A semiconductor material recycling and regeneration device

Abstract

This utility model discloses a semiconductor material recycling and regeneration device, belonging to the field of semiconductor material technology. It includes an injection chamber, connecting pipes, and processing boxes. Multiple sets of connecting pipes are provided, and the number of processing boxes matches the number of connecting pipes. The multiple processing boxes are arranged in a circular array around the injection chamber. The connecting pipes are S-shaped, with one end connected to the bottom wall of the injection chamber and the other end connected to the upper wall of the processing box. This device can adapt to different production scales, automatically control the waste liquid processing volume, effectively screen out impurities, flexibly control the screen position, and facilitate the recycling of cleaning agents to reduce costs and waste.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor material technology, and in particular relates to a semiconductor material recycling and regeneration device. Background Technology

[0002] Mask cleaning agents play a crucial role in the semiconductor manufacturing industry. Their core function is to ensure the precision of the photolithography process and the yield of chips by efficiently removing contaminants and protecting the structural integrity of the mask.

[0003] Water-based neutral cleaning agents can remove residual particles through a filtration system or be reused after being diluted with water. However, the cleaning agents required in the development and mass production stages of semiconductor manufacturing are different, and the number of cleaning agent recycling and regeneration devices required also varies. Utility Model Content

[0004] In view of the above situation and to overcome the defects of the prior art, this utility model provides a semiconductor material recycling and regeneration device. This device can adapt to different production scales, automatically control the amount of waste liquid processed, effectively screen out impurities, flexibly control the screen position, and also facilitate the recycling of cleaning agents to reduce costs and waste.

[0005] The technical solution adopted by this utility model is as follows: A semiconductor material recycling and regeneration device includes an injection chamber, a connecting tube, and a processing box. Multiple sets of connecting tubes are provided, and the number of processing boxes matches the number of connecting tubes. Multiple processing boxes are arranged in a circular array around the injection chamber. The connecting tubes are S-shaped. One end of the connecting tube is connected to the bottom wall of the injection chamber, and the other end of the connecting tube is connected to the upper wall of the processing box. An active control component is provided in the injection chamber, and a processing component is provided in the processing box.

[0006] Furthermore, the activity control component includes a central column, a connecting port, a water-blocking plate, and an elastic rod. The injection cavity is a hollow cylindrical cavity. One end of the central column is located on the inner bottom wall of the injection cavity, and the other end of the central column is located on the inner upper wall of the injection cavity. The connecting port is located on the bottom wall of the injection cavity. Multiple connecting ports are arranged, and the number of connecting ports matches the number of connecting pipes. The multiple connecting ports are arranged in a circular array around the central column. The connecting ports are connected to the connecting pipes. The water-blocking plate is slidably connected to the side wall of the central column. The water-blocking plates are arranged in pairs. One end of the elastic rod is located on the side wall of one of the water-blocking plates, and the other end of the elastic rod is located on the side wall of the other water-blocking plate.

[0007] Furthermore, a water inlet is provided on the upper wall of the injection cavity.

[0008] Furthermore, a water inlet is provided on the upper wall of the treatment tank, and the water inlet is connected to a connecting pipe.

[0009] Furthermore, the processing assembly includes an outlet pipe, a drain pipe, a telescopic pipe, a control cylinder, a lower screen, and an upper screen. The outlet pipe is located on the inner upper wall of the processing tank and is connected to the inlet. A drain outlet is provided on the bottom wall of the processing tank, and the drain pipe is located on the drain outlet. The telescopic pipe is located inside the processing tank, and its lower end is located on the drain outlet. The fixed end of the control cylinder is located on the inner upper wall of the processing tank, and its movable end is connected to the upper end of the telescopic pipe. The lower screen is fixedly installed on the inner side wall of the processing tank. The lower ends of the outlet pipe and the telescopic pipe are respectively fixedly connected to the lower screen. The upper screen is slidably connected to the inner side wall of the processing tank. The upper end of the outlet pipe is slidably connected to the upper screen, and the upper end of the telescopic pipe is fixedly connected to the upper screen.

[0010] Furthermore, a limiting component is provided on the inner side wall of the treatment tank. The limiting component includes a sliding plate, a limiting plate, and a hinge plate. A sliding groove is provided on the side wall of the treatment tank. The sliding plate is slidably connected to the sliding groove. A slot is provided on the water outlet pipe. One end of the limiting plate is slidably connected to the slot. The upper end of the hinge plate is rotatably connected to the limiting plate. The other end of the hinge plate is rotatably connected to the upper end of the sliding plate. A float plate is provided on the lower end of the sliding plate.

[0011] Furthermore, a water valve is provided on the drain pipe, and a water pump is provided on the connecting pipe.

[0012] The beneficial effects of this utility model after adopting the above structure are as follows:

[0013] 1. Adaptable to different production scales: During the development stage, less cleaning agent is required, and the waste liquid enters the connecting pipe through the connecting port between the two baffles; during the mass production stage, more cleaning waste liquid is required. Excessive waste liquid squeezes the baffles to overcome the elastic force of the elastic rod, opening more connecting ports. It can be flexibly adjusted according to the changes in the amount of cleaning waste liquid in different production stages to meet the needs of different production scales.

[0014] 2. Automatic control of waste liquid treatment volume: When the liquid level in the treatment tank rises, the float moves the sliding plate towards the outlet pipe. When the waste liquid reaches the upper limit of treatment, the sliding plate completely blocks the outlet pipe, restricting the waste liquid from entering. At the same time, the water baffle plate in the injection chamber is further squeezed to open more connecting ports and the treatment tank, thereby realizing automatic control of the waste liquid treatment volume and avoiding excessive waste liquid in the treatment tank.

[0015] 3. Effective removal of impurities: The cleaning waste liquid entering the treatment tank passes through the lower screen and the upper screen in sequence from bottom to top, which can effectively remove impurities in the cleaning waste liquid and improve the quality of the recovered cleaning agent.

[0016] 4. Flexible control of screen position: The length of the telescopic tube is changed by controlling the extension and retraction of the cylinder, which in turn drives the upper screen to move up and down. The position of the upper screen can be flexibly adjusted according to actual needs to optimize the impurity removal effect.

[0017] 5. Convenient recycling: By opening the water valve on the drain pipe, the filtered cleaning agent can be discharged from the treatment tank for reuse, realizing the recycling and regeneration of the cleaning agent, reducing production costs and minimizing resource waste. Attached Figure Description

[0018] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0019] Figure 1 A three-dimensional structural diagram of a semiconductor material recycling and regeneration device;

[0020] Figure 2 A three-dimensional structural diagram of the injection cavity and connecting tube;

[0021] Figure 3 This is a diagram showing the internal structure of the activity control component;

[0022] Figure 4 To process the internal structure diagram of the component;

[0023] Figure 5 To restrict the side view of the component.

[0024] In the attached diagram: 1. Injection chamber; 2. Connecting pipe; 3. Treatment box; 4. Motion control assembly; 5. Central column; 6. Connecting port; 7. Water baffle plate; 8. Elastic rod; 9. Treatment assembly; 10. Water outlet pipe; 11. Drain pipe; 12. Telescopic pipe; 13. Control cylinder; 14. Lower screen; 15. Upper screen; 16. Restriction assembly; 17. Sliding plate; 18. Restriction plate; 19. Hinge plate; 20. Slide groove; 21. Slot; 22. Water inlet; 23. Water inlet; 24. Drain outlet; 25. Float plate. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0026] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0027] like Figures 1-5 As shown, a semiconductor material recycling and regeneration device includes an injection chamber 1, a connecting tube 2, and a processing box 3. The connecting tube 2 is provided in multiple sets, and the number of processing boxes 3 matches the number of connecting tubes 2. The multiple processing boxes 3 are arranged in a circular array with the injection chamber 1 as the center. The connecting tube 2 is arranged in an S-shape. One end of the connecting tube 2 is connected to the bottom wall of the injection chamber 1, and the other end of the connecting tube 2 is connected to the upper wall of the processing box 3. An active control component 4 is provided in the injection chamber 1, and a processing component 9 is provided in the processing box 3.

[0028] The activity control component 4 includes a central column 5, a connecting port 6, a water-blocking plate 7, and an elastic rod 8. The injection cavity 1 is a hollow cylindrical cavity. One end of the central column 5 is located on the inner bottom wall of the injection cavity 1, and the other end of the central column 5 is located on the inner upper wall of the injection cavity 1. The connecting port 6 is located on the bottom wall of the injection cavity 1. Multiple connecting ports 6 are arranged, and the number of connecting ports 6 matches the number of connecting pipes 2. Multiple connecting ports 6 are arranged in a circular array around the central column 5. The connecting ports 6 are connected to the connecting pipes 2. The water-blocking plate 7 is slidably connected to the side wall of the central column 5. The water-blocking plates 7 are arranged in pairs. One end of the elastic rod 8 is located on the side wall of one of the water-blocking plates 7, and the other end of the elastic rod 8 is located on the side wall of the other water-blocking plate 7.

[0029] The upper wall of the injection chamber 1 is provided with a water inlet 22, and the upper wall of the treatment box 3 is provided with a water inlet 23, which is connected to the connecting pipe 2.

[0030] The processing assembly 9 includes an outlet pipe 10, a drain pipe 11, a telescopic pipe 12, a control cylinder 13, a lower screen 14, and an upper screen 15. The outlet pipe 10 is located on the inner upper wall of the processing tank 3 and is connected to the inlet 23. A drain outlet 24 is provided on the bottom wall of the processing tank 3, and the drain pipe 11 is located on the drain outlet 24. The telescopic pipe 12 is located inside the processing tank 3, and its lower end is located on the drain outlet 24. The control cylinder 13... The fixed end is located on the inner upper wall of the treatment box 3. The movable end of the control cylinder 13 is connected to the upper end of the telescopic tube 12. The lower screen 14 is fixedly installed on the inner side wall of the treatment box 3. The lower end of the water outlet pipe 10 and the lower end of the telescopic tube 12 are respectively fixedly connected to the lower screen 14. The upper screen 15 is slidably connected to the inner side wall of the treatment box 3. The upper end of the water outlet pipe 10 is slidably connected to the upper screen 15. The upper end of the telescopic tube 12 is fixedly connected to the upper screen 15.

[0031] The inner wall of the treatment tank 3 is provided with a limiting component 16, which includes a sliding plate 17, a limiting plate 18, and a hinge plate 19. The side wall of the treatment tank 3 is provided with a sliding groove 20, and the sliding plate 17 is slidably connected to the sliding groove 20. The water outlet pipe 10 is provided with a slot 21, one end of the limiting plate 18 is slidably connected to the slot 21, the upper end of the hinge plate 19 is rotatably connected to the limiting plate 18, and the other end of the hinge plate 19 is rotatably connected to the upper end of the sliding plate 17. A float plate 25 is provided on the lower end of the sliding plate 17.

[0032] A water valve is provided on the drain pipe 11, and a water pump is provided on the connecting pipe 2.

[0033] In practical use, during the development stage, when less cleaning agent is needed, the used cleaning waste liquid is injected into the injection chamber 1 through the water inlet 22. It enters the connecting pipe 2 through the connecting port 6 on the bottom wall of the injection chamber 1 between the two baffle plates 7. When the water pump is started, the cleaning waste liquid will enter the treatment tank 3. If more cleaning agent is needed during the mass production stage, there will also be more cleaning waste liquid. Excessive cleaning waste liquid will squeeze the baffle plates 7 at both ends, overcoming the elastic force of the elastic rod 8, so that the baffle plates 7 open more connecting ports 6 for use.

[0034] The cleaning waste liquid entering the treatment tank 3 will be discharged to the bottom wall of the treatment tank 3 through the outlet pipe 10. From bottom to top, it will pass through the lower screen 14 and the upper screen 15 to remove impurities in the cleaning waste liquid. The liquid level in the treatment tank 3 will gradually rise and come into contact with the float plate 25. The liquid level of the waste liquid will cause the float plate 25 to gradually move upward. Through the hinge plate 19, the sliding plate 17 will move towards the outlet pipe 10. The liquid level will gradually rise, which will increase the displacement distance of the sliding plate 17 until the waste liquid inside the treatment tank 3 reaches the upper limit of the treatment tank 3. The liquid level will rise to the highest point, and the sliding plate 17 will completely block the outlet pipe 10, restricting the entry of waste liquid. At this time, the water baffle plate 7 in the injection chamber 1 will be further squeezed, opening more connecting ports 6 and the treatment tank 3 for use.

[0035] Inside the treatment tank 3, the waste liquid passes through the lower screen 14 and the upper screen 15 from bottom to top to remove impurities from the cleaning waste liquid. In the initial state, the control cylinder 13 is in its shortest state, and the telescopic tube 12 is in its longest state. When the control cylinder 13 extends, the telescopic tube 12 shortens, causing the upper screen 15 to move down and opening the water valve on the drain pipe 11. The filtered cleaning agent is discharged from the treatment tank 3 through the drain pipe 11 for the next use.

[0036] The above is the overall workflow of this utility model. Simply repeat these steps the next time you use it.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents. In conclusion, if those skilled in the art, inspired by this description, design similar structural methods and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A semiconductor material recycling and regeneration device, characterized in that, It includes an injection chamber, connecting tubes, and a processing box. Multiple sets of connecting tubes are provided. The number of processing boxes matches the number of connecting tubes. Multiple processing boxes are arranged in a circular array around the injection chamber. The connecting tubes are S-shaped. One end of the connecting tube is connected to the bottom wall of the injection chamber, and the other end of the connecting tube is connected to the top wall of the processing box. An active control component is provided in the injection chamber, and a processing component is provided in the processing box.

2. The semiconductor material recycling device of claim 1, wherein The activity control component includes a central column, a connecting port, a water-blocking plate, and an elastic rod. The injection cavity is a hollow cylindrical cavity. One end of the central column is located on the inner bottom wall of the injection cavity, and the other end is located on the inner upper wall of the injection cavity. The connecting port is located on the bottom wall of the injection cavity. Multiple connecting ports are arranged, and the number of connecting ports matches the number of connecting pipes. The multiple connecting ports are arranged in a circular array around the central column. The connecting ports are connected to the connecting pipes. The water-blocking plate is slidably connected to the side wall of the central column. The water-blocking plates are arranged in pairs. One end of the elastic rod is located on the side wall of one of the water-blocking plates, and the other end of the elastic rod is located on the side wall of the other water-blocking plate.

3. The semiconductor material recycling device of claim 2, wherein A water inlet is provided on the upper wall of the injection chamber.

4. The semiconductor material recycling device of claim 3, wherein The upper wall of the treatment tank is provided with a water inlet, which is connected to a connecting pipe.

5. The semiconductor material recycling device of claim 4, wherein The processing assembly includes an outlet pipe, a drain pipe, a telescopic pipe, a control cylinder, a lower screen, and an upper screen. The outlet pipe is located on the inner upper wall of the processing tank and is connected to the inlet. A drain outlet is provided on the bottom wall of the processing tank, and the drain pipe is located on the drain outlet. The telescopic pipe is located inside the processing tank, and its lower end is located on the drain outlet. The fixed end of the control cylinder is located on the inner upper wall of the processing tank, and its movable end is connected to the upper end of the telescopic pipe. The lower screen is fixedly installed on the inner side wall of the processing tank. The lower ends of the outlet pipe and the telescopic pipe are respectively fixedly connected to the lower screen. The upper screen is slidably connected to the inner side wall of the processing tank, and the upper end of the outlet pipe is slidably connected to the upper screen. The upper end of the telescopic pipe is fixedly connected to the upper screen.

6. The semiconductor material recycling device of claim 5, wherein The inner wall of the treatment tank is provided with a limiting component, which includes a sliding plate, a limiting plate and a hinge plate. The side wall of the treatment tank is provided with a sliding groove, and the sliding plate is slidably connected to the sliding groove. A slot is opened on the water outlet pipe, and one end of the limiting plate is slidably connected to the slot. The upper end of the hinge plate is rotatably connected to the limiting plate, and the other end of the hinge plate is rotatably connected to the upper end of the sliding plate. A float plate is provided on the lower end of the sliding plate.

7. The semiconductor material recycling device of claim 6, wherein The drain pipe is equipped with a water valve, and the connecting pipe is equipped with a water pump.

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