A multi-channel MEMS optical switch structure

Abstract

This invention relates to the field of MEMS optical switch technology and discloses a multi-channel MEMS optical switch structure, including a housing and a top cover. The top cover is installed on the top of the housing. An input fiber array is arranged on the left inner wall of the housing, and an output fiber array is arranged on the right inner wall of the housing. A MEMS reflector array is arranged between the input fiber array and the output fiber array. An optical power detection unit is arranged on the left side of the output fiber array. A backup bypass optical path is provided between the MEMS reflector array and the optical power detection unit. By incorporating the MEMS reflector array, when the control system detects an abnormality in the main channel reflection, it adjusts the driving electrode voltage, causing the reflective lens to deflect to a backup angle. The light beam bypasses the main channel path and enters the backup bypass optical path, achieving automatic switching of the optical signal output. This ensures that the device still has optical transmission capability even if the reflector unit fails, forming a multi-channel transmission structure and effectively preventing communication interruption caused by main channel abnormalities.

Description

Technical Field

[0001] This utility model relates to the field of MEMS optical switch technology, specifically a multi-channel MEMS optical switch structure. Background Technology

[0002] MEMS optical switches are optical path switching devices manufactured using microelectromechanical systems (MEMS) technology. They are widely used in optical communication networks for signal conduction, splitting, or switching. Their core components typically include miniature controllable reflective mirrors, driving electrodes, and fiber arrays. The optical signal path is controlled by changing the angle of the micromirrors. Currently, most common MEMS optical switch structures use a single-mirror reflection channel. The input signal is deflected by the micromirror and directly enters the output channel. If the micromirror driver fails or the reflection error exceeds the limit, the optical path will fail to conduct, causing the entire system to interrupt signal transmission. Therefore, there is an urgent need for a multi-channel MEMS optical switch structure with backup optical path switching capabilities to solve this problem. Utility Model Content

[0003] The purpose of this invention is to provide a multi-channel MEMS optical switch structure to solve the problem mentioned in the background art that once the micromirror drive fails or the reflection error exceeds the limit, the optical path will not be able to conduct, resulting in the interruption of signal transmission of the entire system.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a multi-channel MEMS optical switch structure, including a housing and a top cover. The top cover is installed on the top of the housing. An input fiber array is arranged on the left inner wall of the housing, and an output fiber array is arranged on the right inner wall of the housing. A MEMS reflector array is provided between the input fiber array and the output fiber array. An optical power detection unit is arranged on the left side of the output fiber array. A spare bypass optical path is provided between the MEMS reflector array and the optical power detection unit. The MEMS reflector array includes a silicon substrate, a torsion beam, a mirror with a reflective coating, and a driving electrode. The silicon substrate is fixed inside the housing. A torsion beam is installed on the surface of the silicon substrate. A rotatable mirror with a reflective coating is supported at the top of the torsion beam. A driving electrode is arranged on the side of the mirror with a reflective coating.

[0005] As a further technical solution of this utility model, four sets of screw holes are machined on the edge of the outer shell, and the upper cover is connected and sealed to the outer shell through the screw holes, and screws are screwed into the screw holes.

[0006] As a further technical solution of this utility model, an output connection terminal is plugged into the output fiber array.

[0007] As a further technical solution of this utility model, an input fiber is inserted into the input fiber array.

[0008] As a further technical solution of this utility model, welding blocks are symmetrically welded on the inner wall of the outer shell where the input fiber array is located, and a set of supports extends outward from the outer shell through the welding blocks.

[0009] As a further technical solution of this utility model, multiple sets of silicone rings, the same number as the input optical fiber, are embedded at equal intervals at the bracket, and the input optical fiber is correspondingly inserted into the silicone ring.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: by setting up a MEMS reflector array, when the control system detects an abnormality in the main channel reflection, the driving electrode voltage is adjusted so that the reflective film lens is deflected to a backup angle. The light beam will bypass the main channel path and enter the backup bypass optical path, realizing automatic switching output of optical signals. This ensures that the device still has light transmission capability in the event of a failure of the reflector unit, thereby forming a multi-channel transmission structure and effectively preventing communication interruption caused by main channel abnormalities. Attached Figure Description

[0011] Figure 1 This is a top view cross-sectional structural diagram of the present invention;

[0012] Figure 2 This is a magnified side view of the MEMS mirror array structure of this utility model;

[0013] Figure 3 This is a top view of the structure of this utility model;

[0014] Figure 4 This is a side view of the bracket structure of this utility model.

[0015] In the diagram: 1. Outer shell; 2. Screw hole; 3. Output fiber optic array; 4. Output connection terminal; 5. Optical power detection unit; 6. Backup bypass optical path; 7. MEMS reflector array; 8. Input fiber optic array; 9. Bracket; 10. Silicone ring; 11. Input fiber optic cable; 12. Solder block; 13. Top cover; 701. Rotary arm torsion beam; 702. Silicon substrate; 703. Drive electrode; 704. Lens with reflective film; 14. Screw. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see Figure 1-4This utility model provides an embodiment of a multi-channel MEMS optical switch structure, including a housing 1 and a top cover 13. The top cover 13 is installed on the top of the housing 1. An input fiber array 8 is arranged on the left inner wall of the housing 1, and an output fiber array 3 is arranged on the right inner wall of the housing 1. A MEMS reflector array 7 is arranged between the input fiber array 8 and the output fiber array 3. An optical power detection unit 5 is arranged on the left side of the output fiber array 3. A spare bypass optical path 6 is arranged between the MEMS reflector array 7 and the optical power detection unit 5. The MEMS reflector array 7 includes a silicon substrate 702, a torsion beam 701, a reflective lens 704, and a driving electrode 703. The silicon substrate 702 is fixed inside the housing 1. A torsion beam 701 is installed on the surface of the silicon substrate 702. A rotatable reflective lens 704 is supported at the top of the torsion beam 701. A driving electrode 703 is arranged on the side of the reflective lens 704.

[0018] Specifically, such as Figure 1 and Figure 2 As shown, an input fiber array 8 is arranged on the left side of the outer casing 1, and an output fiber array 3 is arranged on the right side. A MEMS reflector array 7 is arranged between the two. The MEMS reflector array 7 is used to control the reflection path of the input light and guide it into the output fiber array 3. To prevent channel blockage caused by abnormal reflector deflection or drive failure, a backup bypass optical path 6 is arranged between the MEMS reflector array 7 and the optical power detection unit 5. Under normal conditions, the reflective lens 704 is at the main channel reflection angle, guiding the input beam to the optical power detection unit 5 and outputting it. When the control system detects abnormal reflection in the main channel, the voltage of the drive electrode 703 is adjusted, causing the reflective lens 704 to deflect to the backup angle. The beam will bypass the main channel path and enter the backup bypass optical path 6, realizing automatic switching output of the optical signal. This ensures that the device still has optical transmission capability in the event of failure of the reflector unit, thus forming a multi-channel transmission structure and effectively preventing communication interruption caused by abnormality in the main channel.

[0019] Four sets of screw holes 2 are machined on the edge of the outer shell 1. The upper cover 13 is connected and sealed to the outer shell 1 through the screw holes 2. Screws 14 are screwed into the screw holes 2.

[0020] Specifically, such as Figure 1 and Figure 3 As shown, the top of the outer shell 1 is connected to the top cover 13 through the screw hole 2. The top cover 13 is fastened and sealed to the outer shell 1 by four sets of screws 14, which facilitates the overall disassembly and module replacement. The internal components, such as the MEMS reflector array 7, the optical power detection unit 5, the input fiber array 8, and the output fiber array 3, are arranged in sequence inside the outer shell 1. They are clearly arranged and do not interfere with each other. The output fiber array 3 is connected to the output connection terminal 4, which facilitates the docking with downstream equipment and other modules, thus forming a standardized optical switch module structure.

[0021] Output connection terminal 4 is plugged into output fiber array 3, input fiber 11 is plugged into input fiber array 8, and welding blocks 12 are symmetrically welded on the inner wall of the outer shell 1 where the input fiber array 8 is located. A set of brackets 9 extends outward from the outer shell 1 through the welding blocks 12. Multiple sets of silicone rings 10 with the same number as the input fiber 11 are embedded at equal intervals at the brackets 9. The input fiber 11 is correspondingly plugged into the silicone rings 10.

[0022] Specifically, such as Figure 1 , Figure 3 and Figure 4 As shown, the input fiber array 8 is fixedly installed on the left inner wall of the housing 1. An input fiber 11 is inserted into the input fiber array 8. Multiple sets of silicone rings 10 are embedded at equal intervals on the bracket 9 on the inner wall of the housing 1 near the input fiber array 8. The input fiber 11 is inserted into the silicone ring 10. This can not only limit and guide, but also prevent the fiber from loosening due to vibration or external force, ensuring the overall operation is stable and reliable.

[0023] Working principle: The input optical signal is introduced into the housing 1 through the input optical fiber 11. First, it is fixed and positioned by the silicone ring 10 and the bracket 9 set on the inside of the housing to ensure that the optical fiber is stable and does not loosen. After the light beam is emitted through the input optical fiber array 8, it is directed towards the MEMS reflector array 7 arranged in the middle of the housing 1. The MEMS reflector array 7 is supported by a torsion beam 701 fixed on the silicon substrate 702. The beam end is connected to a reflective lens 704, and a driving electrode 703 is provided below it to provide electrostatic driving force. Under normal working conditions, the driving electrode 703 maintains the reflective lens 704 at a preset angle and accurately directs the light beam through a slight deflection. The optical power is reflected to the output fiber array 3 in front of the optical power detection unit 5. After detection, the light is sent to the output fiber array 3 and output through the output connection terminal 4. If the main reflecting lens malfunctions, the reflection is abnormal, or the drive is out of control, the control system will detect the optical power reduction or offset signal. At this time, the drive electrode 703 receives the control signal and quickly adjusts the voltage to rotate the reflective lens 704 to the backup angle, guide the light beam into the backup bypass optical path 6, bypass the main channel and re-enter the optical power detection unit 5 and send it out, realizing automatic bypass switching in case of failure. The whole process has a short response time, stable optical path, and has multi-channel switching capability and main channel fault adaptive compensation function.

[0024] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A multi-channel MEMS optical switch structure, comprising a housing (1) and a top cover (13), characterized in that: The top of the housing (1) is equipped with a top cover (13). An input fiber array (8) is provided on the left inner wall of the housing (1), and an output fiber array (3) is provided on the right inner wall of the housing (1). A MEMS reflector array (7) is provided between the input fiber array (8) and the output fiber array (3). An optical power detection unit (5) is provided on the left side of the output fiber array (3). A spare bypass optical path (6) is provided between the MEMS reflector array (7) and the optical power detection unit (5). The MEMS reflector array (7) includes a silicon substrate (702), a torsion beam (701), a reflective lens (704), and a driving electrode (703). The silicon substrate (702) is fixed inside the housing (1). A torsion beam (701) is installed on the surface of the silicon substrate (702). A rotatable reflective lens (704) is supported at the top of the torsion beam (701). A driving electrode (703) is provided on the side of the reflective lens (704).

2. The multi-channel MEMS optical switch structure according to claim 1, characterized in that: The outer shell (1) has four sets of screw holes (2) machined on its edge. The upper cover (13) is connected and sealed to the outer shell (1) through the screw holes (2). Screws (14) are screwed into the screw holes (2).

3. The multi-channel MEMS optical switch structure according to claim 1, characterized in that: The output fiber array (3) is connected to an output connection terminal (4).

4. The multi-channel MEMS optical switch structure according to claim 1, characterized in that: An input fiber optic cable (11) is inserted at the input fiber optic array (8).

5. The multi-channel MEMS optical switch structure according to claim 1, characterized in that: The input fiber array (8) is located on the inner wall of the outer shell (1) where the welding blocks (12) are symmetrically welded, and a set of brackets (9) extends outward from the outer shell (1) through the welding blocks (12).

6. The multi-channel MEMS optical switch structure according to claim 5, characterized in that: Multiple sets of silicone rings (10) are equally spaced at the bracket (9), with the number of silicone rings (10) equal to that of the input optical fiber (11). The input optical fiber (11) is inserted into the silicone ring (10).

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