Open-loop quantitative gas supply device and laser

Abstract

This utility model provides an open-loop quantitative gas replenishment device and a laser, relating to the field of lasers. The open-loop quantitative gas replenishment device provided by this utility model, through the arrangement of a device body and a driving component, controls a first or second opening to connect with a pressure equalization buffer chamber, thereby achieving automatic gas replenishment to the laser's discharge tube. Simultaneously, the driving component controls the opening of the first opening and the closing of the second opening. During operation, the internal gas consumption of the laser's discharge tube causes pressure changes, resulting in a pressure difference between the discharge tube and the pressure equalization buffer chamber. Gas from the discharge tube enters the pressure equalization buffer chamber, thus achieving precise gas replenishment to the discharge tube based on the internal pressure changes. This ensures that the internal gas pressure of the laser's discharge tube remains within the permissible operating range, solving the problems of low gas filling efficiency and poor pressure control accuracy in existing laser discharge tube technologies.

Description

Technical Field

[0001] This utility model relates to the field of gas laser technology, and more specifically, to an open-loop quantitative gas replenishment device and a laser. Background Technology

[0002] Currently, the most common method to ensure that the working gas pressure inside the laser discharge tube remains within the permissible operating range is to use a return gas pipe to connect the discharge tube to the gas filling device (i.e., a gas cylinder or other filling device). The return gas pipe and filling device not only ensure stable gas pressure inside the laser discharge tube, but also improve the voltage imbalance distribution between the two electrodes of the discharge tube, preventing discharge between the filling device and the electrodes, and ensuring that the discharge only occurs within the laser discharge tube.

[0003] However, the above method has the following problems: 1. The gas cylinders and other gas filling devices used by the laser are large in size and are not suitable for small-structure laser equipment such as ion lasers. They will also affect the replacement and maintenance of laser components.

[0004] 2. Current lasers have high precision, and the internal gas pressure of their discharge tubes has a strict correlation with the laser's power, ignition voltage, and other functions. Low gas pressure not only affects the laser's power but also causes damage to its components. However, current gas cylinders and other inflation devices cannot guarantee the accuracy of the inflation pressure, resulting in low efficiency and poor precision of the inflation devices. Utility Model Content

[0005] The purpose of this invention is to provide an open-loop quantitative gas replenishment device and a laser, which can accurately replenish the gas in the discharge tube according to the pressure changes inside the discharge tube.

[0006] The embodiments of this utility model can be implemented as follows:

[0007] In a first aspect, this utility model provides an open-loop quantitative gas replenishment device, comprising:

[0008] The device body has a pressure equalization buffer cavity and a first opening and a second opening communicating with the pressure equalization buffer cavity. The pressure equalization buffer cavity is connected to the discharge tube of the laser through the first opening and to the high-pressure gas chamber through the second opening.

[0009] A driving component is disposed on the device body and is used to close or open the first opening or the second opening to replenish gas to the laser.

[0010] In an optional embodiment, the device body is further provided with a first cavity and a second cavity, the pressure equalization buffer cavity is connected to the first cavity and the second cavity respectively, the first cavity is provided with the first opening, and the second cavity is provided with the second opening;

[0011] The driving component includes a first driving component and a second driving component. The first driving component is disposed in the first cavity and is used to close or open the first opening. The second driving component is disposed in the second cavity and is used to close or open the second opening.

[0012] In an optional embodiment, the pressure equalization buffer cavity is connected to the first cavity through a first channel. A first limiting groove is provided in the first cavity. The first end and the second end of the first cavity are opposite ends. The first end of the first cavity is provided with the first opening, and the second end of the first cavity is provided with the first channel and the first limiting groove.

[0013] One end of the first driving member is an output end and faces the first channel, and the other end of the first driving member faces the first opening. The output end of the first driving member is provided with a first valve stem, which is limited to the first limiting groove. The first driving member works and drives the other end of the first driving member to close or open the first opening.

[0014] In an optional embodiment, the first cavity is provided with a first elastic member, which abuts between the output end of the first drive member and the second end face of the first cavity.

[0015] In an optional embodiment, the pressure equalization buffer cavity is connected to the second cavity through a second channel, the second cavity is provided with a second limiting groove, the first end of the second cavity and the second end of the first cavity are opposite ends, the first end of the second cavity is provided with the second channel and the second limiting groove, and the second end of the second cavity is provided with the second opening;

[0016] The second driving member includes a second driving member, one end of which is an output end facing the second channel, and the other end of which faces the second opening. The output end of the second driving member is provided with a second valve stem, which is limited within the second limiting groove. The second driving member works and drives the other end of the second driving member to close or open the second opening.

[0017] In an optional embodiment, the second cavity is provided with a second elastic member, which abuts between the output end of the second drive member and the first end face of the second cavity.

[0018] In an optional embodiment, the open-loop quantitative gas replenishment device further includes a first detection element and a second detection element, wherein the first detection element is used to detect the pressure of the discharge tube, and the second detection element is used to detect the pressure of the pressure equalization buffer chamber.

[0019] In an optional embodiment, the open-loop quantitative gas replenishment device further includes a control module, which is communicatively connected to the first and second detection elements and to the drive element. The control module is used to control the drive element to close or open the first or second opening by detecting the pressure difference between the discharge tube and the pressure equalization buffer chamber in real time.

[0020] In an optional implementation, the volume of the pressure equalization buffer cavity is controllable.

[0021] Secondly, this utility model provides a laser, including the open-loop quantitative gas replenishment device described in any of the foregoing embodiments.

[0022] The beneficial effects of the open-loop quantitative gas replenishment device and laser provided in this embodiment of the invention include:

[0023] By configuring the device body and the driving component, the driving component controls the first or second opening to connect with the pressure equalization buffer chamber, thereby achieving automatic gas replenishment to the laser's discharge tube. Simultaneously, the driving component controls the opening of the first opening and the closing of the second opening. During the operation of the laser's discharge tube, the internal gas consumption causes pressure changes inside the discharge tube, resulting in a pressure difference between the discharge tube and the pressure equalization buffer chamber. The gas inside the discharge tube enters the pressure equalization buffer chamber, thus achieving precise gas replenishment to the discharge tube based on the internal pressure changes. This ensures that the gas pressure inside the laser's discharge tube remains within the permissible operating range, solving the problems of low gas filling efficiency and poor gas pressure control accuracy in existing technologies. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This embodiment provides a schematic diagram of the open-loop quantitative gas replenishment device.

[0026] Figure 2A schematic diagram showing the first connection between the open-loop quantitative gas replenishment device and the laser, high-pressure gas chamber and control module provided in this embodiment;

[0027] Figure 3 A second connection diagram of the open-loop quantitative gas replenishment device with the laser, high-pressure gas chamber and control module provided in this embodiment;

[0028] Figure 4 The VI curve provided for this embodiment.

[0029] Icons: 100 - Open-loop quantitative gas replenishment device; 110 - Device body; 111 - Pressure equalization buffer chamber; 112 - First opening; 113 - Second opening; 114 - First cavity; 1141 - First channel; 115 - Second cavity; 1151 - Second channel; 116 - First limiting groove; 117 - Second limiting groove; 120 - Driving component; 121 - First driving component; 1211 - First valve stem; 1212 - First elastic component; 122 - Second driving component; 1221 - Second valve stem; 1222 - Second elastic component; 200 - Laser; 300 - High-pressure gas chamber; 400 - Control module. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0033] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0034] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0035] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0036] The following describes in detail the overall structure, working principle, and technical effects of the open-loop quantitative gas replenishment device 100 provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0037] Please refer to Figures 2-3 The open-loop quantitative gas replenishment device 100 provided by this utility model is used to quantitatively replenish the discharge tube of the laser 200. The open-loop quantitative gas replenishment device 100 can also control the speed at which the gas enters the discharge tube of the laser 200.

[0038] Please refer to Figure 1 The present invention proposes an open-loop quantitative gas replenishment device 100, comprising:

[0039] The device body 110 has a pressure equalization buffer cavity 111 and a first opening 112 and a second opening 113 communicating with the pressure equalization buffer cavity 111. The pressure equalization buffer cavity 111 is connected to the discharge tube of the laser 200 through the first opening 112, and the pressure equalization buffer cavity 111 is connected to the high-pressure gas chamber 300 through the second opening 113.

[0040] A drive unit 120 is disposed on the device body 110. The drive unit 120 is used to close or open the first opening 112 or the second opening 113 to replenish gas to the laser 200.

[0041] Understandably, when gas needs to be replenished into the discharge tube of the laser 200, the open-loop quantitative gas replenishment device 100 replenishes the discharge tube quantitatively through the following steps: First, the driving component 120 controls the first opening 112 to open and the second opening 113 to close. Due to the pressure difference between the discharge tube and the pressure equalization buffer chamber 111, the gas in the discharge tube enters the pressure equalization buffer chamber 111. Second, the controlling component controls the first opening 112 to close and the second opening 113 to open. The gas in the high-pressure gas chamber 300 enters the pressure equalization buffer chamber 111 through the second opening 113 and undergoes gas mixing in the pressure equalization buffer chamber 111. Third, the first opening 112 is opened and the second opening 113 is closed. The pressure equalization buffer chamber 111 is connected to the discharge tube through the first opening 112, and the mixed gas in the pressure equalization buffer chamber 111 enters the discharge tube through the first opening 112, thereby achieving automatic gas replenishment for the laser 200.

[0042] Therefore, by setting up the device body 110 and the driving component 120, the driving component 120 controls the first opening 112 or the second opening 113 to communicate with the pressure equalization buffer cavity 111, thereby realizing automatic gas replenishment of the discharge tube of the laser 200; at the same time, the driving component 120 controls the first opening 112 to open and controls the second opening 113 to close. During the operation of the discharge tube of the laser 200, the internal gas consumption causes pressure changes inside the discharge tube, thus creating a pressure difference between the discharge tube and the pressure equalization buffer cavity 111. The gas inside the discharge tube enters the pressure equalization buffer cavity 111, thereby realizing precise gas replenishment of the discharge tube according to the pressure changes inside the discharge tube, ensuring that the gas pressure inside the discharge tube of the laser 200 is maintained within the working allowable range, solving the problems of low gas filling efficiency and poor gas pressure control accuracy of the discharge tube of the laser 200 in the prior art.

[0043] In this embodiment, the laser 200 includes a discharge tube and a return gas tube. Please refer to... Figure 2 The discharge tube is connected to the return gas tube, meaning the gas pressure inside the discharge tube is the same as that inside the return gas tube. The front part of the discharge tube is elongated, and the rear part of the discharge tube is a spiral-shaped return gas tube.

[0044] In this embodiment, the open-loop quantitative gas replenishment device 100 includes a drive element 120.

[0045] The drive unit 120 is disposed on the device body 110 and is used to close or open the first opening 112 or the second opening 113, thereby realizing automatic gas replenishment of the return gas pipe of the laser 200.

[0046] In this embodiment, the open-loop quantitative gas replenishment device 100 includes a drive element 120.

[0047] The device body 110 is equipped with a pressure equalization buffer cavity 111, which is used to automatically replenish gas to the discharge tube of the laser 200 according to the pressure change inside the discharge tube.

[0048] Optionally, the drive element 120 can be a solenoid valve.

[0049] In this embodiment, please refer to Figure 1 The device body 110 is provided with a pressure equalization buffer cavity 111, a first cavity 114, a second cavity 115, a first opening 112, and a second opening 113. The device body 110 has a first end and a second end. The first cavity 114 and the second cavity 115 are respectively located at the first end and the second end of the pressure equalization buffer cavity 111. The pressure equalization buffer cavity 111 is connected to the first cavity 114 and the second cavity 115. The first opening 112 and the second opening 113 are also located at the first end and the second end of the device body 110, respectively.

[0050] The first opening 112 is connected to the discharge tube of the laser 200, the first opening 112 is connected to the first cavity 114, and the first opening 112 is connected to the pressure equalization buffer cavity 111 through the first cavity 114.

[0051] The second opening 113 is connected to the high-pressure gas chamber 300, the second opening 113 is connected to the second cavity 115, and the second opening 113 is connected to the pressure equalization buffer cavity 111 through the second cavity 115.

[0052] In this embodiment, the driving member 120 includes a first driving member 121 and a second driving member 122. The first driving member 121 is disposed in the first cavity 114 and is used to close or open the first opening 112. The second driving member 122 is disposed in the second cavity 115 and is used to close or open the second opening 113.

[0053] It is understandable that by setting the first driving member 121 and the second driving member 122 at the first and second ends of the pressure equalization buffer chamber 111, the first driving member 121 can realize the opening and closing of the first opening 112, and the second driving member 122 can realize the opening and closing of the second opening 113. The two do not interfere with each other, so that the gas transmission speed can be controlled.

[0054] In this embodiment, please refer to Figure 1 The pressure equalization buffer cavity 111 is connected to the first cavity 114 through the first channel 1141. The first cavity 114 is provided with a first limiting groove 116. The first end and the second end of the first cavity 114 are opposite ends. The first end of the first cavity 114 is provided with a first opening 112, and the second end of the first cavity 114 is provided with the first channel 1141 and the first limiting groove 116.

[0055] One end of the first driving member 121 is the output end and faces the first channel 1141, and the other end of the first driving member 121 faces the first opening 112. The output end of the first driving member 121 is provided with a first valve stem 1211, which is limited to the first limiting groove 116. The first driving member 121 works and drives the other end of the first driving member 121 to close or open the first opening 112.

[0056] Furthermore, a first elastic element 1212 is provided inside the first cavity 114, and the first elastic element 1212 abuts between the output end of the first driving element 121 and the second end face of the first cavity 114.

[0057] Optionally, the first driving element 121 can be a solenoid valve structure.

[0058] Understandably, when the first driving member 121 is working, the magnetic field strength is controlled to move the first driving member 121 along the first valve stem 1211 to the first end, and the first opening 112 is closed. At this time, the first elastic member 1212 is in a stretched state. When the first driving member 121 is closed, the first elastic member 1212 is reset, and the first driving member 121 moves along the first valve stem 1211 to the second end, and the first opening 112 is opened. The return air pipe is connected to the first cavity 114 through the first opening 112.

[0059] Optionally, the first drive member 121 has a first mating part at its first end, and the first cavity 114 has a first mating wall at its first end, with the first mating part and the first mating wall engaging and connecting. The first mating part can be a trapezoidal structure, and the first mating wall is a trapezoidal wall surface.

[0060] In this embodiment, please refer to Figure 1 The pressure equalization buffer cavity 111 is connected to the second cavity 115 through the second channel 1151. The second cavity 115 is provided with a second limiting groove 117. The first end of the second cavity 115 and the second end of the first cavity 114 are opposite ends. The first end of the second cavity 115 is provided with the second channel 1151 and the second limiting groove 117. The second end of the second cavity 115 is provided with a second opening 113.

[0061] The second driving member 122 includes a second driving member 122, one end of which is an output end facing the second channel 1151, and the other end of which faces the second opening 113. The output end of the second driving member 122 is provided with a second valve stem 1221, which is limited within the second limiting groove 117. The second driving member 122 works and drives the other end of the second driving member 122 to close or open the second opening 113.

[0062] Furthermore, a second elastic element 1222 is provided inside the second cavity 115, and the second elastic element 1222 abuts between the output end of the second driving element 122 and the first end face of the second cavity 115.

[0063] Optionally, the second drive element 122 can be a solenoid valve structure.

[0064] Understandably, when the second driving member 122 is working, the magnetic field strength is controlled to move the second driving member 122 along the second valve stem 1221 to the second end, and the second opening 113 is closed. At this time, the second elastic member 1222 is in a stretched state. When the second driving member 122 is closed, the second elastic member 1222 is reset, and the second driving member 122 moves along the second valve stem 1221 to the first end, and the second opening 113 is opened. The return air pipe is connected to the second cavity 115 through the second opening 113.

[0065] Optionally, the second drive member 122 has a second mating part at its second end, and the second cavity 115 has a second mating wall at its second end, with the second mating part and the second mating wall engaging and connecting. The second mating part can be a trapezoidal structure, and the second mating wall is a trapezoidal wall surface.

[0066] In this embodiment, please refer to Figures 2-3 The open-loop quantitative gas replenishment device 100 includes a control module 400 and a control panel, a first detection element, and a second detection element that are communicatively connected to the control module 400.

[0067] The first detection element is used to detect the pressure of the discharge tube, the second detection element is used to detect the pressure of the pressure equalization buffer chamber 111, and the control module 400 is used to control the drive element 120 to close or open the first opening 112 or the second opening 113 by detecting the pressure difference between the discharge tube and the pressure equalization buffer chamber 111 in real time.

[0068] Optionally, the first and second detection elements can be pressure sensors.

[0069] The control panel displays the pressure inside the discharge tube, the pressure in the equalizing buffer chamber 111, and the pressure difference between the discharge tube and the equalizing buffer chamber 111. It also includes a gas replenishment button for operator control.

[0070] It is worth mentioning that the volume of the pressure equalization buffer cavity 111 is controllable. Understandably, the control module 400 calculates the chamber volume of the pressure equalization buffer cavity 111 according to empirical formulas to ensure precise control of the gas pressure in the return gas pipe of the laser 200 after each gas replenishment.

[0071] The working principle and process of the open-loop quantitative gas replenishment device 100 provided in this embodiment of the present invention are as follows:

[0072] When the first detection device detects that the gas pressure inside the discharge tube of the laser 200 has dropped below the working gas pressure due to working losses, the control panel displays the working gas pressure inside the discharge tube in real time. When the operator turns on the gas replenishment button, the open-loop quantitative gas replenishment device 100 starts and replenishes gas to the discharge tube and return gas tube of the laser 200 according to the deviation between the actual gas pressure inside the discharge tube and the design gas pressure.

[0073] The open-loop quantitative gas replenishment device 100 replenishes the discharge tube with a single quantitative gas through the following steps S1-S4:

[0074] S1: The first driving element 121 is closed, the first elastic element 1212 is reset, the first opening 112 is opened, and the return gas pipe is connected to the pressure equalization buffer chamber 111; the second driving element 122 is working, the second opening 113 is closed, and the high-pressure gas chamber 300 is isolated from the pressure equalization buffer chamber 111; since there is a pressure difference between the discharge tube and the pressure equalization buffer chamber 111, the gas in the discharge tube will enter the pressure equalization buffer chamber 111.

[0075] S2: The first driving element 121 is opened, the first opening 112 is closed, and the return gas pipe is isolated from the pressure equalization buffer chamber 111; the second driving element 122 is closed, the second elastic element 1222 is reset, the second opening 113 is opened, the high-pressure gas chamber 300 is connected to the pressure equalization buffer chamber 111, and the gas in the high-pressure gas chamber 300 enters the pressure equalization buffer chamber 111 through the second opening 113 and undergoes gas mixing in the pressure equalization buffer chamber 111.

[0076] S3: The first driving element 121 is closed, the first elastic element 1212 is reset, the first opening 112 is opened, and the return gas pipe is connected to the pressure equalization buffer chamber 111; the second driving element 122 is working, the second opening 113 is closed, and the high-pressure gas chamber 300 is isolated from the pressure equalization buffer chamber 111; the well-mixed gas in the pressure equalization buffer chamber 111 enters the discharge chamber through the first opening 112, thereby realizing automatic gas replenishment of the return gas pipe of the laser 200.

[0077] S4: The first driving element 121 operates, the first opening 112 is closed, and the return gas pipe is isolated from the pressure equalization buffer chamber 111; the second driving element 122 operates, the second opening 113 is closed, and the high-pressure gas chamber 300 is isolated from the pressure equalization buffer chamber 111; the open-loop quantitative gas replenishment device 100 is closed. At this time, the gas pressure in the return gas pipe of the laser 200 is restored to the working gas pressure range, ensuring the normal operation of the discharge tube of the laser 200.

[0078] It is understandable that the amount of gas replenishment to the return gas pipe of laser 200 in steps S1-S4 is a fixed value.

[0079] Furthermore, this utility model also proposes a method for calculating the number of times the open-loop quantitative gas replenishment device 100 replenishes gas to the discharge tube, namely, the number of repetitions of steps S1-S4. The open-loop quantitative gas replenishment device 100 replenishes gas based on the deviation between the actual gas pressure and the designed gas pressure inside the discharge tube.

[0080] In this embodiment, the chamber volume of the pressure equalization buffer cavity 111 is V, the gas replenishment resolution of the laser 200 is Re (in Pa, which refers to the increase in gas pressure of the discharge tube when the drive unit 120 is turned on once), the net internal volume of the discharge tube is V2, the current gas pressure of the discharge tube is P1, the design gas pressure of the discharge tube is P2, and the gas pressure of the high-pressure gas chamber 300 is P3.

[0081] During the initial gas replenishment, the first driving component 121 opens, and the gas pressure in the equalizing buffer chamber 111 rises to the design gas pressure P2 of the discharge tube to be the same as the gas pressure P3 of the high-pressure gas chamber 300. Since the gas pressure in the high-pressure chamber is very high, its pressure change is negligible.

[0082] Assume that the first driving element 121 is closed, the first opening 112 is opened, and the return gas pipe is connected to the pressure equalization buffer chamber 111; at the same time, after the second driving element 122 is opened, the gas in the discharge tube will enter the pressure equalization buffer chamber 111, and the gas pressure in the discharge tube will change from P1 to P1′.

[0083] According to the Clapeyron equation: PV = nRT.

[0084] Formula (1) can be derived:

[0085] P1′(V2+V)=(n2+n)RT(1)

[0086] Wherein, n2 is the amount of gas in the discharge tube before gas replenishment, and n is the amount of gas in the pressure equalization buffer chamber 111 when the first driving component 121 is opened.

[0087] Furthermore, n² and n satisfy formulas (2) and (3) respectively:

[0088] P1V2=n2RT(2)

[0089] P3V=nRT(3)

[0090] Formula (5) can be derived from formulas (1), (2), and (3):

[0091]

[0092] The formula (6) for calculating the air replenishment resolution (i.e., the air replenishment pressure after one valve action) is as follows:

[0093] R e =P1′-P1(6)

[0094] Formula (7) can be derived from formulas (5) and (6):

[0095]

[0096] To raise the gas pressure inside the discharge tube from the current pressure P1 to the design pressure P2, the number of times the drive component 120 opens, C, must satisfy formula (8):

[0097]

[0098] Please see Figure 4 The difference ΔP between the current air pressure P1 and the design air pressure P2 is indirectly calculated by measuring the offset ΔV of the VI curve.

[0099] according to Figure 4 When the gas pressure inside the discharge tube changes by ΔP, the VI curve of the discharge tube will deflect vertically by ΔV, where ΔV and ΔP have a strict linear relationship (9):

[0100] ΔP=k*ΔV(9)

[0101] That is, by measuring the offset of the VI curve, the required gas pressure difference ΔP can be calculated. From formulas (8) and (9), the required number of gas replenishment cycles C can be derived as relationship (10):

[0102]

[0103] The combined formula (10) calculates that the number of times to replenish the gas is C. Therefore, the drive unit 120 needs to repeat steps S1-S4C times to complete the gas filling of the discharge tube and raise the gas pressure in the discharge tube to the design gas pressure.

[0104] In summary, the open-loop quantitative gas replenishment device 100 and laser 200 provided in this embodiment of the present invention, by setting up a device body 110 and a driving component 120, and controlling the first opening 112 or the second opening 113 to connect with the pressure equalization buffer chamber 111 through the driving component 120, can automatically replenish gas to the discharge tube of the laser 200. At the same time, by controlling the first opening 112 to open and the second opening 113 to close, the driving component 120 controls the gas inside the discharge tube of the laser 200 to consume gas during operation, resulting in pressure changes inside the discharge tube. Therefore, a pressure difference is generated between the discharge tube and the pressure equalization buffer chamber 111, and the gas inside the discharge tube enters the pressure equalization buffer chamber 111. Thus, based on the pressure changes inside the discharge tube, the discharge tube can be accurately replenished with gas, ensuring that the gas pressure inside the discharge tube of the laser 200 is maintained within the permissible working range. This solves the problems of low gas filling efficiency and poor gas pressure control accuracy of the discharge tube of the laser 200 in the prior art.

[0105] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. An open loop quantitative air supplementing device, characterized in that, include: The device body has a pressure equalization buffer cavity and a first opening and a second opening communicating with the pressure equalization buffer cavity. The pressure equalization buffer cavity is connected to the discharge tube of the laser through the first opening and to the high-pressure gas chamber through the second opening. A driving component is disposed on the device body and is used to close or open the first opening or the second opening to replenish gas to the laser.

2. The open-loop metering gas replenishment device according to claim 1, characterized in that, The device body is further provided with a first cavity and a second cavity. The pressure equalization buffer cavity is connected to the first cavity and the second cavity respectively. The first cavity is provided with the first opening and the second cavity is provided with the second opening. The driving component includes a first driving component and a second driving component. The first driving component is disposed in the first cavity and is used to close or open the first opening. The second driving component is disposed in the second cavity and is used to close or open the second opening.

3. The open loop quantitative air supplementing device according to claim 2, characterized in that, The pressure equalization buffer cavity is connected to the first cavity through the first channel. The first cavity is provided with a first limiting groove. The first end and the second end of the first cavity are opposite ends. The first end of the first cavity is provided with the first opening. The second end of the first cavity is provided with the first channel and the first limiting groove. One end of the first driving member is an output end and faces the first channel, and the other end of the first driving member faces the first opening. The output end of the first driving member is provided with a first valve stem, which is limited to the first limiting groove. The first driving member works and drives the other end of the first driving member to close or open the first opening.

4. The open loop dosing device of claim 3, wherein, The first cavity is provided with a first elastic element, which abuts between the output end of the first driving element and the second end face of the first cavity.

5. The open-loop quantitative gas replenishment device according to claim 2, characterized in that, The pressure equalization buffer cavity is connected to the second cavity through the second channel. The second cavity is provided with a second limiting groove. The first end of the second cavity and the second end of the first cavity are opposite ends. The first end of the second cavity is provided with the second channel and the second limiting groove, and the second end of the second cavity is provided with the second opening. The second driving member includes a second driving member, one end of which is an output end facing the second channel, and the other end of which faces the second opening. The output end of the second driving member is provided with a second valve stem, which is limited within the second limiting groove. The second driving member works and drives the other end of the second driving member to close or open the second opening.

6. The open-loop metering gas replenishment device according to claim 5, characterized in that, The second cavity is provided with a second elastic element, which abuts between the output end of the second drive member and the first end face of the second cavity.

7. The open-loop metering gas replenishment device according to claim 1, characterized in that, The open-loop quantitative gas replenishment device further includes a first detection element and a second detection element. The first detection element is used to detect the pressure of the discharge tube, and the second detection element is used to detect the pressure of the pressure equalization buffer chamber.

8. The open-loop metering gas replenishment device according to claim 7, characterized in that, The open-loop quantitative gas replenishment device also includes a control module, which is communicatively connected to the first and second detection elements and to the drive element. The control module is used to control the drive element to close or open the first or second opening by detecting the pressure difference between the discharge tube and the pressure equalization buffer chamber in real time.

9. The open-loop metering gas replenishment device according to claim 1, characterized in that, The volume of the pressure equalization buffer chamber is controllable.

10. A laser, characterized in that, Includes the open-loop quantitative gas replenishment device according to any one of claims 1-9.

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