A general-purpose master grating period testing fixture

By designing a master grating period testing fixture with adjustable sliding and rotating components, the problem of high cost and low efficiency in testing grating masters of different shapes and sizes by existing fixtures is solved, realizing universal testing and high-efficiency grating period measurement.

CN224435740UActive Publication Date: 2026-06-30BEI JING ZHI GE GUANG DIAN KE JI YOU XIAN GONG SI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
BEI JING ZHI GE GUANG DIAN KE JI YOU XIAN GONG SI
Filing Date
2025-08-26
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing master grating periodic testing fixtures require the design of special fixtures for grating masters of different shapes and sizes, resulting in high testing costs, low efficiency, and fixture accumulation.

Method used

A universal master grating periodic testing fixture is designed. By setting multiple sliding through holes and sliding components on the fixed plate, the sliding components can be adjusted to engage with the edges of grating master plates of different shapes and sizes. Combined with the rotating components, the test angle can be automatically adjusted, avoiding manual rotation.

Benefits of technology

It enables universal testing of grating masters of different shapes and sizes, reduces testing costs, improves testing efficiency, avoids jig accumulation, and prevents grating masters from getting dirty.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention provides a universal master grating periodic testing fixture, including a fixing plate. The top surface of the fixing plate has a fixing groove for placing the grating master. The bottom surface of the fixing groove has multiple sliding through holes arranged at intervals. Each sliding through hole contains a sliding component. By changing the position of the sliding components in each sliding through hole, the edge areas of grating masters of different shapes and sizes can be engaged. In other words, using this universal master grating periodic testing fixture, periodic testing of master gratings of different shapes and sizes can be achieved, reducing testing costs, improving testing efficiency, and avoiding the accumulation of master grating periodic testing fixtures.
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Description

Technical Field

[0001] This utility model belongs to the field of testing fixture technology, specifically relating to a general-purpose master grating period testing fixture. Background Technology

[0002] The existing methods for fabricating diffractive optical waveguides are generally as follows:

[0003] 1. Prepare the grating master.

[0004] Specifically,

[0005] A grating mask is prepared on a master substrate: a layer of photoresist of a certain thickness is spin-coated onto the surface of the master substrate to obtain a master substrate with a photoresist mask; the master substrate with the photoresist mask is exposed, and the photoresist mask on the master substrate is modulated by the periodic bright and dark stripes of the exposure light field, which changes the properties of the photoresist mask, thus obtaining a photoresist mask with altered properties on the master substrate; the photoresist mask with altered properties on the master substrate is developed to obtain a grating mask on the master substrate.

[0006] The grating is fabricated on the master substrate using a grating mask: the grating structure (i.e., the master grating) is etched on the area of ​​the master substrate not covered by the grating mask using an ion beam etching machine, thereby preparing the grating master.

[0007] 2. The grating structure of the grating master is transferred to the soft film substrate using a nanoimprinting process to obtain a soft film with a reverse grating structure.

[0008] Specifically, an imprinting adhesive is uniformly spin-coated onto the grating master plate, and a soft film substrate is bonded to the grating master plate. Pressure is applied to fill the grating structure of the grating master plate with the imprinting adhesive, resulting in an inverse structure of the grating structure on the imprinting adhesive. The grating structure is then cured and demolded using ultraviolet light, and the imprinting adhesive with the inverse structure of the grating structure is transferred to the soft film substrate to obtain a soft film with the inverse structure of the grating structure.

[0009] 3. The inverse structure of the grating structure on the soft film is transferred onto the optical wafer using a nanoimprinting process to obtain an optical wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0010] Specifically, a mold adhesive is spin-coated onto an optical wafer, and a soft film with an inverse grating structure is bonded to the mold adhesive on the optical wafer. Pressure is applied to fill the inverse grating structure of the soft film with the mold adhesive, thus obtaining a grating structure on the mold adhesive. Ultraviolet light is used for curing and demolding, separating the soft film with the inverse grating structure from the mold adhesive with the grating structure, resulting in an optical wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0011] Since the grating period affects the optical performance of diffractive waveguides, periodicity testing of the master grating is performed during the fabrication process. Currently, periodicity testing of the master grating requires the use of test fixtures to fix the grating master. Different test fixtures need to be designed for different shapes and sizes of grating master gratings, leading to the accumulation of existing master grating periodicity testing fixtures, increasing testing costs, and reducing testing efficiency. Utility Model Content

[0012] In order to overcome the shortcomings of the prior art, this utility model provides a universal master grating period testing fixture.

[0013] This utility model is achieved through the following technical solution:

[0014] This utility model provides a universal master grating periodic testing fixture, including a fixing plate;

[0015] A fixing groove is formed on the top surface of the fixing plate; the fixing groove is used to place the grating master plate;

[0016] The bottom surface of the fixed groove is provided with multiple sliding through holes arranged at intervals, and a sliding component is provided in each sliding through hole;

[0017] By changing the position of the sliding components within each sliding through hole, the edge areas of grating master plates of different shapes and sizes can be snapped together.

[0018] Furthermore, the bottom surface of the fixing groove is provided with a first sliding through hole and a second sliding through hole at intervals along the horizontal direction;

[0019] A first sliding component is disposed in the first sliding through hole, and a second sliding component is disposed in the second sliding through hole;

[0020] By changing the first setting position of the first sliding component in the first sliding through hole and the second setting position of the second sliding component in the second sliding through hole, the edge areas of grating master plates of different shapes and sizes are snapped together.

[0021] Furthermore, the bottom surface of the fixing groove is provided with a third sliding through hole and a fourth sliding through hole at intervals along the vertical direction;

[0022] A third sliding component is provided in the third sliding through hole, and a fourth sliding component is provided in the fourth sliding through hole;

[0023] By changing the third setting position of the third sliding component in the third sliding through hole and the fourth setting position of the fourth sliding component in the fourth sliding through hole, the edge areas of grating master plates of different shapes and sizes can be snapped together.

[0024] Furthermore, the sliding component includes a slide rail and a slider;

[0025] The slide rail is disposed on the inner wall of the sliding through hole;

[0026] The bottom of the slider is slidably connected to the slide rail, and a support platform is provided on the middle part of the slider facing the center area of ​​the fixing groove. The support platform provides positioning support for the local edge area of ​​the grating master.

[0027] Furthermore, the bottom surface of the support platform is higher than the bottom surface of the fixing groove.

[0028] Furthermore, the sliding assembly also includes a fixing member;

[0029] The top surface of the slider has a fixing through hole, and the top end of the fixing member extends from one end of the bottom surface of the fixing plate into the fixing through hole and is threadedly connected to the fixing through hole. The bottom end of the fixing member abuts against the bottom surface of the fixing plate in the outer area of ​​the fixing through hole.

[0030] Furthermore, the top of the slider extends downwards towards the center area of ​​the fixing groove, forming an inclined surface;

[0031] The top of the inclined surface is closer to the center area of ​​the fixing groove than the bottom of the inclined surface.

[0032] The bottom of the inclined surface is connected to the top surface of the support platform.

[0033] Furthermore, it also includes a base and a moving assembly, the moving assembly comprising a lateral moving track assembly and a longitudinal moving track assembly;

[0034] The bottom end of the lateral moving track assembly is connected to the base, and the top end of the lateral moving track assembly is connected to the bottom end of the longitudinal moving track assembly.

[0035] The longitudinal moving track assembly is connected to the bottom surface of the fixed plate.

[0036] Furthermore, it also includes rotating components;

[0037] The rotating assembly includes a first adapter and a second adapter;

[0038] The first adapter is connected to the bottom surface of the fixed plate, and the second adapter is connected to the longitudinal moving track assembly. The first adapter plate and the second adapter are rotatably connected.

[0039] Compared with the prior art, the technical solution of this utility model has the following beneficial effects:

[0040] This invention provides a universal master grating periodic testing fixture, including a fixing plate. The top surface of the fixing plate has a fixing groove for placing the grating master. The bottom surface of the fixing groove has multiple sliding through holes arranged at intervals. Each sliding through hole contains a sliding component. By changing the position of the sliding components in each sliding through hole, the edge areas of grating masters of different shapes and sizes can be engaged. In other words, using this universal master grating periodic testing fixture, periodic testing of master gratings of different shapes and sizes can be achieved, reducing testing costs, improving testing efficiency, and avoiding the accumulation of master grating periodic testing fixtures. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A schematic diagram of the overall structure of the universal master grating period testing fixture provided by this utility model at the first angle;

[0043] Figure 2 A schematic diagram of the overall structure of the second angle of the universal master grating period testing fixture provided by this utility model;

[0044] Figure 3 This is a first-angle schematic diagram of the connection structure between the fixed plate and the sliding component.

[0045] Figure 4 A schematic diagram of a structure in which a sliding component is used to attach the grating master plate to the fixing plate;

[0046] Figure 5 This is a second-angle schematic diagram of the connection structure between the fixed plate and the sliding assembly;

[0047] Figure 6 A third-angle schematic diagram of the connection structure between the fixed plate and the sliding component;

[0048] Figure 7 This is a schematic diagram of the slider's structure;

[0049] Figure 8 This is a structural schematic diagram of the first adapter;

[0050] Figure 9 This is a schematic diagram of the second adapter.

[0051] Among them, 1-base, 2-fixed plate, 2-1-fixed groove, 2-2-first sliding through hole, 2-3-second sliding through hole, 2-4-third sliding through hole, 2-5-fourth sliding through hole, 2-6-first connecting through hole, 3-horizontal moving track assembly, 4-vertical moving track assembly, 5-grating master plate, 6-1-first sliding assembly, 6-2-second sliding assembly, 6-3-third sliding assembly, 6-4-fourth sliding assembly, 6-5-1-first slide rail, 6-5-2-second slide rail, 6-5-3-third slide rail, 6-5-4-fourth slide rail, 6-6-slider, 6-6 -1-First slider, 6-6-2-Second slider, 6-6-3-Third slider, 6-6-4-Fourth slider, 6-7-1-First fixing through hole, 6-7-2-Second fixing through hole, 6-7-3-Third fixing through hole, 6-7-4-Fourth fixing through hole, 6-8-1-First fixing component, 6-8-2-Second fixing component, 6-8-3-Third fixing component, 6-8-4-Fourth fixing component, 7-Support platform, 8-Inclined surface, 9-First adapter, 9-1-Second connecting through hole, 10-Second adapter, 10-1-Third connecting through hole, 10-2-Fourth connecting through hole. Detailed Implementation

[0052] The technical solution of this utility model will be clearly and completely described below with reference to its embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0053] In this document, the terms "first," "second," and other similar words are not intended to imply any order, quantity, or importance, but are merely used to distinguish different elements. The terms "one," "a," and other similar words are not intended to indicate the existence of only one of the stated things, but rather that the description refers only to one of the stated things, which may have one or more. The terms "comprising," "including," and other similar words are intended to indicate a logical relationship, not a spatial relationship. For example, "A includes B" means that logically B belongs to A, not that spatially B is located inside A. Furthermore, the meanings of the terms "comprising," "including," and other similar words should be considered open-ended, not closed. For example, "A includes B" means that B belongs to A, but B does not necessarily constitute all of A; A may also include other elements such as C, D, and E.

[0054] In this document, the terms "embodiment," "this embodiment," "preferred embodiment," and "one embodiment" do not imply that the description applies only to one specific embodiment, but rather that such description may also be applicable to one or more other embodiments. Those skilled in the art will understand that any description made herein relating to one embodiment can be substituted, combined, or otherwise incorporated with the descriptions in one or more other embodiments. Such substitutions, combinations, or other incorporations resulting in new embodiments are readily conceived by those skilled in the art and fall within the protection scope of this utility model.

[0055] In this description, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0056] like Figures 1-2 As shown, this utility model provides a universal master grating periodic testing fixture, including a base 1, a moving component, and a fixing plate 2. The moving component includes a horizontal moving track assembly 3 and a vertical moving track assembly 4.

[0057] The bottom end of the horizontal moving track assembly 3 is connected to the base 1, the top end of the horizontal moving track assembly 3 is connected to the bottom end of the vertical moving track assembly 4, and the vertical moving track assembly 4 is connected to the bottom surface of the fixed plate 2.

[0058] The lateral movement track assembly can use existing slide rail slider combination components, and the longitudinal movement track assembly can use existing slide rail slider combination components.

[0059] like Figure 3 As shown, a fixing groove 2-1 is formed on the top surface of the fixing plate 2, and a grating master plate can be placed in the fixing groove 2-1. A grating structure is set on the grating master plate, and the opposite side of one side of the grating structure of the grating master plate is located in the fixing groove.

[0060] Multiple sliding through holes are arranged at intervals on the bottom surface of the fixing groove, and a sliding component is installed in each sliding through hole. By changing the position of the sliding components in each sliding through hole, the edge areas of grating master plates of different shapes and sizes can be snapped together.

[0061] For example, such as Figure 3 As shown, the bottom surface of the fixing groove 2-1 is provided with a first sliding through hole 2-2 and a second sliding through hole 2-3 at intervals along the horizontal direction. The first sliding through hole 2-2 and the second sliding through hole 2-3 are symmetrically arranged about the central area of ​​the bottom surface of the fixing groove 2-1.

[0062] The bottom surface of the fixing groove 2-1 is provided with a third sliding through hole 2-4 and a fourth sliding through hole 2-5 at intervals along the vertical direction. The third sliding through hole 2-4 and the fourth sliding through hole 2-5 are symmetrically arranged about the central area of ​​the bottom surface of the fixing groove 2-1.

[0063] The first sliding through hole 2-2, the second sliding through hole 2-3, the third sliding through hole 2-4, and the fourth sliding through hole 2-5 are not connected to each other.

[0064] A first sliding component 6-1 is provided in the first sliding through hole 2-2, a second sliding component 6-2 is provided in the second sliding through hole 2-3, a third sliding component 6-3 is provided in the third sliding through hole 2-4, and a fourth sliding component 6-4 is provided in the fourth sliding through hole 2-5.

[0065] By changing the first setting position of the first sliding component within the first sliding through hole, the second setting position of the second sliding component within the second sliding through hole, the third setting position of the third sliding component within the third sliding through hole, and the fourth setting position of the fourth sliding component within the fourth sliding through hole, the edge areas of grating masters of different shapes and sizes are snapped together. For example... Figure 4 The diagram shows a grating master plate 5 being engaged within a fixed groove using a first sliding component 6-1, a second sliding component 6-2, a third sliding component 6-3, and a fourth sliding component 6-4.

[0066] It should be noted that the above Figure 3 The arrangement of multiple sliding through holes in the bottom surface of the fixing groove shown is only for illustration. To achieve the purpose of snapping together the edge areas of grating master plates of different shapes and sizes by changing the setting position of the sliding components in each sliding through hole, the arrangement of multiple sliding through holes in the bottom surface of the fixing groove can be varied. For example, some sliding through holes can be set at an angle on the bottom surface of the fixing groove.

[0067] For example, the sliding component described above may include a slide rail or a slider.

[0068] The slide rail is set on the inner wall of the sliding through hole, and the bottom of the slider is slidably connected with the slide rail.

[0069] like Figure 5 As shown above, in the case where the bottom surface of the fixing groove 2-1 is provided with a first sliding through hole 2-2 and a second sliding through hole 2-3 at intervals along the horizontal direction, and the bottom surface of the fixing groove 2-1 is provided with a third sliding through hole 2-4 and a fourth sliding through hole 2-5 at intervals along the vertical direction, a first slide rail 6-5-1 is provided in the first sliding through hole 2-2, and the bottom of the first slider 6-6-1 is slidably connected to the first slide rail 6-5-1; a second slide rail 6-5-2 is provided in the second sliding through hole 2-3, and the bottom of the second slider 6-6-2 is slidably connected to the second slide rail 6-5-2; a third slide rail 6-5-3 is provided in the third sliding through hole 2-4, and the bottom of the third slider 6-6-3 is slidably connected to the third slide rail 6-5-3; and a fourth slide rail 6-5-4 is provided in the fourth sliding through hole 2-5, and the bottom of the fourth slider 6-6-4 is slidably connected to the fourth slide rail 6-5-4.

[0070] In a preferred embodiment, the sliding assembly further includes a fixing member. A fixing through-hole is formed on the top surface of the slider. The top end of the fixing member extends from one end of the bottom surface of the fixing plate into the fixing through-hole and is threadedly connected to it. The bottom end of the fixing member abuts against the bottom surface of the fixing plate in the outer region of the fixing through-hole. The fixing member can be an existing screw or similar component. During the process of engaging the edge region of the grating master using the sliding assembly within each sliding through-hole, the fixing member secures the slider to the desired position within the sliding through-hole.

[0071] like Figure 5 as well as Figure 6 As shown above, the bottom surface of the fixing groove 2-1 is horizontally spaced with a first sliding through hole 2-2 and a second sliding through hole 2-3, and the bottom surface of the fixing groove 2-1 is vertically spaced with a third sliding through hole 2-4 and a fourth sliding through hole 2-5. A first slide rail 6-5-1 is installed in the first sliding through hole 2-2, and the bottom of the first slider 6-6-1 is slidably connected to the first slide rail 6-5-1. A second slide rail 6-5-2 is installed in the second sliding through hole 2-3, and the bottom of the second slider 6-6-2 is slidably connected to the second slide rail 6-5-2. A third slide rail 6-5-3 is installed in the third sliding through hole 2-4, and the bottom of the third slider 6-6-3 is slidably connected to the third slide rail 6-5-3. A fourth slide rail 6-5-4 is installed in the fourth sliding through hole 2-5, and the bottom of the fourth slider 6-6-4 is slidably connected to the fourth slide rail 6-5-4.

[0072] The top surface of the first slider 6-6-1 has a first fixing through hole 6-7-1, the top surface of the second slider 6-6-2 has a second fixing through hole 6-7-2, the top surface of the third slider 6-6-3 has a third fixing through hole 6-7-3, and the top surface of the fourth slider 6-6-4 has a fourth fixing through hole 6-7-4.

[0073] The top end of the first fastener 6-8-1 extends from one end of the bottom surface of the fixing plate 2 into the first fixing through hole 6-7-1 and is threaded into the first fixing through hole. The bottom end of the first fastener 6-8-1 abuts against the bottom surface of the fixing plate 2 in the outer region of the first fixing through hole 6-7-1. The top end of the second fastener 6-8-2 extends from one end of the bottom surface of the fixing plate 2 into the second fixing through hole 6-7-2 and is threaded into the second fixing through hole. The bottom end of the second fastener 6-8-2 abuts against the bottom surface of the fixing plate 2 in the outer region of the second fixing through hole 6-7-2. The top end of the third fastener 6-8-3 extends from one end of the bottom surface of the fixing plate 2 into the third fixing through hole 6-7-3 and is threaded into the third fixing through hole. The bottom end of the third fastener 6-8-3 abuts against the bottom surface of the fixing plate 2 in the outer region of the third fixing through hole 6-7-3. The top end of the fourth fastener 6-8-4 extends from one end of the bottom surface of the fixing plate 2 into the fourth fixing through hole 6-7-4 and is threadedly connected to the fourth fixing through hole. The bottom end of the fourth fastener 6-8-4 abuts against the bottom surface of the fixing plate 2 in the outer area of ​​the fourth fixing through hole 6-7-4.

[0074] The first slider 6-6-1 is fixed in the desired position within the first sliding through hole 2-2 using the first fixing member 6-8-1. The second slider 6-6-2 is fixed in the desired position within the second sliding through hole 2-3 using the second fixing member 6-8-2. The third slider 6-6-3 is fixed in the desired position within the third sliding through hole 2-4 using the third fixing member 6-8-3. The fourth slider 6-6-4 is fixed in the desired position within the fourth sliding through hole 2-5 using the fourth fixing member 6-8-4.

[0075] like Figure 7 As shown, for the first slider, second slider, third slider and fourth slider mentioned above, a support platform 7 is provided on the side of the middle of each slider 6-6 facing the center area of ​​the fixing groove towards the center area of ​​the fixing groove. The support platform 7 provides positioning support for the local edge area of ​​the grating master plate.

[0076] Preferably, the bottom surface of the support platform is higher than the bottom surface of the fixing groove, for example... Figure 3 The arrangement of multiple sliding through holes in the bottom surface of the fixed groove, as the slider slides along the slide rail within the sliding through holes towards the center area of ​​the fixed groove, allows the support platform on the slider to extend further towards the center area of ​​the fixed groove when the slider slides to the end of the sliding through hole near the center area of ​​the fixed groove. This allows the sliding assembly to engage with a smaller grating master plate. As a preferred embodiment, such as... Figure 7As shown, the top of slider 6-6 extends downwards towards the center area of ​​the fixing groove, with an inclined surface 8. The top of the inclined surface is closer to the center area of ​​the fixing groove than the bottom of the inclined surface, and the bottom of the inclined surface 8 is connected to the top surface of the support platform 7. During the process of engaging the edge area of ​​the grating master plate using the sliding components within each sliding through hole, only the inclined surface of the slider is used to engage the side wall of the grating master plate, reducing or even eliminating damage to the grating master plate caused by the test fixture.

[0077] In the process of performing master grating period testing on a grating master using a test fixture, the grating master needs to be adjusted to the required test angle. Therefore, the grating master on the test fixture needs to be rotated. Currently, the grating master is rotated manually, which easily leads to dirt accumulation on the grating master. Therefore, in the preferred embodiment, the universal master grating period testing fixture provided by this utility model also includes a rotating component.

[0078] For example, the rotating assembly includes a first adapter (such as...) Figure 8 (as shown), second adapter (such as) Figure 9 (As shown).

[0079] The first adapter is connected to the bottom surface of the fixed plate, and the second adapter is connected to the longitudinal moving track assembly. The first adapter and the second adapter are rotatably connected.

[0080] For example, the bottom surface of the fixing plate 2 has a first connecting through hole 2-6 (e.g., Figure 3 as well as Figure 6 As shown), a second connecting through hole 9-1 is opened inside the first adapter 9 (as shown). Figure 8 As shown in the figure, a connector is used to connect the first connecting through hole and the second connecting through hole to achieve the connection between the first adapter and the bottom surface of the fixing plate.

[0081] The second adapter 10 has a third connecting through hole 10-1 inside (e.g., ...). Figure 9 As shown), a first adapter is fitted inside the third connecting through hole 10-1, and the first adapter can rotate inside the third connecting through hole.

[0082] The second adapter 10 has a fourth connecting through hole 10-2 on its side wall (e.g., Figure 9 As shown), the fourth connecting through hole 10-2 is connected to the third connecting through hole 10-1. The opening direction of the fourth connecting through hole is preferably perpendicular to the opening direction of the third connecting through hole. When the first adapter rotates to the desired position in the third connecting through hole in the second adapter, the connector passes through the fourth connecting through hole and abuts against the side wall of the first adapter. The connector is threadedly connected to the fourth connecting through hole.

[0083] The aforementioned rotating component enables the fixed plate to rotate relative to the longitudinal moving track component, thereby allowing the grating master plate on the fixed plate to rotate to facilitate adjustment of the test angle. This eliminates the need for manual rotation of the grating master plate, avoiding the problem of dirt accumulation on the grating master plate caused by manual rotation.

[0084] The following describes a test method for testing grating masters using the universal master grating period testing fixture provided by this utility model:

[0085] 1. Place the non-grating structure side of the grating master to be tested into the fixing groove of the fixing plate, adjust the position of the sliding components in each sliding through hole in the fixing groove, and fix the sliding components in the required position of the sliding through hole.

[0086] 2. The bottom of the horizontal moving track assembly is connected to the base, and the top of the horizontal moving track assembly is connected to the vertical moving track assembly.

[0087] 3. Connect the first adapter to the bottom surface of the fixed plate, connect the second adapter to the longitudinal moving track assembly, fit the first adapter into the second adapter, rotate the first adapter within the second adapter to the required grating master test angle, and then fix the position of the first adapter in the second adapter.

[0088] 4. The laser emits a beam onto the grating structure of the grating master, and the period of the grating structure is measured. During this process, the position of the area of ​​the grating master receiving the incident beam can be changed by the lateral and longitudinal moving components, thereby realizing the period measurement of the grating structure area at different positions of the grating master.

[0089] The above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art can still make modifications or equivalent substitutions to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model are within the protection scope of the claims of this utility model pending approval.

Claims

1. A general-purpose master grating period test jig, characterized by, Includes a base, a moving component, a rotating component, and a mounting plate; The moving component includes a lateral moving track component and a longitudinal moving track component; The rotating assembly includes a first adapter and a second adapter; The first adapter and the second adapter are rotatably connected, and the first adapter is connected to the bottom surface of the fixed plate; The bottom end of the lateral moving track assembly is connected to the base, and the top end of the lateral moving track assembly is connected to the bottom end of the longitudinal moving track assembly. The longitudinal moving track assembly is connected to the second adapter; a fixing groove is formed on the top surface of the fixing plate; the fixing groove is used to place the grating master plate; The bottom surface of the fixed groove is provided with multiple sliding through holes arranged at intervals, and a sliding component is provided in each sliding through hole; By changing the position of the sliding components within each sliding through hole, the edge areas of grating master plates of different shapes and sizes can be snapped together.

2. The universal master grating period testing fixture according to claim 1, characterized in that, The bottom surface of the fixing groove is provided with a first sliding through hole and a second sliding through hole at intervals along the horizontal direction; A first sliding component is disposed in the first sliding through hole, and a second sliding component is disposed in the second sliding through hole; By changing the first setting position of the first sliding component in the first sliding through hole and the second setting position of the second sliding component in the second sliding through hole, the edge areas of grating master plates of different shapes and sizes are snapped together.

3. The general-purpose master grating period test jig according to claim 1 or 2, characterized by, The bottom surface of the fixing groove is provided with a third sliding through hole and a fourth sliding through hole at intervals along the vertical direction; A third sliding component is provided in the third sliding through hole, and a fourth sliding component is provided in the fourth sliding through hole; By changing the third setting position of the third sliding component in the third sliding through hole and the fourth setting position of the fourth sliding component in the fourth sliding through hole, the edge areas of grating master plates of different shapes and sizes can be snapped together.

4. The universal master grating periodic testing fixture according to claim 1, characterized in that, The sliding component includes a slide rail and a slider; The slide rail is disposed on the inner wall of the sliding through hole; The bottom of the slider is slidably connected to the slide rail, and a support platform is provided on the middle part of the slider facing the center area of ​​the fixing groove. The support platform provides positioning support for the local edge area of ​​the grating master.

5. The universal master grating periodicity testing fixture according to claim 4, characterized in that, The bottom surface of the support platform is higher than the bottom surface of the fixing groove.

6. The universal master grating periodic testing fixture according to claim 4, characterized in that, The sliding assembly also includes a fixing element; The top surface of the slider has a fixing through hole, and the top end of the fixing member extends from one end of the bottom surface of the fixing plate into the fixing through hole and is threadedly connected to the fixing through hole. The bottom end of the fixing member abuts against the bottom surface of the fixing plate in the outer area of ​​the fixing through hole.

7. The universal master grating periodic testing fixture according to claim 4, characterized in that, The top of the slider extends downwards with an inclined surface towards the center area of ​​the fixing groove. The top of the inclined surface is closer to the center area of ​​the fixing groove than the bottom of the inclined surface. The bottom of the inclined surface is connected to the top surface of the support platform.