate matter and other impurities filtered and intercepted during the sulfuric acid purification process. As a result, the pores of the filter screen are easily clogged with long-term use, which affects the purification efficiency of electronic-grade sulfuric acid. Utility Model Content

[0005] The main purpose of this invention is to provide an electronic-grade multi-stage sulfuric acid purification device, which can effectively solve the problem of not being able to easily clean up impurities such as particulate matter that have been filtered and intercepted.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] An electronic-grade sulfuric acid multi-stage purification device includes a housing. A feeding sleeve is fixedly connected to the upper part of the outer surface of the housing. A sealing cover is movably connected to the upper part of the outer surface of the feeding sleeve. A fixing frame is fixedly connected to the upper part of the outer surface of the housing. A filtration mechanism is slidably connected to the upper part of the inner cavity of the housing. A conveying mechanism is fixedly connected to the upper part of the inner cavity of the housing. A heating mechanism is fixedly connected to the middle of the inner cavity of the housing, and the heating mechanism is sleeved on the lower side outside the conveying mechanism. A storage assembly is fixedly connected to the bottom wall of the inner cavity of the housing. A purification mechanism is slidably connected to the right side inside the storage assembly. A discharge mechanism is fixedly connected to the lower right side of the storage assembly.

[0008] Preferably, the filtering mechanism includes a filter screen body, and a U-shaped plate is fixedly connected to the right end of the outer surface of the filter screen body. The front and right sides of the U-shaped plate are symmetrically threaded with fastening screws, and the outer surfaces of the two fastening screws are threaded together with the right side of the fixing frame.

[0009] Preferably, the material conveying mechanism includes a material conveying pipe, a discharge pipe is fixedly connected to the lower part of the inner cavity of the material conveying pipe, a solenoid valve is installed and fixedly mounted on the lower part of the inner cavity of the discharge pipe, and the upper part of the outer surface of the material conveying pipe is fixedly connected to the upper part of the inner cavity of the box.

[0010] Preferably, the heating mechanism includes a heat-conducting sleeve, a heating tube is fixedly installed in the inner cavity of the heat-conducting sleeve, and the lower part of the outer surface of the conveying pipe is sleeved in the middle of the inner cavity of the heat-conducting sleeve.

[0011] Preferably, the storage assembly includes a storage box, a guide plate is fixedly connected to the bottom wall of the inner cavity of the storage box, a limit frame is fixedly connected to the right side of the inner cavity of the storage box, and the lower part of the outer surface of the discharge pipe is fixedly connected to the middle position of the upper part of the storage box.

[0012] Preferably, the purification mechanism includes an activated carbon adsorption mesh body, a limiting plate is fixedly connected to the front end of the outer surface of the activated carbon adsorption mesh body, two fastening screws are symmetrically threaded on the upper and lower parts of the limiting plate, and the outer surface of the activated carbon adsorption mesh body is slidably connected to the inner cavity of the limiting frame, and the two fastening screws are threaded together to the lower part of the front end of the outer surface of the box.

[0013] Preferably, the discharge mechanism includes a discharge frame, the inner cavity of which is movably connected to a blocking plug, and the left side of the outer surface of the discharge frame is fixedly connected to the lower right side of the storage box.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. This utility model uses a filtration mechanism to intercept and filter particulate impurities in the added electronic-grade sulfuric acid, a conveying mechanism to transport the electronic-grade sulfuric acid, and a heating mechanism to heat the inside of the conveying mechanism, thus improving the practicality of the device. A storage component allows for the convenient storage of the electronic-grade sulfuric acid. A purification mechanism facilitates the adsorption of organic impurities in the purified sulfuric acid, and a discharge mechanism facilitates the discharge of the electronic-grade sulfuric acid, thus improving the practicality and versatility of the device.

[0016] 2. After the purified electronic-grade sulfuric acid is discharged into the inner cavity of the storage tank, an inclined guide plate is set on the bottom wall of the inner cavity of the storage tank, so that the electronic-grade sulfuric acid stored in the inner cavity of the storage tank can flow to the right under the action of gravity. After the plug is pulled out, the electronic-grade sulfuric acid can be smoothly discharged to the outside through the discharge frame, which improves the practicality and universality of the device. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the filtration mechanism of this utility model;

[0019] Figure 3 This is a schematic diagram of the heating mechanism structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the material conveying mechanism, material storage component, purification mechanism, and material discharge mechanism of this utility model.

[0021] In the diagram: 1. Box body; 2. Feeding sleeve; 21. Sealing cover; 3. Fixing frame; 4. Filtering mechanism; 41. Filter screen body; 42. U-shaped plate; 43. Fastening screw one; 5. Conveying mechanism; 51. Conveying pipe; 52. Discharging pipe; 53. Solenoid valve; 6. Heating mechanism; 61. Heat-conducting sleeve; 62. Heating element; 7. Storage assembly; 71. Storage box; 72. Guide plate; 73. Limiting frame; 8. Purification mechanism; 81. Activated carbon adsorption screen body; 82. Limiting plate; 83. Fastening screw two; 9. Discharge mechanism; 91. Discharge frame; 92. Blocking plug. Detailed Implementation

[0022] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0023] like Figure 1 As shown, the multi-stage purification device for electronic-grade sulfuric acid includes a housing 1. A feeding sleeve 2 is fixedly connected to the upper part of the outer surface of the housing 1. A sealing cover 21 is movably connected to the upper part of the outer surface of the feeding sleeve 2. A fixing frame 3 is fixedly connected to the upper part of the outer surface of the housing 1. A filter mechanism 4 is slidably connected to the upper part of the inner cavity of the housing 1, which can intercept and filter particulate impurities contained in the fed electronic-grade sulfuric acid. A conveying mechanism 5 is fixedly connected to the upper part of the inner cavity of the housing 1, which can convey electronic-grade sulfuric acid. A heating mechanism 6 is fixedly connected to the middle of the inner cavity of the housing 1, which can facilitate heating the inside of the conveying mechanism 5. The heating mechanism 6 is sleeved on the lower side of the outside of the conveying mechanism 5. A storage component 7 is fixedly connected to the bottom wall of the inner cavity of the housing 1, which can facilitate the storage of electronic-grade sulfuric acid. A purification mechanism 8 is slidably connected to the right side of the inner cavity of the storage component 7, which can facilitate the adsorption of organic impurities contained in the purified sulfuric acid. A discharge mechanism 9 is fixedly connected to the lower right side of the storage component 7, which can facilitate the discharge of electronic-grade sulfuric acid.

[0024] To achieve the goal of intercepting and filtering particulate impurities contained in the added electronic-grade sulfuric acid, refer to... Figure 2The filter mechanism 4 includes a filter screen body 41. A U-shaped plate 42 is fixedly connected to the right end of the outer surface of the filter screen body 41. Fastening screws 43 are symmetrically threaded to the front and right sides of the U-shaped plate 42, and the outer surfaces of the two fastening screws 43 are threaded to the right side of the fixed frame 3 on the side that is close to each other.

[0025] When it is necessary to clean the particulate matter impurities intercepted on the upper surface of the filter body 41, rotate the two fastening screws 43 to rotate and remove it from the right side of the fixing frame 3, and then pull the U-shaped plate 42 to slide the filter body 41 out from the upper part of the inner cavity of the box 1.

[0026] To achieve the purpose of transporting electronic-grade sulfuric acid, see [reference needed]. Figure 4 The conveying mechanism 5 includes a conveying pipe 51, and a discharge pipe 52 is fixedly connected to the lower part of the inner cavity of the conveying pipe 51. A solenoid valve 53 is installed and fixed in the lower part of the inner cavity of the discharge pipe 52, which can realize the function of smoothly discharging the heated and distilled purified sulfuric acid into the inner cavity of the storage tank 71 by opening the solenoid valve 53. The upper part of the outer surface of the conveying pipe 51 is fixedly connected to the upper part of the inner cavity of the tank 1.

[0027] To facilitate heating of the interior of the material conveying mechanism 5, see [reference needed]. Figure 3 The heating mechanism 6 includes a heat-conducting sleeve 61, and a heating tube 62 is installed and fixed inside the heat-conducting sleeve 61. It can realize the function of distilling and purifying electronic-grade sulfuric acid in the inner cavity of the heating conveying pipe 51. The lower part of the outer surface of the conveying pipe 51 is sleeved in the middle of the inner cavity of the heat-conducting sleeve 61.

[0028] For ease of storage of electronic-grade sulfuric acid, see [reference needed]. Figure 4 The storage assembly 7 includes a storage box 71. A guide plate 72 is fixedly connected to the bottom wall of the inner cavity of the storage box 71, which can facilitate the smooth discharge of sulfuric acid in the inner cavity of the storage box 71 to the right. A limiting frame 73 is fixedly connected to the right side of the inner cavity of the storage box 71, which can guide and limit the disassembly and assembly of the activated carbon adsorption mesh body 81. The lower part of the outer surface of the discharge pipe 52 is fixedly connected to the middle position of the upper part of the storage box 71.

[0029] To facilitate the adsorption of organic impurities in purified sulfuric acid, please refer to... Figure 4 The purification mechanism 8 includes an activated carbon adsorption mesh body 81. A limiting plate 82 is fixedly connected to the front end of the outer surface of the activated carbon adsorption mesh body 81. The upper and lower parts of the limiting plate 82 are symmetrically threaded with fastening screws 83. The outer surface of the activated carbon adsorption mesh body 81 is slidably connected to the inner cavity of the limiting frame 73. The two fastening screws 83 are threadedly connected to the lower part of the front end of the outer surface of the box 1.

[0030] When it is necessary to clean the organic impurities on the surface of the activated carbon adsorption mesh body 81, turn the two fastening screws 83 to remove it from the lower front end of the outer surface of the box 1, and then pull the limiting plate 82 to move the activated carbon adsorption mesh body 81 outward in the inner cavity of the limiting frame 73, so as to facilitate the cleaning of the organic impurities adsorbed by the activated carbon adsorption mesh body 81.

[0031] For the purpose of facilitating the discharge of electronic-grade sulfuric acid, please refer to... Figure 4 The discharge mechanism 9 includes a discharge frame 91, and a plug 92 is movably connected to the inner cavity of the discharge frame 91, which can facilitate the blocking and discharge of sulfuric acid in the inner cavity of the storage tank 71. The left side of the outer surface of the discharge frame 91 is fixedly connected to the lower right side of the storage tank 71.

[0032] It should be noted that the heating element 62 in this utility model is a far-infrared quartz heating element. The specific installation method, circuit connection method and control method of the heating element 62 are all conventional designs, and this utility model will not elaborate on them in detail.

[0033] The working principle of this invention is as follows: After the electronic-grade sulfuric acid to be purified is added into the inner cavity of the feeding sleeve 2, an appropriate amount of purification reagents are added. During this process, particulate impurities in the electronic-grade sulfuric acid will be filtered and intercepted in the upper part of the inner cavity of the filter screen body 41. Then, the sealing cap 21 is tightly closed on the upper part of the feeding sleeve 2. At this time, the heating tube 62 is driven to heat the electronic-grade sulfuric acid and purification reagents entering the inner cavity of the conveying pipe 51. By adopting vacuum distillation technology and equipped with corresponding pressurization equipment, low-boiling-point impurities such as water, organic matter and high-boiling-point metal salts are separated under the conditions of 150-200℃ and 1-10kPa, thereby completing the further purification of the electronic-grade sulfuric acid. Then, the solenoid valve 53 is opened, so that the electronic-grade sulfuric acid in the inner cavity of the conveying pipe 51 flows into the inner cavity of the storage tank 71. At this time, the liquid will flow along the upper surface of the guide plate 72 towards... The flow begins on the right. During this process, organic impurities in the purified electronic-grade sulfuric acid are filtered and adsorbed. Finally, the purified electronic-grade sulfuric acid will be discharged to the outside through the discharge frame 91. When it is necessary to clean the filter screen body 41, turn the two fastening screws 43 to release the lock on the fastening screws 43, and then pull the U-shaped plate 42 to slide it out from the upper part of the inner cavity of the box 1. At this time, the particulate impurities intercepted on the upper surface of the filter screen body 41 can be cleaned. When it is necessary to clean the left side of the outer surface of the activated carbon adsorption screen body 81, turn the two fastening screws 83 to release the lock on the limiting plate 82, and then pull the limiting plate 82 to pull the activated carbon adsorption screen body 81 forward along the inner cavity of the limiting frame 73. Then, the organic impurities intercepted on the left side of the activated carbon adsorption screen body 81 can be cleaned.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An electronic-grade sulfuric acid multi-stage purification device, comprising a housing (1), characterized in that: A feeding sleeve (2) is fixedly connected to the upper part of the outer surface of the box (1), and a sealing cover (21) is movably connected to the upper part of the outer surface of the feeding sleeve (2). A fixing frame (3) is fixedly connected to the upper part of the outer surface of the box (1). A filtering mechanism (4) is slidably connected to the upper part of the inner cavity of the box (1). A conveying mechanism (5) is fixedly connected to the upper part of the inner cavity of the box (1). A heating mechanism (6) is fixedly connected to the middle part of the inner cavity of the box (1), and the heating mechanism (6) is sleeved on the lower side outside the conveying mechanism (5). A storage assembly (7) is fixedly connected to the bottom wall of the inner cavity of the box (1). A purification mechanism (8) is slidably connected to the right side inside the storage assembly (7). A discharge mechanism (9) is fixedly connected to the lower right side of the storage assembly (7).

2. The electronic-grade sulfuric acid multi-stage purification device according to claim 1, characterized in that: The filter mechanism (4) includes a filter screen body (41). A U-shaped plate (42) is fixedly connected to the right end of the outer surface of the filter screen body (41). The front and right sides of the U-shaped plate (42) are symmetrically threaded with fastening screws (43), and the outer surfaces of the two fastening screws (43) are threaded together with the right side of the fixed frame (3).

3. The electronic-grade sulfuric acid multi-stage purification device according to claim 1, characterized in that: The material conveying mechanism (5) includes a material conveying pipe (51), a discharge pipe (52) is fixedly connected to the lower part of the inner cavity of the material conveying pipe (51), a solenoid valve (53) is installed and fixedly installed in the lower part of the inner cavity of the discharge pipe (52), and the upper part of the outer surface of the material conveying pipe (51) is fixedly connected to the upper part of the inner cavity of the box (1).

4. The electronic-grade sulfuric acid multi-stage purification device according to claim 3, characterized in that: The heating mechanism (6) includes a heat-conducting sleeve (61), a heating tube (62) is installed and fixed inside the heat-conducting sleeve (61), and the lower part of the outer surface of the feeding tube (51) is sleeved in the middle of the inner cavity of the heat-conducting sleeve (61).

5. The electronic-grade sulfuric acid multi-stage purification device according to claim 3, characterized in that: The storage assembly (7) includes a storage box (71), a guide plate (72) is fixedly connected to the bottom wall of the inner cavity of the storage box (71), a limit frame (73) is fixedly connected to the right side of the inner cavity of the storage box (71), and the lower part of the outer surface of the discharge pipe (52) is fixedly connected to the middle position of the upper part of the storage box (71).

6. The electronic-grade sulfuric acid multi-stage purification apparatus according to claim 5, characterized in that: The purification mechanism (8) includes an activated carbon adsorption mesh body (81). A limiting plate (82) is fixedly connected to the front end of the outer surface of the activated carbon adsorption mesh body (81). Two fastening screws (83) are symmetrically threaded on the upper and lower parts of the limiting plate (82). The outer surface of the activated carbon adsorption mesh body (81) is slidably connected to the inner cavity of the limiting frame (73). The two fastening screws (83) are threaded together to the lower part of the front end of the outer surface of the box (1).

7. The electronic-grade sulfuric acid multi-stage purification apparatus according to claim 5, characterized in that: The discharge mechanism (9) includes a discharge frame (91), the inner cavity of which is movably connected to a plug (92), and the left side of the outer surface of the discharge frame (91) is fixedly connected to the lower right side of the storage box (71).

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