Magnetron sputtering target core with good magnetic field uniformity

Abstract

This invention discloses a magnetron sputtering target core with good magnetic field uniformity, comprising a target core holder and a magnet holder, wherein the target core holder and the magnet holder are connected by multiple fasteners; four magnet groups are fixedly installed on the magnet holder, wherein two edge magnet groups are on both sides, and two middle magnet groups are between the two edge magnet groups; the two edge magnet groups are installed on the plane of the magnet holder, while the two middle magnet groups are installed on a raised step in the middle of the magnet holder; each of the four magnet groups is composed of multiple rectangular magnetic blocks arranged sequentially along the length direction. The four magnet groups of the magnetron sputtering target core in this invention adopt a special arrangement of Hellbeck array, which gives the target core advantages such as a strong unilateral magnetic field, good magnetic field uniformity, high magnetic field utilization, and self-shielding characteristics, thereby optimizing the magnetic field distribution in the vacuum coating chamber and further improving the coating effect.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering target technology, and in particular to a magnetron sputtering target with good magnetic field uniformity. Background Technology

[0002] Magnetron sputtering is a widely used film deposition process. The principle of sputtering is that an inert gas bombards the surface of a target material under the combined action of a magnetic field and an electric field. Molecules, atoms, ions, and electrons on the target surface are sputtered out and deposited onto the substrate to form a film.

[0003] The quality requirements for magnetron sputtering coating equipment are very high during the coating process, and the magnetic field strength distribution of the magnetron sputtering cathode is particularly important.

[0004] Typically, the target core (also known as a magnetic rod) in coating equipment consists of three magnet groups, and the working surface of each magnet group is a single-level surface. Although the front side (i.e. the working surface) of the target core is a strong magnetic surface, a weak magnetic surface is also formed on the back side of the target core. This weak magnetic surface is also located in the vacuum coating chamber, which will affect the magnetic field uniformity of the strong magnetic surface, thereby affecting the coating effect. Utility Model Content

[0005] The purpose of this invention is to provide a magnetron sputtering target core with good magnetic field uniformity, so as to solve the problem of uneven magnetic field of the target core in existing coating equipment.

[0006] To solve the above-mentioned technical problems, this utility model provides a magnetron sputtering target core with good magnetic field uniformity, including a target core holder and a magnet holder, wherein the target core holder and the magnet holder are connected by a plurality of fasteners;

[0007] Four magnet groups are fixedly installed on the magnet base, including two edge magnet groups on both sides and two middle magnet groups between the two edge magnet groups.

[0008] The two edge magnet assemblies are mounted on the plane of the magnet base, while the two middle magnet assemblies are mounted on the raised step in the middle of the magnet base;

[0009] Each of the four magnet groups consists of multiple rectangular magnetic blocks arranged sequentially along its length.

[0010] Preferably, the two edge magnet groups and the two middle magnet groups are each equipped with an independent square tube, which is fixedly connected to the magnet base to serve as a sealing cover for the four magnet groups.

[0011] Preferably, the working surfaces of the rectangular magnetic blocks in the two edge magnet groups are multi-level surfaces, and the N poles of both are oriented towards the middle magnet group.

[0012] Preferably, the intermediate magnet group includes a first intermediate magnet group and a second intermediate magnet group, which are installed side by side between the two edge magnet groups.

[0013] Preferably, the working surface of the first rectangular magnetic block on the left side of the first intermediate magnet group is a single-level S-pole surface, and the working surfaces of the second and third rectangular magnetic blocks are multi-level surfaces, with the S poles all facing the edge magnet group; the working surface of the first rectangular magnetic block on the right side of the first intermediate magnet group is a single-level S-pole surface, and the working surface of the second rectangular magnetic block is multi-level surface, with the S poles all facing the edge magnet group.

[0014] Preferably, the working surfaces of the rectangular magnetic blocks in the middle part of the first intermediate magnet group are all N-pole single-level surfaces.

[0015] Preferably, the working surface of the first rectangular magnetic block on the left side of the second intermediate magnet group is a single-level S-pole surface, the working surface of the second rectangular magnetic block is a multi-level surface, and the S-pole faces the edge magnet group; the working surface of the first rectangular magnetic block on the right side of the second intermediate magnet group is a single-level S-pole surface, the working surfaces of the second and third rectangular magnetic blocks are both multi-level surfaces, and the S-pole faces the edge magnet group.

[0016] Preferably, the working surfaces of the rectangular magnetic blocks in the middle part of the second intermediate magnet group are all N-pole single-level surfaces.

[0017] Preferably, the fastener includes a double-ended screw and a locking nut, wherein one end of the double-ended screw passes through the target core seat and is threadedly connected to the magnet seat, and the other end is fixed to the target core seat by the locking nut.

[0018] Preferably, at least one set of protective components is added to the outside of the target core seat. The protective components include a protective frame and multiple rollers. The protective frame is fixedly connected to the target core seat, and the rollers are arranged along the axial direction of the target core seat and are rotatably connected to the protective frame.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] In this invention, the four magnet groups of the magnetron sputtering target core adopt a special arrangement of Heilbeck array, which gives the target core advantages such as strong unilateral magnetic field, good magnetic field uniformity, high magnetic field utilization and self-shielding characteristics, thereby optimizing the magnetic field distribution in the vacuum coating chamber and further improving the coating effect. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a magnetron sputtering target core with good magnetic field uniformity provided by this utility model;

[0022] Figure 2This is a front view of a magnetron sputtering target core with good magnetic field uniformity provided by this utility model;

[0023] Figure 3 This is a schematic diagram of the installation of the four magnet groups provided by this utility model;

[0024] Figure 4 This is an installation diagram of the square tube provided by this utility model;

[0025] Figure 5 This is a side view of a magnetron sputtering target core with good magnetic field uniformity provided by this utility model;

[0026] Figure 6 yes Figure 5 A sectional view;

[0027] Figure 7 This is a layout diagram of the intermediate magnet assembly provided by this utility model;

[0028] Figure 8 This is a diagram showing the magnetic field distribution formed by four groups of magnets.

[0029] In the diagram: 1. Target core holder; 2. Magnet holder; 3. Fastener; 4. Edge magnet assembly; 5. Middle magnet assembly; 6. Square tube; 301. Double-ended screw; 302. Locking nut; 501. First middle magnet assembly; 502. Second middle magnet assembly; 7. Protective component; 701. Protective frame; 702. Roller. Detailed Implementation

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0031] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0033] This invention provides a magnetron sputtering target core with good magnetic field uniformity. Please refer to [link / reference]. Figure 1 and Figure 2 It includes a target core seat 1 and a magnet seat 2, wherein the target core seat 1 and the magnet seat 2 are connected by a plurality of fasteners 3.

[0034] For details, please continue reading. Figure 3 Four magnet groups are fixedly installed on the magnet base 2, including two edge magnet groups 4 on both sides and two middle magnet groups 5 between the two edge magnet groups 4; the two edge magnet groups 4 are installed on the plane of the magnet base 2, while the two middle magnet groups 5 are installed on the raised step in the middle of the magnet base 2; each of the four magnet groups is composed of multiple rectangular magnetic blocks arranged sequentially along the length direction.

[0035] For further details, please refer to Figure 4-6 Each of the two edge magnet groups 4 and the two middle magnet groups 5 is equipped with an independent square tube 6, which is fixedly connected to the magnet base 2 and serves as a sealing cover for the four magnet groups.

[0036] For further details, please refer to Figure 7The working surfaces of the rectangular magnetic blocks in the two edge magnet groups 4 are all multi-level surfaces, and the N poles are all facing the middle magnet group 5.

[0037] The intermediate magnet group 5 includes a first intermediate magnet group 501 and a second intermediate magnet group 502, which are installed side by side between the two edge magnet groups 4.

[0038] The working surface of the first rectangular magnetic block on the left side of the first intermediate magnet group 501 is a single-level S-pole surface, and the working surfaces of the second and third rectangular magnetic blocks are multi-level surfaces, with the S poles facing the edge magnet group 4; the working surface of the first rectangular magnetic block on the right side of the first intermediate magnet group 501 is a single-level S-pole surface, and the working surface of the second rectangular magnetic block is multi-level surface, with the S poles facing the edge magnet group 4.

[0039] Furthermore, the working surfaces of the rectangular magnetic blocks in the middle portion of the first intermediate magnet group 501 are all N-pole single-level surfaces.

[0040] The working surface of the first rectangular magnetic block on the left side of the second intermediate magnet group 502 is a single-level S-pole surface, and the working surface of the second rectangular magnetic block is a multi-level surface, with the S-pole facing the edge magnet group 4; the working surface of the first rectangular magnetic block on the right side of the second intermediate magnet group 502 is a single-level S-pole surface, and the working surfaces of the second and third rectangular magnetic blocks are both multi-level surfaces, with the S-pole facing the edge magnet group 4.

[0041] Furthermore, the working surfaces of the rectangular magnetic blocks in the middle part of the second intermediate magnet group 502 are all N-pole single-level surfaces.

[0042] In this invention, the four magnet groups of the magnetron sputtering target core are arranged in a special Halebeck array, forming a magnetic field such as... Figure 8 As shown, this gives the target core advantages such as a strong unilateral magnetic field, good magnetic field uniformity, high magnetic field utilization, and self-shielding characteristics, thereby optimizing the magnetic field distribution in the vacuum coating chamber and further improving the coating effect.

[0043] For details, please continue reading. Figure 6 The fastener 3 includes a double-ended screw 301 and a locking nut 302, wherein one end of the double-ended screw 301 passes through the target core seat 1 and is threadedly connected to the magnet seat 2, and the other end is fixed to the target core seat 1 by the locking nut 302.

[0044] For further details, please refer to Figure 1 and Figure 2At least one set of protective components 7 is added to the outside of the target core holder 1. The protective components 7 include a protective frame 701 and multiple rollers 702. The protective frame 701 is fixedly connected to the target core holder 1, while the rollers 702 are arranged along the axial direction of the target core holder 1 and are rotatably connected to the protective frame 701. When the magnetron sputtering target core is disassembled or assembled along the axis of the target cylinder, the rollers 702 contact the inner wall of the target cylinder, and the rotating rollers 702 prevent the magnetron sputtering target core from being scratched during the disassembly or assembly process.

[0045] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A magnetron sputtering target core having good magnetic field uniformity, characterized by, It includes a target core holder (1) and a magnet holder (2), wherein the target core holder (1) and the magnet holder (2) are connected by a plurality of fasteners (3); Four magnet groups are fixedly installed on the magnet base (2), including two edge magnet groups (4) on both sides and two middle magnet groups (5) between the two edge magnet groups (4). The two edge magnet groups (4) are mounted on the plane of the magnet base (2), while the two middle magnet groups (5) are mounted on the raised step in the middle of the magnet base (2); Each of the four magnet groups consists of multiple rectangular magnetic blocks arranged sequentially along its length.

2. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 1, wherein, Each of the two edge magnet groups (4) and the two middle magnet groups (5) is equipped with an independent square tube (6), which is fixedly connected to the magnet base (2) as a sealing cover for the four magnet groups.

3. The magnetron sputtering target core of claim 1, wherein the target core has a uniform magnetic field. The working surfaces of the rectangular magnetic blocks in the two edge magnet groups (4) are all multi-level surfaces, and the N poles are all facing the middle magnet group (5).

4. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 3, wherein, The intermediate magnet group (5) includes a first intermediate magnet group (501) and a second intermediate magnet group (502), which are installed side by side between the two edge magnet groups (4).

5. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 4, wherein, The working surface of the first rectangular magnetic block on the left side of the first intermediate magnet group (501) is a single-level S-pole surface, and the working surfaces of the second and third rectangular magnetic blocks are multi-level surfaces, with the S poles facing the edge magnet group (4); the working surface of the first rectangular magnetic block on the right side of the first intermediate magnet group (501) is a single-level S-pole surface, and the working surface of the second rectangular magnetic block is multi-level surface, with the S poles facing the edge magnet group (4).

6. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 5, wherein, The working surfaces of the rectangular magnetic blocks in the middle part of the first intermediate magnet group (501) are all N-pole single-level surfaces.

7. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 4, wherein The working surface of the first rectangular magnetic block on the left side of the second intermediate magnet group (502) is a single-level S-pole surface, and the working surface of the second rectangular magnetic block is a multi-level surface, with the S-pole facing the edge magnet group (4); the working surface of the first rectangular magnetic block on the right side of the second intermediate magnet group (502) is a single-level S-pole surface, and the working surfaces of the second and third rectangular magnetic blocks are both multi-level surfaces, with the S-pole facing the edge magnet group (4).

8. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 7, wherein, The working surfaces of the rectangular magnetic blocks in the middle part of the second intermediate magnet group (502) are all N-pole single-level surfaces.

9. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 1, wherein, The fastener (3) includes a double-ended screw (301) and a locking nut (302), wherein one end of the double-ended screw (301) passes through the target core seat (1) and is threadedly connected to the magnet seat (2), and the other end is fixed to the target core seat (1) by the locking nut (302).

10. A magnetron sputtering target core with good magnetic field uniformity as claimed in claim 1, wherein, At least one set of protective components (7) is added to the outside of the target core seat (1). The protective components (7) include a protective frame (701) and multiple rollers (702). The protective frame (701) is fixedly connected to the target core seat (1), while the rollers (702) are arranged along the axial direction of the target core seat (1) and are rotatably connected to the protective frame (701).

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