Tray storage mechanism

Abstract

This utility model discloses a tray storage mechanism, relating to the field of wafer sorting technology. The tray storage mechanism includes: a loading module, which has a first receiving position and a second receiving position relative to the unloading position. At the first receiving position, the loading module can receive trays; at the second receiving position, the trays in the loading module can receive materials. A storage rack has multiple storage positions for storing multiple trays that are not full of materials. A transfer module can transfer trays that are not full of materials from the second receiving position to the storage positions, or transfer trays that are not full of materials from the storage position to the second receiving position. The technical solution provided by this utility model can solve the technical problem of trays entering the wafer spool without being fully loaded with wafers.

Description

Technical Field

[0001] This utility model relates to the field of wafer sorting technology, and in particular to a material tray storage mechanism. Background Technology

[0002] A wafer sorter is a key piece of equipment used in the semiconductor manufacturing process. It is mainly used to classify wafers. The wafer sorter sorts the wafers on the blue film and puts the same wafers into the same tray. After sorting, the tray enters the storage rack.

[0003] However, when the aforementioned operation is applied, there is a problem where the tray is not fully occupied by wafers. In other words, after one type of material on a blue film is sorted, the tray is not full. When the unfilled tray enters the storage rack, the following problems will occur:

[0004] 1. It is inconvenient to count the wafers in the storage rack;

[0005] 2. It will waste space on the material tray, resulting in the problem of too many material trays being put in. It is understandable that in the case of quantitative wafers, too many material trays will enter the material tower before the wafers are full. If all the quantitative wafers are placed in the material tower, the number of material trays will need to be increased. Utility Model Content

[0006] In order to solve at least one of the above-mentioned technical problems, the purpose of this utility model is to provide a material tray storage mechanism.

[0007] To achieve the above objectives, the material tray storage mechanism proposed in this utility model is applied to a wafer sorting machine, wherein the wafer sorting machine is provided with a material unloading position, and the material tray storage mechanism includes:

[0008] The material loading module has a first receiving position and a second receiving position relative to the unloading position. When it is at the first receiving position, the material loading module can receive the material tray. When it is at the second receiving position, the material tray in the material loading module can receive the material.

[0009] The storage rack is provided with multiple storage positions, which are used to store multiple trays that are not full of material.

[0010] The transfer module is capable of transferring a tray that is not full of material from the second receiving position to the storage position, or transferring a tray that is not full of material from the storage position to the second receiving position.

[0011] In one embodiment, the transfer module includes a transport unit and an infeed / outfeed unit;

[0012] The loading module is provided with a transfer position relative to the unloading position, and the transport unit can drive the loading module to move back and forth between the first receiving position, the second receiving position, and the transfer position;

[0013] When the material loading module is in the transfer position, the material loading module corresponds to the storage rack. The feeding and discharging unit can move the tray that is not full of material from the material loading module to the storage position, or move the tray that is not full of material in the storage position to the material loading module.

[0014] In one embodiment, the transport unit includes a first linear drive member for driving the material loading module to move along the X direction, so that the material loading module reciprocates between the first receiving position, the second receiving position, and the transfer position.

[0015] In one embodiment, the transport unit further includes a second linear drive, which drives the first linear drive and the loading module to move along the Y direction, the first linear drive drives the loading module to move along the X direction, and the storage rack and the transfer position are arranged along the Y direction.

[0016] And / or, the first linear drive includes a first guide rail, a first slider, and a first drive, the first guide rail extends along the X direction, the material loading module is mounted on the first slider, and the first drive drives the first slider to move along the first guide rail.

[0017] In one embodiment, the material tray storage mechanism further includes a first driving component, which is used to drive the storage rack to move along the Z direction;

[0018] Multiple storage positions are stacked on the storage rack, and the storage rack moves along the Z direction so that any one of the storage positions corresponds to the transfer position.

[0019] In one embodiment, the first driving component includes a third guide rail, a third slider, and a third driving member. The third guide rail extends along the Z direction, the third slider is slidably disposed on the third guide rail, the storage rack is mounted on the third slider, and the third driving member drives the third slider to move along the third guide rail.

[0020] In one embodiment, the storage rack is provided with a storage cavity, and a plurality of storage positions are provided in the storage cavity. The storage cavity is provided with a first opening and a second opening that are disposed opposite to each other.

[0021] The feeding and discharging unit includes a feeding component and a discharging component fixedly disposed relative to the storage rack. The feeding component is used to move the unfilled material tray in the material loading module to the storage position through the first opening.

[0022] The discharge component moves the unfilled tray in the storage position to the loading module through the first opening via the second opening.

[0023] In one embodiment, the feeding assembly includes a first abutting part and a fourth driving member. The fourth driving member is used to drive the first abutting part so that the first abutting part moves the unfilled tray through the first opening to the storage position.

[0024] And / or, the discharge assembly includes a second abutment and a fifth driving member, the fifth driving member being used to drive the second abutment so that the second abutment moves the unfilled tray located in the storage position through the first opening to the loading module.

[0025] In one embodiment, the material loading module includes a first mounting frame mounted on the transport unit and a transfer component mounted on the first mounting frame, the transfer component being used to drive the material tray to move along the Y direction;

[0026] At the first receiving position, the material loading module can output the material tray.

[0027] In one embodiment, the material loading module further includes a lifting component and a clamping component disposed on the first mounting frame. When in the second receiving position, the lifting component can lift the material tray, and the clamping component can clamp the material tray to restrict the material tray to the lifting component.

[0028] And / or, the loading module further includes a blocking component mounted on the first mounting bracket, the blocking component being capable of confining the tray to the transfer component.

[0029] The technical solution of this utility model adopts a storage rack with multiple storage positions, which are used to store multiple trays that are not full of material. After the wafer sorter finishes sorting the A-type material on a blue film, if it finds that the tray is not full of A-type material, the tray can be temporarily stored in the storage position. When the next blue film sorts the A-type material, the tray that is not full of A-type material is taken out from the storage position and placed in the second receiving position to continue receiving A-type material until the tray is full of A-type material. In this way, the tray is prevented from entering the material tower without being full of wafers, thereby solving the technical problems existing in the prior art. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0031] Figure 1 A schematic diagram of an embodiment of the material tray storage mechanism provided by this utility model;

[0032] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0033] Figure 3 for Figure 1 Enlarged view of the medium-load module.

[0034] Explanation of icon numbers:

[0035] 100. Loading module; 110. First mounting frame; 120. Conveying assembly; 121. Conveying belt; 122. Sixth drive component; 130. Lifting assembly; 131. Pallet; 140. Clamping assembly; 141. First gripper; 142. Second gripper; 143. Seventh drive component; 150. Blocking assembly; 151. Blocking plate;

[0036] 200. Storage rack; 210. Storage position; 220. Storage cavity; 221. First opening;

[0037] 311, First linear drive component; 3111, First guide rail; 3112, First slider; 3113, First drive component; 312, Second linear drive component; 3121, Second guide rail; 3122, Second slider; 3123, Second drive component; 321, Feeding assembly; 3211, Fourth drive component; 322, Discharge assembly; 3221, Fifth drive component; 3222, Pusher plate;

[0038] 400. First drive assembly; 410. Third guide rail; 420. Third drive component;

[0039] 500, tray.

[0040] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0042] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0043] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0044] This utility model proposes a material tray storage mechanism for use in a wafer sorting machine. Further, in some embodiments, the wafer sorting machine includes a turret, a suction nozzle disposed on the turret, a blue film loading module, and a unloading position. The suction nozzle can remove materials from the blue film. Then, the rotation of the turret drives the suction nozzle to rotate to the unloading position, thereby moving the materials to the unloading position. It should be noted that multiple materials are disposed on the blue film, and the wafer sorting machine has already obtained the types and positions of these materials. When the turret drives the suction nozzle to pick up materials, it first removes one type of material from the blue film until all of it is removed, then removes another type of material, until all the materials on the blue film are removed. It can be understood that when the turret drives the suction nozzle to pick up materials, it does so according to the type of material.

[0045] Please see Figure 1 , Figure 2 , Figure 3 In one embodiment of this utility model, the material tray storage mechanism includes a material loading module 100, a material storage rack 200, and a transfer module:

[0046] The material loading module 100 is provided with a first receiving position and a second receiving position relative to the unloading position. At the first receiving position, the material loading module 100 can receive the material tray 500. At the second receiving position, the material tray in the material loading module 100 can receive materials.

[0047] It should be noted that in some embodiments, the first receiving position and the second receiving position can be configured as a single workstation, i.e., a combined workstation. In this case, during use, the material tray can be placed in the combined workstation by a multi-axis robotic arm (not shown in the figure) or manually. The combined workstation is equipped with another multi-axis robotic arm, which has grippers. These grippers are configured as a material-carrying module 100 and can hold the material tray. Further, the turret drives the suction nozzle to pick up the material, and then the suction nozzle places the material into the material tray. However, this design is not limited to this. When the first receiving position and the second receiving position are configured as a single workstation, i.e., a combined workstation, a belt conveyor module can also be used to transport the empty material tray to the grippers in the combined workstation so that the material-carrying module 100 can hold the material tray.

[0048] Furthermore, in some embodiments, the first receiving position and the second receiving position can be set separately. When the first receiving position and the second receiving position are set separately, when the loading module 100 is at the first receiving position, the loading module 100 can receive the material tray. The material tray can be transported to the first receiving position by other transportation structures (such as belt conveyor modules). When the loading module 100 receives the material tray at the first receiving position, the loading module 100 moves the material tray to the second receiving position. It should be noted that the second receiving position corresponds to the unloading position. At this time, the suction nozzle places the material on the material tray at the unloading position. That is to say, the material tray in the loading module 100 can receive the material.

[0049] When materials of the same type from a blue membrane are placed into a tray, the tray changes from an empty tray to a tray that is either partially filled or full of materials. For trays full of materials, other components on the wafer sorter transport them to a designated location. For example, in some embodiments, when the wafer sorter is equipped with a multi-axis robotic arm, the multi-axis robotic arm can grip the tray full of materials and place it into the designated location. For trays that are not full of material, the transfer module transfers them to the storage rack 200, which has multiple storage positions 210. These storage positions 210 are used to store multiple trays that are not full of material. It should be noted that each type of material has a corresponding storage position 210. For example, when sorting material of type A in a blue film, the storage rack 200 has storage positions 210 for temporary storage of material of type A. When a tray of material of type A is not full, it can be placed in the corresponding temporary storage position 210. When sorting material of type A in the next blue film, the tray that was not full of material A can be taken out from the storage position 210 and placed in the second receiving position so that the tray can continue to receive material A until the tray is full of material A.

[0050] Furthermore, in one embodiment, when the first receiving position and the second receiving position are configured as a combined position (this embodiment is not shown in the figure), the transfer module is used to transfer the unfilled material tray from the combined position to the storage position 210, or to transfer the unfilled material tray from the storage position 210 to the combined position. Furthermore, in this embodiment, the transfer module can use a multi-axis robotic arm to assist in the transfer of the material tray.

[0051] Further, refer to Figure 1 , Figure 2 In some embodiments, when the first receiving position and the second receiving position are set separately, the transfer module is used to transfer the unfilled material tray from the second receiving position to the storage position 210, or to transfer the unfilled material tray from the storage position 210 to the second receiving position. In some embodiments, the transfer module can use a multi-axis robotic arm to only drive the material tray and the material on the material tray for transfer. However, this design is not limited to this. In some embodiments, the transfer module can drive the loading module 100 to move the loading module 100, thereby moving the tray and material placed on the loading module 100 together from the second receiving position to a position close to the storage rack 200. Then the transfer module transfers the tray on the loading module 100 into the storage position 210. Similarly, the transfer module can also move the tray that is not full of material in the storage position 210 from the storage rack 200 to the loading module 100. Then the transfer module drives the loading module 100 to move it from a position close to the storage rack 200 to the second receiving position.

[0052] This application addresses the technical problems in the prior art by using multiple storage positions 210 in the storage rack 200, where multiple storage positions 210 are used to store multiple trays that are not full of material. After the wafer sorter finishes sorting the A-type material on a blue film, if it finds that the tray is not full of A-type material, the tray can be temporarily stored in the storage position 210. When the next blue film sorts the A-type material, the tray that is not full of A-type material is taken out from the storage position 210 and placed in the second receiving position to continue receiving A-type material until the tray is full of A-type material. In this way, the tray is prevented from entering the material tower without being full of wafers.

[0053] It should be noted that the quantity of material that can be placed in each tray and the quantity of a certain type of material on a blue film are known in advance. For example, each tray can hold 50 wafers, and each blue film has 30 type A wafers and 20 type B wafers. When type A wafers from a blue film are sorted and loaded into a tray, the tray will have 20 empty wafer slots. The tray with 20 empty wafer slots is then transferred to the corresponding storage position 210 in the storage rack 200. When the next blue film sorts, the tray containing type A wafers with 20 empty wafer slots is placed in the second receiving position to continue receiving type A wafers until the tray is full of type A wafers.

[0054] In one embodiment, reference Figure 1 , Figure 2 The transfer module includes a transport unit and an infeed / outfeed unit; wherein the loading module 100 is provided with a transfer position relative to the unloading position, and the transport unit can drive the loading module 100 to reciprocate between the first receiving position, the second receiving position, and the transfer position. It can be understood that the first receiving position, the second receiving position, and the transfer position are set on the movement path of the loading module 100. The movement path of the loading module 100 can be a straight line or a curve, and there is no limitation here.

[0055] Furthermore, the transport unit drives the loading module 100 so that when the loading module 100 is in the transfer position, it corresponds to the storage rack 200. At this time, the feeding and discharging unit can move the tray that is not full of material from the loading module to the storage position 210, or move the tray that is not full of material in the storage position 210 to the loading module. Furthermore, in this embodiment, the feeding and discharging unit can be a multi-axis robotic arm, which moves the tray that is not full of material from the loading module to the storage position 210, or moves the tray that is not full of material in the storage position 210 to the loading module.

[0056] In one embodiment, reference Figure 1 , Figure 2The transport unit includes a first linear drive 311, which drives the material loading module 100 to move along the X direction, so that the material loading module 100 reciprocates between the first receiving position, the second receiving position, and the transfer position. It can be understood that when the material loading module 100 moves along the X direction, its movement path is a straight path, and it can also be understood that the first receiving position, the second receiving position, and the transfer position are arranged along the X direction.

[0057] In one embodiment, reference Figure 1 , Figure 2 The transport unit further includes a second linear drive 312, which drives the first linear drive 311 and the loading module 100 to move along the Y direction. The first linear drive 311 drives the loading module 100 to move along the X direction. The storage rack 200 and the transfer position are arranged along the Y direction. It can be understood that when the first linear drive 311 drives the loading module 100 to move to the transfer position, the second linear drive 312 can drive the first linear drive 311 and the loading module 100 to move along the Y direction. Since the storage rack 200 and the transfer position are arranged along the Y direction, the loading module 100 can move closer to or further away from the storage rack 200 during the movement along the Y direction, so that the material tray can enter from the loading module 100 to the storage position 210, or move out of the storage position 210 to the loading module 100.

[0058] In one embodiment, reference Figure 1 , Figure 2 The first linear drive unit 311 includes a first guide rail 3111, a first slider 3112, and a first drive unit 3113. The first guide rail 3111 extends along the X direction. The material loading module 100 is mounted on the first slider 3112. The first drive unit 3113 drives the first slider 3112 to move along the first guide rail 3111. The first drive unit 3113 can be a drive motor. The first drive unit 3113 can drive the first slider 3112 through a belt, so that it moves along the first guide rail 3111.

[0059] Furthermore, in some embodiments, reference is made to... Figure 1 , Figure 2The second linear drive unit 312 includes a second guide rail 3121, a second slider 3122, and a second drive unit 3123. The second guide rail 3121 extends along the Y direction. The material loading module 100 is mounted on the second slider 3122. The second guide rail 3121 is mounted on the first slider 3112. The second drive unit 3123 drives the second slider 3122 to move along the second guide rail 3121. Furthermore, the second drive unit 3123 can be a drive motor. The second drive unit 3123 can also drive the second slider 3122 through a belt, so that it moves along the second guide rail 3121.

[0060] In one embodiment, reference Figure 1 , Figure 2 The material tray storage mechanism further includes a first driving component 400, which drives the storage rack 200 to move along the Z direction. Multiple storage positions 210 are stacked on the storage rack 200. The storage rack 200 moves along the Z direction so that any one of the storage positions 210 corresponds to the transfer position. It is understood that the storage rack 200 has corresponding storage positions 210 for different types of materials. Further, in some embodiments, the storage rack 200 has fifty storage positions 210, enabling the wafer sorter to support the sorting of fifty types of wafers. During the sorting process, when the tray containing type A wafers is not full, the loading module 100 can be moved to the loading module by the first linear drive 311, and then the unfilled tray on the loading module 100 can be moved to the storage position 210 by the infeed / outfeed unit. Furthermore, when it is necessary to move a tray that is not full of Class B wafers to the storage position 210, the first drive component 400 drives the storage rack 200 to move along the Z direction, so that the tray that is not full of Class B wafers corresponds to the storage position 210 where Class B wafers are stored. At this time, the loading / unloading unit moves the tray that is not full of Class B wafers to the storage position 210. Similarly, this is also the case for Class C wafers, Class D wafers, etc. Furthermore, in some embodiments, the transport unit only includes a first linear drive member, in which case the first drive component 400 and the storage rack are located at the end of the first linear drive member.

[0061] Furthermore, in some embodiments, a storage position 210 can be selected to correspond to a type of wafer, so that when a tray that is not full of wafers enters the storage rack 200, it can enter the corresponding storage position 210. However, this design is not limited to this. In some embodiments, a storage position 210 may not correspond to a type of wafer. Specifically, when a tray that is not full of type A wafers enters a storage position 210, the wafer sorter can obtain the position of the tray that is not full of type A wafers in the storage rack 200 to calibrate the tray. When the next blue film needs to sort type A wafers, the tray that is not full of type A wafers can be removed from the storage position 210 according to the previously obtained position. At the same time, when a storage position 210 is not corresponding to a type of wafer, the wafers are placed into the storage rack 200 with a certain degree of randomness.

[0062] In one embodiment, reference Figure 1 , Figure 2 The first driving assembly 400 includes a third guide rail 410, a third slider, and a third driving member 420. The third guide rail 410 extends along the Z direction, the third slider is slidably disposed on the third guide rail 410, the storage rack 200 is mounted on the third slider, and the third driving member 420 drives the third slider to move along the third guide rail 410. Further, the third driving member 420 can be a drive motor, and it can also drive the third slider via a belt, causing it to move along the third guide rail 410. When the third slider moves, it can also move the storage rack 200 mounted on the third slider together.

[0063] Furthermore, in some embodiments, reference is made to... Figure 1 In order to ensure the stability of the storage rack 200 during movement, guide frames can be provided on both sides of the storage rack 200. The purpose of the guide frames is to ensure the stability of the storage rack 200 during movement.

[0064] In one embodiment, reference Figure 1 , Figure 2The storage rack 200 is provided with a storage cavity 220, and multiple storage positions 210 are provided in the storage cavity 220. The storage cavity 220 is provided with a first opening 221 and a second opening that are opposite to each other. The feeding and discharging unit includes a feeding component 321 and a discharging component 322 that are fixedly disposed relative to the storage rack 200. It should be noted that when the storage rack 200 moves along the Z direction, the positions of the feeding component and the discharging component 322 do not change. When the material tray located at the receiving position corresponds to a storage position 210, the feeding component 321 is used for... The unfilled tray in the loading module is moved to the storage position 210 through the first opening 221. It should be noted that the feeding component 321 drives the unfilled tray in the loading module to move it to the storage position 210 through the first opening 221. Furthermore, before the feeding component drives the tray to move, the conveyor belt in the loading module can first feed part of the tray structure into the storage position through the first opening, and then the feeding component drives the tray to feed the remaining part of the tray structure into the storage position through the first opening. When a tray in storage position 210 that is not full of material corresponds to a receiving position, the discharging component 322 moves the tray in storage position 210 that is not full of material to the loading module through the first opening 221 via the second opening. In other words, the discharging component 322 drives the tray in storage position 210 that is not full of material into the loading module through the first opening 221 via the second opening, so that the loading module 100 receives the tray. It should be noted that the discharging component feeds part of the tray structure into the loading module, and then the conveyor belt on the loading module rotates to drag the remaining part of the tray structure onto the loading module.

[0065] In one embodiment, reference Figure 1 , Figure 2 The feeding assembly 321 includes a first abutting part and a fourth driving member 3211. The fourth driving member 3211 drives the first abutting part to move the unfilled tray through the first opening 221 to the storage position 210. The fourth driving member 3211 is configured as a push motor structure, and the first abutting part is located within the push motor structure. The push motor structure pushes the unfilled tray through the first opening 221 into the storage position 210. However, this design is not limited to this. In some embodiments, when a multi-axis robotic arm is used to move the unfilled tray to the storage position 210, the multi-axis robotic arm is equipped with grippers that can hold the tray and move it to the storage position 210.

[0066] In one embodiment, reference Figure 1 , Figure 2The discharge assembly 322 includes a second abutment and a fifth driving member 3221. The fifth driving member 3221 drives the second abutment so that the second abutment moves the tray that is not full of material in the storage position 210 through the first opening 221 to the loading module. The fifth driving member 3221 is configured as a push motor structure, and the second abutment is located in the push motor structure. Further, in order to facilitate the discharge assembly 322 to push the tray that is not full of material out of the storage position 210, the push motor structure is provided with a push plate 3222, and the second abutment is located in the push plate 3222. When the tray that is not full of material is pushed out of the storage position 210, the push plate 3222 can be located in the storage rack 200.

[0067] In one embodiment, reference Figure 3 The loading module 100 includes a first mounting frame 110 mounted on the transport unit and a transmission component 120 mounted on the first mounting frame. The first mounting frame 110 is mounted on a first slider 3112. The transmission component 120 is used to drive the material tray to move along the Y direction. At the first receiving position, the loading module 100 can output the material tray. Furthermore, in some embodiments, the transmission component 120 includes a transmission belt 121 and a sixth drive member 122, wherein the sixth drive member 122 is configured as a drive motor, the transmission belt 121 is configured as a synchronous belt, the drive motor drives the synchronous belt through a synchronous pulley, the sixth drive member 122 can drive the transmission belt 121 to rotate, and when the transmission belt 121 rotates, it can drive the material tray to move along the Y direction. It should be noted that in some embodiments, when a material tray that is not full of material enters the storage position 210, the material tray can first be transported to the storage position 210 a certain distance by the transmission belt 121, and then the material tray can be fed into the storage position 210 by the feeding component 321.

[0068] In one embodiment, reference Figure 3The material loading module 100 further includes a lifting assembly 130 and a clamping assembly 140 disposed on the first mounting frame 110. At the second receiving position, the lifting assembly 130 can lift the material tray, and the clamping assembly 140 can clamp the material tray to confine it within the lifting assembly 130. Further, in some embodiments, the lifting assembly 130 includes a lifting cylinder and a support plate 131 mounted on the lifting cylinder. The lifting cylinder drives the support plate 131 to move, which in turn drives the material tray to move, thereby lifting the material tray. It should be noted that the lifting cylinder drives the support plate 131 to move along the Y direction. The clamping assembly 140 includes a first clamping jaw 141, a second clamping jaw 142 fixed to the first mounting bracket 110, and a seventh driving member 143 that drives the first clamping jaw 141 to move. When the tray is lifted, the seventh driving member 143 drives the first clamping jaw 141 to move toward the second clamping jaw 142, reducing the distance between them, thereby achieving clamping of the tray.

[0069] In some embodiments, reference Figure 3 The loading module 100 further includes a blocking component 150 mounted on the first mounting bracket 110. The blocking component 150 can restrict the material tray to the transmission component 120. The blocking component 150 includes a lifting cylinder and a blocking plate 151. The lifting cylinder can drive the blocking plate 151 to move along the Z-axis. The blocking plate 151 has a first position and a second position. When the blocking plate 151 is in the first position, the blocking plate 151 can block the movement of the material tray, thereby restricting the material tray to the belt of the transmission component 120. When the blocking plate 151 is in the second position, the transmission component 120 can remove the material tray from the loading module 100.

[0070] The above description is merely an exemplary embodiment of the present utility model and does not limit the scope of protection of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present utility model.

Claims

1. A material tray storage mechanism, characterized in that, Applied to a wafer sorting machine, the wafer sorting machine is provided with a feeding position, and the tray storage mechanism includes: The material loading module has a first receiving position and a second receiving position relative to the unloading position. When it is at the first receiving position, the material loading module can receive the material tray. When it is at the second receiving position, the material tray in the material loading module can receive the material. The storage rack is provided with multiple storage positions, which are used to store multiple trays that are not full of material. The transfer module is capable of transferring a tray that is not full of material from the second receiving position to the storage position, or transferring a tray that is not full of material from the storage position to the second receiving position.

2. The material tray storage mechanism as described in claim 1, characterized in that, The transfer module includes a transportation unit and a material feeding / discharging unit; The loading module is provided with a transfer position relative to the unloading position, and the transport unit can drive the loading module to move back and forth between the first receiving position, the second receiving position, and the transfer position; When the material loading module is in the transfer position, the material loading module corresponds to the storage rack. The feeding and discharging unit can move the tray that is not full of material from the material loading module to the storage position, or move the tray that is not full of material in the storage position to the material loading module.

3. The material tray storage mechanism as described in claim 2, characterized in that, The transport unit includes a first linear drive unit, which drives the material loading module to move along the X direction, so that the material loading module reciprocates between the first receiving position, the second receiving position, and the transfer position.

4. The material tray storage mechanism as described in claim 3, characterized in that, The transport unit further includes a second linear drive, which drives the first linear drive and the loading module to move along the Y direction. The first linear drive drives the loading module to move along the X direction. The storage rack and the transfer position are arranged along the Y direction. And / or, the first linear drive includes a first guide rail, a first slider, and a first drive, the first guide rail extends along the X direction, the material loading module is mounted on the first slider, and the first drive drives the first slider to move along the first guide rail.

5. The material tray storage mechanism as described in claim 3, characterized in that, The material tray storage mechanism further includes a first driving component, which is used to drive the storage rack to move along the Z direction; Multiple storage positions are stacked on the storage rack, and the storage rack moves along the Z direction so that any one of the storage positions corresponds to the transfer position.

6. The material tray storage mechanism as described in claim 5, characterized in that, The first driving component includes a third guide rail, a third slider, and a third driving member. The third guide rail extends along the Z direction, the third slider is slidably disposed on the third guide rail, the storage rack is mounted on the third slider, and the third driving member drives the third slider to move along the third guide rail.

7. The material tray storage mechanism as described in claim 5, characterized in that, The storage rack is provided with a storage cavity, and a plurality of storage positions are provided in the storage cavity. The storage cavity is provided with a first opening and a second opening that are arranged opposite to each other. The feeding and discharging unit includes a feeding component and a discharging component fixedly disposed relative to the storage rack. The feeding component is used to move the unfilled material tray in the material loading module to the storage position through the first opening. The discharge component moves the unfilled tray in the storage position to the loading module through the first opening via the second opening.

8. The material tray storage mechanism as described in claim 7, characterized in that, The feeding assembly includes a first abutting part and a fourth driving member. The fourth driving member is used to drive the first abutting part so that the first abutting part moves the unfilled tray through the first opening to the storage position. And / or, the discharge assembly includes a second abutment and a fifth driving member, the fifth driving member being used to drive the second abutment so that the second abutment moves the unfilled tray located in the storage position through the first opening to the loading module.

9. The tray storage mechanism as described in any one of claims 1 to 8, characterized in that, The material loading module includes a first mounting frame installed on the transport unit and a transmission component installed on the first mounting frame. The transmission component is used to drive the material tray to move along the Y direction. At the first receiving position, the material loading module can output the material tray.

10. The tray storage mechanism as described in claim 9, characterized in that, The material loading module also includes a lifting component and a clamping component disposed on the first mounting frame. When in the second receiving position, the lifting component can lift the material tray and the clamping component can clamp the material tray to restrict the material tray to the lifting component. And / or, the loading module further includes a blocking component mounted on the first mounting bracket, the blocking component being capable of confining the tray to the transfer component.

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