An integrated multi-unit laminar flow air supply device

Abstract

This utility model discloses an integrated multi-unit laminar flow air supply device, comprising: a laminar flow air supply body, an airflow handling system, an installation interface flush with the building ceiling, a lateral return air duct, and a flow equalization structure; wherein, the laminar flow air supply body is fixed flush with the cleanroom ceiling via the installation interface, the airflow handling system is integrated inside the laminar flow air supply body, and the lateral return air duct is used to connect to an external return air duct. The device provided in this application, by installing flush with the ceiling, can solve the problem of excessively high equipment height in areas requiring laminar flow cleanliness due to limited cleanroom ceiling height.

Description

Technical Field

[0001] This utility model relates to the field of cleanroom facility technology, specifically to an integrated multi-unit laminar flow air supply device. Background Technology

[0002] Conventional laminar flow hoods are installed below the ceiling of the cleanroom. For some equipment that requires laminar flow devices, due to the high height of the equipment and the limited room height, the laminar flow hood must be installed flush with the ceiling panel to meet the requirements. Conventional laminar flow hoods are box-type and do not have an outer mounting edge. Moreover, the laminar flow return air surface is mostly side return air, which is not suitable for a structure that is flush with the ceiling.

[0003] Traditional laminar flow hoods are all fixed laminar flow hoods, designed for specific work areas, and mostly use side return air within the room. They cannot be directly installed flush with the ceiling to meet the requirements of return air pipes connected through side wall ducts.

[0004] Traditional laminar flow hoods are structured with an aluminum alloy frame and FFUs, which cannot be directly installed flush with the top plate and require return air to be piped through side wall ducts.

[0005] For traditional laminar flow hoods to be installed flush with the ceiling, a separate static pressure box needs to be built above the ceiling. This is inconvenient to construct, cannot be inspected and maintained in the cleanroom, and seriously affects the aesthetics. Utility Model Content

[0006] The purpose of this invention is to provide an integrated multi-unit laminar flow air supply device to address the laminar flow purification needs in scenarios with limited floor height.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] An integrated multi-unit laminar flow air supply device includes:

[0009] Laminar flow air supply unit,

[0010] Airflow handling system

[0011] Installation interface flush with the building's roof slab.

[0012] Lateral return air duct, and

[0013] Flow equalization structure;

[0014] The laminar flow air supply body is fixed flush with the cleanroom ceiling via an installation interface. The airflow handling system is integrated inside the laminar flow air supply body, and the lateral return air channel is used to connect to the external return air duct.

[0015] In some embodiments, the laminar flow air supply body includes a vertical laminar flow air supply static pressure box and at least two air supply units arranged in parallel, with the air supply units installed through the inside of the static pressure box.

[0016] In some embodiments, the lateral return air duct includes a side flange located on the side wall of the static pressure box, which is connected to the return air duct on the side wall of the cleanroom via a pipe.

[0017] In some embodiments, the airflow handling system includes an under-mounted centrifugal fan and a high-efficiency filter;

[0018] The centrifugal fan is installed at the air inlet at the top of the air supply unit, and the high-efficiency filter is set in the air duct in the middle of the air supply unit.

[0019] In some embodiments, a filter testing system is also included, which consists of a PAO smoke-generating duct and a PAO testing duct welded to the air supply unit, for testing the integrity of the high-efficiency filter.

[0020] In some embodiments, the installation interface includes a box lifting lug located on the top of the static pressure box, which is connected to the building roof slab so that the lower end face of the static pressure box is flush with the lower surface of the roof slab.

[0021] In some embodiments, multiple air supply units are horizontally connected by splicing flanges to form a continuous multi-row laminar flow air supply surface.

[0022] The beneficial effects that the integrated multi-unit laminar flow air supply device disclosed in this application may bring include, but are not limited to:

[0023] 1. Saves vertical space and is suitable for high-equipment process areas;

[0024] 2. Reduce construction costs and avoid the risk of air leakage in the interlayer;

[0025] 3. Maintenance can be performed directly in a cleanroom, reducing downtime;

[0026] 4. Forms a continuous and uniform laminar flow field, improving purification stability;

[0027] 5. Enables in-situ online detection to ensure filtration efficiency. Attached Figure Description

[0028] Figure 1 This is the front view of the present invention.

[0029] Figure 2 This is a side view of the present invention. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0031] Conversely, this application covers any substitutions, modifications, equivalent methods, and schemes made within the spirit and scope of this application as defined in the claims. Furthermore, to provide the public with a better understanding of this application, certain specific details are described in detail below. However, this application can be fully understood by those skilled in the art even without these detailed descriptions.

[0032] like Figure 1-2 As shown, the present invention provides an integrated multi-unit laminar flow air supply device comprising: a vertical laminar flow air supply static pressure box 1, a multi-row air supply unit 2, a centrifugal fan 3, a high-efficiency filter 4, a side flange port 5, a box body lifting lug 6, a flow equalization orifice plate 7, a PAO smoke generation pipeline 8, and a PAO detection pipeline 9.

[0033] The overall multi-unit laminar flow air supply device has a vertical laminar flow air supply static pressure box 1 as its outer frame. Multiple air supply units 2 are installed inside the vertical laminar flow air supply static pressure box 1. Centrifugal fans 3 are installed above the air supply units, and high-efficiency filters 4 are installed in the middle section. A flow equalization plate 7 is installed at the lower end of the vertical laminar flow air supply static pressure box 1. The vertical laminar flow air supply static pressure box 1 has a side flange port 5 for connecting to the return air duct. The vertical laminar flow air supply static pressure box 1 is installed on the ceiling of the clean room and is connected to the box body lifting lugs 6 by a hanger rod. The length of the hanger rod is adjusted to make the vertical laminar flow air supply static pressure box 1 firmly fixed to the ceiling. Each air supply unit 2 is welded with a PAO smoke generating pipe 8 and a PAO detection pipe 9 for filtration detection of the high-efficiency filter 4.

[0034] Centrifugal fan 3 draws fresh air into air supply unit 2; after being purified by high-efficiency filter 4, the airflow forms a vertical laminar flow through uniform flow plate 7; polluted air flows back to the side wall channel through the equipment area and enters the device for circulation through flange port 5.

[0035] The technical solution provided in this application solves the problem of excessively high equipment height in areas requiring laminar flow due to limited cleanroom floor height by using a flush-mounted installation method.

[0036] By using a duct system to connect the return air duct on the side wall of the cleanroom, the problem of needing to manufacture a large static pressure box on the top plate for laminar flow air supply equipment is solved.

[0037] The multi-unit parallel structure meets the requirements for use in large-area laminar flow environments and avoids the problem of laminar flow dead zones caused by installing multiple small-sized laminar flow units on the top plate.

[0038] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A whole multi-union laminar air supply device, characterized by, include: Laminar flow air supply unit, Airflow handling system Installation interface flush with the building's roof slab. Lateral return air duct, and Flow equalization structure; The laminar flow air supply body is fixed flush with the cleanroom ceiling via an installation interface. The airflow handling system is integrated inside the laminar flow air supply body, and the lateral return air channel is used to connect to the external return air duct.

2. The laminar flow air supply device as described in claim 1, characterized in that: The laminar flow air supply body includes a vertical laminar flow air supply static pressure box (1) and at least two air supply units (2) arranged in parallel, with the air supply units (2) installed through the inside of the static pressure box (1).

3. The laminar flow air supply device as described in claim 1, characterized in that: The lateral return air duct includes a side flange (5) located on the side wall of the static pressure box (1), which is connected to the return air duct on the side wall of the clean room via a pipe.

4. The laminar flow air supply device as described in claim 1, characterized in that: The airflow handling system includes an under-mounted centrifugal fan (3) and a high-efficiency filter (4); A centrifugal fan (3) is installed at the top air inlet of the air supply unit (2), and a high-efficiency filter (4) is installed in the middle air duct of the air supply unit (2).

5. The laminar flow air supply device as described in claim 1, characterized in that: It also includes a filter testing system, which consists of a PAO smoke-generating duct (8) and a PAO testing duct (9) welded to the air supply unit (2), and is used for the integrity testing of the high-efficiency filter (4).

6. The laminar flow air supply device as described in claim 1, characterized in that: The installation interface includes a box lug (6) located on the top of the static pressure box (1), which is connected to the building roof slab so that the lower end face of the static pressure box (1) is flush with the lower surface of the roof slab.

7. The laminar flow air supply device as described in claim 2, characterized in that: Multiple air supply units (2) are connected laterally by splicing flanges to form a continuous multi-row laminar flow air supply surface.

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